• 한국재료학회지
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• 제6권2호
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• pp.158-165
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• 1996

열증착기(thermal evaporator)로 증착시킨 Cu를 상온에서 3.5M CuCl2+0.5M HCI+0.5MKCI 용액을 사용하여 습식각하고 2일간 대기중 노출시킨 후 X-선 광전자 분광기를 이용하여 표면의 결합상태를 관찰하였다. 그 결과 습식식각된 Cu 표면에서는 C, O, Ci 및 Cu가 존재함을 알 수 있었다. 표면원소에 대한 오제이 전자 스펙트라(Auger electron spectra)와 광전자 스펙트라(photoelectron spectra)의 정량적인 비교를 통하여 표면의 모든 결합상태를 확인할 수 있었고 그 상대적인 양까지도 얻어낼 수 있었다. 식각된 Cu의 표면에는 Cu-Cu, 2Cu-O, Cu-Ci, Cu-2(OH), 및 Cu-2Cl의 결합상태가 존재함을 알 수 있었고, CuLMMAuger line spectrum의 관찰을 통하여 계산된 각 결합의 정량적인 비교를 검증할 수 있었다. 따라서 chemical shift가 거의 관찰되지 않아 결합상태 분리가 불가능한 식각된 구리표면의 정량적 결합상태는 각 결합상태의 상대적 비교를 통하여 얻어질 수 있음을 알 수 있었다.

• 대한기계학회논문집B
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• 제30권12호
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• pp.1196-1202
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• 2006

A MEMS methanol reformer was fabricated and its performance was evaluated in the present study. Catalytic steam reforming of methanol was selected because the process had been widely applied in macro scale reformers. Conventional Cu/ZnO catalyst that was prepared by co-precipitation method to give the highest coating quality was used. The reactor structure was made by bonding three layers of glass wafers. The internal structure of the wafer was fabricated by the wet-etching process that resulted in a high aspect ratio. The internal surface of the reactor was coated by catalyst and individual wafers were fusion-bonded to form the reactor structure. The internal volume of the microfabricated reactor was $0.3cm^3$ and the reactor produced exhaust gas with hydrogen concentration at 73%. The production rate of hydrogen was 4.16 ml/hr that could generate power of 350 mW in a typical PEM fuel cell.

• 한국전기전자재료학회논문지
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• 제16권12호
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• pp.1097-1102
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• 2003

In this paper, we used only PR as etching mask, while it used usually Cr/AU as etching mask, and in order to fabricate a photosensor has the increased sensitivity, we investigated on the sensitivity of general type and p-i-n type diode. we designed microchannel size width max 10um, min 5um depth max 10um, reservoir size max 100um, min 2mm. Fabrication of microfluidic devices in glass substrate by glass wet etching methods and glass to glass fusion bonding. The p-i-n diode has higher sensitivity than photodiode, Considering these results, we fabricated p-i-n diodes on the high resistive(4㏀$.$cm) wafer into rectangle and finger pattern and compared internal resistance of each pattern. The internal resistance of pin diode can be decreased by the application of finger pattern has parallel resistance structure from 571Ω to 393Ω.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.743-746
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• 2000

The removal of contaminants of silicon wafers has been investigated by various methods. Laser cleaning is the new dry cleaning technique to replace wafer wet cleaning in the near future. A dry laser cleaning uses inert gas jet to remove contaminant particles lifted off by the action of a KrF excimer laser. A laser cleaning model is developed to simulate the cleaning process and analyze the influence of contaminant particles and experimental parameters on laser cleaning efficiency. The model demonstrates that various types of submicrometer-sized particles from the front sides of silicon wafer can be efficiently removed by laser cleaning. The laser cleaning is explained by a particle adhesion model. including van der Waals forces and hydrogen bonding, and a particle removal model involving rapid thermal expansion of the substrate due to the thermoelastic effect. In addition, the experiment of wafer laser cleaning using KrF excimer laser was conducted to remove various contaminant particles.

• Journal of the Korean Wood Science and Technology
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• 제24권2호
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• pp.42-45
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• 1996

A residue from the newsprint waste was investigated as a filler in adhesive for bonding southern pine plywood. The residue was prepared by drying the wet residue to 8% moisture content and grinding the dry material using a laboratory Wiley mitt with a 75-${\mu}m$(200-mesh) screen. The residue was compared to a commercial filler commonly used in structural plywood adhesives. A total of 48 three-ply panels. 12.7mm nominal thickness and 0.3 by 0.3 m in size, were fabricated at two press times(4 and 5 min) and three assembly times(20, 40 and 60 min). Evaluations of the residue were carried out by performance tension shear tests after two 4-hour boil accelerated aging tests on plywood. The test results included tension shear strength and estimated wood failure values. All plywood made with the residue filler were comparable to the control-bonded plywood. These results indicate that residue from the newsprint waste streams would be suitable as filler for plywood adhesives.

• KSBB Journal
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• 제20권3호
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• pp.133-141
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• 2005

This review presents the preparation, transport mechanism and application of molecularly imprinted membranes (MIM). Molecular imprinting has now been established as a technique which allows the creation of tailor-made binding sites for many classes of compounds. MIM have some advantages; a high capacity due to a large surface area, faster transport of substrate molecules and faster equilibrium of binding cavities compared to molecularly imprinted particles. MIM were prepared by covalent and non-covalent chemical bonding systems, by interactions between functional monomer and template. MIM can be prepared by in-situ polymerization, wet phase inversion, dry phase inversion, and surface imprinting method. MIM can continuously separate mixtures based on facilitated or retarded diffusion of the template. MIM can change their permeability in the presence of templates. MIM have a potential to be used to separate chiral compounds and materials with similar structures. However the application of MIM by the chemical industries is still in its infancy stages.

• KSBB Journal
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• 제16권2호
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• pp.115-122
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• 2001

Molecular imprinting has now been established as a technique which allows the creation of tailor-made binding sites for many classes of compounds. MIPs were prepared by covalent and non-covalent chemical bonding systems, by interactions between functional monomer and template. The shape of MIP is divided to particle and membrane. MIP membranes can be prepared by surface imprinting, in-situ polymerization, wet phase inversion and the dry phase inversion method. MIPs have been mainly used for analytical separation and biosensor systems to separate and detect chiral compounds and materials with similar structures. However the application of MIP by the chemical industries is still in its infancy stages. This review summarizes the preparative characteristics and applications of MIP with respect to chiral separations and biosensors.

• 대한치과의사협회지
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• 제49권2호
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• pp.85-94
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• 2011

In the filed of Dentistry, minimally invasive treatment modalities are new trend for conservation of natural teeth. Of them, laminate veneer and resin bonded fixed partial denture belong to restoration procedures. In this review, survival rates of each modalities and cause of unserviceability are analyzed, and criteria for success are presented. To get successful results of minimally invasive restoration, plenty of enamel layer, thin and strong materials, and high bonding strength are essential under cyclically loaded wet oral condition. Newly tried design of minimally invasive technique nowadays have to be evaluated only on the basis of requirement for long-term success.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1526-1527
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• 2007

This paper presents the design, fabrication and experimental results of an electromagnetic microvalve for drug delivery systems. The microvalve consists of two silicon substrates with a silicone rubber diaphragm and a flow channel, a PDMS layer, and an electromagnetic actuator. Each substrate is fabricated by using the silicon wet etch, SU-8 mold process and $O_2$ plasma bonding.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.