• 한국산학기술학회논문지
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• 제12권1호
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• pp.74-79
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• 2011

정렬 시스템(Alignment System)은 다축의 스테이지를 이용하여 신속하게 물체를 정렬오차 범위 내로 위치결정시키는 역할을 한다. 본 연구에서는 병렬구조로 설계하여 두께가 얇고 높은 정밀도와 더불어 강성이 높은 XY${\theta}$ 정렬 스테이지를 개발하였다. 개발된 박형 병렬구조 XY${\theta}$정렬 스테이지는 직각도, 반복정밀도, 진직도 등의 3가지 측정항목에 대해 초정밀급을 달성하였으며 반복정밀도는 $1{\mu}m$미만이다. 비전시스템 및 정렬알고리즘을 활용한 정렬성능 평가에서는 정렬오차 ${\pm}6.25{\mu}m$를 달성하였다.

• 대한기계학회논문집A
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• 제35권6호
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• pp.599-607
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• 2011

본 논문에서는 별도의 외부 격리 구조물이나 추가 모터가 필요 없는 XY 선형 모션 스테이지를 위한 반발력 보상 시스템을 개발하였다. 개발된 시스템은 이동 가능한 마그넷 트랙, 스프링, 추가 질량을 포함한 자체 반발력 보상 구조를 가지고 있으며 이송용 모터 코일과 마그넷 트랙의 상대 위치를 검출할 수 있는 전용 센서를 개발하여 고정밀 추력 및 위치를 제어에 적용하였다. 먼저 반발력 보상 시스템을 모델링하고 모의 시험을 통해 이동 거리, 가속도, 하중, 허용 가능한 장비 크기와 같은 설계 요소를 최적화 하였다. 반발력 보상 시스템이 구비된 XY 모션 스테이지를 제작하였으며, 해당 시스템의 성능을 실험적으로 검증하였다. 실험결과 10m/$s^2$ 가감속 시에 85%의 반발력이 반발력 보상 시스템에 의해 흡수되었다.

• 한국공작기계학회논문집
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• 제16권4호
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• pp.71-78
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• 2007

Input shaping is known to be a very effective tool for suppressing residual vibration without introducing any complicated sensors and feedback control. Real-time input shaping schemes necessitate a process such that the input command is discretized to deal with non-prescribed, real-time input. Thus parameters associated with input command discretization, such as time spacing and duration time, are unknowns which affect the performance of input shaping schemes, especially for small and fast XY stages. This paper investigates the effects of input command discretization parameters, such as time spacing and duration time, on the dynamic performance of XY stages subjected to real-time input shaping. An experimental system is developed which is equipped with an XY stage driven by servo-motors and real-time user command. Experiments are performed to investigate the dynamic performance of XY stage by changing these parameters and to yield a strategy to gain better performance.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.141-142
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• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.547-548
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• 2013

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2242-2244
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• 2000

시분할 다중화 방식을 이용한 정전 구동형 XY 스테이지의 새로운 위치 검출 방법을 제안한다. 각축의 고정자에 90도의 위상차를 가지는 여기(excitation) 신호를 주입하여 스테이지와 연결된 1개의 charge amplifier와 S/H를 이용하여 x축과 y축 방향의 위치를 검출한다. charge amplifier의 파라미터는 DC 이득이 크고 또한 신호간 간섭이 발생하지 않도록 설정한다. 제안된 방법은 XY 스테이지의 디지털 서보 제어기의 구성요소인 S/H를 사용하기 때문에 기존의 방식과는 달리 위치 신호의 검출이 안정적이고 반송 신호에 의한 고조파 왜곡과 복조 과정에서 발생되는 지연을 현저히 줄일 수 있으며 간단하게 구현할 수 있다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1438-1441
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• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 한국생산제조학회지
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• 제19권4호
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• pp.553-561
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• 2010

In flat panel display or semiconductor industries, they install the equipments with fine line width and high throughput for fabrication and inspection. The equipments are required to have the linear stage which can position the work-piece with high speed, fine resolution on wide range of motion. In this paper, a precision planar linear XY stage is proposed. The stage has a symmetric planar window configuration and is guided by air-bearings on granite plate. The symmetric planar window configuration makes the stage has robustness against dynamic and thermal disturbances. The air-bearings let the stage move smooth on straight guide bar and flat granite surface. The stage is actuated by linear motor with Halbach magnet array (HMA). HMA generates more confined magnetic flux than conventional array. The linear motors are optimized by using sequential quadratic programming (SQP) with the several constraints that are thermal dissipation, required power, force ripple and so on. The planar linear XY stage with the symmetric planar configuration and the linear motors is implemented and then the performance such as force ripple, resolution and stroke are evaluated.