• 한국정밀공학회지
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• 제26권8호
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• 한국세라믹학회지
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• 제50권6호
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• pp.523-527
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• 2013

Ti-based coatings following laser ablation were studied to compare degradation behaviors by thermomechanical stress. TiN, TiCN, and TiAlN coatings were degraded by a Nd:YAG pulsed laser with an increase in the laser pulses. A decrease in the hardness was identified as the pulses increased, and the hardness levels were in the order of TiAlN > TiCN > TiN. The TiN showed cracks on the surface, and cracks with pores formed along the cracks were observed in the TiCN. The dominant degradation behavior of the TiAlN was surface pore formation. EDS results revealed that diffusion of substrate atoms to the coating surface occurred in the TiN. Delamination occurred in the TiN and TiCN, while the TiAlN which has higher thermal stability than the TiN and TiCN maintained adhesion to the substrate. It was considered that the decrease in the hardness of the Ti-based hard coatings is attributed to surface cracking and the diffusion of substrate atoms.

• 한국생산제조학회지
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• 제24권5호
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• pp.475-480
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• 2015

Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

• 구강회복응용과학지
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• 제32권3호
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• pp.194-201
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• 2016

목적: 본 연구는 Co-Cr, Ti-6Al-4V 합금에 Zirconium Nitride (이하 ZrN) 적용 시, 의치상 레진과의 접착력을 비교하는 것이다. 연구 재료 및 방법: Co-Cr, Ti-6Al-4V 디스크(직경 10 mm, 두께 2.5 mm)를 각각 14개씩 제작하였고, ZrN 코팅에 따라 2개의 그룹으로 나누었다. Primer로 시편 전처리 후, 의치상 레진(직경 6 mm, 두께 5 mm)을 부착하였다. 표면 측정기를 이용하여 시편의 거칠기를 측정한 후, 만능 시험기를 이용하여 전단결합강도를 측정하였으며, 이원분산분석으로 통계 분석하였다. 시편 표면과 파절 양상을 주사전자현미경을 이용하여 관찰하였다. 결과: ZrN을 코팅한 시편에서 유의하게 높은 표면 거칠기를 나타내었고(P < 0.05), 전단결합강도는 낮았다(P < 0.001). ZrN 코팅 시편에서는 혼합성 파절과 부착성 파절이 함께 나타났다. 결론: Co-Cr, Ti-6Al-4V 합금에서 ZrN 코팅 처리는 의치상 레진과의 결합력을 약화시켰다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.152-152
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• 2017

Titanium and its alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element,such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}$-stabilizer and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Silicon (Si) and magnesium (Mg) has a beneficial effect on bone. Si in particular has been found to be essential for normal bone and cartilage growth and development. In vitro studies have shown that Mg plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Therefore, in this study, Si and Mg coatings on the hydroxyapatite film formed Ti-29Nb-xHf alloys by plasma electrolyte oxidation has been investigated using several experimental techniques. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. The electrolyte was Si and Mg ions containing calcium acetate monohydrate + calcium glycerophosphate at room temperature. The microstructure, phase and composition of Si and Mg coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

• Corrosion Science and Technology
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• 제14권5호
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• pp.213-217
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• 2015

Recently, household electronic industries require environmentally-friendly and highly functional steels in order to enhance the quality of human life. Customers especially require both excellent corrosion and abrasion resistant anti-fingerprint steels for digital TV panels. Thus POSCO has developed new functional electro-galvanized steels, which have double coated layers with organic-inorganic composites on the zinc surface of the steel for usage as the bottom chassis panel of TVs. The inorganic solution for the bottom layer consists of inorganic phosphate, magnesium, and zirconium compounds with a small amount of epoxy binder, and affords both improved adhesion properties by chemical conversion reactions and corrosion resistance due to a self-healing effect. The composite solution for the top layer was prepared by fine dispersion of organic-inorganic ingredients that consist of a urethane modified polyacrylate polymer, hardener, silica sol and a titanium complex inhibitor in aqueous media. Both composite solutions were coated on the steel surface by using a roll coater and then cured through an induction furnace in the electro-galvanizing line. New anti-fingerprint steel was evaluated for quality performance through such procedures as the salt spray test for corrosion resistance, tribological test for abrasion resistance, and conductivity test for surface electric conductance regarding to both types of polymer resin and coating weight of composite solution. New composite coated anti-fingerprint steels afford both better corrosion resistance and abrasion properties compared to conventional anti-fingerprint steel that mainly consists of acrylate polymers. Detailed discussions of both composite solutions and experimental results suggest that urethane modifications of acrylate polymers of composite solutions play a key role in enhanced quality performances.

