• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.347-353
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• 2006

A helium permeation type standard leak calibration system has newly developed by using dynamic gas expansion method. The measurement range was extended lower to $10^{-6}$ Pa L/s for participating CCM (Consultative Committee for Mass and Related Quantities) standard leak key comparison. For the system, pressure ratios of high and ultra-high vacuum chamber and porous plug conductance for helium gas were determined. By using the system, a permeation type standard leak of $5.6{\times}10^{-4}$ Pa L/s range was calibrated. The calibration result showed that the difference between standard commercial leak was 11.1 %.

• Journal of the Korean Vacuum Society
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• v.7 no.1
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• pp.1-4
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• 1998

We have developed an extreme high vacuum (XHV) system using a new combination pump cpmposed of a suitably shaped NEG(Non-Evaporable Getters) in the body of a sputter-ion pump (SIP). The stainless-steel test chamber was used which had been well oxidized at $450^{\circ}C$ and already yielded XHV with a turbomolecular pumping system. The pressure was measured by a Leybold extractor gauge (EXG,limit:1~$2{\times}10^{-12}$torr, but in the ultimate pressure regionthe EXG shows an unusual sign as $-0.{\times}10^{-12}$ torr which indicates much lower pressure range than its available lower limit. These results are mainly due to the high pumping speed of NEG for hydrogen. Furthermore, use of the SIP combined with the NEG as a XHV pumping system implies the potential for actualization of the surface analysis under XHV environment, and allows one to have a chance tp meet a new world in nanometer science and technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.237-242
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• 1993

In the cluster tool, it is necessary to precisely control the vacuum pressure for the wafer transportation between transport module and cassette or process with the range of 10 $^{-4}$ to 5*10 $^{-5}$ torr. So we have designed the pressure control system for the transport module of the cluster tool and have evaluated its performance. Digital PID is utilized with the weighted sum of both three previous errors and one current error. The feedback signal is put into the nitrgen mass flow controller using the transport module controller. This pressure control system can prevent the transport module from the particle generation and backstreaming of hazardous process gases of the process chamber.

• Journal of Ceramic Processing Research
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• v.17 no.7
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• pp.763-767
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• 2016

The structural characterization of cubic boron nitride (c-BN) thin films was performed using a B4C target in a radio-frequency magnetron sputtering system. The deposition processing conditions, including the substrate bias voltage, substrate temperature, and base pressure were varied. Fourier-transform infrared spectroscopy and X-ray photoelectron spectroscopy were used to analyze the crystal structures and chemical binding energy of the films. For the BN film deposited at room temperature, c-BN was formed in the substrate bias voltage range of -400 V to -600 V. Less c-BN fraction was observed as the deposition temperature increased, and more c-BN fraction was observed as the base pressure increased.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.705-708
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• 2003

To observe a hydrated biological specimen, an environmental chamber was necessary to keep the specimen in a wet state under vacuum surroundings. The specimen holder is as follows designed consequently. The specimen holder consisted of two Si wafers, the centers of which were Si$_3$N$_4$(100nm thickness) windows of a 0.3mm square. The windows were made by a photo-lithographic method. The transmission of a window at 400eV is about 70%. A hydrated biological specimen was put between the two windows. When the chamber was closed, two wafers were contact at the metal mesh by the pressure of O-rings, and the specimen holder moved by the three micrometers.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.05a
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• pp.349-352
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• 2010

A study is analyzed on the transient flow of supersonic diffuser and performed on the of supersonic diffuser with Computational Fluid Dynamic. The flow field of supersonic diffuser is calculated using Axisymmetric two-dimensional Navier-Stokes equation with $k-{\epsilon}$ turbulence model. The transient simulation is compared in terms of mach number and temperature of vacuum chamber according to the chamber pressure of starting transient on Liquid rocket engine.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.135-138
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• 2011

As a basic research for the development of Korean lunar lander, propulsion system development for ground test is in progress. Thrust for descent is 200 N class. Design target is 220 N in vacuum thrust at 100 g/s flow rate, 200 psi chamber pressure. For ground test, thrust measurement system using LM guide was developed and test was performed. The result shows 160 N thrust in atmosphere condition at 210 psi chamber pressure.

• Journal of the Korean Geotechnical Society
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• v.38 no.12
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• pp.125-134
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• 2022

The Global Expansion Roadmap published by the International Space Exploration Coordination Group, which is organized by space agencies around the world, presents future lunar exploration guidance and stresses a lunar habitat program to utilize lunar resources. The Moon attracts attention as an outpost for deep space exploration. Simulating lunar surface environments is required to evaluate the performances of various equipment for future lunar surface missions. In this paper, an experimental study was conducted to simulate high vacuum pressure and cryogenic temperature of the permanent shadow regions in the lunar south pole, which is a promising candidate for landing and outpost construction. The establishment of an efficient dirty thermal vacuum chamber (DTVC) operation process has never been presented. One-dimensional ground cooling tests were conducted with various vacuum pressures with the Korean Lunar Simulant type-1 (KLS-1) in DTVC. The most advantageous vacuum pressure was found to be 30-80 mbar, considering the cooling efficiency and equipment stability. However, peripheral cooling is also required to simulate a cryogenic for not sublimating ice in a high vacuum pressure. In this study, an efficient peripheral cooling operation process was proposed by applying the frost ratio concept.

• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.20-27
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• 1997

We have investigated the formation techniques of copper thin films which would be useful for sub-quarter-micron integrated circuits. A chemical vapor deposition technology has been tried for the better side wall formation of the thin films, and a metal organic compound, named (hface)Cu(VTMS) (hexafluoroacetylacetonate vinyltrimethylsilane copper(I)) was used as the precursors. We have deposited the copper thin films on TiN and $SiO_2$substrates. The film resistivity and deposition selectivity have been measured as functions of substrate temperature and chamber pressure. Best electrical properties were obtained at $180^{\circ}C$ of substrate temperature and 0.6 Torr of chamber pressure. Under the optimum deposition conditions, polycrystalline copper structures were observed to be grown, and the deposition rate of 120 nm/min was measured. The electrical resistivity as low as 0.25$mu \Omega$.cm, and the surface roughness of 15.5 nm were also measured. These are the suitable electrical and material properties required in the sub-quarter-micron device fabrication. Also, in the substrate temperature range of 140-$250^{\circ}C$, high deposition selectivity was observed between TiN and $SiO_2$.

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.197-202
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• 2009

The long term stability of ion current of QMS has been one of key parameters for monitoring gas process in vacuum. The time dependence of ionic current was monitored while the pressure of nitrogen gas was kept at a fixed pressure by introducing the gas into vacuum chamber. The chamber was evacuated to ${\sim}3{\times}10^{-9}\;Torr$ to reduce background signals before the measurement. Two ion sources were tested; one had brownish or black color due to gas contamination and the other one was new, i.e. cleaner. At a nitrogen pressure of $1{\times}10^{-5}\;Torr$, the ionic currents measured by the contaminated ion source decreased faster with time. The decrease rate was respectively ${\sim}46%$ for cleaner one and ${\sim}84%$ for contaminated one after ${\sim}5.5%$ hours. In order to test the effect of filament material on the ion current decrease, we fabricated a tungsten(W) filament which consisted of two parts; one half was made of W and the other was coated with yttria. The similar decrease of ionic currents were shown for the two types of filaments, indicating that slight change of temperature of filament due to material difference i.e. baking effect could not improve the origin of ionic current decrease. Overall the decreasing rate of ionic current is more closely associated with contaminated ion source of QMS rather than its filament materials.