• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.214.2-214.2
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• 2013

Device performance for the 45 and 32 nm node CMOS technology requires the integration of ultralow-k materials. To lower the dielectric constant for PECVD and spin-on materials, partial replacement of the solid network with air (k=1.01) appears to be more intuitive and direct option. This can be achieved introducting of second "labile" phase during depositoin that is removed during a subsequent UV curing and annealing step. Besides, with shrinking line dimensions the resistivity of barrier films cannot meet the International Technology Roadmap for Semiconductors (ITRS) requirements. To solve this issue self-forming diffusion barriers have drawn attention for great potential technique in meeting all ITRS requirments. In this present work, we report a Cu-V alloy as a materials for the self-forming barrier process. And we investigated diffusion barrier properties of self-formed layer on low-k dielectrics with or without UV curing treatment. Cu alloy films were directly deposited onto low-k dielectrics by co-sputtering, followed by annealing at various temperatures. X-ray diffraction revealed Cu (111), Cu (200) and Cu (220) peaks for both of Cu alloys. The self-formed layers were investigated by transmission electron microscopy. In order to compare barrier properties between V-based interlayer on low-k dielectric with UV curing and interlayer on low-k dielectric without UV curing, thermal stability was measured with various heat treatment temperature. X-ray photoelectron spectroscopy analysis showed that chemical compositions of self-formed layer. The compositions of the V based self-formed barriers after annealing were strongly dominated by the O concentration in the dielectric layers.

• Journal of the Korean Ceramic Society
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• v.47 no.6
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• pp.515-523
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• 2010

Porous SiC candle filter preforms were fabricated by extrusion and ramming process. To fabricate SiC candle filter preform, commercially available F180 mesh ($85\;{\mu}m$) $\alpha$-SiC powder and $44\;{\mu}m$ mullite, $CaCO_3$ powder were used as the starting materials. The candle type preforms were fabricated by vacuum extrusion and ramming process, and sintered at $1400^{\circ}C$ 2 h in air atmosphere. Corrosion test of the sintered candle filter specimens as forming method was performed at $600^{\circ}C$ for 2,400 h in simulated IGCC syngas atmosphere. The effect of forming method on mechanical properties, pore distribution, microstructure and crystalline phase was investigated.

• Journal of the Korean Ceramic Society
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• v.46 no.6
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• pp.662-667
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• 2009

Porous SiC candle filter preforms were fabricated by extrusion and ramming process. To fabricate SiC candle filter preform, commercially available 85 ${\mu}m\;{\alpha}-$-SiC powder and 44 ${\mu}m$ mullite, CaC$O_3$ powder were used as the starting materials. The candle type preforms were fabricated by vacuum extrusion and ramming process, and sintered at $1400{^{\circ}C}$ 2 h in air atmosphere. The effect of forming method on porosity, density, strength (flexural and compressive strength) and microstructure was investigated. Also, corrosion test of the sintered candle filter specimens as forming method was performed at $600{^{\circ}C}$ in IGCC syngas atmosphere. The sintered SiC filter which was formed by ramming process has more higher density and exhibit higher strength than extruded filter. Its maximum density and 3-point bending strength were 2.00 g/$cm^3$ and 45 MPa, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.256-256
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• 2012

Oxide semiconductors such as zinc tin oxide (ZTO) or indium gallium zinc oxide (IGZO) have attracted a lot of research interest owing to their high potential for application as thin film transistors (TFTs) [1,2]. However, the instability of oxide TFTs remains as an obstacle to overcome for practical applications to electronic devices. Several studies have reported that the electrical characteristics of ZnO-based transistors are very sensitive to oxygen, hydrogen, and water [3,4,5]. To improve the reliability issue for the amorphous InGaZnO (a-IGZO) thin-film transistor, back channel passivation layer is essential for the long term bias stability. In this study, we investigated the instability of amorphous indium-gallium-zinc-oxide (IGZO) thin film transistors (TFTs) by the back channel contaminations. The effect of back channel contaminations (humidity or oxygen) on oxide transistor is of importance because it might affect the transistor performance. To remove this environmental condition, we performed vacuum seasoning before the deposition of hybrid passivation layer and acquired improved stability. It was found that vacuum seasoning can remove the back channel contamination if a-IGZO film. Therefore, to achieve highly stable oxide TFTs we suggest that adsorbed chemical gas molecules have to be eliminated from the back-channel prior to forming the passivation layers.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.8
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• pp.180-188
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• 2000

