• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.1
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• pp.74-79
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• 2011

Alignment systems with multi-axis motions are applied to determine vertical arrangement of multilayer assembly such as LCD, PDP, and MLCC. This study reports the development of XY${\theta}$ alignment stage which is designed as thin-type structure and parallel actuations. The thin-type parallel XY${\theta}$ alignment stage is maintained below $1{\mu}m$ in repeatability error. The squareness and straightness also allow precise motion for the alignment by the developed stage. The measured error is ${\pm}6.25{\mu}m$ in the alignment experiment by the vision system on the parallel XY${\theta}$ alignment stage.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.6
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• pp.599-607
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• 2011

In this paper, a reaction-force compensation system for an XY linear motion stage, without an additional external isolation structure or extra motors, is developed. This system consists of a movable magnet track, a spring, a dummy weight, and a dedicated sensor module that measures the relative positions of the movable magnet track with respect to the motor coil. The reaction force compensation system is modeled, and simulations are carried out to optimize design parameters such as the moving distance of the magnet track, the transmission force, the dummy weight, and the allowed size of the mechanism. An XY linear motion stage is built, incorporating the reaction force compensation system, and the performance of the system is verified experimentally. For acceleration and deceleration values of 10 m/$s^2$, 85% of the reaction force is absorbed by the reaction force compensation system.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.4
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• pp.71-78
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• 2007

Input shaping is known to be a very effective tool for suppressing residual vibration without introducing any complicated sensors and feedback control. Real-time input shaping schemes necessitate a process such that the input command is discretized to deal with non-prescribed, real-time input. Thus parameters associated with input command discretization, such as time spacing and duration time, are unknowns which affect the performance of input shaping schemes, especially for small and fast XY stages. This paper investigates the effects of input command discretization parameters, such as time spacing and duration time, on the dynamic performance of XY stages subjected to real-time input shaping. An experimental system is developed which is equipped with an XY stage driven by servo-motors and real-time user command. Experiments are performed to investigate the dynamic performance of XY stage by changing these parameters and to yield a strategy to gain better performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.141-142
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• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.547-548
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• 2013

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2242-2244
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• 2000

시분할 다중화 방식을 이용한 정전 구동형 XY 스테이지의 새로운 위치 검출 방법을 제안한다. 각축의 고정자에 90도의 위상차를 가지는 여기(excitation) 신호를 주입하여 스테이지와 연결된 1개의 charge amplifier와 S/H를 이용하여 x축과 y축 방향의 위치를 검출한다. charge amplifier의 파라미터는 DC 이득이 크고 또한 신호간 간섭이 발생하지 않도록 설정한다. 제안된 방법은 XY 스테이지의 디지털 서보 제어기의 구성요소인 S/H를 사용하기 때문에 기존의 방식과는 달리 위치 신호의 검출이 안정적이고 반송 신호에 의한 고조파 왜곡과 복조 과정에서 발생되는 지연을 현저히 줄일 수 있으며 간단하게 구현할 수 있다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.553-561
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• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.