Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2003.10a
- /
- Pages.58-58
- /
- 2003
Influence of sputtering parameter on the properties of silver-doped zinc oxide sputtered films
- S. H. Jeong (Sungkyunkwan University) ;
- Lee, S. B. (Sungkyunkwan University) ;
- J.H. Boo (Sungkyunkwan University)
- Published : 2003.10.01
Abstract
Silver doped ZnO (SZO) films were prepared by rf magnetron sputtering on glass substrates with extraordinary designed ZnO target. With the doping source for target, use AgNO