• 제목/요약/키워드: X-ray target

검색결과 471건 처리시간 0.099초

Influence of sputtering parameter on the properties of silver-doped zinc oxide sputtered films

  • S. H. Jeong;Lee, S. B.;J.H. Boo
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2003년도 추계학술발표회초록집
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    • pp.58-58
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    • 2003
  • Silver doped ZnO (SZO) films were prepared by rf magnetron sputtering on glass substrates with extraordinary designed ZnO target. With the doping source for target, use AgNO$_3$ powder on a various rate (0, 2, and 4 wt.%). We investigated dependence of coating parameter such as dopant content in target and substrate temperature in the SZO films. The SZO films have a preferred orientation in the (002) direction. As amounts of the Ag dopant in the target were increased, the crystallinity and the transmittance and optical band gap were decreased. And the substrate temperature were increased, the crystallinity and the transmittance were increased. But the crystallinity and the transmittance of SZO films were retrograde at 200$^{\circ}C$. Upside facts were related with composition. In addition, the Oxygen K-edge features of the SZO films were investigated by using near edge X-ray absorption fine structure (NEXAFS) spectroscopy. Changes of optical band gap of the SZO films were explained compared with XRD, XPS and NEXAFS spectra.

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RF Co-sputtering법에 의한 $Si_{1-x}C_x$ 박막 증착 및 후 열처리에 따른 양자점 박막 특성 분석 (Characterization of post-annealed Si QDs in $Si_{1-x}C_x$ thin film by RF co-sputtering)

  • 문지현;김현종;조준식;장보윤;고창현;박상현;윤경훈;송진수;오병성;이정철
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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    • pp.33-36
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    • 2009
  • 고효율 양자점 태양전지를 위하여 $Si_{1-x}C_x$ 박막 내에 Si 양자점을 형성한 박막을 제작하고 그 특성을 분석하였다. $Si_{1-x}C_x$ 박막은 Si과 C target을 co-sputtering하여 증착하였다. C target의 RF power를 변화시켜 $Si_{1-x}C_x$ 박막의 조성비를 조절하였으며, 조성비는 auger electron spectroscopy로 정량적으로 측정하였다. 이 박막들을 질소 분위기에서 후 열처리하여 high resolution transmittance electron microscopy로 확인한 결과 박막 내에 2~10nm 크기의 양자점이 형성된 것을 관측할 수 있었다. 이 양자점은 transmittance electron diffraction과 grazing incident X-ray diffraction을 통해 Si 양자점과 SiC 양자점이 형성되었음을 알 수 있었다. Raman 측정 결과에서는 후 열처리한 $Si_{1-x}C_x$ 박막의 조성비가 증가할 수록 crystal Si peak의 shift가 증가함을 알 수 있었고, 이를 통해 양자점의 크기도 함께 계산할 수 있었다. Fourier transform infrared spectroscopy을 통해 후 열처리한 Si1-xCx 박막의 양자점의 형성 원인을 추정하였다.

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Co-sputtering법으로 제작된 MgxZn1-xO 박막의 인가 파워에 따른 구조적 특성 (The Structural Characteristics of MgxZn1-xO Thin Films with Sputtering Power by Co-sputtering Method)

  • 김상현;손지훈;장낙원;김홍승;윤영
    • 한국전기전자재료학회논문지
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    • 제26권2호
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    • pp.164-169
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    • 2013
  • The effect of co-sputtering condition on the structural properties of $Mg_xZn_{1-x}O$ thin films grown by RF magnetron co-sputtering system was investigated for manufacturing UV LED. $Mg_xZn_{1-x}O$ thin films were grown with ZnO and MgO target varying RF power. Structural properties were investigated by X-ray diffraction (XRD) and Energy dispersive spectroscopy (EDS). The $Mg_xZn_{1-x}O$ thin films have sufficient crystallinity on the high ZnO power. The EDS analyzed showed that the Mg content in the $Mg_xZn_{1-x}O$ films decreased from 3.99 to 24.27 at.% as the RF power of ZnO target increased. The Mg content in the $Mg_xZn_{1-x}O$ films could be controlled by co-sputtering power.

