Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2013.08a
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- Pages.138.1-138.1
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- 2013
Reduction of Vacuum Sublimation by Ion Beam Treatment for e-beam Deposited SiC Films
- Kim, Jaeun (Korea Atomic Energy Research Institute) ;
- Hong, Sungdeok (Korea Atomic Energy Research Institute) ;
- Kim, Yongwan (Korea Atomic Energy Research Institute) ;
- Park, Jaewon (Korea Atomic Energy Research Institute)
- Published : 2013.08.21
Abstract
We present the low temperature (