• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.62-67
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• 2016

This paper presents a silicon nanostructure array embedded in a polymer film. The silicon nanostructure array was fabricated by using basic microelectromechanical systems (MEMS) processes such as photolithography, reactive ion etching, and anisotropic KOH wet etching. The fabricated silicon nanostructure array was transferred into polymer substrates such as polymethyl methacrylate (PMMA), polyethylene terephthalate (PET), and polycarbonate (PC) through the hot-embossing process. In order to determine the transfer conditions under which the silicon nanostructures do not fracture, hot-embossing experiments were performed at various temperatures, pressures, and pressing times. Transfer was successfully achieved with a pressure of 1 MPa and a temperature higher than the transition temperature for the three types of polymer substrates. The transferred silicon nanostructure array was electrically evaluated through measurements with a semiconductor parameter analyzer (SPA).

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.6
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• pp.533-538
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• 2014

We fabricated grooved mushroom structures with anisotropic wettability on silicon substrates using basic MEMS processes. The geometry of these grooved mushroom structures could be changed by controlling the additional IPA solution during Si etching by TMAH solution. To understand anisotropic wettability, contact angles (CAs) of hexadecane droplets were measured in the orthogonal and parallel directions to grooved lines. The CA measurement results displayed anisotropic wetting on the grooved mushroom structures. However, specimens with $80{\mu}m$ distance between top layers displayed isotropic and superoleophobic wetting. This study demonstrates that the thickness of the top layer is more critical than the width or height of the ridge when determining the wettability of organic solvent. Despite the wide distance between top layers ($80{\mu}m$), the specimen with a thin top layer (100 nm) showed highly anisotropic wetting and low CA due to the pinning of droplets at the edge of the top layer.

• Clean Technology
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• v.13 no.2
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• pp.109-114
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• 2007

In this study, we performed basic researches to develop wet purification system for improving air qualities of ventilation in semiconductor manufacturing process. Using 0.5 M aqueous solution of $KMnO_4$, 50 ppm of $NH_3$, SOx and NOx were reduced to 99% successfully. However, the removal of $O_3$ was limited to $22{\sim}30%$ for all the tested chemical solutionsincluding $KMnO_4$. Therefore, adoption of a dry ozone filter is necessary to reduce $O_3$ below a satisfactory level. For all the chemical solutions tested, NOx removal efficiency increased as NOx was mixed with $O_3$. As chemical solution was sprayed using water spraying system equipped with air atomizing type nozzle, the removal efficiencies of gaseous pollutants increased due to the increase of gas-liquid interfacial area.

• Journal of Korean Society on Water Environment
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• v.22 no.1
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• pp.97-103
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• 2006

Excess sludge treatment and disposal currently represent a rising challenge for domestic or wastewater treatment plants due to economic, environmental and regulation factors. Conventional gravity sedimentation process has been widely used in sludge thickening. The operation method of the process is very simple, but the process requires long detention time for sludge thickening, uses polymers, and shows low sludge thickening efficiency. To solve the problems, we studied on DAF (Dissolved Air Flotation) system. We use bulking sludge of a paper manufacturing plant. The effects of parameters such as SVI (Sludge Volume Index), storage time, initial concentration and wet density of excess sludge were examined. The results showed that the more SVI was low, the more sludge was thickened. As storage time goes by, SVI was increased and thickening performance was deteriorated. In order to improve flotation performance at high concentration, high recycling ratio and pressure did not increase the concentration due to thickening limitation. The addition of 0.8 g/L of loess was increased flotation efficiency of 1.41 times.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.315-320
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• 2004

Cutting fluid usually has been used in order to improve machinability, tool life, surface quality. However, problems such as pollution, costs of chip and fluid treatment caused. In this paper, compressed chilly air was used to machine aircraft parts and investigate possibility and advantage of that. The experiments were carried out in various cutting environments, such as wet and compressed chilly air. With respect to the cutting environment, compressed chilly air gave advantages such as decrease of pollution and easy chip treatment.

• Transactions of the Korean hydrogen and new energy society
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• v.25 no.1
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• pp.72-78
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• 2014

The study has been designed to develop water vapor supply for semiconductor industry, industrial gas manufacturing, impurities analysis, and fuel cell. Water concentration in air reached $1019{\mu}mol/mol$ at dew temp ($-20^{\circ}C$) and water concentration in CO2 reached $127{\mu}mol/mol$ at dew temp ($-40^{\circ}C$. Carbon dioxide needs more wet gas than air because interaction potential of carbon dioxide shows more strong attraction than air.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.43 no.1
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• pp.65-73
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• 2011

The fibrous raw materials in packaging-grade paper production in Korea were mainly obtained from waste paper. The use of recycled paper has both positive and negative impacts in papermaking process. The primary positive impacts are the environmental protection and manufacturing cost reduction, and the negative impacts are the quality reduction in paper quality and the accumulation of heavy metals and other pollutants in wet- and dry-end process. This study was carried out to consider the optimum acid decomposition system with the highest recovery rate for the analysis of heavy metals in packaging-grade paper. The open digestion system using Kjeldahl apparatus and the closed digestion system using microwave oven for decomposing the organic materials in paper were compared. In both open and closed digestion method, the combination of nitric acid, hydrochloric acid and hydrogen peroxide showed higher recovery rate than using only nitric acid alone because the presence of Cl- ions in hydrochloric acid stabilizes ligand formation with metal ions. KOCC was observed to have the highest heavy metal content among the recycled paper samples. The heavy metal contents decomposed with the closed digestion system were relatively higher than with open digestion system.

• Journal of the Korean Solar Energy Society
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• v.35 no.1
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• pp.29-34
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• 2015

The photovoltaic ribbon attached the flux reduces the solar module manufacturing process and the pollution. This paper presents an analytical method for solving the continuous flux drying system of photovoltaic ribbon. Also, some experiments of the drying of photovoltaic ribbon are carried out in order to design the drying system. Numerical results indicate the air temperature, the air velocity, the air pressure and the timewise temperature variation of ribbon during drying process. In case of the drier process length is short, 400mm, the photovoltaic ribbon is wet. Thus, another study of drying system is necessary to improve the drying ability. As a result, multi-stage drier system is proposed and shown to be good drying ability.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.9
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• pp.967-972
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• 2014

The good light permeability and hardness of glass allow it to be used in various fields. Non-conventional machining methods have been used for glass machining because of its brittle properties. As one non-contact machining method, a laser has advantages that include a high machining speed and the fact that no tool making is required. However, glass has light permeability. Thus, the use of a laser to machine glass has limitations. A nanosecond pulse laser can be used at low power for laser-induced backside wet etching, which is an indirect method. In previous studies, a short-wave laser that had good light absorption but a high price was used. In this study, a near-infrared laser was used to test the possibility of glass micro-machining. In particular, when deeper machining was conducted on a glass structure, more problems could result. To solve these problems, microstructure manufacturing was conducted using ultrasonic vibration.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.64-67
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• 2009

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Single crystal Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height was similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.