• 제목/요약/키워드: Vacuum sublimation

검색결과 39건 처리시간 0.019초

Reduction of Vacuum Sublimation by Ion Beam Treatment for e-beam Deposited SiC Films

  • Kim, Jaeun;Hong, Sungdeok;Kim, Yongwan;Park, Jaewon
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
    • /
    • pp.138.1-138.1
    • /
    • 2013
  • We present the low temperature (${\leq}1,000^{\circ}C$) vacuum sublimation behavior of an e-beam evaporative deposited on a SiC film and a method to reduce the vacuum sublimation through an ion beam process. The density of the SiC film deposited using the e-beam evaporation method was ~60% of the density of the bulk source material. We found that the sublimation became appreciable above ${\sim}750^{\circ}C$ under $1.5{\times}10^{-5}$ torr pressure and the sublimation rate increased with an increase in temperature, reaching ~70 nm/h at $950^{\circ}C$ when the coated sample was heated for 5 h. When the film was irradiated with 70 keV N+ ions prior to heating, the sublimation rate decreased to ~23 nm/h at a fluence of $1{\times}10^{17}\;ions/cm^2$. However, a further increase in fluence beyond this value or an extended heating period did not change (decrease or increase) the sublimation rate any further.

  • PDF

Low temperature deposition of carbon nanofilaments using vacuum-sublimated $Fe(CO)_5$ catalyst with thermal chemical vapor deposition

  • Kim, Nam-Seok;Kim, Kwang-Duk;Kim, Sung-Hoon
    • 한국결정성장학회지
    • /
    • 제17권1호
    • /
    • pp.18-22
    • /
    • 2007
  • Carbon nanofilaments were deposited on silicon oxide substrate by thermal chemical vapor deposition method. We used $Fe(CO)_5$ as the catalyst for the carbon nanofilaments formation. Around $800^{\circ}C$ substrate temperature, the formation density of carbon nanofilaments could be enhanced by the vacuum sublimation technique of $Fe(CO)_5$, compared with the conventional spin coating technique. Finally, we could achieve the low temperature, as low as $350^{\circ}C$, formation of carbon nanofilaments using the sublimated Fe-complex nanograins with thermal chemical vapor deposition. Detailed morphologies and characteristics of the carbon nanofilaments were investigated. Based on these results, the role of the vacuum sublimation technique for the low temperature deposition of carbon nanofilaments was discussed.

고정격자계에서 유한체적법을 이용한 진공동결건조 과정의 열 및 물질전달에 대한 연구 (A Fixed Grid Finite Volume Analysis of Multi-Dimensional Freeze Drying Process under Vacuum Condition)

  • Chi-Sung, Song
    • Journal of Advanced Marine Engineering and Technology
    • /
    • 제28권6호
    • /
    • pp.981-992
    • /
    • 2004
  • Freeze drying under vacuum condition is a complex process that involves simultaneous heat and mass transfer, sublimation of ice, and motion of sublimation front. Proper treatment of the motion of sublimation interface is crucial for an accurate prediction of the freeze drying process. Based on the enthalpy formulation that has been successfully used in liquid/solid phase change problems. a fixed grid method. streamlined for the freeze drying analysis. was developed in this study. The accuracy of the fixed grid method was checked by solving a one-dimensional tray freeze drying and a two-dimensional vial freeze drying problem and then comparing the results with those by the moving grid method. Finally. the freeze drying characteristics of two-dimensional slab and axis-symmetric cylinder was investigated using the fixed grid method.

Numerical Modeling of an Inductively Coupled Plasma Sputter Sublimation Deposition System

  • Joo, Junghoon
    • Applied Science and Convergence Technology
    • /
    • 제23권4호
    • /
    • pp.179-186
    • /
    • 2014
  • Fluid model based numerical simulation was carried out for an inductively coupled plasma assisted sputter deposition system. Power absorption, electron temperature and density distribution was modeled with drift diffusion approximation. Effect of an electrically conducting substrate was analyzed and showed confined plasma below the substrate. Part of the plasma was leaked around the substrate edge. Comparison between the quasi-neutrality based compact model and Poisson equation resolved model showed more broadened profile in inductively coupled plasma power absorption than quasi-neutrality case, but very similar Ar ion number density profile. Electric potential was calculated to be in the range of 50 V between a Cr rod source and a conductive substrate. A new model including Cr sputtering by Ar+was developed and used in simulating Cr deposition process. Cr was modeled to be ionized by direct electron impact and showed narrower distribution than Ar ions.

진공 동결에 의한 건조 화훼류의 품질특성 평가에 관한 연구 (The Evaluation for Quality Characteristics of Drying Flowering Plant by Vacuum-Freeze)

  • 김재돌
    • 동력기계공학회지
    • /
    • 제15권4호
    • /
    • pp.5-10
    • /
    • 2011
  • In case of using rapid vacuum-freeze drying for high quality dry flower of flowering plant, the morphological and physiological characteristics of dry rose showed as the following. The dry ratio of about 82% presented after 1 day in case of using rapid vacuum-freeze drying and it was reached that the optimum storage water content of general dry products was 18%. The dry ratio of about 89% presented after 4 days. This result indicates very short dry time comparing with natural dry time of 12 days. Also, the morphological characteristics of flowering plant in case of vacuum-freeze drying showed similar shape with real flower. The contraction decreased about 9% comparing with real flower under dry time of 72 hours. But the contraction in case of natural dry decreased 36% and showed noticeable difference. The brightness which affects physiological characteristics of dry flowering plant showed lower values according to the dry process and chromaticity was thick. After 4 days, natural dry was thick with about 2 times comparing with vacuum-freeze drying. In case of vacuum-freeze drying, the quantity of anthocyanin and chlorophyl which affect discoloration and bleaching of dry flowering plant showed the clear difference comparing with natural dry method due to the sublimation by vacuum after rapid freeze with short initial time.

