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Rear Surface Passivation with Al2O3 Layer by Reactive Magnetron Sputtering for High-Efficiency Silicon Solar Cell

  • Moon, Sun-Woo;Kim, Eun-Kyeom;Park, Won-Woong;Jeon, Jun-Hong;Choi, Jin-Young;Kim, Dong-Hwan;Han, Seung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.211-211
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    • 2012
  • The electrical loss of the photo-generated carriers is dominated by the recombination at the metal- semiconductor interface. In order to enhance the performance of the solar cells, many studies have been performed on the surface treatment with passivation layer like SiN, SiO2, Al2O3, and a-Si:H. In this work, Al2O3 thin films were investigated to reduce recombination at surface. The Al2O3 thin films have two advantages, such as good passivation properties and back surface field (BSF) effect at rear surface. It is usually deposited by atomic layer deposition (ALD) technique. However, ALD process is a very expensive process and it has rather low deposition rate. In this study, the ICP-assisted reactive magnetron sputtering method was used to deposit Al2O3 thin films. For optimization of the properties of the Al2O3 thin film, various fabrication conditions were controlled, such as ICP RF power, substrate bias voltage and deposition temperature, and argon to oxygen ratio. Chemical states and atomic concentration ratio were analyzed by x-ray photoelectron spectroscopy (XPS). In order to investigate the electrical properties, Al/(Al2O3 or SiO2,/Al2O3)/Si (MIS) devices were fabricated and characterized using the C-V measurement technique (HP 4284A). The detailed characteristics of the Al2O3 passivation thin films manufactured by ICP-assisted reactive magnetron sputtering technique will be shown and discussed.

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Behavior of Rare Earth Elements in Synthetic Fluorapatites Revealed by Rietveld Structure Refinement Data (리트벨트법에 의한 합성인회석 내의 희토류 원소의 거동에 관한 연구)

  • 문용희;최진범;이병임
    • Journal of the Mineralogical Society of Korea
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    • v.13 no.4
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    • pp.221-230
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    • 2000
  • 이성분 희토류 원소로 치환된 4종류의 합성불화인회석(synthetic fluorapatite) (Ap49: La+Gd, Ap50:Ce+Dy, Ap51: Pr+Er, Ap54: Eu+Lu; $Ca{10-x-2y}$ $Na_{y}$ $REE_{x+y}$($P_{1-x}$ //$Si_{x}$ $_{4}$)$_{6}$ $F_{2}$, x=0.13~0.12, y=0.26~0.42)을 대상으로 X-선 회절분석을 통해 얻어진 자료를 이용하여 리트벨트 구조분석을 실시하고 치환된 희토류원소의 거동을 단결정법으로 구해진 결과와 비교.분석하였다. 리트벨트 구조분석결과 합성불화인회석은 공간군 $P6_3$/m, 단위포는 평균하여 a=9.3906(1) $\AA$, c=6.8924(1) $\AA$, V=527.36 $\AA^3$의 값을 갖는다. 구조의 정밀도를 나타내는 R 지수를 보면 $R_{B}$ / 값은 17.29~18.80이고 S(GofF)값은 1.44~1.68로 계산되었다. 불화인회석은 9개의 산소를 배위하는 Ca1자리와 6개의 산소와 하나의 불소가 배위하는 Ca2자리가 있으며 Ca1-O의 평균거리는 2.563 $\AA$이고 Ca2-O의 평균거리는 $2.460 \AA$으로 Ca1자리가 Ca2자리보다 다소 크다. 구조자리 치환식에서는 $Ca^{2+}$ / 자리를 치환하는 $REE^{3+ }$ 로 인하여 전하균형을 맞춰주기 위해서 인과규소가 함께 참여하였다. ($REE^{3}$+Si$^{ 4+}$ $2Ca^{2+}$ : Ca1) 계산된 희토류원소의 자리점유율(REE-Ca2/REE-Cal)은 원자번호가 증가함에 따라 일정하게 감소하는 경향을 보여주며 이는 희토류원소의 거동이 LREE는 크기가 상대적으로 작은 Ca2 자리에 우선 치환되고 HREE는 크기가 큰 Ca1자리에 우선 치환되는 경향을 지시한다.

