• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.82-82
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• 2011

본 연구에서는 이온빔 스퍼터링 방법으로 증착한 Cr2O3, Ta2O5, HfO2 산화물박막의 구조적 특성변화를 관찰하였다. 금속박막에서 표면이 산화되는 문제를 해결하기위하여 산화물 박막을 증착시켰다. 이온빔 스퍼터링으로 박막 증착 시 산화물 타겟을 사용할 때 발생되는 전하의 영향을 상쇄하기 위하여 neutralizer를 사용하였다. 박막 증착 후 XRR (X-ray Reflectometer)을 이용하여 박막의 두께, 거칠기 및 밀도를 확인하였으며, AFM (Atomic Force MicroScope)을 통하여 증착한 박막표면 거칠기 측정을 하여 XRR로 얻은 데이터와 비교하여 살펴보았다. 또한 XPS (X-ray photoelectron spectroscopy)측정을 통해 제조된 박막의 화학적 결합상태를 확인하였다. 여러 가지 조건변화와 기판의 차이에 따라 제작된 산화물 박막 중 실리콘 기판을 사용하여 증착시킨 박막은 XRR측정시 반사율 곡선에서 자연 산화막에 의한 영향이 나타났다. 반면 glass나 sapphire에 증착시킨 산화물 박막은 실리콘기판에서 나타난 자연 산화막의 영향을 받지 않음을 확인하였다. 기판과 산화물 박막사이에 계면층에 나타나는 영향을 최소화시킴으로써 양질의 박막을 제작할 수 있을 것으로 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.50-50
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• 2011

The aluminum nitride films were prepared by RF magnetron sputtering using an AlN ceramic target. The crystallinity, grain size, Al-N bonding and thermal conductivity were investigated in dependence on the plasma power densities (4.93, 7.40, 9.87 W/$cm^2$) during sputtering. High thermal conductivity is important properties of A1N passivation layer for functioning properly in thermal inkjet printhead. The crytallinity, grain size, Al-N bonding formation and chemical composition were observed using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), fourier transform infrared (FTIR) and X-ray photoelectron spectroscopy (XPS), respectively. The AlN thin film was changed from amorphous to crystalline as the power density was increased, and the largest grain size appeared at medium power density. The near stoichiometry Al-N bonding ratio was acquired at medium power density. So, we know that the AlN thin film had better thermal conductivity with crystalline phase and near stoichometry Al-N bonding ratio at 7.40 W/$cm^2$ power density.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.537-537
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• 2012

We have studied a fabrication of vapor phase polymerized Poly(3,4-ethylenedioxythiophene) (PEDOT) nanowire arrays for the first time. The vapor-phase polymerization (VPP) technique is a bottom-up processing method that utilizes the organic arrangement of macromolecules to easily produce ordered aggregates, including on the nanoscale, or prepare thin films of self-assembled molecules, micropatterns, or modified microstructures of pure conducting polymers. Also, liquid-bridge-mediated nanotransfer molding (LB-nTM), which was reported as a new direct patterning method recently, is for the arrayed formation of two- or three-dimensional structures with feature sizes as small as tens of nanometers over large areas up to 4 inches across and is based on the direct transfer of various materials from a mould to a substrate through a liquid bridge between them. The PEDOT nanowires grown by VPP method and transferred on a substrate to use LB-nTM method have been fabricated to single crystal PEDOT nanowires investigated Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Selected Area Electron Diffraction (SAED), X-Ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), and electrical properties.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.333-333
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• 2012

$Co_3O_4$ 계열 스피넬(spinel) 전이금속 산화물 $TCo_2O_4$ (T = 3d 전이금속)는 화학적 촉매, 센서, 이차전지, 연료전지 등으로의 응용성에 기인하여 최근 주목을 받고 있으며, 특정 응용분야와 관련하여 그 박막 시료 제작 및 물리적, 화학적 성질들에 대한 세밀한 연구의 필요성이 제기되고 있다. 본 연구에서는 졸-겔 방법을 이용하여 $TCo_2O_4$ 박막이 $Al_2O_3$ (0001) 기판 위에 균일한 두께로 제작될 수 있는 최적 조건을 찾고자 하였으며, 후열처리 조건 변화에 따르는 박막의 구조적 성질 변화를 조사하였다. 후열처리는 공기 중에서 이루어졌으며 온도 ${\sim}800^{\circ}C$에서 최적 결정성을 갖는 다결정 박막이 얻어졌다. 또한, 박막에 작은 시간(~10 min) 동안의 전자선(electron beam) 조사를 통한 다결정 박막의 형성도 관측되었다. $TCo_2O_4$ 박막들에 대한 X-ray diffraction, X-ray photoelectron spectroscopy, spectroscopic ellipsometry 측정들을 수행하여 그 구조적, 광학적 성질을 조사 하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2012년도 춘계학술발표대회
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• pp.98.1-98.1
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• 2012

