• Title/Summary/Keyword: Wet chemical process

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Novel Low-Temperature Deposition of the $SiO_2$ Thin Film using the LPCVD Method and Evaluation of Its Reliability in the DRAM Capacitors (LPCVD 방법에 의한 저온 $SiO_2$ 박막의 증착방법과 DRAM 커패시터에서의 그 신뢰성 연구)

  • Ahn Seong-Joon;Park Chul-Geun;Ahn Seung-Joon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.3
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    • pp.344-349
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    • 2006
  • The low-temperature processing is very important for fabrication of the very large scale ($60{\sim}70nm$) semiconductor devices since the submicron transistors are sensitive to the thermal budget. Hence, in this work, we propose a noble low-temperature LPCVD (Low-Pressure Chemical Vapor Deposition) process for the $SiO_2$ film and evaluate the electrical reliability of the LTO (Low-Temperature Oxide) by making the capacitors with ONO (Oxide/Nitride/Oxide) structure. The leak current of the LTO was similar to that of the high-temperature wet oxide until the electric field was lower than 5 MV/cm. However, when the electric field was higher, the LTO showed much better characteristics.

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Study on the Manufacturing of Leather-like Material using Leather and Textile Scrap (피혁 및 섬유 제조공정 폐기물을 활용한 피혁 대체 소재의 제조에 관한 연구)

  • Kim, Won-Ju;Ko, Jae-Yong;Heo, Jong-Soom
    • Journal of the Korea Organic Resources Recycling Association
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    • v.8 no.4
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    • pp.93-99
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    • 2000
  • Treatment of shaving scrap, a chrome containing solid scrap generated by leather manufacturing process, has been so far depended on mainly incineration, soil landfill and ocean dumping, which give bad impact on environment and cause pollution. Shaving scrap generates from the mechanical work for controlling the final thickness of leather and its main components are collagen protein and pan of chromium compound. For the purpose of reusing this leather waste as resources, researches in connection with collagen fiber recovery, gelable protein recovery and liquid fertilizer is being speedily progressed. In the experiment, shaving scrap went through wet pulverizing treatment by physical and chemical methods. Then, making the leather sheet evenly, it is mixed with natural latex and every kind of binding materials in the container, and the mixtures were passed through experimental hydraulic press machine and applied to Fourdrinier machine respectively. Lastly, a test for fading out physical strength and properties of multiple-purpose of leather-like material was performed on a continuous leather sheet prepared by the experiment. In result, the physical strength and properties of leather-like material showed noticeable differences according to mixing ratio of binding materials, beating methods and the Ends of binding materials selected, and generally tear strength was the weakest property among others. Also, by the pilot scale experiment in sequence, it was possible to manufacture recycled goods made of soft and hard types of leather-like material with various performances.

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Phase equilibria between coexisting minerals in the talc ores and process of talc formation in the Daeheung Talc Deposits, Korea (대흥활석광상에 있어서 공존하는 광물의 상평형과 활석화 과정)

  • 이상헌
    • The Journal of the Petrological Society of Korea
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    • v.3 no.2
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    • pp.156-170
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    • 1994
  • The talc ore deposits can be divided into chloritic and dolomitic ores according to mineral assemblages. The former is mainly composed of chlorite and talc accompanied with dolomite, muscovite and opaque mineral, and the latter of dolomite and talc with serpentine, calcite and magnesite in places. Talc was originated from chlorite and serpentine. Carbonate minerals were formed either directly from the introduced hydrothermal solution or secondarily as a by-product of steatitization of chlorite and serpentine. The process of talc formation may be governed by the chemical composition of the host rocks and the amount and/or chemical composition of the hydrothermal solution which may be different in places. However, the representative reactions producing talc from chlorite and serpentine are as follows : (1) chlorite+$Mg^{++}+Si^{4+}+H_2O$=talc, (2) chlorite+$Mg^{++}+Si^{4+}+Ca^{++}+CO_2+O_2+H_2O$=talc+ dolomite+ magnesite, and (3) serpentine +$Mg^{++}+Fe^{++}+Si^{4+}+Ca^{++}+CO_2+H_2O$=talc+dolomite. The reactions indicate that the carbonate minerals can be formed when the hydrothermal solution have high $fO_2$ and $fCO_2$. The steatitization might be proceeded by the hydrothermally metasomatic reaction between chlorite schist or chlorite gneiss intercalated in the granitic gneiss and hydrothermal solution accompanied to the wet granitization.