볼락의 형태학적 특징과 음향반사강도 특성 (Morphological Properties and Target Strength Characteristics for dark banded rockfish (Sebastes inermis))

  • 황보규
    • 수산해양기술연구
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    • 제51권1호
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    • pp.120-127
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    • 2015
  • Morphological properties of dark banded rockfish (Sebastes inermis) were analysed to investigate its acoustic scattering characteristics. Total of 18 live samples was prepared for X-ray photos and collected morphological coordinates of their body and swim bladder shapes. Kirchhoff-ray mode model was used to calculate acoustic scattering pattern for broad-band frequency range. Inclination of swim bladder ranged from 17 to 30 and the averaged value was about $25.2^{\circ}$ (S.D.(standard deviation)=3.15). There were no any tendency of increase or decrease in volume and area ratio of swim bladder to fish body and ranged from 2.2 % to 4.43 % and 14.85 % to 21.31 %, respectively. The averaged value of volume and area ratio was 3.13 % (S.D.=0.52) and 17.6 % (S.D.=1.5). $b_{20}$ values were -69.01 for 38 kHz, -69.83 for 70 kHz, -70.17 for 120 kHz and -70.93 for 200 kHz, recpectively. Broadband acoustic patterns of dark banded rockfish for 20 ~ 200 kHz were similar among samples and they reflected size and morphological properties of fish species.

Rf - magnetron sputtering system을 사용한 $YBa_2Cu_3O_x$ 초전도 박막의 제조 (The preparation of $YBa_2Cu_3O_x$ superconducting thin film using rf - magnetron sputtering system)

  • 박성진;김민기;최성환;최효상;황종선;한병성
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1992년도 하계학술대회 논문집 B
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    • pp.717-720
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    • 1992
  • Since the discovery of High-Tc superconducting Y-Ba-Cu-O ceramics with critical temperature of about 90K, numerous efforts to prepare supercond ucting thin films with excellent qualities such as High-Tc and critical current density have been made. The samples were deposited onto $SiO_x$ substrates heated at 540$^{\circ}C$ - 600$^{\circ}C$ in a single target rf - magnetron sputtering system. The film thickness has 2000$\AA$ - 5000 $\AA$ with a rate of 16 $\AA$/min. and distance between target and substrate was 50 mm. The films were characterized by X - ray diffraction, scanning electron microscopy and critical temperature.

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Mechanical and Chemical Characterization of NbNx Coatings Deposited by ICP Assisted DC Magnetron Sputtering

  • Jun, Shinhee;Kim, Junho;Kim, Sunkwang;You, Yong Zoo;Cha, Byungchul
    • 열처리공학회지
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    • 제27권1호
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    • pp.10-14
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    • 2014
  • Niobium nitride coatings have many potential thin film applications due to their chemical inertness, good mechanical properties, temperature stability and superconducting properties. In this study, $NbN_x$ coatings were prepared by inductively coupled plasma (ICP) assisted DC magnetron sputtering method on the surface of AISI 304 austenitic stainless steels. Effects of target power were studied on mechanical and chemical properties of the coatings. The coating structure was analyzed by X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). The coating hardness was measured by micro-knoop hardness tester. The coating thickness was measured using a 3D profiler and wear characteristics were estimated using a ball-on-disk wear tester. The thickness of the $NbN_x$ coatings increased linearly from 300 nm to 2000 nm as the Nb target power increased, and it showed over $HK_{0.005}$ 4000 hardness above Nb target power of 300 W. Hexagonal ${\delta}^{\prime}$-NbN phase and cubic ${\delta}$-NbN phase were observed in the coating films and the hardness of the NbNx coatings was higher when these two peaks were mixed. The corrosion resistance increased with the increase of the Nb target power.

