• 제목/요약/키워드: Vacuum Glass

검색결과 758건 처리시간 0.027초

$CaF_2$ 박막의 전기적, 구조적 특성 (Eelctrical and Structural Properties of $CaF_2$Films)

  • 김도영;최석원;이준신
    • 한국전기전자재료학회논문지
    • /
    • 제11권12호
    • /
    • pp.1122-1127
    • /
    • 1998
  • Group II-AF_2$films such as $CaF_2$, $SrF_2$, and $BaF_2$ have been commonly used many practical applications such as silicon on insulatro(SOI), three-dimensional integrated circuits, buffer layers, and gate dielectrics in filed effect transistor. This paper presents electrical and structural properties of fluoride films as a gate dielectric layer. Conventional gate dielectric materials of TFTs like oxide group exhibited problems on high interface trap charge density($D_it$), and interface state incorporation with O-H bond created by mobile hydrogen and oxygen atoms. To overcome such problems in conventional gate insulators, we have investigated $CaF_2$ films on Si substrates. Fluoride films were deposited using a high vacuum evaporation method on the Si and glass substrate. $CaF_2$ films were preferentially grown in (200) plane direction at room temperature. We were able to achieve a minimum lattice mismatch of 0.74% between Si and $CaF_2$ films. Average roughness of $CaF_2$ films was decreased from 54.1 ${\AA}$ to 8.40 ${\AA}$ as temperature increased form RT and $300^{\circ}C$. Well fabricated MIM device showed breakdown electric field of 1.27 MV/cm and low leakage current of $10^{-10}$ A/$cm^2$. Interface trap charge density between $CaF_2$ film and Si substrate was as low as $1.8{\times}10^{11}cm^{-2}eV^{-1}$.

  • PDF

Cu/In 비에 따른 CuInS2 박막의 특성에 관한 연구 (A Study on Properties of CuInS2 Thin Films by Cu/ln Ratio)

  • 양현훈;박계춘
    • 한국전기전자재료학회논문지
    • /
    • 제20권7호
    • /
    • pp.594-599
    • /
    • 2007
  • [ $CulnS_2$ ] thin films were synthesized by sulfurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furnace annealing at temperature $200^{\circ}C$. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_2$ thin films with non-stoichiometry composition. $CuInS_2$ thin film was well made at the annealed $200^{\circ}C$ of SLG/Cu/In/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1 : 1 : 2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and Hall measurement system. The compositional deviations from the ideal chemical formula for $200^{\circ}C$ material can be conveniently described by non-molecularity$({\Delta}x=[Cu/In]-1)$ and non-stoichiometry $({\Delta}y=[{2S/(Cu+3In)}-1])$. The variation of ${\Delta}x$ would lead to the formation of equal number of donor and accepters and the films would behave like a compensated material. The ${\Delta}y$ parameter is related to the electronic defects and would determine the type of the majority charge carriers. Films with ${\Delta}y>0$ would behave as p-type material while ${\Delta}y<0$ would show n-type conductivity. At the sane time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}cm^{-3},\;312.502cm^2/V{\cdot}s\;and\;2.36{\times}10^{-2}\;{\Omega}{\cdot}cm$, respectively.

Ga doped ZnO 박막의 질소분위기 열처리에 따른 특성 변화 (Effect of Annealing in Nitrogen Atmosphere on the Characteristics of Ga Doped ZnO Films)

  • 허성보;이영진;이학민;김선광;김유성;공영민;김대일
    • 열처리공학회지
    • /
    • 제24권6호
    • /
    • pp.338-342
    • /
    • 2011
  • Ga doped ZnO (GZO) thin films were deposited with RF magnetron sputtering on glass substrate and then the effect of post deposition annealing at nitrogen atmosphere on the structural, optical and electrical properties of the films was investigated. The post deposition annealing process was conducted for 30 minutes at different temperature of 150, 300 and $450^{\circ}C$, respectively. As increase annealing temperature, GZO films show the increment of the prefer orientation of ZnO (002) diffraction peak in the XRD pattern and the optical transmittance in a visible wave region was also increased, while the electrical sheet resistance was decreased. The figure of merit obtained in this study means that GZO films which vacuum annealed at $450^{\circ}C$ have the highest optoelectrical performance in this study.

