• Title/Summary/Keyword: UV/VIS Spectrophotometer

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Thickness Determination of Ultrathin Gate Oxide Grown by Wet Oxidation

  • 장효식;황현상;이확주;조현모;김현경;문대원
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.107-107
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    • 2000
  • 최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

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Development of Thermo-Cosmetics Using Photothermal Effect of Gold Nanoparticles (금 나노입자의 광열효과를 이용한 온열화장품 개발)

  • Lee, Jae-Yeul;Kim, Bo-Mi;Park, Se-Ho;Choi, Yo-Han;Shim, Kyu-Dong;Moon, Sung-Bae;Jang, Eue-Soon;Yang, Seun-Ah;Jhee, Kwang-Hwan
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.41 no.1
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    • pp.27-34
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    • 2015
  • Many applications of nanoparticles have been developed since 1970s. Surface plasmon resonance (SPR) effect can be generated at the surface of nanoparticles by illumination. SPR is the resonant oscillation of conduction electrons at the surface material stimulated by incident light. The collisions between excited electrons and metal atoms can cause the production of thermal energy (photothermal effect). Here, we presented the development of thermo-cosmetics using photothermal effect of gold nanoparticles. Gold nanoparticles (GNPs) were chosen for it's low toxicity. We also and investigated the cell biocompatibility and heating effectiveness for photothermal effect of GNPs. Synthesized GNPs were verified by UV-vis spectrophotometer, where GNP has a characteristic absorbance spectrum. Concentration of GNP was measured by atomic absorption analyzer. The cytotoxicity was confirmed by MTT assay and double staining assay. Photothermal effect of GNP was demonstrated by the thermal increasing properties depending on GNP concentration, which was taken by an IR-thermal camera with a xenon lamp as the light source. If the thermal effect of GNP is applied for thermo-cosmetics, it can supply heat to skin by converting solar energy into thermal energy. Thus, cosmetics containing GNPs can provide benefits to people in the cold region or winter season for maintaining skin temperature, which lead to a positive effect on skin health.

Understanding of a Korean Standard for the Analysis of Hexavalent Chromium in Soils and Interpretation of their Results (토양오염공정시험기준 6가크롬 분석의 이해와 결과 해석)

  • Kim, Rog-Young;Jung, Goo-Bok;Sung, Jwa-Kyung;Lee, Ju-Young;Jang, Byoung-Choon;Yun, Hong-Bae;Lee, Yee-Jin;Song, You-Seong;Kim, Won-Il;Lee, Jong-Sik;Ha, Sang-Keun
    • Korean Journal of Soil Science and Fertilizer
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    • v.44 no.5
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    • pp.727-733
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    • 2011
  • A new Korean standard for the determination of Cr(VI) in soils has been officially published as ES 07408.1 in 2009. This analytical method is based on the hot alkaline digestion and colorimetric detection prescribed by U.S. EPA method 3060A and 7196A. The hot alkaline digestion accomplished using 0.28 M $Na_2CO_3$ and 0.5 M NaOH solution (pH 13.4) at $90{\sim}95^{\circ}C$ determines total Cr(VI) in soils extracting all forms of Cr(VI), including water-soluble, adsorbed, precipitated, and mineral-bound chromates. This aggressive alkaline digestion, however, proved to be problematic for certain soils which contain large amounts of soluble humic substances or active manganese oxides. Cr(III) could be oxidized to Cr(VI) by manganese oxides during the strong alkaline extraction, resulting in overestimation (positive error) of Cr(VI). In contrast, Cr(VI) reduction by dissolved humic matter or Fe(II) could occur during the neutralization and acidic colorimetric detection procedure, resulting in underestimation (negative error) of Cr(VI). Futhermore, dissolved humic matter hampered the colorimetric detection of Cr(VI) using UV/Vis spectrophotometer due to the strong coloration of the filtrate, resulting in overestimation (positive error) of Cr(VI). Without understanding the mechanisms of Cr(VI) and Cr(III) transformation during the analysis it could be difficult to operate the experiment in laboratory and to evaluate the Cr(VI) results. For this reason, in this paper we described the theoretical principles and limitations of Cr(VI) analysis and provided useful guidelines for laboratory work and Cr(VI) data analysis.

