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Surface reaction of $HfO_2$ etched in inductively coupled $BCl_3$ plasma ($BCl_3$ 유도결합 플라즈마를 이용하여 식각된 $HfO_2$ 박막의 표면 반응 연구)

  • Kim, Dong-Pyo;Um, Doo-Seunng;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.477-477
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    • 2008
  • For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

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Influence of Amount of Waste Nutrient Solution and Compost on Growth and Quality of Tomato Grown by Fertigation (폐양액 관비량과 퇴비 시용량이 토마토의 생육과 품질에 미치는 영향)

  • Zhang, Cheng-Hao;Kang, Ho-Min;Kim, Il-Seop
    • Journal of Bio-Environment Control
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    • v.18 no.2
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    • pp.119-123
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    • 2009
  • Waste nutrient solution (WNS) that composed of nutrient solution of horticultural research institute in Japan and used for culture tomato in perlite hydroponics showed $1.9{\sim}2.4$ dS/m of EC and $5.5{\sim}7.1$ of pH. Although $NH_{4}^+$-N concentration of WNS decreased remarkably, the others did not change significantly as compared with supplied solution. The growth characteristics such as plant height, stem diameter, leaf length, and leaf width were increased as amount of compost was increased in 1 L WNS supply treatment. But there was not any regular tendency on growth characteristics in 2 L/plant WNS supply treatment. The chlorophyll content of tomato leaf was highest in I L/plant WNS supply and 4,000 kg/10a compost treatment. The fresh and dry weight, and yield of tomato fruit also increased with increase of amount of WNS and compost, and they were highest in 1 L WNS supply and 4,000 kg/10a compost treatment. The sugar content of tomato fruits was not influenced by amount of WNS and compost, fructose and glucose and total sugar was highest in 2 L/plant WNS supply and 2,000 kg/10a compost treatment. Therefore fertigation culture used WNS is environmentally friendly and can guarantee yield and quality of tomato fruits and growth of tomato plants.

Morphological standardization research of head and face on the 50's and 60's in Korean according to Sasang Constitution (한국인(韓國人) 남(男).여(女) 50-60대(代)의 사상체질별(四象體質別) 안면형태(顔面形態)에 관(關)한 표준화(標準化) 연구(硏究))

  • Lee, Su-Kyung;Lee, Eui-Ju;Koh, Byung-Hee;Song, Il-Byung;Yun, Jong-Hyun
    • Journal of Sasang Constitutional Medicine
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    • v.12 no.2
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    • pp.123-131
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    • 2000
  • 1. Background and Purpose The faces of human being change as they grow older. Therefore, we must consider the changes of the face when we diagnosed the Sasang Constitution of men through the analysis of facial appearance. As a study of all the standardization researches about the morphology of face, I carried out this study about the 50's and 60's of Korean men and women according to Sasang Constitution. 2. Objectives The object of this study is selected from the patients who were already diagnosed Sasang Constitutions at the department of Sasang Constitutional Medicine in Kyunghee Oriental Medical Center. The number of the patients were 74 men and 73 women in 50's and 60's. The number of general age group were 182 men and 180 who were also diagnosed Sasang Constitutions at the department of Sasang Constitutional Medicine at the same period. 3. Method I took the photographs of front view and lateral view of the objectives by digital camera and obtained the 200 measure through the facial measurement program. I compared the measure of 50's and 60's by three constitutional groups and I also compared the measure between 50's to 60's and all ages by three constitutional groups. 4. Results In men group, the measures which made differences by each constitutional groups were 17, and they were 6 in 50's and 60's. In women group, the measures which made differences by each constitutional groups were 52, and they were 33 in 50's and 60's 5. Conclusion (1) In the men group of 50's and 60's, Taeumin showed wide bigonial breadth, Soyangin showed long brow and Soumin showed big eyes. (2) In the women group of 50's and 60's, Taeumin showed the longest level of facial length, width and metopion head length, Soyangin showed metopion head length was long and the nose was also long, Soumin showed the ratio of brow in the face didn't make any difference with other constitutions and the metopion head length was short. (3) The measures which made differences were more in the all ages than in the 50's and 60's. It means that the differences decrease as they grow older, especially in 50's and 60's.

