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검색결과 141건 처리시간 0.024초

STI(Shallow Trench Isolation) 공정에서 Torn Oxide Defect 해결에 관한 연구 (A Study for the Improvement of Torn Oxide Defect in STI(Shallow Trench Isolation)Process)

  • 김상용;서용진;김태형;이우선;정헌상;김창일;장의구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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    • pp.723-725
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    • 1998
  • STI CMP process are substituting gradually for LOCOS(Local Oxidation of Silicon) process to be available below sub-0.5um technology and to get planarized. The other hand, STI CMP process(especially STI CMP with RIE etch back process) has some kinds of defect like Nitride residue, Torn Oxide defect, etc. In this paper, we studied how to reduce Torn Oxide defects after STI CMP with RIE etch back process. Although Torn Oxide defects which occur on Oxide on Trench area is not deep and not sever, Torn oxide defects on Moat area is sometimes very deep and makes the yield loss. We did test on pattern wafers witch go through Trench process, APCVD process, and RIE etch back process by using an REC 472 polisher, IC1000/SUV A4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the root causes of torn oxide defects.

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지역성을 이용한 하이브리드 메모리 페이지 교체 정책 (Page Replacement Policy of DRAM&PCM Hybrid Memory Using Two Locality)

  • 정보성;이정훈
    • 대한임베디드공학회논문지
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    • 제12권3호
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    • pp.169-176
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    • 2017
  • To replace conventional DRAM, many researches have been done on nonvolatile memories. The DRAM&PCM hybrid memory is one of the effective structure because it can utilize an advantage of DRAM and PCM. However, in order to use this characteristics, pages can be replaced frequently between DRAM and PCM. Therefore, PCM still has major problem that has write-limits. Therefore, it needs an effective page management method for exploiting each memory characteristics dynamically and adaptively. So we aim reducing an average access time and write count of PCM by utilizing two locality for an effective page replacement. We proposed a page selection algorithm which is recently requested to write in DRAM and an algorithm witch uses two locality in PCM. According to our simulation, the proposed algorithm for the DRAM&PCM hybrid can reduce the PCM write count by around 22% and the average access time by 31% given the same PCM size, compared with CLOCK-DWF algorithm.

방음벽 상단소음저감장치의 성능평가 방법에 관한 연구(3) - 시험 및 평가방법의 제안 - (Estimation Method of Noise Reducing Devices Installed on the Noise Barrier(3) - Suggestion of Test and Estimation Method -)

  • 김철환;장태순;강희만;전기성;김동준;장서일
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2008년도 춘계학술대회논문집
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    • pp.496-499
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    • 2008
  • The noise reducing devices installed on the noise barrier have been developed in many shapes and ways to reduce noise around road traffic areas. In this study, test and estimation method for the noise reducing device witch installed on the top of a noise barrier was suggested. For this, the authors have considered sound power flow around the device and sound pressure levels for the far field area. To estimate the area effect behind the barrier, area average of noise pressure level difference divided by two area, upper and bellow the sight-line. Comparing the attenuation difference of these areas, the tendency of noise reduction effect was studied according to type of noise reducing devices. Compared with noise shielding efficiency of the devices that using equivalent height of a simple barrier calculated by the SoundPlan, the commercial environment noise simulation software.

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우리말 연속음성의 음절 분할법 (A Syllabic Segmentation Method for the Korean Continuous Speech)

  • 한학용;고시영;허강인
    • 한국음향학회지
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    • 제20권3호
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    • pp.70-75
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    • 2001
  • 본 논문은 우리말 연속음성에 대한 음절단위 분할법을 제안한다. 이 방법은 다음 3단계로 이루어진다: (1) 음성의 시간영역 분할 파라메터인 피치, 에너지, ZCR, PVR을 이용하여 음성데이터를 자음, 자음. 묵음 단위로 라벨링하여 토큰 (Token)을 형성, (2) 형성된 토큰을 유한상태오토마타를 이용하여 한국어 음절구조로 파서 (Parser)를 설계하여 스캐닝 (Scanning), (3) 의사 음절핵 정보를 이용하여 두개 혹은 여러 개의 음절을 가지는 음성부분에 대한 재분할을 통하여 음절단위 분할 완성. 제안된 방법에 대한 성능 평가를 위해서 문장과 단어단위 연속음성에 대한 분할 실험결과 각각 73.7%와 85.9%의 분할률을 얻었다.

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가연물 접촉에 따른 전기히터의 화재위험성에 관한 실험적 연구 (An Experimental Study on the Fire Risk of Electric Heaters According to Contact of Flammable Materials)

  • 이성룡
    • 한국화재소방학회논문지
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    • 제25권3호
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    • pp.63-71
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    • 2011
  • 본 연구에서는 대표적인 계절용기기인 전기히터에 대하여 발화위험성을 평가하였다. 실험에는 2종류의 전기히터가 사용되었다. 전기히터 가동 시 히터 표면 및 주변의 온도변화를 측정하였으며, 내부 비파괴검사를 통하여 전기히터 내부구조를 파악하였다. 전기히터 화재원인 중 가장 높은 비율을 차지하는 가연물 근접방치에 의한 화재위험성을 평가하였다. 또한 전도 안전스위치 오작동에 의한 발화위험성을 평가하였다. 정상작동 시 전기히터 발열제 주위에서 온도가 $80^{\circ}C$ 이하로 유지되었다. 전기히터 가동 중 가연물 낙하 등으로 인하여 히터를 덮거나 안전장치(전도안전스위치, 과열방지장치)의 오작동 등에 의해 발화위험성이 상존하고 있다.