Molybdenum 저지극을 이용한 X-ray의 미세병소 검출능력에 관한 연구 (A Study on the Detection Ability of Minute Lesions in X-ray Using the Molybdenum Target)

  • 양다래;동경래;박용순;지연상;김영근;김창복
    • Journal of Radiation Protection and Research
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    • 제35권1호
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    • pp.43-48
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    • 2010
  • 방사선의 선질은 X선관의 target에 따라 결정된다. 유방검사의 경우 Molybdenum target을 사용하는데 22~28 kV 범위에서 평균 17.9~19.5 keV의 Mo 특성에너지를 얻어 유방의 high contrast 영상을 얻을 수 있다. 따라서 본 연구에서는 최근 대부분의 유방 검사장치에 이용되는 Mo/Mo 조합 유방장치의 미세병변 탐지능력을 측정하기 위하여 ALVIM TRM 팬텀을 이용하여 그 기초적인 실험으로 획득한 영상을 ROC(receiver operating characteristic) curve를 통해 분석하였다. 유방의 평균 피사체 두께가 40 mm로 가정하고 kV와 mAs, 그리고 두께변화에 따른 질환 검출능력을 실험한 결과, kV 변화에서는 Speck과 Fiber의 병소 검출능력이 거의 차이를 보이지 않은 것으로 나타났으며, mAs와 피사체두께 변화에서는 많은 차이를 보이는 것으로 나타났다. 즉, 유방의 피사체 평균두께인 약 40 mm에서는 관전압 변화가 병소의 검출능력에 많은 영향을 끼치지 않으므로 평균 두께의 피사체에서는 관전압을 높여서는 안된다.

요로결석 위치 진단에 대한 복부자세 변화에 따른 연구 (A Study on the Diagnosis of Urinary Stone Location by Abdominal Positioning Variations)

  • 김동진;채종상;유채민;이배원
    • 대한방사선기술학회지:방사선기술과학
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    • 제41권1호
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    • pp.7-12
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    • 2018
  • Patients who visit the emergency room with urinary stones have difficulty lying down in a supine position due to severe pain when performing the KUB test. The purpose of this study was to find methods to reduce the patients' pain and image distortion, and obtain medical images with high diagnostic values. After checking the standard classification of disease and cause of death, the target group consisted of 121 patients who had clearly distinguished stones from computed tomography. Patients with stones in the ureteralvesical junction were excluded. Qualitative image evaluation was performed by confirming the location of the stone in the computed tomography images. and evaluated the rate of visual discrimination of stones possible through KUB and abdominal plain X-ray. Quantitative image evaluation was performed on the KUB, abdominal plain X-ray images. The transverse process of the first lumbar vertebrae served as the standard point, and the length from this point to the lower part of the stone was measured. Results from looking at the rate of visual discrimination of stones possible through KUB and abdominal plain X-ray showed: 94 patients (77.6%) for KUB images and 91 patients (75.2%) for computed tomography images. The standard deviation for KUB and abdominal X-ray was 3 (2.4%). Comparing and analyzing the location from KUB images and abdominal plain X-ray images, the stone position was 10.1 mm in the kidney, 10.5 mm in the ureteropelvic junction, and 9.7 mm in the ureters. It was shown that the stone moved 10 mm on average with significant statistical difference (P<0.05). In cases where the pain is so severe that it is impossible to perform the test in the supine position, an alternative may be to check the stone position by performing a modified KUB test by having the patient stand in a vertical position. In the future, this will provide convenience to both the examiner and the patient when performing the examination, and it will contribute with its reproducibility.

Daily localization of partial breast irradiation patients with three-dimensional ultrasound imaging

