• 제목/요약/키워드: XPS analysis

검색결과 721건 처리시간 0.039초

X-ray Photoelectron Spectroscopy(XPS) 분석법을 이용한 FKM 오링의 노화 메카니즘 분석 연구 (Study on the Degradation Mechanism of FKM O-ring by X-ray Photoelectron Spectroscopy)

  • 이진혁;배종우;윤유미;최명찬;조남주
    • 한국추진공학회:학술대회논문집
    • /
    • 한국추진공학회 2017년도 제48회 춘계학술대회논문집
    • /
    • pp.168-171
    • /
    • 2017
  • X-ray photoelectron spectroscopy(XPS) 분석법을 이용하여 FKM O-ring의 대기중에서의 노화 메카니즘을 관찰하였다. FKM O-ring은 선경 3.53mm, 내경 91.67mm인 오링을 시편으로 사용하였다. 노화 후 FKM O-ring의 oxygen 원소의 농도가 20.39%로 증가하였으며, fluorine 원소는 각각 8.29%로 감소하는 경향을 나타내었다. 이를 통하여 산소에 의한 산화 반응이 FKM O-ring의 주요 노화 반응으로 나타났다. C1s와 F1s 피크 분석 결과, FKM O-ring의 주쇄중 C-F 결합에서 산화 반응이 주로 진행되는 것으로 나타났다. 또한 O1s 피크 분석 결과, 산화 반응을 통하여 C-OH, C=O, 그리고 O=C-O 구조를 형성하며, 주로 카르복실기가 생성되는 것으로 나타났다.

  • PDF

Defective Surface Analysis of Aluminum Bonding Pads for Au Wire Bonding

  • Son, Dong-Ju;Ji, Yong-Joo;Jeon, Yoon-Su;Soh, Dae-Wha;Hong, Sang-Jeen
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
    • /
    • pp.4-4
    • /
    • 2009
  • Surface analysis on defective wire-bonding pads are performed in flash memory assembly. Week wire bonding may cause a significant effect on the final product reliability, and the surface condition of the aluminum bond pads is critical in terms of product reliability. To find out possible week bonding on semiconductor interconnects, ball sheer test (BST) has been performed. On some defective or week bonded pads, we have investigated the surface contents, assuming that the week bonding is induced from the surface conditions. AES and XPS are employed for the quantitative surface analysis on defective dies.

  • PDF

가속열화 실험에 의한 고분자 애자의 분해 (Degradation of Composite Insulator as Accelated Aging Test)

  • 이용희;장동욱;박영국;박정남;강성화;임기조
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
    • /
    • pp.144-147
    • /
    • 2000
  • The effect of accelerated aging test on ethylene-propylene-diene monomer(EPDM) rubber used for outdoor insulation was studied by X-ray photoelectron spectroscopy(XPS), scanning electron microscope(SEM), FFT spectrum alalysis, and electrical pulse counts using PC by oscilloscope(300 MHz). In electrical alalysis, FFT spectrum analysis indicated arcing caused a significant increase in the third harmonic content of the leakage current of polluted insulator. Also, pulse counts increased as aging time. The surface oxygen and aluminum content were found to increase and that of carbon and nitrogen were found to decrease with time. The detailed XPS analysis indicated that the concentration of carbon in C-C decreased and concentration of highly oxidized carbons increased with time, which was due to the oxidation of EPDM rubber polymer SEM analysis indicated that crack and erosion of EPDM rubber occurred with time.

  • PDF

A surface chemical analysis strategy for the microstructural changes in a CuAgZrCr alloy cast under oxidation conditions

  • Ernesto G. Maffia;Mercedes Munoz;Pablo A. Fetsis;Carmen I. Cabello;Delia Gazzoli;Aldo A. Rubert
    • Advances in materials Research
    • /
    • 제13권2호
    • /
    • pp.141-151
    • /
    • 2024
  • The aim of this work was to determine the behavior of alloy elements and compounds formed during solidification in the manufacturing process of the CuAgZrCr alloy under an oxidizing environment. Bulk and surface analysis techniques, such as Scanning Electron Microscopy (SEM), X-ray Photoelectron Spectroscopy (XPS), Raman and X-ray diffraction (XRD) were used to characterize the phases obtained in the solidification process. In order to focus the analysis on the on grain boundary interface, partial removal of the matrix phase by acid attack was performed. The compositional differences obtained by SEM-EDX, Raman and XPS on post-manufacturing materials allowed us to conclude that the composition of grain boundaries of the alloy is directly influenced by the oxidizing environment of alloy manufacturing.

