• Proceedings of the Korean Vacuum Society Conference
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• 2008.08a
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• pp.263-263
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2005.08a
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• pp.180-180
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• 2005

• Applied Science and Convergence Technology
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• v.23 no.3
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• pp.103-112
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• 2014

The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.605-611
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• 2006

We have developed in-situ vacuum gauge calibration system in the range 1 Pa to 100 kPa by using constant volume method. The system is capable of gauge calibration by comparison method without demount the reference gauges. The system will be useful for dissemination of national vacuum standards to foreign developing countries and domestic industries.

• Journal of the Korean Vacuum Society
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• v.2 no.2
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• pp.139-144
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• 1993

The dynamic calibration system which can calibrate the ultrahigh vacuum pressure down to $10^{-10}$torr has been fabricated. The production and control of minute flow of $10^{-6}~10^{-9}$torr L/s range is done by a porous plug connected to the high vacuum standards system. The base pressure of the UHV standards system down to $10^{-11}$torr range was obtained by refrigerator type cryopump, whose pumping speed is known to be constant. By using the UHV standards system, 2 extractor gauges and 1 nude ion gauge were calibrated and their linearities and scatterings were studied.

• Journal of the Korean Vacuum Society
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• v.14 no.3
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• pp.103-109
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• 2005

A new medium vacuum primary standard using the static expansion method was developed in KRISS. In order to evaluate the performance of the equipment, we compared the medium vacuum standard with an ultrasonic interferometer manometer using two capacitance diaphragm gauges, the measuring ranges of which were 133 Pa and 1,333 Pa respectively. The result, Error normalized values, showed that the two standards are coincident each other within the range of combined uncertainty at calibrated pressure of $3pa\;\sim\;100pa$.

• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.1-13
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• 2006

Vacuum laboratory in Korea Research Institute of Standards and Science (KRISS) was opened in 1983 for establishing and disseminating vacuum standard in Korea. The major three systems such as the ultrasonic interferometer manometer (UIM), the static expansion system (SES) and the dynamic expansion system (DES) with orifice and porous plug conductance are developed. In this study, the standard systems from low to ultra-high vacuum, uncertainty analysis by ISO regulation, and key and bilateral comparison results will be described.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.3
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• pp.109-115
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• 2002

This paper describes a CCM key comparison of low absolute-pressure standards at seven National Measurement Institutes that was carried out during the period March 1998 to September 1999 in order to determine their degrees of equivalence at pressures in the range 1 Pa to 1000 Pa. The Korea Research Institutes of Standards and Science(KRISS) participated from 10 Pa to 1000 Pa pressure range in 1999. The primary standards, which represent two principal measurement methods, included five liquid-column manometers and four static expansion systems. The transfer standard package consisted of four high-precision pressure transducers, two capacitance diaphragm gauges to provide high resolution at low pressures, and two resonant silicon gauges to provide the required calibration stability.

• Journal of the Korean Vacuum Society
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• v.14 no.2
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• pp.59-68
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• 2005

We developed a national medium vacuum standard by static expansion method. A 133 Pa capacitance diaphragm gauge was calibrated and analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The results showed that the expanded uncertainty of $2.628\times10^{-3}$ Pa at $95\%$ confidence level and coverage factor of k=2.

• Proceedings of the Korean Vacuum Society Conference
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• 1996.02a
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• pp.178-178
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• 1996