• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2008-2010
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• 2002

Process conditions of a novel negative thick photoresist, JSR THB-$430N^{(R)}$, are established in this paper. Although SU-8 obtains uniform and high-aspect-ratio structures, it is hard to remove the SU-8 mold after electroplating. The JSR THB-$430N^{(R)}$ can be more easily removed than the SU-8 and has a low internal stress. Introducing two step strip processes using acetone and the jSR THB-$S1^{(R)}$, the JSR THB-$430N^{(R)}$ electroplating mold was removed completely and a JSR THB-$430N^{(R)}$ film stress is compressive less than 2 MPa. In this paper, we obatined $200{\mu}m$ thick PR structure and $100{\mu}m$ thick electroplated nickel structure using the JSR THB-$430N^{(R)}$ photoresist.

• Journal of Surface Science and Engineering
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• v.38 no.6
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• pp.234-240
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• 2005

In this study, ion nitriding of a EHA pump part made of AISI 4340 steel was performed under different applied power conditions to study the relationship between dimensional changes of specimens and the type of applied power source. Microstructures and micohardness distribution at different processing conditions were also examined. Duplex surface treatment of ion nitriding with the optimum process conditions to produce the minimum dimensional variation in a EHA pump part and a TiN thin film coating by unbalanced magnetron sputtering was performed and the specimens with a duplex surface treatment were subjected to a high speed wear test to evaluate the wear performance of EHA hydraulic pump parts with various surface treatment conditions. Results indicated that uniform and continuous surface layer with a minimum dimensional variation could be obtained by ion nitriding with bipolar mode power source and much enhanced wear characteristics with a duplex surface treatment could be obtained, compared with results from ion nitriding or single-layerd TiN coating specimens.

• Journal of Surface Science and Engineering
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• v.47 no.4
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• pp.155-161
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• 2014

The present work is concerned with the formation behavior of anodic oxide films on Al7075 alloy under a galvanostatic condition in 20 vol.% sulfuric acid solution. The formation behaviour of anodic oxide films was studied by the analyses of voltage-time curves and observations of colors, morphologies and thicknesses of anodic films with anodization time. Hardness of the anodic oxide films was also measured with anodization time and at different positions in the anodic films. Six different stages were observed with anodiziation time : barrier layer formation (stage I), pore formation (stage II), growth of porous films (stage III), abnormal rapid oxide growth (stage IV), growth of non-uniform oxide films (stage V) and breakdown of the thick oxide films under high anodic voltages (stage VI). Hardness of the anodic oxide films appeared to decrease with increasing anodization time and with the position towards the outer surface. This work provides useful information about the thickness, uniformity, imperfections and hardness distribution of the anodic oxide films formed on Al7075 alloy in sulfuric acid solution.

• Journal of Sensor Science and Technology
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• v.18 no.4
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• pp.311-315
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on AlN(0.1 $\mu$m)/3C-SiC(1.0 $\mu$m) suspended membranes by surface micro-machining technology. The 3C-SiC and AlN thin films which have wide energy band gap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3CSiC RTD(resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR(thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 ppm/$^{\circ}C$ within a temperature range from 25 $^{\circ}C$ to 50 $^{\circ}C$ and -1040 ppm/$^{\circ}C$ at 500 $^{\circ}C$. The micro heater generates the heat about 500 $^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than Pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.45 no.4
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• pp.21-26
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• 2013

The effect of esterified starch as surface sizing agent for inkjet printing paper has been evaluated and compared with oxidized starch. Also the influence of various additives including cationic poly-DADMAC, stearic acrylic copolymer, calcium chloride, and GCC was examined. Results showed that starch ester gave higher ink density than oxidized starch. Addition of poly-DADMAC improved water fastness. In general, low molecular weight poly-DADMAC performed better than high molecular weight one, and it was attributed to the fact that it gave more uniform film forming characteristics in surface sizing. Use of styrene acrylic acid copolymer increased hydrophobicity of the paper surface, but it did not increase the ink density. Use of GCC and calcium chloride had only marginal effect on printing quality.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.10
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• pp.1007-1014
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• 2004

This paper presents a study of low frequencies volume velocity vibration control of a smart panel in order to reduce sound transmission. A distributed piezoelectric quadratically shaped polyvinylidene fluoride (PVDF) polymer film is used as a uniform force actuator and an array of $4\;{\times}\;4$ accelerometer is used as a volume velocity sensor for the implementation of a single-input single-output control system. The theoretical and experimental study of sensor-.actuator frequency response function shows that this sensor-actuator arrangement provides a required strictly positive real frequency response function below about 900 Hz. Direct velocity feedback could therefore be implemented with a limited gain which gives reductions of about 15 dB in vibration level and about 8 dB in acoustic power level at the (1,1) mode of the smart panel. It has been also shown that the shaping error of PVDF actuator could limit the stability and performance of the control system.

• Progress in Superconductivity
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• v.7 no.2
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• pp.158-161
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• 2006

Superconducting YBCO films were successfully fabricated by MOD process using chemically modified precursor solution. In this study, a chemically modified precursor solution for MOD processing was synthesized using metal-organic salts and organic additives. It was shown that crack-free and uniform precursor films were formed after calcination in humidified Oxygen atmosphere. Less than 3 hours are required to finish the calcination process. XRD measurement shows that $BaF_2,\;CuO,\;Y_2O_3$ are major constituent of precursor films. Furthermore, YBCO films without any secondary phases were successfully fabricated after annealing in wet $Ar/O_2$ atmosphere. The YBCO film prepared on a $LaAlO_3$ single crystal substrate ($10mm{\times}10mm$) gives transport $I_c$ of 10A at 77K. This chemical modification approach is a possible candidate for improving MOD-processing of YBCO coated conductor.

• Transactions of the Korean Society of Automotive Engineers
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• v.13 no.5
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• pp.64-74
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• 2005

The effect of fuel injection spray on engine performance has been known as one of the major concerns for improving fuel economy and reducing emissions. In general, reducing the spray droplet size could prevent HC emission in gasoline engine. As far as PFI gasoline engine is concerned, the mixture of air and fuel may not be uniform under a certain condition, because breakup and production of spray droplets are made in a short distance between the fuel injector and intake valve. This study, by constituting PFI gasoline spray system, was performed to study the transient spray characteristics and dynamic behavior of droplets from two-holes two-sprays type injector used in DOHC gasoline engine. Mean droplet size and optical concentration in accordance with various conditions were measured by LDPA and CCD camera. Through this study, the variation of drop size and optical concentration could be used for understanding the behavior of unsteady spray was declared and the existing the small droplets between each pulse spray could be estimated caused to the development of wall film was conformed.

• Journal of Surface Science and Engineering
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• v.51 no.1
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• pp.34-39
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• 2018

Steel crucible used for molten Al has a problem of very limited lifetime because of the interaction between Fe and molten Al. This study was performed to improve the lifetime of steel crucible for molten Al by coating metallic Al and by further anodizing treatment to form thick and uniform anodic oxide films. The lifetime of the steel crucible was improved slightly by Al coating from 30 to 40 hours by metallic Al coating and largely to 120 hours by coating the surface with anodic oxide film. The improved lifetime was attributed to blocking of the reaction between Fe and molten Al with the help of anodic oxide layer with more than 20 um thickness on the crucible surface. The failure of the steel crucible arises from the formation of intermetallic compounds and pores at the steel/Al interface.