• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.9
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• The Journal of the Korea institute of electronic communication sciences
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• v.15 no.3
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• pp.465-472
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• 2020

Recently, various deep neural networks based methods have been proposed for audio event detection. In this study, we improved the performance of audio event detection by adopting an attention approach to a baseline CRNN. We applied context gating at the input of the baseline CRNN and added an attention layer at the output. We improved the performance of the attention based CRNN by using the audio data of strong labels in frame units as well as the data of weak labels in clip levels. In the audio event detection experiments using the audio data from the Task 4 of the DCASE 2018/2019 Challenge, we could obtain maximally a 66% relative increase in the F-score in the proposed attention based CRNN compared with the baseline CRNN.

• The Journal of the Korea Contents Association
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• v.14 no.10
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• pp.361-373
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• 2014

Oriental painting lesson is considered neglectedly, because of pressure on teachers and troublesomeness of preparing and using for art supplies. However, change of medium can solve pressure on teachers and students for Oriental painting lesson enough. Therefore this study will present composition of Oriental painting lesson planning using photoshop program as a way of overcoming weak points, increasing students' interests and giving effective composition lesson. We developed composition of Oriental painting lesson planning using layer of photoshop program. Then We surveyed 60 students who are two classes of the first grade in G high school to know the effect and possibility of the lesson planning and analyzed the results. The most(75%) of the respondents answered that composition of Oriental painting lesson planning using photoshop program was appropriate. The more than half (58.3%) respondents wanted to participated in lesson regardless of any subjects. That shows highly interest for photoshop program. The respondents answered that the merits of this lesson using photoshop program are less pressure for drawing(33.3%), possibility of variety expression(30%), not requiring art supplies(26.6%). So this study shows using photoshop program for art class can solve weak points of Oriental painting lesson.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.2
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• pp.43-48
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• 2022

Effect of temperature/humidity (T/H) treatment conditions on the peel strength of screen-printed Ag/polyimide (PI) structures was evaluated by peeling PI films in 90° peel test. Initial peel strength was 25.99±1.47 gf/mm, and then decreased to 6.05±0.54 gf/mm after 500 h at 85℃/85% relative humidity T/H condition. And, the peeled locus was changed from Ag/PI interface to shallow cohesive inside PI near interface. X-ray photoelectron spectroscopy analysis on the peeled surfaces showed that the long-term moisture penetration into the Ag/PI interface during T/H treatment led to hydrolytic degradation of PI to form weak boundary layer inside PI near Ag/PI interface, which are responsible for large decrease in peel strength.

• Progress in Superconductivity and Cryogenics
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• v.8 no.1
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• pp.9-14
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• 2006

Sample preparation plays a critical role in microstructure analysis using TEM. Although TEM specimen has been usually prepared by jet-polishing or Ar-ion beam milling technique. these methods could not be applied to YBCO CC which is composed of IBAD or RABiTS substrates, several buffet layers, and YBCO superconducting layer because of big difference in mechanical strengths between the metallic phase and oxide phases. To obtain useful cross-sectional information such as interface between the phases or second phases in YBCO CC, it is prerequisite to secure the large area of thin section in the cross-sectional direction. The superconducting layer or the buffer layers are relatively weak and fragile compared to the metallic substrate such as Ni-5wt%W RABiTS of Hastelloy-based IBAD, and preferential removal of weak ceramic phases during polishing steps makes specimen preparation almost impossible. Tripod polisher and small jig were home-made and employed to sample preparation. The polishing angle was maintained <$1^{\circ}$ throughout the polishing steps using 2 micrometers attached to the tripod plate. TEM specimens with large and thin area could be secured and used for RABiTS/IBAD substrate analyses. In some cases, additional Ar-beam ion milling with low beam current and impinging angle was used for less than 30 sec. to remove debris or polishing media attacked to the specimens.

• Journal of the Microelectronics and Packaging Society
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• v.30 no.2
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• pp.52-59
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• 2023

The effects of dielectric curing temperature and temperature/humidity treatment conditions on the interfacial adhesion energies between Ti diffusion barrier/polybenzoxazole (PBO) dielectric layers were systematically investigated for Cu redistribution layer applications of fan-out wafer level package. The initial interfacial adhesion energies were 16.63, 25.95, 16.58 J/m² for PBO curing temperatures at 175, 200, and 225 ℃, respectively. X-ray photoelectron spectroscopy analysis showed that there exists a good correlation between the interfacial adhesion energy and the C-O peak area fractions at PBO delaminated surfaces. And the interfacial adhesion energies of samples cured at 200 ℃ decreased to 3.99 J/m² after 500 h at 85 ℃/85 % relative humidity, possibly due to the weak boundary layer formation inside PBO near Ti/PBO interface.

• Journal of Conservation Science
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• v.11 no.1 s.14
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• pp.38-51
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• 2002

The first priority we face in the conservation of wall paintings, is the conservation of painting layer. The 'painting layer' is sometimes called the pigment layer, and refers to the painted surface. For the consolidation of this painting layer we use 'fixative'. Fixative is a common adhesive which has been used in various field and conservators have made up for the weak points in the consolidation of wall paintings. In my thesis, I will summarise the range of use, standards of selection, and results of research on the use of fixative in the conservation of European paintings. In addition, I will describe various kinds of our traditional fixatives. As synthetic resins have proved that it is not ideal as a fixative for wall painting, conservators have studied to find an alternative. Same as European conservators, Asian scientists has researched to find alternative fixative which is more suitable to the wall paintings in Asia based on their traditional techniques and materials. Therefore, 1 have studied to find an adequate fixative for our own wall paintings and I could conclude that we can consider traditional fixative which is made of 'seaweeds' as an alternative and it is very important to proceed research and experiment on this material.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.858-863
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• 2001

In this paper, the test and result of flow and combustion for 21AFR lean fuel models are described. The necessity to develop the low emission combustor has been issued from the concern on the increase of green house and the destruction of ozone layer. To evaluate the flow and combustion performance of new designed 21AFR lean modules, the hydraulic tests in stereo lithographic airflows models, the low pressure combustion tests in three injectors model for weak extinction and ignition and the high pressure combustion tests in single sector for NOx, SAE and efficiency are performed. The low pressure tests reveal that the governing parameters in weak extinction and ignition at atmospheric condition are prefilmer length, swirl flow rotation direction, secondary swirl angle and flow split. As a results of combustion test at high pressure, the efficiency and smoke level are satisfied with performance targets, but EINOx of 17.8 is higher than target value of 13.1. The high pressure tests show that the main parameters influenced on NOx are primary swirl angle, swirl flow rotation direction, heatshield exit angle and liner mixing hole location.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.8
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• pp.1132-1137
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• 2002

In this paper, the test results of the combustion for 2 IAFR lean fuel models are described. The need for the low emission combustor has been issued from the concern on the increase of green house and the destruction of ozone layer. To evaluate the flow and combustion performance of newly designed 21AFR lean modules, the hydraulic tests in stereolithographic airflows models, the low pressure combustion tests in three injectors model for weak extinction and ignition and the high pressure combustion tests in single sector for NOx, SAE and efficiency are performed. The low pressure tests reveal that the governing parameters in weak extinction and ignition at atmospheric condition are prefilmer length, swirl flow rotation direction, secondary swirl angle and flow split. As a result of combustion test at high pressure, the efficiency and smoke level are satisfied with performance targets, but EINOx of 17.8 is higher than target value of 13.1 The high pressure tests show that the main parameters influenced on NOx are primary swirl angle, swirl flow rotation direction, heatshield exit angle and liner mixing hole location.