Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2009.10a
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- Pages.267-270
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- 2009
Development of New Micro Pattern Fabrication Process by U sing Isostatic Pressing
정수압을 이용한 미세 패턴 전사 신공정 개발
- Published : 2009.10.08
Abstract
In the present investigation, we are newly developing a new forming process which can fabricate micro patterns on large-area polymeric substrates for high speed mass production. The key idea of the new process is to pressurize multiple vacuum-packed substrate-mold stacks above the glass transition temperature (