Discretization Effects of Real-Time Input Shaping in Residual Vibration Reduction for Precise XY Stage

정밀 XY 스테이지 잔류진동 억제를 위한 실시간 입력성형에서의 이산화 효과에 관한 연구

  • 박상원 (금오공과대학교 대학원) ;
  • 최훈석 (금오공과대학교 대학원) ;
  • ;
  • 홍성욱 (금오공과대학교 기계공학부)
  • Published : 2007.08.15

Abstract

Input shaping is known to be a very effective tool for suppressing residual vibration without introducing any complicated sensors and feedback control. Real-time input shaping schemes necessitate a process such that the input command is discretized to deal with non-prescribed, real-time input. Thus parameters associated with input command discretization, such as time spacing and duration time, are unknowns which affect the performance of input shaping schemes, especially for small and fast XY stages. This paper investigates the effects of input command discretization parameters, such as time spacing and duration time, on the dynamic performance of XY stages subjected to real-time input shaping. An experimental system is developed which is equipped with an XY stage driven by servo-motors and real-time user command. Experiments are performed to investigate the dynamic performance of XY stage by changing these parameters and to yield a strategy to gain better performance.

Keywords

References

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