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The Etching Mechanism of $CeO_2$ Thin Films using Inductively Coupled Plasma (유도 결합 플라즈마를 이용한 $CeO_2$ 박막의 식각 메카니즘)

  • 오창석;김창일
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.695-699
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    • 2001
  • Cerium dioxide (CeO$_2$) was used as the intermediate layer between the ferroelectric thin film and Si substrate in a metal-ferroelectric-semiconductor field effect transistor (MFSFET), to improve the interface property by preventing the interdiffusion of the ferroelectric material and the Si substrate. In this study, CeO$_2$ thin films were etched with a CF$_4$/Ar gas combination in inductively coupled plasma (ICP). The maximum etch rate of CeO$_2$ thin films was 270$\AA$/min under CF$_4$/(CF$_4$+Ar) of 0.2, 600 W/-200V, 15 mTorr, and $25^{\circ}C$. The selectivities of CeO$_2$ to PR and SBT were 0.21, 0.25, respectively. The surface reaction in the etching of CeO$_2$ thin films was investigated with x-ray photoelectron spectroscopy (XPS). There is a chemical reaction between Ce and F. Compounds such as Ce-F$_{x}$ remains on the surface of CeO$_2$ thin films. Those products can be removed by Ar ion bombardment. The results of secondary ion mass spectrometry (SIMS) were consistent with those of XPS. Scanning electron microscopy (SEM) was used to examine etched profiles of CeO$_2$ thin films. The etch profile of over-etched CeO$_2$ films with the 0.5${\mu}{\textrm}{m}$ line was approximately 65$^{\circ}$.>.

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Composition Control of a Light Absorbing Layer of CuInSe2 Thin Film Solar Cells Prepared by Electrodeposition (전착법을 이용한 CuInSe2 박막태양전지 광활성층의 조성 조절)

  • Park, Young-Il;Kim, Donghwan;Seo, Kyungwon;Jeong, Jeung-Hyun;Kim, Honggon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.3
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    • pp.232-239
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    • 2013
  • Thin light-active layers of the $CuInSe_2$ solar cell were prepared on Mo-coated sodalime glass substrates by one-step electrodeposition and post-annealing. The structure, morphology, and composition of $CuInSe_2$ film could be controlled by deposition parameters, such as the composition of metallic precursors, the concentration of complexing agents, and the temperature of post-annealing with elemental selenium. A dense and uniform Cu-poor $CuInSe_2$ film was successfully obtained in a range of parametric variation of electrodeposition with a constant voltage of -0.5 V vs. a Ag/AgCl reference electrode. The post-annealing of the film at high temperature above $500^{\circ}C$ induced crystallization of $CuInSe_2$ with well-developed grains. The KCN-treatment of the annealed $CuInSe_2$ films further induced Cu-poor $CuInSe_2$ films without secondary phases, such as $Cu_2Se$. The structure, morphology, and composition of $CuInSe_2$ films were compared with respect to the conditions of electrodeposition and post-annealing using SEM, XRD, Raman, AES and EDS analysis. And the conditions for preparing device-quality $CuInSe_2$ films by electrodeposition were proposed.

Structures and some Properties of the Antimicrobial Compounds in the Red Alga, Symphyocladia latiuscula (참보라색우무에서 추출한 항균물질의 구조 및 특성)

  • LIM Chi-Won;LEE Jong-Soo;CHO Young-Je
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.33 no.4
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    • pp.280-287
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    • 2000
  • Three antimicrobial compounds (SL-l, SL-2 and SL-3) were isolated and identified from the marine red alga, Symphyocladia latiuscula. In addition, their biological functionalities such as cytotoxicity and desmutagenic activity were investigated. From the cryophyllized S. JatiuscuJa, SL-l, SL-2 and SL-3 were purified by solvent extractions and HPLC.SL-2 was crystallized in benzene-diethyl ether solvent. On the EI-MS spectra, it was found that they had three bromines in their structure which showed typical signal strength ratios at $M^+, [M+2]^+, [M+4]^+, [M+6]^+ (13: 38: 37: 12)$. $SL-l$ was identified as 2,3,6-tribromo-4,5-dihydroxybenzyl alcohol ($C_8H_7Br_3O_3, MW=374$) by NMR and MS spectra. SL-2 was assigned as 2,3,6-tribromo-4,5-dihydroxybenzyl methyl ether ($C_8H_7Br_3O_3, MW=388$) and confirmed by X-ray crystallographic analysis. SL-3 was presumed as an isomer of SL-2. Methanol extract of the S. latiuscula showed antimicrobial activities against all strains tested (bacteria, 15 strains; yeasts, 17 strains; fungi, 4 strains), much or less. The strongest inhibition activity of the methanol extract was to the Vibrio mimicus ($50 {\mu}g/ml$) and V. vulnificus ($50 {\mu}g/ml$). The mice injected intraperitoneally with 3 mg of SL-l and 5 mg of 5L-2 showed no acute toxicity response. SL-2 showed higher desmutagenic activity than SL-l against PhIP and MeIQx.

