• Title/Summary/Keyword: W-N

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Parametric study of inductively coupled plasma etching of GaN epitaxy layer (GaN epitaxy 층의 식각특성에 미치는 공정변수의 영향)

  • Choi, Byoung Su;Park, Hae Li;Cho, Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.4
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    • pp.145-149
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    • 2016
  • The effect of process parameters such as plasma composition, ICP (Inductively Coupled Plasma) source power and rf chuck power on the etch characteristics of GaN epitaxy layer was studied. $Cl_2/Ar$ ICP discharges showed higher etch rates than $SF_6/Ar$ discharges because of the higher volatility of $GaCl_x$ etch products than $GaF_x$ compounds. As the Ar ratio increases in the $Cl_2/Ar$ ICP discharges, the etch anisotropy was enhanced due to the improved physical component of the etching. For both plasma chemistries, the GaN etch rate increased continuously as both the ICP source power and rf chuck power increased, and a maximum etch rate of 251.9 nm/min was obtained at $13Cl_2/2Ar$, 750W ICP power, 400W rf chuck power and 10 mTorr condition.

Design and Fabrication of X-Band GaN TRM for a Radar (레이더용 X대역 GaN 반도체 송수신기 설계 및 제작)

  • Lim, Jae-Hwan;Jin, Hyung-Suk;Ryu, Seong-Hyun;Park, Jong-Sun;Kim, Tae-Hun;Lim, Duck-Hee
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.25 no.2
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    • pp.172-182
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    • 2014
  • In this paper, is is presented the result of design and fabrication for X band T/R module using in active array radar. The high power RF circuit was fabricated using GaN element, so that high power and high efficiency was fulfilled comparing with the previous T/R module that have under 50 W output power for X band. Designed X band T/R module demonstrated 200 W(53 dBm) peak power, 20 us pulse width with 0.4 dB pulse droop and 20 % duty cycle. And it has characteristics of 26 dB receive gain and 4.5 dB noise figure. The structure was applied to prevent serious damage of receive path and GaN HPA by transmitting power during trasmit time of a pulse radar.

PROPAGATION OF THE BLUE CRAB, PORTUNUS TRITUBERCULATUS (MIERS) (꽃게 Portunus trituberculatus (MIERS)의 종묘 생산에 관한 연구)

  • PYEN Choong-Kyu
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.3 no.3
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    • pp.187-198
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    • 1970
  • The author succeeded in rearing the young blue crab from the first stage of zoe ato the true crab shape, and during this time he observed their growth and metamorphosis. The relationships between the number of eggs carried by female crabs (E) and the carapace width (C) and body weight (W) are shown as follows: E= 27.9049C-281.8155, E=0.5682 W-116.4606. There are five zoeal stages and a megalopa in the complete larval development of the blue crab. Water temperature in rearing aquaria ranged from 21.4 to $25.2^{\circ}C$. The duration of each zoeal stage was two days on the average. After the fifth moulting, the zoea becomes megalopa and 5 to 6 days later the megalopa moults and develops into the first stage of adult crab shape. The carapace width of megalopa measured about 1.70 mm and the carapace length, from the tip of the rostrum to the posterior dorsal margin of the carapace, was about 2.78 mm on the average. The carapace width and length of the first crab, 18 days after hatching, measured about 4.48 mm and 2.62 mm respectively. After two days, the first crab moulted and grew into the second crab with about 6.47 mm in carapace width and 4.66 mm in carapace length. The larval rearing in the outdoor tank shelved better results than in the indoor aquarium. The highest mortality occurred when the first stage of zoea moulted into the second stage. Percentage of crabs which survived, from the first crab to the ninth crab stages, was about $55\%$. The relationships between rearing days (D) and the carapace width (C), carapace length (L) and body weight (W) of the crab stages during 40 days of rearing are shown as follows. Carapace width, Indoor: C=1.1250D+1.7227 Outdoor C=1.3465D -0.2449 Carapace length, Indoor: L=0.6654D+1.6712 Outdoor: L=0.7893D+0.6919 Body Weight, Outdoor: $$W=1.15e^{0.12423D}$$ Indoor: $$W=6.759\times10^{-2}D^{1.2598}$$ (9-19 day old crabs) Outdoor: $$W=4.136\times10^{-2}D^{1.6024}$$ (21-40 day old crabs) During the crab stage, the following relationships between the number of moulting times and the carapace width (C), carapace length (L) and body weight (W) were found as follows: $$C=5.2e^{0.28119N}$$ $$L=3.65e^{0.26372N}$$ $$W= 0.14e^{0.7037N}$$ The relationships between the carapace length (L) and the carapace width (C) and body weight (W) of the crab stages are shown as follows: Carapace length, mm Formula 2.62-27.17 L=1.6864C-1.0387 7.47-18.53 $$W=9.367\times10^{-5}C^{3.5567}$$ 22.11-27.17 $$W=3.406\times10^{-5}C{3.8571}$$