The comparisons of layers and the effect of additional firings on flexural strength and translucency of 5Y-ZP (Translucent zirconia의 layer 간 비교 및 추가적인 소성이 굽힘강도, 투과도에 미치는 영향)

  • Kim, Hyung-Joon;Shin, Soo-Yeon
    • Journal of Dental Rehabilitation and Applied Science
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    • v.37 no.3
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    • pp.111-122
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    • 2021
  • Purpose: The purpose of this in vitro study was to investigate the flexural strength and translucency of three layers in 5Y-ZP and to assess the effect of additional firings on these properties. Materials and Methods: Sintered zirconia blocks were sectioned according to three layers : incisal, transition, and body. Disc-shaped specimens were fabricated from each layer. The diameter of specimens was 15.0 mm and each thickness of specimens for biaxial flexural strength test and translucency was 1.2 mm and 1.0 mm. The specimens were classified into subgroups according to the number of firing (0, 1, and 3 times; n = 10/subgroup) and the additional firings were performed under 900℃ using a furnace. Biaxial flexural strength and translucency was measured using universal testing machine and uv-vis spectrophotometer. X-ray diffraction (XRD) analysis was used for measurement of the phase identification. One-way ANOVA, Tukey HSD test were performed (α = 0.05). Results: There was no significant difference in flexural strength between the three layers (P > 0.05), while there was significant difference in translucency between different layers (P < 0.05). The flexural strength of incisal and transition layer was decreased by the single additional firing, and the three additional firings significantly decreased the flexural strength of three layers. The translucency of layer was decreased by additional firings except the body layer. The XRD patterns of all groups were similar. Conclusion: Three layers of 5Y-ZP were different only in translucency. Additional firings affected the flexural strength and translucency differently depending on the layers but crystalline phases were not changed.

Spectrophotometric Determination of Soil Chemical Properties Using Soiltek® KA-P Spectrophotometer (Soiltek KA-P 분광광도계률 사용한 토양 화학적 성질의 분광학적 분석)

  • Hyun, Hae-Nam;Oh, Sang-Sil;Koo, Bon-Jun;Kang, Ho-Jun
    • Korean Journal of Soil Science and Fertilizer
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    • v.33 no.2
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    • pp.127-138
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    • 2000
  • To enable rapid and convenient soil test, new soil analytical methods, which require only one instrument, UV/Vis spectrophotometer, were developed and named "Soiltek KA-P spectrophotometric methods". The Soiltek$^{(R)}$ KA-P spectrophotometric method was compared with standard method of RDA in analytical capability for soil chemical properties. Using the 78 soils collected from upland, paddy, orchard, and vinyl house soils, soil organic matter, exchangeable K, Ca, and Mg. CEC, available $SiO_2$, and nitrate were analyzed by the two methods. The color stability(ratio of the absorbance at elapsed time t to the absorbance at time t=0) of organic matter. Ca, Mg, and available $SiO_2$ decreased to about 2% within one hour. However, that of exchangeable K, CEC, and nitrate remained constant. The results obtained with Soiltek$^{(R)}$ KA-P spectrophotometric method showed highly significant correlation with those measured by the standard method of RDA($R^2$ >0.9501), in which the slopes were near unity of $1.0{\pm}0.05$. The standard deviation values of organic matter, exchangeable K, Ca, and Mg, CEC, available $SiO_2$, and nitrate were apparently lower than ${\pm}1.8gkg^{-1}$, ${\pm}0.05cmol^+kg^{-1}$, ${\pm}0.18cmol^+kg^{-1}$, and ${\pm}0.13cmol^+kg^{-1}$, ${\pm}1.0cmol^+kg^{-1}$, ${\pm}5.0mgkg^{-1}$, and ${\pm}10.0mgkg^{-1}$, respectively. All the measurements showed coefficients of variation of less than 7~17% and were within the confidence level of 95%, which means both the methods are precise. Considering the relative simplicity, low cost, precision and accuracy, the proposed Soiltek$^{(R)}$ KA-P spectrophotometric methods could be recommended as an alternative to standard method.