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Factors Influencing on the Drop of in vitro Protein Digestibility in Dried Fish Meat (건어육(乾魚肉) 저장(貯藏)중의 단백질(蛋白質) 소화율(消化率) 저하요인(低下要因))

  • Kim, Sang-Ae;Lee, Kang-Ho;Ryu, Hong-Soo
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.15 no.1
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    • pp.45-55
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    • 1986
  • This paper aims to study the reactions of lipid or oxidized lipid with protein during drying and storing hair tail fish(Trichurus lepturus) and flounder(Kanakius kitaharai) being generally consumed as dried seafood products in Korea and their influence on the drop of in vitro protein digestibility of these fish meat. The results of the study are as follows: The digestibility of the raw materials of flounder and hair tail fish was 87.63% and 86.08% respectively, and that of sundried and hot air dried materials went down $1{\sim}2$ percent with drying process. But in case of defatted and sundried materials, the rate increased 85.15% and 87.15% respectivley. After 30 days of storage, the digestibility decreased in all materials, and hot air dried meat showed a significant decrease. Trypsin indigestible substrate (TIS) contents of flounder and hair tail fish, in case of raw materials were 0.88 and 0.96mg/g. solid repectiveiy and in case of defatted and sundried materials, TIS contents showed a low increase and digestibility showed a high increase. Brown pigment formation had a wide range of increase in case of the sundried and hot air dried materials and it was increased with duration of storage and temperature. The major fatty acids in the fats of hair tail fish and flounder were $C_{18:1},\;C_{16:0},\;C_{22:6}\;and\;C_{16:1}$ and rate of unsaturated to saturated fatty acids was 79.2:20.8 for flounder, 67.8:32.2 for hair tail fish. After 30 days of storage at room temperature. saturated fatty acids increased compared with the raw materials while unsaturated fatty acids showed a tendency to decrease. Avaialble lysine of hair tail fish was higher than that of flounder and both of them lost about 8.23% of that in raw materials after 30 days of storage.

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Baggage Limitations of Liability of Air Carrier under the Montreal Convention (몬트리올협약상 항공여객운송인의 수하물 책임 - 2012년 11월 22일 EU 사법재판소 C-410/11 판결의 평석 -)

  • Kim, Young-Ju
    • The Korean Journal of Air & Space Law and Policy
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    • v.30 no.1
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    • pp.3-29
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    • 2015
  • In case of C-410/11, Pedro Espada $S\acute{a}nchez$ and Others v Iberia $L\acute{i}neas$ $A\acute{e}reas$ de $Espa\tilde{n}a$ SA., ECLI:EU:C:2012:747, the passengers of a flight between Barcelona and Paris, whose baggage had been lost, lodged a claim before a Spanish court, asking for compensation. More specifically, the claimants were a family of four (two adults and two children), and had stored all their personal items in two suitcases, which had been checked in and tagged but never returned to the passengers in question. The four claimants relied on the Montreal Convention, ratified by the EU, which provides that each passenger can claim up to 1,000 SDRs in compensation (i.e. ${\euro}1,100$) in case his or her baggage is lost; thus, they sought to recover ${\euro}4,400$ (4,000 SDRs, i.e. 1,000 SDRs x4). The preliminary reference issue raised by the Spanish court to the CJEU regarded the $Montr\acute{e}al$ Convention's correct interpretation; in particular, it asked whether compensation should be available only to passengers whose lost baggage had been checked in "in their own name" or whether it is also available to passengers whose personal items had been stored in the (lost) baggage of a different passenger. The CJEU held that compensation had to be granted to all passengers whose items had been lost, regardless of whether these had been stored in baggage checked in "in their own name." In fact, it maintained that the real aim of the $Montr\acute{e}al$ convention is to provide passenger-consumers with protection for the loss of their personal belongings, so the circumstance of where these were being carried is not relevant. Nevertheless, the CJEU clarified that it is for national courts to assess the evidence regarding the actual loss of an item stored in another passenger's baggage, and maintained that the fact that a group of people were travelling together as a family is a factor that may be taken into account.