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Investigation of the TiCrN Coating Deposited by Inductively Coupled Plasma Assisted DC Magnetron Sputtering. (Inductively Coupled Plasma Assisted D.C. Magnetron Sputtering법으로 제작된 TiCrN 코팅층의 특성 분석)

  • Cha, B.C.;Kim, J.H.;Lee, B.S.;Kim, S.K.;Kim, D.W.;Kim, D.;You, Y.Z.
    • Journal of the Korean Society for Heat Treatment
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    • v.22 no.5
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    • pp.267-274
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    • 2009
  • Titanium Chromium Nitrided (TiCrN) coatings were deposited on stainless steel 316 L and Si (100) wafer by inductively coupled plasma assisted D.C. magnetron sputtering at the various sputtering power on Cr target and $N_2/Ar$ gas ratio. Increasing the sputtering power of Cr target, XRD patterns were changed from TiCrN to nitride $Cr_2Ti$. The maximum hardness was $Hk_{3g}$ 3900 at $0.3\;N_2/Ar$ gas ratio. The thickness of the TiCrN films increased as the Cr target power increased, and it showed over $Hk_{5g}3100$ hardness at 100 W, 150 W. TiCrN films were deposited by the ICP assisted DC magnetron sputtering shown good wear resistance as the $N_2/Ar$ gas ratio was 0.1, 0.3.

Mechanization of Pine Cone Harvest(III) -Power Requirements to Cut Shoots of Korean Pine Trees by Circular Saw- (잣 수확의 기계화 연구(III) -원형톱에 의한 잣나무 가지의 절단에 소요되는 동력-)

  • 강화석;강위수;이재선
    • Journal of Biosystems Engineering
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    • v.20 no.3
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    • pp.245-249
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    • 1995
  • In this study power requirements to saw shoots with circular saw were determined by measuring and analyzing the required maximum torque to provide the information for the mechanization of Korean pine cone harvest. Two levels of feed rate of shoots, 10.4mm/s and 20.8mm/s, three levels of sawing speed 5.8㎧, 11.6㎧, and 17.4㎧, and 14 levels of shoot diameter from 7.7 to 18.1mm were used as variables. 1) The maximum torques were significantly affected by all three variables. The average maximum torque, 18.2 N-cm for feed rate of 20.Bmm/s was greater as much as 80% of 10.1 N-cm for feed rate of 10.4mm/s. 2) As the sawing speed was increased from 5.8㎧ to 11.6㎧ and 17.4㎧, the maximum torques were decreased to 14.8N-cm, 8.5N-cm, and 7.IN-cm, respectively when the feed rate was 10.4mm/s. The maximum torque ranged from 4.5 to 19.3N-cm as shoot diameter increased from 7.7 to 18.1mm. The minimum power requirements to saw shoots of 18.1mm with circular saw was 30W for the feed rate of 10.4mm/s. 3) The maximum torques were 28.6N-cm, 14.6N-cm, and 11.4N-cm when sawing speeds were 5.8㎧, 11.6㎧, and 17.4㎧, respectively when the feed rate was 20.8mm/s and these torques were increased as much as 93%, 36%, and 61% of those for the feed rate of 10.4mm/s. The maximum torque increased from 9.7N-cm to 30.7N-cm as shoot diameter increased from 7.7 to 18.1mm. The minimum power requirements to saw shoots of 18.1mm was 54W which was 1.8 times of 30W for the feed rate of 10.4mm/s.

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Milk Yield, Composition, and Fatty Acid Profile in Dairy Cows Fed a High-concentrate Diet Blended with Oil Mixtures Rich in Polyunsaturated Fatty Acids

  • Thanh, Lam Phuoc;Suksombat, Wisitiporn
    • Asian-Australasian Journal of Animal Sciences
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    • v.28 no.6
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    • pp.796-806
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    • 2015
  • To evaluate the effects of feeding linseed oil or/and sunflower oil mixed with fish oil on milk yield, milk composition and fatty acid (FA) profiles of dairy cows fed a high-concentrate diet, 24 crossbred primiparous lactating dairy cows in early lactation were assigned to a completely randomized design experiment. All cows were fed a high-concentrate basal diet and 0.38 kg dry matter (DM) molasses per day. Treatments were composed of a basal diet without oil supplement (Control), or diets of (DM basis) 3% linseed and fish oils (1:1, w/w, LSO-FO), or 3% sunflower and fish oils (1:1, w/w, SFO-FO), or 3% mixture (1:1:1, w/w) of linseed, sunflower, and fish oils (MIX-O). The animals fed SFO-FO had a 13.12% decrease in total dry matter intake compared with the control diet (p<0.05). No significant change was detected for milk yield; however, the animals fed the diet supplemented with SFO-FO showed a depressed milk fat yield and concentration by 35.42% and 27.20%, respectively, compared to those fed the control diet (p<0.05). Milk c9, t11-conjugated linoleic acid (CLA) proportion increased by 198.11% in the LSO-FO group relative to the control group (p<0.01). Milk C18:3n-3 (ALA) proportion was enhanced by 227.27% supplementing with LSO-FO relative to the control group (p<0.01). The proportions of milk docosahexaenoic acid (DHA) were significantly increased (p<0.01) in the cows fed LSO-FO (0.38%) and MIX-O (0.23%) compared to the control group (0.01%). Dietary inclusion of LSO-FO mainly increased milk c9, t11-CLA, ALA, DHA, and n-3 polyunsaturated fatty acids (PUFA), whereas feeding MIX-O improved preformed FA and unsaturated fatty acids (UFA). While the lowest n-6/n-3 ratio was found in the LSO-FO, the decreased atherogenecity index (AI) and thrombogenicity index (TI) seemed to be more extent in the MIX-O. Therefore, to maximize milk c9, t11-CLA, ALA, DHA, and n-3 PUFA and to minimize milk n-6/n-3 ratio, AI and TI, an ideal supplement would appear to be either LSO-FO or MIX-O.