황의 Sublimatographic Characters에 관한 연구 (Study on the Sublimatographic Characters of Sulfur)

  • 손진언;김주봉
    • Elastomers and Composites
    • /
    • 제7권1호
    • /
    • pp.53-58
    • /
    • 1972
  • Sublimatographic study on the method of test for sulfur in the petroleum and rubber products was as following results: (1) The relation between the heating temperature$(t_h)$ and the vacuum condensing point(V.C.P.) of sulfur at different degree of vacuum appeared as Fig.4. The results were in good agreement with those expected from the $t_h-V.C.P$ curves of sublimatographic separation of sulfur. (2) The relation between the degree of vacuum and the V.C.P. at different heating temperature of sulfur appeared as follows; $$tv.c.p.=\alpha+{\beta}logP_{va}$$ (3) The V.C.P of sulfur could be physical property comparing with melting point and boiling point. (4) The relation between the V.C.P. and the quantity of sublimation of sulfur becomes quantitative as Fig.7.

  • PDF

다공성 물길의 진공동결건조과정에서 얼 및 물질전달 특성에 관한 연구 (A Study on the Heat and Mass Transfer Characteristics of Vacuum Freeze Drying Process for Porous Media)

  • c. s. song
    • Journal of Advanced Marine Engineering and Technology
    • /
    • 제25권6호
    • /
    • pp.1341-1352
    • /
    • 2001
  • Vacuum freeze drying process by which frozen water in a drying material is removed sublimation under vacuum condition, is now applied to various industrial field such as the manufacturing and packaging of pharmaceuticals in pharmaceutical industry, the drying of bio- products in bio-technology industry, the treatment of various quality food stuff in food technology, and so on. The Knowledge about the heat and mass transfer characteristics related with the vacuum freeze drying process is crucial to improve the efficiency of the process as well as the quality of dried products. In spite of increasing needs for understanding of the process, the research efforts in this fields are still insufficient. In this paper, a numerical code that can predict primary drying in a vial is developed based on the finite volume method with a moving grid system. The calculation program can handle the axis- symmetric and multi-dimensional characteristics of heat and mass transfer of the vial freeze drying process. To demonstrated the usefulness of the present analysis, a practical freeze drying of skim Milk solution in a vial is simulated and various calculation results are presented.

  • PDF

고성능 액체 크로마토그래피를 이용한 고삼 중의 oxymatrine 분석에 관한 연구 (Determination of oxymatrine in Sophora Radix by High Performance Liquid Chromatography)

  • 양승권;윤영자;남궁미옥
    • 분석과학
    • /
    • 제17권4호
    • /
    • pp.289-294
    • /
    • 2004
  • 고성능 액체 크로마토그래피를 이용하여 고삼 중의 oxymatrine을 분석하였다. acetonitrile을 포함하는 완충용액과 $C_{18}$컬럼을 이용한 역상 크로마토그래피를 수행하였다. Oxymatrine의 분리는 215 nm에서 UV흡수가 관측되었다. 고삼 중의 oxymatrine의 추출은 다양한 용매와 다양한 추출방법을 사용한 결과, 마쇄한 고삼의 최적의 추출 효율은 $80^{\circ}C$에서 50% ethanol로 5시간 동안 환류가열 하였을 때 가장 높은 효율을 보였다. 대부분의 추출 방법은 복잡한 전처리를 필요로 하지만, 본 연구에서는 승화 추출법으로 복잡한 전처리를 제외시킨 추출법을 고안하였다. 승화 추출은 높은 진공 ($1{\times}10^{-3}$ torr) 과 높은 온도 ($200^{\circ}C$)에서 수행되었다. 승화 추출법을 사용한 추출 효율은 다른 추출 방법들과 비교해서 전처리 과정을 거치지 않은 장점은 있었으나 추출 효율이 좀 낮았다.

성막조건에 따른 $\alpha$-Sexithienyl 박막의 물리적 특성 및 전기전도도에 관한 연구 (A study on the physical characteristics and conductivities of $\alpha$ -Sexithienyl thin films with various deposition conditions)

  • 박용인;권오관;오세운;최종선;김영관;신동명;강도열
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1997년도 춘계학술대회 논문집
    • /
    • pp.91-94
    • /
    • 1997
  • $\alpha$-sexithienyl($\alpha$-6T) thin films were deposited by Organic Molecular Beam Deposition(OMBD) technique, where the $\alpha$-6T was synthesized and purified by the sublimation method. The thin films of the $\alpha$-6T were deposited under various deposition conditions. The effects of deposition rate, substrate temperature. and vacuum pressure an the formation of these films have been studied. The molecular orientations of $\alpha$-6T films were investigated with the polarized electronic absorption spectroscopy. The molecules in the $\alpha$-6T film deposited at a low deposition rate under a high vacuum were aligned almost perpendicular to the substrate. The film deposited at an elevated substrate temperature (~9 $O^{\circ}C$) showed higher conductivity than the film deposited at room temperature.

  • PDF