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Glass strengthening and coloring using PIIID technology

  • Han, Seung-Hee;An, Se-Hoon;Lee, Geun-Hyuk;Jang, Seong-Woo;Whang, Se-Hoon;Yoon, Jung-Hyeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.178-178
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    • 2016
  • Every display is equipped with a cover glass to protect the underneath displaying devices from mechanical and environmental impact during its use. The strengthened glass such as Gorilla glass.$^{TM}$ has been exclusively adopted as a cover glass in many displays. Conventionally, the strengthened glass has been manufactured via ion-exchange process in wet salt bath at high temperature of around $500^{\circ}C$ for hours of treatment time. During ion-exchange process, Na ions with smaller diameter are substituted with larger-diameter K ions, resulting in high compressive stress in near-surface region and making the treated glass very resistant to scratch or impact during its use. In this study, PIIID (plasma immersion ion implantation and deposition) technique was used to implant metal ions into the glass surface for strengthening. In addition, due to the plasmonic effect of the implanted metal ions, the metal-ion implanted glass samples got colored. To implant metal ions, plasma immersion ion implantation technique combined with HiPIMS method was adopted. The HiPIMS pulse voltage of up to 1.4 kV was applied to the 3" magnetron sputtering targets (Cu, Ag, Au, Al). At the same time, the sample stage with glass samples was synchronously pulse-biased via -50 kV high voltage pulse modulator. The frequency and pulse width of 100 Hz and 15 usec, respectively, were used during metal ion implantation. In addition, nitrogen ions were implanted to study the strengthening effect of gas ion implantation. The mechanical and optical properties of implanted glass samples were investigated using micro-hardness tester and UV-Vis spectrometer. The implanted ion distribution and the chemical states along depth was studied with XPS (X-ray photo-electron spectroscopy). A cross-sectional TEM study was also conducted to investigate the nature of implanted metal ions. The ion-implanted glass samples showed increased hardness of ~1.5 times at short implantation times. However, with increasing the implantation time, the surface hardness was decreased due to the accumulation of implantation damage.

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Removal of Tar from Biomass Gasification Process (Biomass Gasification 공정에서 발생하는 Tar 제거연구)

  • Kim, Ju-Hoe;Jo, Young-Min;Kim, Jong-Su;Kim, Sang-Bum
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.8
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    • pp.552-561
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    • 2018
  • Biomass, a carbon-neutral resource, is an alternative energy source for exhaustion of fossil fuel and environmental problems. Most of energy production systems using biomass operate with a thermal chemical conversion method. Amongst them, gasification generates syngas and applies to boilers or engines for the production of heat and electricity. However, Tar could be formed during the production of syngas and it is condensed at low temperature which may cause to clog the pipelines and combustion chamber, ultimately resulting in decrease of process efficiency. Thus this work utilized water and oily materials such as soybean oil, waste cooking oil and mineral oil for scrubbing liquid. The removal efficiency of Tar appeared 97%, 70%, 63% and 30% for soybean oil, waste cooking oil, mineral oil and water respectively.

