• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.608-611
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• 2003

In this paper, laser direct micromaching is developed to fabricate micro patterns using UV laser ( λ$_3$= 355 nm). Experimentally, laser beam paths mainly influences the surface shape quality. Thus. we proposed laser beam path generator by extracting shape data in a blueprint worked through CAD modeler and using genetic algorithm that considers the characteristics of laser beam. The results show that various shapes of micro patterns could be manufactured using proposed method in this paper.

• Journal of the Microelectronics and Packaging Society
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• v.16 no.4
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• pp.33-39
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• 2009

A microlens array (MLA) was developed based on the wet-etched quartz substrate and coating of UV adhesive on the substrate for maskless lithography application. The developed MLA has the focal length of ${\sim}45\;{\mu}m$ and the spot size of ${\sim}1\;{\mu}m$. The spot size of the focused beam passing through the MLA was detected by CCD camera, and its intensity was monitored by beam profiler. Uniform spots with nearly identical intensities were observed on the focal plane when a beam passes through the fabricated MLA. The focal length was varied depending on thickness of the coated UV adhesive. The thicker the thickness of the UV adhesive was, the shorter the focal length of the MLA was. With a general mask aligner, UV beam focusing was tested onto photoresist (PR). The beams were well focused onto PR when UV passes through the MLA. Depending on the variable distances from the MLA, beam sizes onto PR were controlled. Even at high temperature for a long time, the performances of the MLA were not changed.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.216-224
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• 2004

In this study, we have developed a new UV$({\lambda}=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. The developed laser manufacturing process for laser micromachining is that, after extracting coordinates of shape data from CAD model data, a beam path considering manufacturing features of laser beam is created by using genetic algorithm. This generated manufacturing process is sent to stage controller. In order to improve the surface quality of micro parts, we have carried out experiments on iteration manufacturing and beam step-over by using a minimum focus size. Moreover, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.72-75
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• 2012

In our experiments, strain-free nanowires(NWs) were dispersed on to the substrate, followed by e-beam lithography(EBL) to fabricate single nanowire ultraviolet(UV) sensor devices. Focused-ion beam(FIB), micro-Raman spectroscopy and photoluminescence were employed to characterize the structural and optical properties of AlGaN/GaN NWs. Also, I-V characteristics were obtained under both dark condition and UV lamp to demonstrate AlGaN/GaN NW-based UV sensors. The conductance of a single AlGaN/GaN UV sensor was 9.0 ${\mu}S$(under dark condition) and 9.5 ${\mu}S$ (under UV lamp), respectively. The currents were enhanced by excess carriers under UV lamp. Fast saturation and decay time were demonstrated by the cycled processes between UV lamp and dark condition. Therefore, we believe that AlGaN/GaN NWs have a great potential for UV sensor applications.

• Journal of the Korean Society of Food Science and Nutrition
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• v.41 no.11
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• pp.1632-1638
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• 2012

The effects of combined treatment of aqueous $ClO_2$ and UV-C or electron beam irradiation on microbial growth and quality in chicon during storage at $4^{\circ}C$ were investigated. Samples were treated separately with 50 ppm of $ClO_2$, 5 kJ/$m^2$ of UV-C, 2, 5, 7, and 10 kGy of electron beam irradiation, as well as a combination of $ClO_2$ and UV-C or 2 kGy of electron beam irradiation. The populations of total aerobic bacteria as well as yeast and molds in the chicon samples were determined following each treatment. The populations of total aerobic bacteria in the chicon samples decreased by 1.49~2.92 log CFU/g following combined treatment of $ClO_2$ and UV-C irradiation compared to the control, whereas the populations of yeast and molds decreased by 1.63~1.78 log CFU/g. On the contrary, following combined treatment of $ClO_2$ and electron beam irradiation, the populations of total aerobic bacteria as well as yeast and molds in the chicon samples were undetectable during storage. Color measurements indicated that Hunter $L^*$, $a^*$, and $b^*$ values were not significantly different among the treatments during storage. These results suggest that combined treatment of $ClO_2$ and electron beam irradiation can be useful for improving microbiological safety in chicon during storage.

• Laser Solutions
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• v.14 no.1
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• pp.14-18
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• 2011

Semiconductor industry demands decrease in line/space dimensions of IC substrates. Particularly for IC substrates for CPU, line/space dimensions below $10{\mu}m/10{\mu}m$ are expected to be used in production since 2014. Conventional production technologies (SAP, etc.) based on photolithography are widely agreed to be reaching capability limits. To address this limitation, the embedded circuit fabrication technology using laser ablation has been recently developed. In this paper, we used a nanosecond UV laser and a picosecond UV laser to fabricate embedded circuit patterns into a buildup film with $SiO_2$ powders for IC substrate. We conducted SEM and EDS analysis to investigate surface quality of the embedded circuit patterns. Experimental results showed that due to higher recoil pressure, picosecond UV laser ablation of the buildup film generated a better surface roughness.

• Polymer(Korea)
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• v.29 no.6
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• pp.588-592
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• 2005

For the purpose of obtaining polycarbonate film which blocks ultra-violet ion beam was irradiated onto the surface of PC film. This method has gotten several advantages compared with the techniques, such as the protection of changes in film thickness and UV blocking material deposited onto a base film. In order to investigate UV blocking PC film, the optical and chemical characteristics, surface morphology and lightfastness were confirmed by UV/Vis, FTIR(ATR) spectroscopy, AFM, and Q-UV fasoess analyses. As a result, it was shown that the modified PC film was able to block almost all of UV region and easily control the degree of UV block. The optical changes in the film were attributed to chemical changes in PC surface by ion beam irradiation. Moreover, we expect that the modified PC film can durably block UV due to no changes in colour and UV transmittance after UV fastness test.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.665-668
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• 1997

We fabricated a number of optical fiber Bragg gratings by varying the UV beam parameters such as the laser energy density, pulse repetition rate and exposing time. The reflectance and the Bragg wavelength shift of the fiber Bragg gratings formed with a KrF excimer laser in real time depend strongly on the UV beam parameters. The index changes in the gratings during the exposing time are well fitted to the well known equations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.519-520
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• 2006

• Food Science and Preservation
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• v.20 no.1
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• pp.45-51
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• 2013

This study was conducted to evaluate the changes in the quality of rice wine (Makgeolli) treated with UV-C and electron beam (EB) irradiation during its storage at $4^{\circ}C$ for 15 days. The EB irradiation was found to be more effective than the UV-C irradiation for microbiological control. The pH tended to be increased by UV-C, EB irradiation, and storage period. Acidity was significantly higher in rice wine treated with EB irradiation than those of control and UV-C irradiation during storage period. The $L^*$-value of the samples treated with UV-C and EB irradiation tended to be proportionately higher than that of the control, but this was not consistent during storage period. The $a^*$-value of the sample treated with EB was higher than that of the others, but this was not consistent during the storage period. The reducing sugar content was higher in the control at day 0, but it rapidly decreased compared with the control during the storage. The results indicate that EB irradiation was more effective than UV-C irradiation in controlling microorganisms of rice wine. However, a further study is needed to minimize the rice wine quality deterioration caused by UV-C or EB irradiation during storage.