A Study on 600 V Super Junction Power MOSFET Optimization and Characterization Using the Deep Trench Filling (Deep Trench Filling 기술을 적용한 600 V급 Super Junction Power MOSFET의 최적화 특성에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.25 no.4
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- pp.270-275
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- 2012