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Biogeochemical Remediation of Cr(VI)-Contaminated Groundwater using MMPH-0 (Enterobacter aerogenes) (MMPH-0 (Enterobacter aerogenes)에 의한 6가 크롬 오염 지하수의 생지화학적 정화)

  • Seo, Hyun-Hee;Rhee, Sung-Keun;Kim, Kang-Joo;Park, Eun-Gyu;Kim, Yeong-Kyoo;Chon, Chul-Min;Moon, Ji-Won;Roh, Yul
    • Economic and Environmental Geology
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    • v.45 no.2
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    • pp.105-119
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    • 2012
  • Indigenous bacteria isolated from contaminated sites play important roles to remediate contaminated groundwater. Chromium has the most stable oxidation states. Cr(VI) is toxic, carcinogenic, and mobile, but Cr(III) is less toxic and immobile. In this study, indigenous microorganism (MMPH-0) was enriched from Cr(VI) contaminated groundwater, and identified by 16S rRNA gene analysis. Using MMPH-0, the effect of stimulating with e-donors (glucose, lactate, acetate, and no e-donor control), respiration conditions, biomass, tolerance, and geochemical changes on Cr(VI) reduction were investigated in batch experiments for 4 weeks. The changes of Cr(VI) concentration and geochemical conditions were monitored using UV-vis-spectrophotometer and Eh-pH meter. And the morphological and chemical characteristics of MMPH-0 and precipitates in the effluents were characterized by TEM-EDS and SEM-EDS analyses. MMPH-0 (Enterobacter aerogenes) was able to tolerate up to 2000 mg/L Cr(VI) and reduce Cr(VI) under aerobic and anaerobic conditions. MMPH-0 performed faster and higher efficiency of Cr(VI) reduction with electron donors (over 70% after 1 week with e-donor, 10-20% after 4 weeks without e-donor). The changes of Eh-pH in effluents showing the tendency from oxidizing to reducing condition and a bit of acidic change in pH due to microbial oxidation of organic matters donating electrons and protons suggested the roles of MMPH-0 on Cr(VI) in the contaminated water catalyzing to transit geochemical stable zone for more stable $Cr(OH)_3$ or Cr(III) precipitates. TEM/SEM-EDS analyses of MMPH-0 and precipitates indicate direct and indirect Cr(VI) reduction: extracellular polymers capturing Cr component outside cells. These results suggested diverse indigenous bacteria and their biogeochemical reactions might enhance more effective and feasible remediation technology of redox sensitive heavy metals in metal-contaminated in groundwater.

Methylene Blue Photodegradation Properties of Anatase/brookite Hybrid TiO2 Photocatalyst Prepared with Different Acid Catalysts (산 촉매에 따른 아나타제/브루카이트 혼성형 TiO2 광촉매의 메틸렌블루 광분해특성)

  • Yun, Seok-Min;Kim, Jinhoon;Jeong, Euigyung;Im, Ji Sun;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.22 no.1
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    • pp.21-25
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    • 2011
  • In this study, anatase/brookite hybrid $TiO_2$ was prepared using different acid catalysts and microwave to improve photodegradation of organic pollutants. The methylene blue photodegradation properties of the prepared photocatalysts with different particle/crystal size and brookite fractions were investigated. Surface characteristics and particle sizes of anatase/brookite hybrid $TiO_2$ were evaluated using scanning electron microscopy (SEM) and laser diffraction particle size analyzer, respectively and crystal structures were investigated with X-ray diffraction (XRD). Methylene blue photodegradation properties were evaluated with UV-vis spectrophotometer. Anatase and anatase/brookite hybrid $TiO_2$ had less than 500 nm size of clusters and the average particle size of $6.66{\sim}6.85{\mu}m$, suggesting that types of acid catalysts did not affect the size. XRD of the prepared $TiO_2$ showed that the photocatalysts had anatase/brookite hybrid crystal structure and applying microwave did not change their crystal structure. Photodegradation of methylene blue with the prepared photocatalyst did not increased proportionally to the fraction of brookite and the crystal size and decreased when brookite fraction and the crystal size increased further. Anatase/brookite hybrid $TiO_2$ with brookite fraction of 9.4% and crystal size of 4.53 nm shows the best photodegradation activity of methylene blue.