Interaction study of molten uranium with multilayer SiC/Y2O3 and Mo/Y2O3 coated graphite

  • S.K. Sharma;M.T. Saify;Sanjib Majumdar;Palash K. Mollick
    • Nuclear Engineering and Technology
    • /
    • 제55권5호
    • /
    • pp.1855-1862
    • /
    • 2023
  • Graphite crucibles are used for melting uranium and its alloys in VIM furnace. Various coating materials namely Al2O3, ZrO2, MgO etc. are applied on the inner surface of the crucibles using paint brush or thermal spray technique to mitigate U-C interaction. These leads to significant amount of carbon pick-up in uranium. In this study, the attempts are made to develop multilayer coatings comprising of SiC/Y2O3 and Mo/Y2O3 on graphite to study the feasibility of minimizing U-C interaction. The parameters are optimized to prepare SiC coating of about 70㎛ thickness using CVD technique on graphite coupons and subsequently Y2O3 coating of about 250㎛ thickness using plasma spray technique. Molybdenum and Y2O3 layers were deposited using plasma spray technique with 70㎛ and 250㎛ thickness, respectively. Interaction studies of the coated graphite with molten uranium at 1450℃ for 20 min revealed that Y2O3 coating with SiC interlayer provides physical barrier for uranium-graphite interaction, however, this led to the physical separation of coating layer. Y2O3 coating with Mo interlayer provided superior barrier effect showing no degradation and the coatings remained intact after interaction tests. Therefore, the Mo/Y2O3 coating was found to be a promising solution for minimizing carbon pick-up during uranium/uranium alloy melting.

1 keV $Ar^+$ 이온의 조사가 유리기판위의 금 박막의 미치는 영향 (Effects of 1 keV $Ar^+$ ion irradiation on Au films on glass)

  • 장홍규;김기환;한성;최원국;고석근;정형진
    • 한국진공학회지
    • /
    • 제5권4호
    • /
    • pp.371-376
    • /
    • 1996
  • 유리기판(BK7)에 5-cm cold-hollow cathode형 이온건(ion gun)을 이용한 sputtering 방법으로 금 박막을 1600$\AA$ 두께 (RBS확인한 두께 : 1590 $\AA$)로 증착하였다. 증착후 15$\mu$A/$\textrm{cm}^2$의 이온전류밀도를 갖는 1 keV $Ar^+$ beam을 이용하여 $1\times 10^{16}\;Ar^+\textrm{cm}^{-2}$에서 $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$의 이온선량을 조사하였다. 박막제작시와 $Ar^+$이온조사시의 진공도는 $1\times 10^{-6}-1\times 10^{-5}$Torr이었으며, 기판온도는 상온으로 하였다. 금 박막은 $Ar^+$이온의 조사에 관계없이 모두 (111)방향만 관찰되었으며, $Ar^+$이온이 조사된 시료의 x-ray peak의 세기는 이온선량이 증가함에 따라 감소하였다. Rutherford Backscattering Spectroscopy(RBS) 측정결과 $Ar^+$ 이온선량이 증가함에 따라 sputtering yield는 감소하였다. $2\times 10^{17}\;Ar^+\textrm{cm}^{-2}$의 이온선량이 조사된 시료는 두께가 711$\AA$으로 이온의 조사에 의해 Au 박막이 879$\AA$ sputter된 것을 확인하였으며, 이 때 sputtering yield는 2.57이었다. Atomic Force Microscope(AFM) 측정 결과 이온선량이 증가함에 따라 Au 박막의 Rms표면 거칠기는 16$\AA$에서 118$\AA$으로 증가하였다. 또한 Scratch test를 이용한 박막의 접착력 측정결과 이온선량이 증가함에 따라 유리기판위에 Au박막의 접착력은 1.1N에서 10N으로 9배 이상 증가하였다. 이상의 결과로부터 낮은 에너지의 이온선을 조사하여 유리기판고 금 박막사이에 좋은 접착력을 갖는 박막을 제작할 수 있었다.