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A Study of Be Levels in p-GaSb:Be/GaAs Epitaxial Layers (p-GaSb:Be/GaAs 에피층의 Be 준위에 관한 연구)

  • Noh, S.K.;Kim, J.O.;Lee, S.J.
    • Journal of the Korean Vacuum Society
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    • v.20 no.2
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    • pp.135-140
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    • 2011
  • By investigating photoluminescence (PL) spectra (20 K) of undoped and Be-doped p-type GaSb/GaAs epilayers, the origin has been analyzed by the change due to doping density. We have observed that the PL peak shifts to higher energy and the full-width half-maximum (FWHM) decreases with increasing the doping density below ${\sim}10^{17}cm^{-3}$, contrasted to shift to low energy and increasing FWHM above the density of ${\sim}10^{17}cm^{-3}$. From the variation of the integrated PL intensities of three peaks dissolved by Gaussian fit, it has been analyzed that, as the density increases, the $Be[Be_{Ga}]$ acceptor level (0.794 eV) reduces, whereas the intrinsic defect of $A[Ga_{Sb}]$ (0.778 eV) enhances together with a new $Be^*$ level (0.787 eV) locating between A and Be. We have discussed that it is due to coexistence of the Be acceptor level (${\Delta}E=16meV$) and the complex level (${\Delta}E=23meV$), $Be^*[Ga_{Sb}-Be_{Ga}]$combined by Be and A, in Be-doped p-GaSb, and that the level density of $Be[Be_{Ga}]$ may be reduced above ${\sim}10^{17}cm^{-3}$.

MISCLASSIFIED TYPE 1 AGNS IN THE LOCAL UNIVERSE

  • Woo, Jong-Hak;Kim, Ji-Gang;Park, Daeseong;Bae, Hyun-Jin;Kim, Jae-Hyuk;Lee, Seung-Eon;Kim, Sang Chul;Kwon, Hong-Jin
    • Journal of The Korean Astronomical Society
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    • v.47 no.5
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    • pp.167-178
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    • 2014
  • We search for misclassified type 1 AGNs among type 2 AGNs identified with emission line flux ratios, and investigate the properties of the sample. Using 4 113 local type 2 AGNs at 0.02 < z < 0.05 selected from Sloan Digital Sky Survey Data Release 7, we detected a broad component of the $H{\alpha}$ line with a Full-Width at Half-Maximum (FWHM) ranging from 1 700 to $19090km\;s^{-1}$ for 142 objects, based on the spectral decomposition and visual inspection. The fraction of the misclassified type 1 AGNs among type 2 AGN sample is ~3.5%, implying that a large number of missing type 1 AGN population may exist. The misclassified type 1 AGNs have relatively low luminosity with a mean broad $H{\alpha}$ luminosity, log $L_{H\alpha}=40.50{\pm}0.35\;erg\;s^{-1}$, while black hole mass of the sample is comparable to that of the local black hole population, with a mean black hole mass, log $M_{BH}=6.94{\pm}0.51\;M_{\odot}$. The mean Eddington ratio of the sample is log $L_{bol}/L_{Edd}=-2.00{\pm}0.40$, indicating that black hole activity is relatively weak, hence, AGN continuum is too weak to change the host galaxy color. We find that the O III lines show significant velocity offsets, presumably due to outflows in the narrow-line region, while the velocity offset of the narrow component of the $H{\alpha}$ line is not prominent, consistent with the ionized gas kinematics of general type 1 AGN population.