  • Sayan, Mutlay;Vergalasova, Irina;Hard, Daphne;Wrigth, Heather;Archambault, Jessica;Gagne, Havaleh;Nelson, Carl;Heimann, Ruth
    • Radiation Oncology Journal
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    • 제37권4호
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    • pp.259-264
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    • 2019
  • Purpose: Accurate localization of the lumpectomy cavity during accelerated partial breast radiation (APBR) is essential for daily setup to ensure the prescribed dose encompasses the target and avoids unnecessary irradiation to surrounding normal tissues. Three-dimensional ultrasound (3D-US) allows direct visualization of the lumpectomy cavity without additional radiation exposure. The purpose of this study was to evaluate the feasibility of 3D-US in daily target localization for APBR. Materials and methods: Forty-seven patients with stage I breast cancer who underwent breast conserving surgery were treated with a 2-week course of APBR. Patients with visible lumpectomy cavities on high quality 3D-US images were included in this analysis. Prior to each treatment, X-ray and 3D-US images were acquired and compared to images from simulation to confirm accurate position and determine shifts. Volume change of the lumpectomy cavity was determined daily with 3D-US. Results: A total of 118 images of each modality from 12 eligible patients were analyzed. The average change in cavity volume was 7.8% (range, -24.1% to 14.4%) on 3D-US from simulation to the end-of-treatment. Based on 3D-US, significantly larger shifts were necessary compared to portal films in all three dimensions: anterior/posterior (p = 7E-11), left/right (p = 0.002), and superior/inferior (p = 0.004). Conclusion: Given that the lumpectomy cavity is not directly visible via X-ray images, accurate positioning may not be fully achieved by X-ray images. Therefore, when the lumpectomy cavity is visible on US, 3D-US can be considered as an alternative to X-ray imaging during daily positioning for selected patients treated with APBR, thus avoiding additional exposure to ionizing radiation.

3차원 전신 정위 방사선 치료 장치의 개발 (Development of the Whole Body 3-Dimensional Topographic Radiotherapy System)

  • 정원균;이병용;최은경;김종훈;안승도;이석;민철기;박참복;장혜숙
    • 한국의학물리학회지:의학물리
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    • 제10권2호
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    • pp.63-71
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    • 1999
  • 입체조형 치료와 전신 방사선 수술에의 이용을 목적으로 3차원 전신 정위 방사선 치료 장치를 개발하였다. Couch 위에 놓을 수 있는 전신 정위 치료판을 제작하여 방사선 비투과성 카테타 선을 이용하여 치료판 위에 좌표계를 설치하고, MeV-Green(전성 물산, 한국)으로 고정틀을 만들어 환자 자세를 고정시키고, 플라스틱 봉과 봉 지지판을 이용하여 고정틀을 고정하였다. 이러한 설계, 제작으로 입체 조형 치료 등에서 갠트리 회전에 의한 기하학적 제약을 최소화하고 방사선 조사 투과율 이 특정한 방향에서 영향을 받는 문제점을 해소하였다. CT 영상을 통해 치료 표적의 위치를 파악하고 치료판 기준점에 대하여 좌표화하여 모의 치료시와 방사선 치료시의 환자 자세 변화 오차를 줄였다. 3대의 CCTV 카메라를 사용하여 환자 자세 변화를 감지, 수정함으로써 체표변의 외곽선으로 부터 setup 오차를 최소화 할 수 있었다. 치료 효용성을 높이기 위해 이러한 과정을 모니터를 보면서 실시간으로 처리 할 수 있도록 하였고, IDL(Interactive Data Language, RSI, U.S.A.)을 사용하여 image subtraction 방식으로 환자 자세 변화를 가시화하여 오차를 줄이도록 하였다. 내부 장기 움직임에 따른 표적의 움직임을 추적할 목적으로 rotating X-ray 장치를 제작하였다. Landmark 나사를 표적주위 뼈나 표적중심에 삽입하여 이 rotating X-ray 장치를 이용해서 anterior, lateral 두 방향에서 얻은 영상 정보로부터 marker 에 대한 표적의 위치 변화를 가시화 하여 내부 표적의 움직임에 따른 setup 오차를 줄였다. CT 모의치료를 할 수 있도록 IDL 을 이용하여 PC용 모의치료 프로그램을 GUI 환경에서 구현하였고 이 프로그램을 통해서 치료 계획을 위해 CT 에서 수집된 영상정 보를 이용하여 표적을 포함한 장기들의 그래픽 처리, 편집, 전송 등의 작업을 수행하도록 하였다.

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