Transport and Distribution of Calcium Salt in Tofu Manufacturing Process -Part I. Conductometric Measurement of Calcium Salt in Tofu and Drained Solution- (두부제조공정(製造工程)중 Calcium 염(鹽)의 행동(行動)과 분포(分布) -제1보(第一報). 전기전도도법(電氣傳導度法)에 의한 두부 및 순물의 Calcium 농도 측정방법(測定方法)-)

  • Yim, Sang-Bin;Lee, Choon-Ki;Chun, Jae-Kum
    • Applied Biological Chemistry
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    • v.28 no.1
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    • pp.8-12
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    • 1985
  • For measuring calcium content during the manufacturing process of Tofu, conductometric electrodes were made with the copper plate, and the results were compared with chemical analysis methods. Three types of plate material (I, II, III) for electrode were tested to apply for measuring $CaCl_2$ content in solution, drained solution from Tofu and in agar-agar gel ana Tofu. Empirical linear correlation equations between conductivity (Y, mho) and calcium content (C, Mole $\bar{C}$, mg% wet basis) were obtained for the quick estimation of calcium content during Tofu processings. Equations with plate II type electrode were Y=0.6364C+0.0775 for drained solution with r=0.99, and $Y=7.1503{\times}10^{-5}\bar{C}-2.9895{\times}10^{-3}$ for Tofu with r=0.91,respectively.

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Dispersion and Shape Control on Nanoparticles of Gd2O3:Eu3+ Red Phosphor Prepared by Template Method (주형법으로 제조된 Gd2O3:Eu3+ 적색 형광체의 나노입자 분산 및 형상제어)

  • Park, Jeong Min;Ban, Se Min;Jung, Kyeong-Youl;Choi, Byung-Ki;Kang, Kwang-Jung;Kim, Dae-Sung
    • Korean Journal of Materials Research
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    • v.27 no.10
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    • pp.534-543
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    • 2017
  • $Gd_2O_3:Eu^{3+}$ red phosphors were prepared by template method from crystalline cellulose impregnated by metal salt. The crystallite size and photoluminescence(PL) property of $Gd_2O_3:Eu^{3+}$ red phosphors were controlled by varying the calcination temperature and $Eu^{3+}$ mol ratio. The nano dispersion of $Gd_2O_3:Eu^{3+}$ was also conducted with a bead mill wet process. Dependent on the time of bead milling, $Gd_2O_3:Eu^{3+}$ nanosol of around 100 nm (median particle size : $D_{50}$) was produced. As the bead milling process proceeded, the luminescent efficiency decreased due to the low crystallinity of the $Gd_2O_3:Eu^{3+}$ nanoparticles. In spite of the low PL property of $Gd_2O_3:Eu^{3+}$ nanosol, it was observed that the photoluminescent property was recovered after re-calcination. In addition, in the dispersed nanosol treated at $85^{\circ}C$, a self assembly phenomenon between particles appeared, and the particles changed from spherical to rod-shaped. These results indicate that particle growth occurs due to mutual assembly of $Gd(OH)_3$ particles, which is the hydration of $Gd_2O_3$ particles, in aqueous solvent at $85^{\circ}C$.

Synthesis of Spindle Shape α-FeOOH Nanoparticle from Ferrous(II) Sulfate Salt (황산 제1철을 이용한 방추형 괴타이트 나노 입자의 합성)

  • Han, Yang-Su;You, Hee-Joun;Moon, Ji-Woong;Oh, You-Keun
    • Journal of the Korean Ceramic Society
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    • v.42 no.11 s.282
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    • pp.722-728
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    • 2005
  • A wet-chemical route was utilized to obtain nanosized crystalline goethite ($\alpha$-FeOOH) particle, which was known as an oxidation catalyst in reducing carbon monoxide (CO) and dioxine during incineration. A cost-effective $FeSO_4{\cdot}7H_2O$ was used as starting raw material and a successive process of hydrolysis-oxidation was utilized as synthetic method. The effects of the initial $Fe^{2+}$ concentration, hydrolysis time and oxidation period on the crystalline phase and particle characteristics were systematically investigated by X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and BET analyses. It was found that the spindle-shaped crystalline $\alpha$-FeOOH particle with the width of 70 nm and the length of 200 nm could be obtained successfully when the initial concentration of 1.5 M, hydrolysis time of 4h, and oxidation period of 10 h, respectively. In addition, it was observed that the spindle-shaped $\alpha$-FeOOH particle consisted of nano-sized primary crystallites of $30\~50\;nm$, which were de-agglomerated into individual particle and successively re­agglomerated into spherical or irregular-shaped agglomerates beyond certain periods in the hydrolysis and oxidation process.