Characteristics and Physical Property of Tungsten(W) Related Diffusion Barrier Added Impurities (불순물을 주입한 텅스텐(W) 박막의 확산방지 특성과 박막의 물성 특성연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
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    • v.17 no.6
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    • pp.518-522
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    • 2008
  • The miniaturization of device size and multilevel interlayers have been developed by ULSI circuit devices. These submicron processes cause serious problems in conventional metallization due to the solubility of silicon and metal at the interface, such as an increasing contact resistance in the contact hole and interdiffusion between metal and silicon. Therefore it is necessary to implement a barrier layer between Si and metal. Thus, the size of multilevel interconnection of ULSI devices is critical metallization schemes, and it is necessary reduce the RC time delay for device speed performance. So it is tendency to study the Cu metallization for interconnect of semiconductor processes. However, at the submicron process the interaction between Si and Cu is so strong and detrimental to the electrical performance of Si even at temperatures below $200^{\circ}C$. Thus, we suggest the tungsten-carbon-nitrogen (W-C-N) thin film for Cu diffusion barrier characterized by nano scale indentation system. Nano-indentation system was proposed as an in-situ and nanometer-order local stress analysis technique.

Analysis of the Transmissivities of Direct and Diffuse Solar Radiation in Multispan Glasshouse (연동 유리온실내의 직달일사 및 산란일사 투과율 해석)

  • 김용현;이석건
    • Journal of Biosystems Engineering
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    • v.23 no.5
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    • pp.439-444
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    • 1998
  • Effects of the number of spans, orientation and latitude on the transmissivities of direct and diffuse solar radiation in multispan glasshouse were analyzed using a computer simulation model (Kim and Lee, 1997). The number of spans did not affect the transmissivity of diffuse solar radiation, ranging 60∼61%. The transmissivities of direct solar radiation were 55∼64% for E-W orientation and 47∼70% for N-S orientation in ten multispan glasshouse. There was no effect of the latitude on the transmissivity of direct solar radiation in domestic regions. Differences in the transmissivity of direct solar radiation between single-span and multispan glasshouse were significant for E-W orientation during winter season; however, those were relatively small for N-S orientation throughout the year. Transmissivity of direct solar radiation decreased with the increasing number of spans for E-W glasshouse, whereas those for N-S glasshouse was hardly affected by the number of spans.

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STATIC AND RELATED CRITICAL SPACES WITH HARMONIC CURVATURE AND THREE RICCI EIGENVALUES

  • Kim, Jongsu
    • Journal of the Korean Mathematical Society
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    • v.57 no.6
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    • pp.1435-1449
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    • 2020
  • In this article we make a local classification of n-dimensional Riemannian manifolds (M, g) with harmonic curvature and less than four Ricci eigenvalues which admit a smooth non constant solution f to the following equation $$(1)\hspace{20}{\nabla}df=f(r-{\frac{R}{n-1}}g)+x{\cdot} r+y(R)g,$$ where ∇ is the Levi-Civita connection of g, r is the Ricci tensor of g, x is a constant and y(R) a function of the scalar curvature R. Indeed, we showed that, in a neighborhood V of each point in some open dense subset of M, either (i) or (ii) below holds; (i) (V, g, f + x) is a static space and isometric to a domain in the Riemannian product of an Einstein manifold N and a static space (W, gW, f + x), where gW is a warped product metric of an interval and an Einstein manifold. (ii) (V, g) is isometric to a domain in the warped product of an interval and an Einstein manifold. For the proof we use eigenvalue analysis based on the Codazzi tensor properties of the Ricci tensor.

NOTES ON WEAKLY CYCLIC Z-SYMMETRIC MANIFOLDS

  • Kim, Jaeman
    • Bulletin of the Korean Mathematical Society
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    • v.55 no.1
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    • pp.227-237
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    • 2018
  • In this paper, we study some geometric structures of a weakly cyclic Z-symmetric manifold (briefly, $[W CZS]_n$). More precisely, we prove that a conformally flat $[W CZS]_n$ satisfying certain conditions is special conformally flat and hence the manifold can be isometrically immersed in an Euclidean manifold $E^n+1$ as a hypersurface if the manifold is simply connected. Also we show that there exists a $[W CZS]_4$ with one parameter family of its associated 1-forms.