근적외선 및 열풍방식을 이용한 건조시스템 개발 (Development of Drying System using NIR and Hot Air Method)

  • 고재섭;최정식;강성준;백정우;장미금;문주희;정동화
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2010년도 하계학술대회 논문집
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    • pp.589-590
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    • 2010
  • The drying method that is applied in industry is mainly used hot air drying method witch is circulated heated air by generating heat from thermal source. But these methods have problems such as decreasing drying efficiency and waste of energy by low thermal efficiency. Therefore, this paper proposes high efficiency hybrid drying system using near infrared ray(NIR) drying method using halogen lamp and hot air drying method. And this paper proves validity of proposed drying system through experiment about thermal and humidity of drying system inside.

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GPS 위치정확도 향상을 위한 의사거리 오차의 분석에 관한 연구 (Error Budget Analysis of Pseudorange for Improving the GPS Positioning Accuracy)

  • 김용일;김동현;김병국
    • 대한공간정보학회지
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    • 제4권2호
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    • pp.79-90
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    • 1996
  • C/A코드용 GPS 수신기를 단독으로 사용하여 위치를 구하는 경우 수신기에서 측정되는 위성-수신기간의 의사거리에 포함된 여러 오차요소플로 인하여 계산된 위치는 매우 큰 오차를 가진다는 것이 알려져 있다. 본 논문은 측정된 의사거리에 포함된 오차요소들의 정량적인 분석에 관한 것이며, 그 중에서 오차의 가장 큰 부분을 차지하면서 현재 발생과정이 공개되지 않고 있는 고의적인 오차인 SA(selective availability)의 특성을 쉽게 확인할 수 있는 방법이 제시되었다. 실험결과 측정된 도플러 편의량과 수신기시계 편의량의 변화로부터 SA의 효과를 확인할 수 있었으며, 전자에 대해서는 2차 다항식을 그리고 후자에 대해서는 선형식을 적용함으로써 측정값과 추정값간의 차를 보정하여 SA의 영향을 어느 정도 소거할 수 있음을 보였다. SA의 특성에 대한 분석은 주기성 자기상관함수를 적용하였으며, 그 결과 1차 Gauss-Markov프로세서의 인자들이 결정되었다.

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초음파(超音波)에 대한 ICR Mouse 착상전기(着床前期)의 개체(個體) Level 영향(影響)(기형(奇形).배사망.(胚死亡))으로부터 초음파(超音波)의 물리학적(物理學的) 특성(特性)에 대한 연구(硏究) (Embryonic Effects of Ultrasound Irradiation on Preimplantation Stage of ICR Mouse Embryos - About embryonic death and malformation of ultrasound mechanisms -)

  • 송재관;김예현
    • 대한방사선기술학회지:방사선기술과학
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    • 제18권2호
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    • pp.75-86
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    • 1995
  • Embryos and fetuses are more sensitive to various environmental agents than adults of children biological effects following the exposure, such as intrauterin, malformation, have intimate conception with the prenatal exposure. There have been many studies on radiation and other agent. However, imformation about the ultrasound effects is limited. It is very important to study the effect of ultrasound with these kinds of fatera in consideration of ultrasound protection and safty. In this study, embryonic and fefal effects of ICR mouse embryos irradiated on 24, 48, 12 and 192 hpc of preimplantation and organogenesis period at the intensity of $0.5{\sim}3\;W/cm^2$ were investigated. Many type of external malformation observed in mouse irradiated on 72 hpc and 192 hpc. However, the embryos irradiated on 24 hpc and 48 hpc, at witch embryos had less then 6 cells and were pre-compaction stage, had no sensitivity for external malformation. The threshold doses of external malformation in mouse irradiated on 72 hpc and 192 hpc, at which embryos were consisted of $16{\sim}32$ cells and neural formation stage, were $1\;W/cm^2$ and $0.5\;W/cm^2$.

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용접이상화에 의한 용접부정의 예측과 정도 (Prediction of Welding Imperfection with Idealization of Welding and Their Accuracy)

  • 이재익;장경호;김유철
    • Journal of Welding and Joining
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    • 제31권5호
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    • pp.15-19
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    • 2013
  • In order to reduce a grand compute time in prediction of welding distortion and residual stress by 3D thermal elastic plastic analysis, idealization of welding that is methods to heat input simultaneously in all weld metal on the same welding direction is carried out on two weld joints(butt welding and fillet welding). Then, the accuracy of acquired results is investigated through the comparison of the high accuracy prediction results. The thermal conduction analysis results by idealization of welding, the temperature is raised accompany with beginning of heat input because all of weld metal is heated input at the same time. On the other side, the temperature witch predicted with high accuracy is raised at the moment heating source passes the measuring points. So, there is difference of time between idealization of welding and considering of moving heat source faithfully. However, temperature history by idealization of welding is well simulated a high accuracy prediction results.

오스템퍼드 구상흑연주철품의 기계적 성질에 미치는 잔류오스테나이트량의 영향 (Effect of the Amount of Retained Austenite on the Mechanical Properities of Austempered Ductile Iron)

  • 최준오;이상학;최창옥;박성택
    • 열처리공학회지
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    • 제15권4호
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    • pp.178-187
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    • 2002
  • Austempered Ductile Iron (ADI) castings having various chemical composition and heat treatment conditions were investigated. Especially, this study was investigated the influence of various parameters on austempering temperature and alloying elements. The addition of Mo, Cu, and Ni individually or combined in these alloys also investigated. The alloying elements influence the austempering reaction, the microstructures, mechanical properties and amount of retained austenite. In this study, the mechanical properties (ultimate tensile strength(UTS), hardness, elongation) are analysed to show the relationship between alloying elements, austempering temperatures and amount of retained austenite. The amount of retained austenite was the range of 15 - 40%. In case of the alloy to witch Mo, Cu, and Ni was added, the amount of retained austenite was the largest at a constant austempering temperature.