Effects of Deep Tillage before Planting on Physicochemical Properties of Soil, Growth and Fruit Characteristics in Cultivation of Watermelon under Plastic Film House (수박 시설 재배에서 정식 전 심경로타리 처리가 토양 이화학성, 생육 및 과실 특성에 미쳐는 영향)

  • Eun, Jong-Seon;Han, Suk-Kyo;Kang, Nam-Hee;Kim, Ho-Cheol;Bae, Jong-Hyang
    • Journal of Bio-Environment Control
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    • v.19 no.3
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    • pp.130-134
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    • 2010
  • To investigate effects of deep tillage before planting on physicochemical properties of soil, growth and fruit characteristics in cultivation of watermelon (Citrullus vulgaris L. cv. 'Uriggul') under plastic film house, this study was conducted in cultivating field of Gochang Junbuk. pH in soil after harvest compared with soil before planting of watermelon had almost no change, but EC lowed greatly in the two treatments. Available phosphate concentration in the soil with the deep tillage treatment was lower, K concentration of exchangeable cation decreased greatly than these with conventional tillage treatment. In the growth at 27th day after planting plant, stem length to 10th node from the first node, leaf width with deep tillage treatment were longer, bearing node of the first and second flower and wilting degree were lower than these with conventional tillage treatment. In the growth of harvesting time, the stem length to 30th node from the first node with the deep tillage treatment were longer, leaf discoloration degree was lower than these with conventional tillage treatment. Also, the harvested fruits length, diameter, peel hardness, and weight were significantly better than these with conventional tillage treatment.

Effects of Planting Densities and Maturing Types on Growth and Yield of Soybean in Paddy Field

  • Cho, Jin-Woong;Lee, Jung-Joon;Oh, Young-Jin;Lee, Jae-Dong;Lee, Sang-Bok
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.49 no.2
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    • pp.105-109
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    • 2004
  • Field studies were conducted in the southeastern Korea ($36^{\circ}$N) on a commerce silt loam soil at paddy field. Seed were manually planted on 16 July 2003. Plants were planted with plant densities of 70${\times}$10 cm (row width x plant spacing), 50 x 10 cm, and 30 ${\times}$10 cm. Two seedlings per hill were taken prior to V3 stage. Fertilizer was applied prior to plant at a rate of 30-30-34 kg (N-$\textrm{P}_2\textrm{O}_5$-$\textrm{K}_2\textrm{O}$) per ha. Experimental design was a randomized complete block in a split plot arrangement with three replications. Yield from different planting densities responded similarly in three soybean cultivars and increased when planting density increased. Somyeongkong showed the highest increasing rate of yield about 26% by 338 g $\textrm{m}^{-2}$ at 30 x l0 cm compared to yield of conventional planting density (70 x 10 cm). Also, the planting density significantly affected pod and seed number and seed weight, but not seed per pod. The tallest plant appeared at 30${\times}$10 cm. The change of leaf area according to days after emergence showed differently in soybean cultivars. The highest and lowest total dry matter production per square meter appeared at 30 x 10 cm and at 70 x 10 cm, respectively. Crop growth rate (CGR) showed greater at R3∼R4 stages compared with V7∼R2 or R2∼R3 growth stages and showed the greatest at 30 x 10 cm in three soybean cultivars. As late planted soybean, there was a significant relation between seed yield and CGR, and leaf area index (LAI) according to planting densities at before and after the flowering stage. Relationship between seed yield and CGR in three planting densities showed a highly significant positive relation ($\textrm{R}^2$=0.757) at R3 to R4 stages, and significant relations ($\textrm{R}^2$=0.505, 0.617) at V7 to R2 and V2 to V3. Also, there was a highly significant positive difference between seed yield and LAI during R3 to R4 and R2 to R3 stages.

EFFECTS OF ANTICURVATURE FILING ON DANGER ZONE WIDTH IN CURVED ROOT CANALS (만곡된 근관 성형시 스테인레스 강 파일과 니켈 티타늄 파일의 anticurvature filing 영향)