Estimation of the Moisture Maximizing Rate based on the Moisture Inflow Direction : A Case Study of Typhoon Rusa in Gangneung Region (수분유입방향을 고려한 강릉지역 태풍 루사의 수분최대화비 산정)

  • Kim, Moon-Hyun;Jung, Il-Won;Im, Eun-Soon;Kwon, Won-Tae
    • Journal of Korea Water Resources Association
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    • v.40 no.9
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    • pp.697-707
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    • 2007
  • In this study, we estimated the PMP(Probable Maximum Precipitation) and its transition in case of the typhoon Rusa which happened the biggest damage of all typhoons in the Korea. Specially, we analysed the moisture maximizing rate under the consideration of meteorological condition based on the orographic property when it hits in Gangneung region. The PMP is calculated by the rate of the maximum persisting 12 hours 1000 hPa dew points and representative persisting 12 hours 1000 hPa dew point. The former is influenced by the moisture inflow regions. These regions are determined by the surface wind direction, 850 hPa moisture flux and streamline, which are the critically different aspects compared to that of previous study. The latter is calculated using statistics program (FARD2002) provided by NIDP(National Institute for Disaster Prevention). In this program, the dew point is calculated by reappearance period 50-year frequency analysis from 5% of the level of significant when probability distribution type is applied extreme type I (Gumbel distribution) and parameter estimation method is used the Moment method. So this study indicated for small basin$(3.76km^2)$ the difference the PMP through new method and through existing result of established storm transposition and DAD(Depth-Area-Duration). Consequently, the moisture maximizing rate is calculated in the moisture inflow regions determined by meteorological fields is higher $0.20{\sim}0.40$ range than that of previous study. And the precipitation is increased $16{\sim}31%$ when this rate is applied for calculation.

Electrical Characteristics According to the Manufacturing Process of the Flexible Li/MnO2 Primary Cell (플렉서블 Li/MnO2 일차전지의 제조공정에 따른 전기적 특성)

  • Lee, Mi-Jai;Chae, Yoo-Jin;Kim, Jin-Ho;Hwang, Jong-Hee;Park, Sang-Sun
    • Korean Journal of Materials Research
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    • v.22 no.12
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    • pp.717-721
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    • 2012
  • Manganese dioxide ($MnO_2$) is one of the most important cathode materials used in both aqueous and non-aqueous batteries. The $MnO_2$ polymorph that is used for lithium primary batteries is synthesized either by electrolytic (EMD-$MnO_2$) or chemical methods (CMD-$MnO_2$). Commonly, electrolytic manganese dioxide (EMD) is used as a cathode mixture material for dry-cell batteries, such as a alkaline batteries, zinc-carbon batteries, rechargeable alkaline batteries, etc. The characteristics of lithium/manganese-dioxide primary cells fabricated with EMD-$MnO_2$ powders as cathode were compared as a function of the parameters of a manufacturing process. The flexible primary cells were prepared with EMD-$MnO_2$, active carbon, and poly vinylidene fluoride (PVDF) binder (10 wt.%) coated on an Al foil substrate. A cathode sheet with micro-porous showed a higher discharge capacity than a cathode sheet compacted by a press process. As the amount of EMD-$MnO_2$ increased, the electrical conductivity decreased and the electrical capacity increased. The cell subjected to heat-treatment at $200^{\circ}C$ for 1 hr showed a high discharge capacity. The flexible primary cell made using the optimum conditions showed a capacity and an average voltage of 220 mAh/g and 2.8 V, respectively, at $437.5{\mu}A$.

Crystal Structures and Thermal Properties of 2,6-Dinitrophenol Complexes with Lanthanide Series

  • Kim, Eun-Ju;Kim, Chong-Hyeak;Kim, Jae-Kyung;Yun, Sock-Sung
    • Bulletin of the Korean Chemical Society
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    • v.29 no.6
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    • pp.1157-1161
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    • 2008
  • 2,6-Dinitrophenol (2,6-DNP) complexes with lanthanide series including yttrium (except Pm, Tm, and Lu) have been synthesized and their crystal structures have been analyzed by X-ray diffraction methods. Singlecrystal X-ray structure determinations have been performed at 296 K on the Ce$\rightarrow$Yb species and shown them to be isomorphous, triclinic, P1, a = 8.6558(2)$\rightarrow$8.5605(3) $\AA$, b = 11.8813(3)$\rightarrow$11.6611(4) $\AA$, c = 13.9650(3) $\rightarrow$13.8341(5) $\AA$, $\alpha$ = 73.785(1)$\rightarrow$73.531(2)o, $\beta$ = 74.730(1)→74.903(2)${^{\circ}}$, $\gamma$ = 69.124(1)→ 69.670 $(2){^{\circ}}$, V = 1266.86(5)→1221.53(7) $$\AA^{3}$$, Z = 2. In Ln(III) complexes, three 2,6-DNP ligands coordinate directly to the metal ion in the bidentate fashion. The nine coordinated Ln(III) ion forms slightly distorted tri-capped trigonal prism. There are no water molecules in the crystal lattice. The dependences of metal to ligand bond lengths are discussed on the atomic number of lanthanide elements. The thermal properties of lanthanide complexes of 2,6- DNP have also studied by TG-DTG and DSC thermal analysis methods.