CdS/CdTe 박막 태양전지의 경우 높은 광흡수 계수를 가지고 있는 CdTe 다결정 박막을 흡수층으로이용 한다. CdTe 다결정 박막의 경우 CdS/CdTe 계면과 박막 내부에 많은 결함들이 존재 하며, CdTe 박막 내부에 존재하는 캐리어의 수를 증가 시키기 위하여 $CdCl_2$ 활성화 공정을 거치게 된다. 이때 박막의 물성 변화를 분석 하기 위하여, X-Ray Diffractometer (XRD), X-ray Photoelectron Spectroscopy (XPS)를 이용하여 박막 표면 분석을 진행 하였다. 이를 통해 박막 표면에서 산소가 Cd와 Te과 결합하면서 산화막이 생성되는 것을 확인하였다. 박막 표면에 생성된 산화막은 후면 금속 전극 형성을 위해, 용액 공정을 통하여 제거 되는데, 이때 CdTe 박막 표면에서 Cd이 용액에 의해 제거 되는 것을 확인 하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.175-179
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• 1996

Ferroelectric SrBi$_2$Ta$_2$$O_{9}$ thin films were fabricated by tole Sol-Gel method using a spin-on coating with MOD(Metal Organic Dccomposition) solution on Pt/Ti/SiO$_2$/Si(100) substratcs. The films were anncalcd at 80$0^{\circ}C$ for one hour in oxygen atmosphere. The effects of Bi/Ti mole ratios on crystalline orientations, surface morphologies, and subface composition SBT thin films with a Bi/Ta mole ratios from 1.1 to 1.3 were investigated using X-ray Diffractometry (XRD). Atomic Force (AFM), X-Ray Photoelectron Spectroscopy(XPS). Ferroelectric properties of these films were also measured.d.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1600-1602
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• 1997

We have studied microstructure of carbn fiber and graphite using scanning electron microscope, x-ray diffractommetry and x-ray photoelectron spectroscopy. According to the results, intercalation of lithium ion affected formation of film on carbon surface and changed structural parameter. Also, we found that film on carbon surface included lithium ion. And, the results of XPS indicated that surface of lithiated carbon materials existed P and F consisting electrolyte. Thus, We expected electrolyte cointercalated with lithium.

• Bulletin of the Korean Chemical Society
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• 제33권1호
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• pp.209-214
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• 2012

In this work, the reduced graphene nanosheets were synthesized from pre-exfoliated graphite flakes. The pristine graphite flakes were firstly pre-exfoliated to graphite nanoplatelets in the presence of acetic acid. The obtained graphite nanoplatelets were treated by Hummer's method to produce graphite oxide sheets and were finally exfoliated to graphene nanosheets by ultrasonication and reduction processes. The prepared graphene nanosheets were studied by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), and transmission electron microscopy (TEM). From the results, it was found that the preexfoliation process showed significant influence on preparation of graphite oxide sheets and graphene nanosheets. The prepared graphene nanosheets were applied to the preparation of conductive materials, which yielded a greatly improved electrical resistance of $200{\Omega}/sq$.

• Bulletin of the Korean Chemical Society
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• 제31권11호
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• pp.3145-3150
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• 2010

Ruthenium catalysts modified by selenium have been introduced as alternative materials to Pt in Direct methanol fuel cells (DMFCs). RuSe nano-particles were synthesized on the Vulcan XC72R carbon supports via polyol method. The prepared catalysts were electrochemically and physically characterized by cyclic voltammetry (CV,) linear sweep voltammetry, methanol tolerance test, X-ray diffraction (XRD), Transmission electron microscopy (TEM), Energydispersive Spectrometer (EDS) and X-ray photoelectron spectroscopy (XPS). Increasing the Se concentration up to 20 at % increased the electro-catalytic activity for the oxygen reduction. By increasing Se amount, Ru metallic form on the surface was increased. The $Ru_{80}Se_{20}$/C catalysts showed the highest oxygen reduction reaction (ORR) activity and outstanding methanol tolerant property in half cell tests as well as single cell test.

• Bulletin of the Korean Chemical Society
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• 제27권4호
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• pp.489-494
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• 2006

Goethite, hematite, magnetite and synthesized iron oxide are used as catalysts for Fenton-type oxidation of phenol. The synthesized iron oxides were characterized by X-ray diffraction (XRD), BET, X-ray photoelectron spectroscopy (XPS), and electron paramagnetic resonance (EPR). The catalytic activity of these materials is classified according to the observed rate of phenol oxidation. The effectiveness of the catalysts followed the sequence: ferrous ion > synthesized iron oxide >> magnetite hematite > goethite. According to these results, the most effective iron oxide catalyst had the structure similar to natural hematite. The surface oxidation state of the catalyst was between magnetite and hematite (+2.5 ~ +3.0). Phenol degraded completely in 40 min at neutral pH (pH = 7). Soluble ferric and ferrous ions were not detected in the filtrate from Fenton reaction solution by AAS. The formation of hydroxyl radicals was confirmed by EPR.