  • Kim, Eui-Seong;Kim, Hyun-Jung;Seo, Deog-Gyu;Roh, Byoung-Duck
    • Restorative Dentistry and Endodontics
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    • v.34 no.3
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    • pp.232-239
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    • 2009
  • The aim of this study was to compare the effects of anti curvature filing with stainless steel k-file versus nickel-titanium ProFile in the shaping of mesial root canals of extracted mandibular molars. A total of 60 canals from 30 mesial roots of mandibular molar teeth were randomly assigned to three groups with n=20 each. They were prepared with different instruments and methods: The first group with stainless steel k-file and circumferential filing. the second with precurved stainless steel k-file and anticurvature filing and the third with ProFile C06 taper) and anticurvature filing. Using a micro-computed tomography system (skyscan-1076, SKYSCAN, Antwerpen, Belgium), pre-and post-operative specimens were scanned. Subsequently, canal images were superimposed and changes in root dentin thickness were measured at distal side (danger zone) of the canal. The data was analyzed using a one-way ANOVA and the comparison of means was conducted using a post hoc multiple comparison Tukey test. There were significant differences in the change of root dentin thickness at the $7.5{\sim}8.5\;mm$ level between group 1 and 2, $3.5{\sim}6mm$ level between group 1 and 3 and $3.5{\sim}6mm$ level between group 2 and 3(n=20, P<0.05).

THE REMINERALIZING FEATURES OF PH 5.5 SOLUTIONS OF DIFFERENT DECREE OF SATURATIONS ON ARTIFICIALLY DEMINERALIZED ENAMEL (pH 5.5에서 재광화 용액의 포화도 변화가 인공 탈회된 법랑질의 재광화에 미치는 영향)

  • Kwak, Young-Jun;Kim, Eui-Seoug;Park, Sung-Ho;Gong, Hyung-Kyu;Lee, Yoon;Lee, Chan-Young
    • Restorative Dentistry and Endodontics
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    • v.33 no.5
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    • pp.481-492
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    • 2008
  • The purpose of this study is to observe and compare the remineralization tendencies of artificially demineralized enamel by remineralization solutions of different degree of saturations at pH 5.5, using a polarizing microscope and computer programs (Photoshop, Image pro plus, Scion Image, Excel). For this study, 36 sound permanent teeth with no signs of demineralization, cracks, or dental restorations were used. The specimens were immersed in lactic acid demineralization solution for 3 days in order to produce dental caries artificially that consist of surface and subsurface lesions. Each of 9 or 10 specimens was immersed in pH 5.5 lactic acid buffered remineralization solution of three different degrees of saturation (0.25, 0.30, 0.35) for 12 days. After the demineralization and remineralization, images were taken by a polarizing microscope $({\times}100)$. The results were obtained by observing images of the specimens, and using computer programs, the density of caries lesions were determined. In conclusion, in the group with the lowest degree of saturation, remineralization occurred thoroughly from the surface to the subsurface lesion, whereas in the groups with greater degree of saturation showed no significant change in the subsurface lesion, although there was corresponding increase in the remineralization width on the surface zones.

Water-Level Fluctuation due to Groundwater-Surface Water Interaction in Coastal Aquifers (해안대수층에서 지하수-지표수 상호작용에 의한 지하수위 변화)

  • Kim Kue-Young;Lee Cheol-Woo;Kim Yongje;Kim Taehee;Woo Nam-Chil
    • Journal of Soil and Groundwater Environment
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    • v.9 no.4
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    • pp.32-41
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    • 2004
  • Analysis of water-level fluctuation due to goundwater-surface water interaction in coastal aquifers is carried out by numerical modeling. The conceptual model used in this study has a stream boundary and a tidal boundary that forms a right angle and the stream partially penetrates the aquifer. We analyzed the effect of each boundary and the simultaneous effect of the two boundary conditions. The area of influence caused by the stream boundary increased during the simulation, while the influence zone of the coastal boundary was relatively constant. The groundwater level near the zone where two boundaries meet may rise by the action of combined effect of the two boundaries or may not change by cancelling the effect of each boundary. Thereafter, care must be taken when hydraulic parameters are estimated using sinusoidal oscillations of hydraulic head in coastal aquifers. Sensitivity analysis is employed to develop insight into the controls on groundwater level fluctuations. In this study our analyses focused on the effect of conductance and the stream width to the aquifer nearby.