Journal of Korean Vacuum Science & Technology
- Volume 6 Issue 3
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- Pages.109-115
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- 2002
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- 1226-6167(pISSN)
Results of the key comparison in absolute pressure from 1 Pa to 1000 Pa
- Hong, Seung-Soo (Center for Vacuum Technology, Korea Research Institute of Standards and Science and Science) ;
- Shin, Yong-Hyeon (Center for Vacuum Technology, Korea Research Institute of Standards and Science and Science) ;
- Chung, Kwang-Hwa (Center for Vacuum Technology, Korea Research Institute of Standards and Science and Science) ;
- A. P. Miiller (Process Measurements Division, National Institute of Standards and Technology, USA)
- Published : 2002.09.01
Abstract
This paper describes a CCM key comparison of low absolute-pressure standards at seven National Measurement Institutes that was carried out during the period March 1998 to September 1999 in order to determine their degrees of equivalence at pressures in the range 1 Pa to 1000 Pa. The Korea Research Institutes of Standards and Science(KRISS) participated from 10 Pa to 1000 Pa pressure range in 1999. The primary standards, which represent two principal measurement methods, included five liquid-column manometers and four static expansion systems. The transfer standard package consisted of four high-precision pressure transducers, two capacitance diaphragm gauges to provide high resolution at low pressures, and two resonant silicon gauges to provide the required calibration stability.
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