• 제목/요약/키워드: YBCO films

검색결과 373건 처리시간 0.035초

ICP 식각 시스템에 의한 YBCO 초전도 박막의 식각두께 변화에 따른 특성 분석 (Analysis of Characteristics with Etching Thickness of YBCO Superconducting Thin Films By ICP system)

  • 고석철;강형곤;현종옥;최명호;한병성;한윤봉
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.259-262
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    • 2003
  • Superconducting flux flow transistor(SFFT) is based on a control of the Abrikosov vortex flowing along a channel. The induced voltage by moving of the Abrikosov vortex in SFFT is greatly affected by the thickness and width, of channel. In order to fabricate a reproducibility channel in SFFT, we have researched the variation of the critical characteristics of YBCO thin films with the etching time using ICP(Inductively coupled plasma) system. It was certified that the velocity of vortex decreased with increasing the width of channel and was saturated faster in low bias from a simulation. An etching mechanism of YBCO thin films by ICP system was also certified by AFM(Atomic Force Microscope) and by measuring the critical current density with etching time. As measurement result, we could analyze that we should optimize the etching thickness of channel part to construct a flux flow transistor with desired characteristics.

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CeO$_2$ 완충층에 대한 고온 열처리가 CeO$_2$ 완충층을 지닌 R-cut 사파이어 기판 우에 성장된 YBa$_2Cu_3O_{7-{\delta}}$ 박막의 표면상태에 미치는 영향 (Effects of High-temperature Annealing of CeO$_2$ Buffer Layers on the Surface Morphology of YBa$_2Cu_3O_{7-{\delta}}$ Films on CeO$_2$-buffered R-cut Sapphire Substrates)

  • 이재훈;양우일;장정문;류재수;;이상영
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.152-159
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    • 1999
  • YBa$_2Cu_3O_{7-{\delta}}$ (YBCO) films grown on CeO$_2$-buffered r-cut sapphire substrates (CbS's) were prepared and their structural and electrical properties were measured. Post-annealed CeO$_2$ films were used as buffer layers for the experiments. It turned out that the YBCO films grown on post-annealed CbS's had the rms roughness of less than 20 ${\AA}$ and peak-to-peak roughness of about 30 ${\AA}$ when the YBCO film thickness was 3000 ${\AA}$. Meanwhile, YBCO films on in-situ grown CeO$_2$ buffer layers on r-cut sapphire substrates appeared to have the peak-to-peak roughness of more than 450 ${\AA}$. X-ray diffraction data revealed that the YBCO flms were epitaxially grown along the c-axis with the typical FWHM of(005) ${\theta}$ -2 ${\theta}$ peak about 0. 16 $^{\circ}$ and ${\Delta}$ ${\omega}$ of the (005) peak about 0.5 $^{\circ}$. T$_c$ > 87 K, ${\Delta}$T < 1 K and R(look)/R(100K) ${\ge}$3 were observed from the YBCO films. Applicability of the YBCO films for high-frequency applications was described.

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YBCO coated conductor with a single buffer layer of Yttrium Oxide

  • Park, Chan;Dongqi Shi;Kyujeong Song;Rokkil Ko;Park, Soojeong;Yoo, Sang-Im
    • 한국초전도ㆍ저온공학회논문지
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    • 제5권3호
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    • pp.20-22
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    • 2003
  • Y$_2$O$_3$ films were pulsed laser deposited on cube textured Ni and Ni-W substrates to be used as a single buffer layer of YBCO coated conductor. Initial deposition of $Y_2$O$_3$ films was performed in a reducing atmosphere, and subsequent deposition was done in the base pressure of the chamber and oxygen atmosphere. The $Y_2$O$_3$ films have a strong cube texture (The full width at half maximum of the ø-scan of $Y_2$O$_3$ was 8.4 which was the same as that of metal substrate) and smooth crack-free microstructure. The biaxially textured YBCO films (The full width at half maximum of the ø-scan was 10.2) pulsed laser deposited on the $Y_2$O$_3$/metal exhibited Tc(R=0) of 86.5K and Jc of 0.7 MA/cm2 at 77K in self field, representing that the $Y_2$O$_3$ single buffer layer is an efficient diffusion barrier of Ni and thus very promising for the achievement of high-Jc YBCO coated conductor.