Tribological performance of a sputtered $MoS_2$ film having an oxidized surface layer

  • Suzuki, M.;Shimizu, S.
    • 한국윤활학회:학술대회논문집
    • /
    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
    • /
    • pp.151-152
    • /
    • 2002
  • An oxidized surface layer was intentionally formed on a sputtered $MoS_2$ film by introducing oxygen gas in the final stage of sputtering process. The film showed longer life than the normal Ar-sputtered film when the surface layer was slightly oxidized. A XPS analysis revealed co-existence of $MoS_2$ and $MoO_3$ in the surface layer. suggesting that the existence of some amount of oxides in the surface layer had beneficial effect. A confusing result was obtained: the life was much shorter than normal Ar-sputtered film when the film was exposed to $O_2$ environment for 1 minute after normal Ar-sputtering, although almost no oxide was detected in XPS analysis.

  • PDF

Polishing Mechanism of TEOS-CMP with High-temperature Slurry by Surface Analysis

  • Kim, Nam-Hoon;Seo, Yong-Jin;Ko, Pil-Ju;Lee, Woo-Sun
    • Transactions on Electrical and Electronic Materials
    • /
    • 제6권4호
    • /
    • pp.164-168
    • /
    • 2005
  • Effects of high-temperature slurry were investigated on the chemical mechanical polishing (CMP) performance of tetra-ethyl ortho-silicate (TEOS) film with silica and ceria slurries by the surface analysis of X-ray photoelectron spectroscopy (XPS). The pH showed a slight tendency to decrease with increasing slurry temperature, which means that the hydroxyl $(OH^-)$ groups increased in slurry as the slurry temperature increased and then they diffused into the TEOS film. The surface of TEOS film became hydro-carbonated by the diffused hydroxyl groups. The hydro-carbonated surface of TEOS film could be removed more easily. Consequently, the removal rate of TEOS film improved dramatically with increasing slurry temperature.

코로나 대전을 통한 옥외용 고분자 절연재료의 자외선 열화특성 연구 (Study on UV degradation in Polymeric Insulating Materials for Use in Outdoor Insulators by Corona-Charging)

  • 연복희;안종식;이상용;허창수
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
    • /
    • pp.106-109
    • /
    • 2001
  • In this paper, we have investigated the degradation of shed materials of outdoor insulators by UV-radiation by using corona-charging and XPS analysis. The accumulated charges on polymeric surface having intrinsic hydrophobic property have a negative impact on retaining its hydrophobicity. Therefore, shorter decay times of surface charges are preferred. The surface voltage decay on UV-treated silicone rubber and EPDM show a different decay trend with UV treated time. From the XPS analysis, the oxidized groups of silica-like structure in silicone rubber increase with UV treatment time. For EPDM, the oxidized carbon groups of C=O, O=C-O increase as elapse of UV radiation time. These oxidized surface for each material have different electrostatic characteristics, so deposited charges may be expected to have different impacts on their surface hydrophobicity. The degradation mechanism based on our results is discussed.

  • PDF

기판의 종류에 따른 SnO2 박막의 전기적인 특성 연구 (Study on the Electrical Characteristics of SnO2 on p-Type and n-Type Si Substrates)

  • 오데레사
    • 반도체디스플레이기술학회지
    • /
    • 제16권2호
    • /
    • pp.9-14
    • /
    • 2017
  • $ISnO_2$ thin films were prepared on p-type and n-type Si substrates to research the interface characteristics between $SnO_2$ and substrate. After the annealing processes, the amorphous structure was formed at the interface to make a Schottky contact. The O 1s spectra showed the bond of 530.4 eV as an amorphous structure, and the Schottky contact. The analysis by the deconvoluted spectra was observed the drastic variation of oxygen vacancies at the amorphous structure because of the depletion layer is directly related to the oxygen vacancy. $SnO_2$ thin film changed the electrical properties depending on the characteristics of substrates. It was confirmed that it is useful to observe the Schottky contact's properties by complementary using the XPS analysis and I-V measurement.

  • PDF

FCVA 방법으로 증착된 DLC 박막의 계면 및 구조분석 (Analysis of Interfaces and Structures of DLC Films Deposited by FCVA Method)

  • 박창균;장석모;엄현석;서수형;박진석
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
    • /
    • pp.16-19
    • /
    • 2001
  • DLC films are deposited using a modified FCVA system. Carbon amorphous networks, chemical bonding states, $sp^3$ fraction, interfaces, and structures are studied as a function of substrate voltage ($0{\sim}-250V$). The $sp^3$ content in the films is evaluated by analyzing the XPS spectra(C1s). The structural properties of the surface, bulk, and interfacial layers in DLC/Si systems are quantitatively analyzed by employing XRR method. As the substrate voltage is increased, the $sp^3$ fraction is decreased by means of XPS and Raman spectroscopy. In addition, the structural properties (interfacial layer, contamination layer, and sp3 fraction) derived from XPS depth profile are relatively correlated with the XRR results.

  • PDF