Fine multi-hole sheet metal product(FMSMP) is a specific metal plate which is used in color TV and computer monitor. Processes of manufacturing FMSMP are generally composed of coating cleaning exposure and etching processes. After a thin metal plate is made by rolling photosensitive liquid is coated on the metal plate in coating process. Then the coated thin metal plate consecutively passes through exposure process in which upper and lower glasses are compressed by vacuuming the space between glasses and metal plate. In this lowered glasses are compressed by vacuuming the space between glasses and metal plate. In this lowered vacuum state certain part of metal plate is desirably exposed to light and will be etched into forming lots of well-arranged holes with a specific diameter, nowadays to manufacture FMSMP of 17 inch braun tube 80 second is required for complete vacuum but 35 second is applied to manufacture FMSMP in reality. In the present study vacuuming time is tried to reduce for improvement of productivity by analyzing vacuum system and proposing several solutions, for faster vacuuming speed degree of vacuum state between glasses and metal plate is improved by the proposed method and experiments using the proposed method are performed for verification. In addition microstructure of FMSMP is investigated to prevent stain phenomena and to improve quality of the product.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.267-270
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• 2009

In the present investigation, we are newly developing a new forming process which can fabricate micro patterns on large-area polymeric substrates for high speed mass production. The key idea of the new process is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature ($T_g$) of the polymeric substrates. The new process is thought to be promising micro-pattern fabrication technique in three aspects; firstly, isostatic pressing ensures the uniform micro-pattern replicating condition regardless of the substrate area. Secondly, the control of forming condition such as temperature and pressure can realize well-defined process condition exploited in the conventional hot embossing research field. Thirdly, multiple substrates can be patterned at the same time. A prototype forming machine for the new process was developed with the design consideration realizing the present idea. With a developed machine, micro prismatic array patterns with 50 um in size were successfully made on the $380{\times}300{\times}6\;mm$ PMMA plate.

• Journal of Korea Foundry Society
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• v.26 no.2
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• pp.98-103
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• 2006

Metal-mold reactions between investment mold and TiAl alloys were investigated for the economic net-shape forming of TiAl alloys. The effect of mold preheating temperatures on the metal-mold reaction were investigated using a vacuum induction-melting furnace. In the case of TiAl alloys, there were no ${\alpha}$-case formation reactions. There were neither interstitial nor substitutional ${\alpha}$-case formations as TiAl alloys have both negligible solubility of oxygen and low activity in molten states. The fluidity of TiAl alloys increases with mold preheating temperature since they have a peritectic reaction that appears in the form of envelope, surrounding each particles of the primary constituent. The results of the investment casting of TiAl alloys confirm that the casting route in our study can be an effective approach for the economic net-shape forming of TiAl alloys.

• Journal of the Korean Magnetics Society
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• v.8 no.3
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• pp.125-130
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• 1998

13Cr-1.5Nb-Fe alloy powder was fabricated by water atomization method, and ring-shape specimen of this composition was fabricated by oil press, and then sintered in the vacuum furnace. Powder shape, size distribution, composition (C, N, O, S) analysis and saturation magnetization of as-prepared 13Cr-1.5Nb-Fe alloy powder were investigated. Ac permeability and power loss was measured after forming and sintering process. Saturation magnetization and contents of oxygen of the alloy powder is160 emu/g and about 6000 ppm, respectively. 50 % volume fraction indicate particle size of 70$\mu$m. The ac permeability of sintered specimen increases with increasing sintering temperature and forming pressure. The power loss is 107 W/cc at sintering temperature of 1200 $^{\circ}C$, 12 ton/$\textrm{cm}^2$ forming pressure, and 20 KHz. It is the lowest among the prepared specimen.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.167-176
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• 2001

The effects of heat treatments and testing temperatures on the mechanical properties of Invar materials were investigated through experiments, which call influence the formability in metal forming fields. Annealing temperatures were changed from $900^{\circ}C$ to $1200^{\circ}C$ with an increment of $100^{\circ}C$ under two different furnace atmosphere(vacuum and H$_2$gas). Microstructure and hardness tests were performed for annealed specimens at room temperature(RT) and tensile tests were also performed by changing annealing temperatures as well as testing temperatures from RT to $300^{\circ}C$. The grain size of annealed materials increased with increasing annealing temperature, while micro-hardness distributions showed almost same hardness values regardless of annealing temperatures. Strength ratio (tensile/yield strength), which influences the forming characteristics of sheet metal, remained almost constant for various experimental conditions in case of unannealed specimens. However, it showed increasing tendency with increasing both annealing and testing temperatures, particularly at the testing temperature higher than $200^{\circ}C$. Therefore it can be concluded that press formability of fully-annealed Invar material can be improved by warm forming technique.

• Composites Research
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• v.23 no.6
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• pp.61-66
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• 2010

In this paper, the variation of mechanical properties of T800 carbon/epoxy composites according to the forming pressure, which was referred to previous studies on a filament winding process, were investigated. The specimens of all the tests were fabricated by an autoclave de-gassing molding process controlling forming pressure (absolute pressures of 0.1MPa, 0.3MPa, 0.7MPa including vacuum) and water jet cutting after fabricating composite laminates. Various tensile tests were performed for in-plane properties and interlaminar properties were also measured by using Iosipescu test jig. Fiber volume fraction was measured to correlate the property variation and the forming pressure. This properties are expected to be utilized in the design of Type III pressure vessel for hydrogen vehicles which uses the same carbon fiber (T800 carbon fiber) for the filament winding process.