Modified melt-textured growth 법으로 제작한 타겟을 사용한 YBCO 박막의 펄스레이저 증착 (Pulsed laser deposition of YBCO thin films using modified melt-textured grown targets)

  • 김창훈;김인태;홍국선;김영환;최상삼;한택상
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.115-119
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    • 1999
  • Ba$_2Cu_3O_{7-{\delta}}$ (YBCO) thin films were deposited by pulsed laser deposition using differently prepared targets: One was a conventionally solid-state sintered (SSS) target and the other was a modified melt-textured grown (MTC) target. Compared with SSS targets, MTG targets showed a well-connected microstructure consisting of much larger grains and the surface was Bess roughened with the cumulative laser incidence. YBCO films deposited from MTC targets showed a denser and smoother surface of the basal film than the case of SSS targets. The investigations of ${\alpha}$-axis outgrowths in the films indicated that the deposition using MTG targets would result in a more homogeneous and stable film growth as compared to the SSS targets. Also, TEM analysis revealed that the film deposited from MTG targets had a less granular microstructure that would reduce weak-link effects in the film.

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CeO$_2$ 버퍼막과 함께 ${\alpha}\;-Al_2O_3$ 기판 위에 성장된 YBCO 박막을 사용한 HTS Microscrp Bandpass filter의 제작 (Fabrication of HTS Microstrip Bandpass Filters using CeO$_2$ buffered YBCO Films grown on ${\alpha}\;Al_2O_3$ substrates)

  • 정구락;추형곤;강준희;박상진;석중현;이은홍
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.58-62
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    • 1999
  • We fabricated a new hairpin type HTS 2-pole microstrip Bandpass filter to operate at 5.8GHz. The fabrication method was pulsed laser deposition and YBCO films were deposited on ${\alpha}$-A1$_2O_3$ substrates with a CeO$_2$ thin layer as a buffer layer. We developed a new style hairpin type filter by using interdigitide innerpole. Compared to the saute size regular hairpin type filters, our filter had a lower center frequency, bandwidth and loss by an amount of 14.5%, 29.6%, 0.5488dB, respectively. The size of the filters were 13.7${\times}$3.3mm. We did simulations on the several types of band pass filters by using HFSS and serenade. We measured growth rate and Tc of YBCO films grown on CeO$_2$/ ${\alpha}$-A1$_2O_3$ substrates which were rotated while growing films.

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수정된 TFA-MOD법에 의한 (100) $SrTiO_3$ 단결정 기판 위 고 임계전류 밀도 $YBa_2Cu_3O_{7-{\delta}}$ 박막 제조 (Fabrication of high-$J_c$ $YBa_2Cu_3O_{7-{\delta}}$ thin films on (100) $SrTiO_3$ single crystal substrates by a modified TFA-MOD method)

  • 위성훈;신거명;송규정;홍계원;문승현;박찬;유상임
    • 한국초전도ㆍ저온공학회논문지
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    • 제6권1호
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    • pp.12-17
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    • 2004
  • High critical current density. $J_c$ over $1MA/cm^2$ at 77 K in a self field was successfully achieved from the YBCO film prepared on (100) $SrTiO_3$ single-crystal substrates by the TFA-MOD process. Unlike a normal TFA-MOD process, we prepared the TFA precursor solution by dissolving YBCO powder into the trifluoroacetic acid. A significant amount of the second phases, including $BaF_2$, was observed in the films fired at $700-725^{\circ}C$ for 2 h under $P(O_2)=10^{-3}$ atm and $P(H_2O)=4.2%$, most probably due to an insufficient reaction time, and hence $T_c$ was greatly degraded. However the films fired at $750-800^{\circ}C$ for 2 h were composed of strongly c-axis oriented YBCO grams without any second phases. and exhibited the $T_c$ values of 89.5 ~ 91 K with a sharp transition. With increasing the firing temperature from 750 to $800^{\circ}C$ average grain size of YBCO was increased and grain connectivity was enhanced. The highest $J_c$ value of $1.1MA/cm^2$ was obtained from the YBCO film fired at $800^{\circ}C$.

분무 열분해 CVD법으로 이동 중인 LaAlO_3(100) 단결정 위에 증착시킨 YBCO 박막의 특성 (Deposition of YBCO Films on Moving Substrate by a Spray Pyrolysis method)

  • 김재근;홍석관;김호진;유석구;조한우;안지현;주진호;이희균;홍계원
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.93-97
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    • 2006
  • YBCO films were deposited on a moving substrate by a spray pyrolysis method using nitrate aqueous solution as precursors. Deposition was made on $LaAlO_3$(100) single crystal substrate by spraying precursor droplets generated by a concentric nozzle. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:4.5. The distance between nozzle and substrate was 15 cm. Substrate was transported with a speed ranging from 0.23 cm/min to 0.5 cm/min. Films were deposited at the pressure ranging from 10 Torr to 20 Torr and the deposition temperature was ranged from $740^{\circ}C\;to\;790^{\circ}C$. Oxygen partial pressure was controlled between 1 Tow and S Torr. Superconducting YBCO films were obtained from $740^{\circ}C\;to\;790^{\circ}C$ with an oxygen partial pressure of 3 Torr. Scanning electron microscope(SEM) and X-ray diffraction(XRD) observation revealed that films are smooth and highly texture with(001) plans parallel to substrate plane. Highest Jc was 0.72 $MA/cm^2$ at 77K and self-field for the film with a thickness of 0.15 m prepared at a substrate temperature of $740^{\circ}C$ and $PO_2$=3 Torr.