  • PDF

설비공학 분야의 최근 연구 동향 : 2013년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2013)

  • 이대영;김사량;김현정;김동선;박준석;임병찬
    • 설비공학논문집
    • /
    • 제26권12호
    • /
    • pp.605-619
    • /
    • 2014
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.

진공증착법으로 제조한 투명 비정질 $V_2O_5$박막의 특성평가 (Evaluation of Transparent Amorphous $V_2O_5$ Thin Film Prepared by Thermal Evaporation)

  • 황규석;정설희;정주현
    • 한국안광학회지
    • /
    • 제13권1호
    • /
    • pp.27-30
    • /
    • 2008
  • 목적: 본 논문은 저온에서 $V_2O_5$의 cathode의 합성이 가능하다는 것이다. 방법: 간편한 진공 열증착법을 이용하여, 현미경용 소다 라임 실리카 슬라이드 기판위에 가시영역에서 투명하고 결정학적으로 비정질인 $V_2O_5$ 박막을 제조하였다. 100, 150 및 200$^{\circ}C$로 10분간 열처리가 완료된 박막의 표면미세구조와 파단면을 전계방사 주사형 전자현미경으로 분석하였다. 박막의 가시영역에서의 투과율과 표면 거칠기를 ultra violet-visible spectrophotometer와 Scanning probe microscope로 각각 분석하였다. 결과: 열처리 온도가 100$^{\circ}C$에서 150 및 200$^{\circ}C$로 증가함에 따라, 박막의 투과율은 감소하는 경향을 보였다. 박막의 광학적 특성은 표면미세구조적 결과를 바탕으로 토론될 것이다. 결론: 100$^{\circ}C$인 경우 광학적 투과율이 우수하고, 박막의 표면특성이 균질한 비정질 $V_2O_5$ 박막을 제조할 수 있었다.

  • PDF

PEDOT-PSS/NPD-$C_{60}$ 정공 주입/수송 층이 도입된 유기발광소자의 성능 향상 연구 (Enhanced Efficiency of Organic Electroluminescence Diode Using PEDOT-PSS/NPD-$C_{60}$ Hole Injection/Transport Layers)

  • 박경남;강학수;나타라잔 센틸루마르;박대원;최영선
    • 폴리머
    • /
    • 제33권5호
    • /
    • pp.407-412
    • /
    • 2009
  • 유기발광소자(OLED)에서 정공 수송층(hole injection layer, HIL)으로 사용되는 N,N'-di-1-naphthyl-N,N'-diphenyl-1,1'-biphenyl-4,4'-diamine (NPD)가 정공 주입층(hole injection layer HIL)으로 사용된 PEDOT-PSS 층 위로 진공 증착되었다. PEDOT-PSS 층은 ITO 유리 위에 스핀 코팅되어 제조되었다. 또한, NPD와 $C_{60}$의 공증착에 의해 $C_{60}$이 약 10 wt% 도핑된 NPD-$C_{60}$ 층을 제조하였으며, AFM과 XRD를 이용하여 NPD-$C_{60}$ 박막의 모폴로지 특성을 관찰하였다. 다층 소자를 제조하여 J-Y, L-V 및 전류 효율 특성이 고찰되었다. $C_{60}$박막은 국부적인 결정성 구조를 가지고 있으나, NPD-$C_{60}$ 박막에서는 $C_{60}$ 분자가 균일하게 분산되어 $C_{60}$의 결정성 구조가 확인되지 않았다. 또한, $C_{60}$의 도핑에 의해서 박막의 표면이 균일해지는 것을 확인하였으며, 박막 내의 전류 밀도가 증가됨을 확인하였다. NPD-$C_{60}$ 박막을 이용하여 ITO/PEDOT-PSS/NPD-$C_{60}/Alq_3$/LiF/Al 다층 소자를 제조하였을 때, 소자의 휘도 측면에서 약 80% 향상 효과가 있었으며, 소자 효율 측면에서도 약 25%의 향상을 기대할 수 있었다.

