References
- M. Koch, N. Harris, R. Maas, A. G. R. Evans, N .M. White, and A. Brunnschweiler, 'A novel micropump design with thick film piezoelectric actuation,' Meas. Sci. Technol, Vol. 8, p. 49, 1997 https://doi.org/10.1088/0957-0233/8/1/008
- C. Lee, T. Itoh, R. Maeda, and T. Suga, 'Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy,' Rev. Sci. Instrum., Vol. 68, No. 5, P. 2091, 1997 https://doi.org/10.1063/1.1148102
-
R. Maeda, Z. Wang, J. Chu, J. Akedo, M. Ichiki, and S. Yonekubo, 'Deposition and patterning technique for realization of Pb(
$Zi_0.52,Ti_0.480_3$ ) thick film micro actuator,' Jpn. J. Appl. Phys., Vol. 37, p. 7116, 1998 https://doi.org/10.1143/JJAP.37.7116 -
J. Akedo and M. Lebedev, 'Piezoelectric properties and poling effect of Pb(Zr,Ti)
$O_3$ thick films prepared for microactuators by aerosol deposition,' Appl. Phys. Lett., Vol. 77, No. 11, p. 1710, 2000 https://doi.org/10.1063/1.1309029 - C. Lucat, F. Menil and R. Von Der Muhll, 'Thick film densification for pyroelectric sensors,' Meas. Sci., Technol., Vol. 8, p. 38, 1997 https://doi.org/10.1088/0957-0233/8/1/006
- Y. Jeon, J. Chung, and K. No, 'Fabhcation of PZT thick films on silicon substrates for piezoelectric actuator,' J. Electroceramics, Vol. 4, No. 1, p.195, 2000 https://doi.org/10.1023/A:1009924113335
- V. Ferrari, D. Marioli, and A. Taroni, 'Thick film resonant piezo layers as new gravimethc sensors,' Meas. Sci. Technol, Vol. 8, p. 42, 1997 https://doi.org/10.1088/0957-0233/8/1/007
-
T. Kubota, K. Tanaka, and Y. Sakabe, 'Formation of Pb(Zr,Ti)
$O_3 Pb(Zn,Nb)O_3$ system piezoelectric thick films in low temperature firing process,' Jpn. J. Appl. Phys., Vol. 38, p. 5535, 1999 https://doi.org/10.1143/JJAP.38.5535 -
T. Futakuchi, Y. Matui, and M. Adachi, 'Preparation of PbZr
$O_3-PbTiO_3 Pb(Mg_\frac{1}{3}Nb\frac{2}{3})O_3$ thick films by screen printing,' Jpn. J. Appl. Phys., Vol. 38, No. 9B. p. 5528, 1999 https://doi.org/10.1143/JJAP.38.5528 - Y. Akiyama, K. Yamanaka, E. Fujisawa, and Y. Kowata, 'Development of lead zirconate titanate family thick films on various substrates,' Jpn. J. Appl. Phys., Vol. 38, No. 9B, p. 5524, 1999 https://doi.org/10.1143/JJAP.38.5524
- P. G. Jones, S. P. Beeby, P. Dargie, T. Papakostas, and N.M. White, 'An investigation into the effect of modified firing profiles on the piezoelectric properties of thick film PZT layers on silicon,'Meas. Sci. Technol, Vol. 11, p. 526, 2000 https://doi.org/10.1088/0957-0233/11/5/312
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