Efficient Enantioselective Synthesis of (R)-[3,5-Bis(trifluoromethyl)phenyl] Ethanol by Leifsonia xyli CCTCC M 2010241 Using Isopropanol as Co- Substrate

  • Ouyang, Qi;Wang, Pu;Huang, Jin;Cai, Jinbo;He, Junyao
    • Journal of Microbiology and Biotechnology
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    • v.23 no.3
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    • pp.343-350
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    • 2013
  • (R)-[3,5-Bis(trifluoromethyl)phenyl] ethanol is a key chiral intermediate for the synthesis of aprepitant. In this paper, an efficient synthetic process for (R)-[3,5- bis(trifluoromethyl)phenyl] ethanol was developed via the asymmetric reduction of 3,5-bis(trifluoromethyl) acetophenone, catalyzed by Leifsonia xyli CCTCC M 2010241 cells using isopropanol as the co-substrate for cofactor recycling. Firstly, the substrate and product solubility and cell membrane permeability of biocatalysts were evaluated with different co-substrate additions into the reaction system, in which isopropanol manifested as the best hydrogen donor of coupled NADH regeneration during the bioreduction of 3,5-bis(trifluoromethyl) acetophenone. Subsequently, the optimization of parameters for the bioreduction were undertaken to improve the effectiveness of the process. The determined efficient reaction system contained 200mM of 3,5-bis(trifluoromethyl) acetophenone, 20% (v/v) of isopropanol, and 300 g/l of wet cells. The bioreduction was executed at $30^{\circ}C$ and 200 rpm for 30 h, and 91.8% of product yield with 99.9% of enantiometric excess (e.e.) was obtained. The established bioreduction reaction system could tolerate higher substrate concentrations of 3,5- bis(trifluoromethyl) acetophenone, and afforded a satisfactory yield and excellent product e.e. for the desired (R)-chiral alcohol, thus providing an alternative to the chemical synthesis of (R)-[3,5-bis(trifluoromethyl)phenyl] ethanol.

Pretreatment Condition of Cu by Ammonium-Based Mixed Solvent and Its Effects on the Fabrication of Ag-Coated Cu Particles (Ag 도금 Cu 입자의 제조에서 암모늄 기반 혼합 용매를 사용한 Cu 입자의 전처리 조건과 이의 영향)

  • Lee, Hee Bum;Lee, Jong-Hyun
    • Korean Journal of Materials Research
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    • v.26 no.3
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    • pp.109-116
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    • 2016
  • To achieve the fabrication of high-quality Ag-coated Cu particles through a wet chemical process, we reported herein pretreatment conditions using an ammonium-based mixed solvent for the removal of a $Cu_2O$ layer on Cu particles that were oxidized in air for 1 hr at $200^{\circ}C$ or for 3 days at room temperature. Furthermore, we discussed the results of post-Ag plating with respect to removal level of the oxide layer. X-ray diffraction results revealed that the removal rate of the oxide layer is directly proportional to the concentration of the pretreatment solvent. With the results of Auger electron spectroscopy using oxidized Cu plates, the concentrations required to completely remove 50-nm-thick and 2-nm-thick oxides within 5 min were determined to be X2.5 and X0.13. However, the optimal concentrations in an actual Ag plating process using Cu powder increased to X0.4 and X0.5, respectively, because the oxidation in powder may be accelerated and the complete removal of oxide should be tuned to the thickest oxide layer among all the particles. Back-scattered electron images showed the formation of pure fine Ag particles instead of a uniform and smooth Ag coating in the Ag plating performed after incomplete removal of the oxide layer, indicating that the remaining oxide layer obstructs heterogeneous nucleation and plating by reduced Ag atoms.