페라이트 도금법에 의한 $M_xZn_{0.22}Fe_{2.78-x}O_4(M=Mn, Ni)$ 박막의 제조와 자기적 성질 (Preparation of $M_xZn_{0.22}Fe_{2.78-x}O_4(M=Mn, Ni)$ Films by the Ferrite Plating and Their Magnetic Properties)

  • 하태욱;유윤식;김성철;최희락;이정식
    • 한국자기학회지
    • /
    • 제10권3호
    • /
    • pp.106-111
    • /
    • 2000
  • 페라이트 도금 방법으로 M $n_{x}$Z $n_{0.22}$F $e_{2.78-x}$ $O_4$(x=0.00~0.08)와 N $i_{x}$Z $n_{0.22}$F $e_{*}$2.78-x/ $O_4$(x=0.00~0.15)의 스피넬 페라이트 박막을 제작하였다. 반응용액의 조성비 변화에 따라 형성된 박막의 조성비와 성장속도를 조사하였다. 제조한 시료들의 결정성과 미세구조는 x-선 회절분석과 전자현미경으로 조사하고, 시료의 자기적 성질을 진동 시료형 자력계를 사용하여 조사했다. 조성비 x가 증가함에 따라 격자상수는 M $n_{x}$Z $n_{0.22}$F $e_{2.78-x}$ $O_4$(x=0.00~0.08) 박막에서 증가하지만, N $i_{x}$Z $n_{0.22}$F $e_{2.78-x}$ $O_4$(x=0.00~0.15) 박막에서 감소한다. M $n_{x}$Z $n_{0.22}$F $e_{2.78-x}$ $O_4$(x = 0.00~0.08) 박막의 포화자화는 419 emu/㎤에서 394 emu/㎤ 의 값을 가져 N $i_{x}$Z $n_{0.22}$F $e_{2.78-x}$ $O_4$(x=0.00~0.15)의 $M_{s}$ 보다 높게 나타났다. 보다 높게 나타났다. 보다 높게 나타났다.

  • PDF

PEDOT:PSS 정공 수송층에 금 나노입자를 첨가한 유기태양전지의 제작 및 특성 연구 (Fabrication and Characterization of Organic Solar Cells with Gold Nanoparticles in PEDOT:PSS Hole Transport Layer)

  • 김성호;최재영;장호정
    • 마이크로전자및패키징학회지
    • /
    • 제20권2호
    • /
    • pp.39-46
    • /
    • 2013
  • 본 논문은 캐리어의 이동도 및 전도도를 개선하고, 흡수된 빛의 이동 경로를 증가시켜 광흡수도를 높이기 위하여 정공 수송층 재료에 금 나노입자를 첨가하여 유기태양전지를 제작하였다. 광활성층으로는 P3HT와 PCBM의 bulk-heterojunction 구조를 사용하였다. 유기태양전지에서 금 나노입자를 첨가한 정공 수송층의 효과를 관찰하기 위하여 금 나노입자의 첨가량(0, 0.5, 1.0 wt% Au)과 열처리온도(상온, $110^{\circ}C$, $130^{\circ}C$, $150^{\circ}C$)에 따른 광학적 전기적 특성을 조사하였다. 최대전력변환효율을 갖는 유기태양전지는 0.5 wt% 금 나노입자 첨가한 소자와 $130^{\circ}C$에서 열처리한 소자에서 관찰되었다. 이때 유기태양전지의 전기적 특성은 금 나노입자를 0.5 wt% 첨가한 경우, 단락전류밀도, 곡선인자 및 전력변환효율은 각각 10.2 $mA/cm^2$, 55.8% 및 3.1%로 나타났으며, $130^{\circ}C$에서 열처리한 경우, 12.0 $mA/cm^2$의 단락전류밀도와 64.2%의 곡선인자를 가지며, 4.0%의 전력변환효율이 관찰되었다.