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DCA-MOD 법에 의한 High $J_c$ YBCO 박막의 제조 (The Preparation of High $J_c$ YBCO Films by DCA-MOD Method)

  • 김병주;김혜진;이금영;이종범;김호진;이희균;홍계원
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.59-64
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    • 2006
  • High $J_c\;YBa_2Cu_3O_x$ superconducting films were fabricated by MOD method using fluorine-free dichloroacetic acid(DCA) as chelating solvent for preparing precursor solution. Coating solutions were prepared by dissolving Y-, Ba- and Cu-acetates in DCA solvent followed by drying in rota vapor to obtain the blue gel that is diluted in methanol and 2-methoxyethanol for adjusting the cation concentration. DCA-MOD precursor solution was coated on a single crystal(001) $LaAlO_3(LAO)$ substrate by a dip coating method with a speed of 25 mm/min. Coated films were calcined at lower temperature up to $500^{\circ}C$ in flowing oxygen atmosphere with a 7.2% humidity. Conversion heat treatment was performed at various temperatures of $780{\sim}810^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. SEM observations showed that films have very dense microstructures for the films prepared at the temperature higher than $800^{\circ}C$ regardless of diluting solvent; methanol or 2-methoxyethanol. X-ray diffraction analysis showed that YBCO grains grew with a (001) preferred orientation. A High critical current density($J_c$) of 1.28 $MA/cm^2$(@77 K and self-field) was obtained id. the YBCO film prepared using 2-methoxyethanol as a solvent.

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DCA-MOD 법으로 YBCO 박막 제조시 하소열처리의 승온속도 효과 (Effect of heating rate on calcination heat treatment of YBCO thin films by DCA-MOD method)

  • 김병주;김혜진;조한우;권연경;유정희;이희균;홍계원
    • Progress in Superconductivity
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    • 제8권2호
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    • pp.186-192
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    • 2007
  • High $J_c\;YBa_2Cu_3O_{7-x}$ superconducting films have been fabricated $LaAlO_3(100)$ substrate by MOD method using dichloroacetic acid(DCA) as chelating solvent for preparing precursor solution. Heating rate was varied in order to optimize the calcination heat treatment condition in DCA-MOD method. Coated films were calcined at lower temperature up to $500^{\circ}C$ in flowing humid oxygen atmosphere. The heating rate was calcined from $13.3^{\circ}C/min\;to\;0.28^{\circ}C/min$. Conversion heat treatment was performed $800^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. Surface and cross sectional SEM microstructures showed that particle sizes were increased with heating rate at a calcination step. The amount of pores was increased with heating rate in the calcined films. Dense microstructure and sharp texture were developed in an YBCO films after conversion heat treatment. A high critical current density (Jc) of $1.26MA/cm^2$ (@77 K and self-field) was obtained for the YBCO film which was prepared with a heating rate of $0.28^{\circ}C/min$.

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Effect of water partial pressure on the texture and the morphology of MOD-YBCO films on buffered metal tapes

  • Chung, Kook-Chae;Yoo, Jai-Moo;Ko, Jae-Woong;Kim, Young-Kuk;Wang, X.L.;Dou, S.X.
    • 한국초전도ㆍ저온공학회논문지
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    • 제9권2호
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    • pp.23-26
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    • 2007
  • The influence of water partial pressure in Metal-organic Deposition (MOD) method was investigated on the texture and the morphology of $YBa_2Cu_3O_{7-x}$ (YBCO) films grown on the buffered metal tapes. The water partial pressure was varied from 4.2% up to 10.0% with the other process variables, such as annealing temperature and oxygen partial pressure, kept constant. In this work, the fluorine-free Y & Cu precursor solution added with Sm was synthesized and coated by the continuous slot-die coating & calcination step. The next annealing step of the YBCO films was done by the reel-to-reel method with the gas flowed vertically down. From the x-ray diffraction analysis, the un-reacted phase like $BaF_2$ peak was found at the water partial pressure of 4.2%, but $BaF_2$ peak intensity is much reduced as the water partial pressure is increased. However, the higher water partial pressure of about 10% in this experiment leads to the poor crystallinity of YBCO films. The morphologies of the YBCO films were not different from each other when the water partial pressure was varied in this work. The maximum critical current density of 3.8MA/$cm^2$ was obtained at the water partial pressure of 6.2% with the annealing temperature of 780$^{\circ}C$ and oxygen partial pressure of 500ppm.