• 한국건설순환자원학회논문집
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• 제10권1호
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• pp.56-65
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• 2022

본 연구에서는 시설물의 자기정화성능을 확보하기 위하여 이산화티탄 광촉매 용액을 코팅한 모르타르의 자기정화성능을 분석하였다. 광촉매 코팅 용액의 농도(1.5 %와 3.0 %), 초친수강화 용액 적용 유무 및 프라이머 용액의 사용 유무를 실험변수로 고려하였다. 광촉매 농도가 증가할수록 메틸렌블루 수용액의 색상 변화율이 증가하였으며, 이는 광촉매 농도가 증가할수록 자기정화성능이 증가하는 것을 나타낸다. 초친수성 광촉매 용액의 적용은 일반 광촉매 용액에 비해 자기정화성능을 다소 감소시킬 가능성이 있음을 나타낸다. 또한, 프라이머를 사용한 모르타르의 자기정화성능은 프라이머를 사용하지 않은 모르타르의 자기정화성능과 뚜렷한 차이를 나타내지 않는다. 한편, 낮은 농도(1.5 %)로 코팅된 모르타르에 비해 높은 농도(3.0 %)로 코팅된 모르타르 시편 표면의 코팅 균열이 미세하여 상대적으로 큰 광촉매 반응면적을 확보하고 자기정화성능 증가에 유리한 영향을 미친 것으로 판단된다.

• Bulletin of the Korean Chemical Society
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• 제23권5호
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• pp.741-744
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• 2002

Single phase of multicomponent oxide ZrTiO4 film could be prepared through surface sol-gel route simply by coating the mixture of 100 mM zirconium butoxide and titanium butoxide on $Pt/Ti/SiO_2Si(100)$ substrate, following pyro lysis at $450^{\circ}C$, and annealing it at 770 $^{\circ}C.$ The dielectric constant of the film was reduced as the film thickness decreased due to of the interfacial effects caused by layer/electrode and a few voids inside the multilayer. However, the dielectric property was independent of applied dc bias sweeps voltage (-2 to +2 V).The dielectric constant of bulk film, 31.9, estimated using series-connected capacitor model was independent of film thickness and frequency in the measurement range, but theoretical interfacial thickness, ti, was dependent on the frequency. It reached a saturated ti value, $6.9{\AA}$, at high frequency by extraction of some capacitance component formed at low frequency range. The dielectric constant of bulk ZrTiO4 pellet-shaped material was 33.7 and very stable with frequency promising as good applicable devices.

• Bulletin of the Korean Chemical Society
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• 제28권9호
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• pp.1463-1466
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• 2007

Single phases of multi-component oxides films, ZrTiO4 and Ta2Zr6O17, could be synthesized by using the combinatorial approach through surface sol-gel route, coating the appropriate mole ratio of 100 mM zirconium butoxide, tantalum butoxide and titanium butoxide precursors on Pt/Ti/SiO2/Si (100) substrate, following pyrolysis at 450 oC, and annealing them at 770 oC. Both the films and bulks of ZrTiO4 and Ta2Zr6O17 showed very stable dielectric properties in temperature range, ?140 to 60 oC, and frequency range, 100 Hz to 1 MHz, promising their applications in wide range of temperatures and frequencies. The dielectric constants of the films were lower and a little more dependent on frequency than those of the bulks. The reduction of dielectric property in the film was mainly due to the interfacial effects that worked as series and parallel-connected capacitances toward the substantial film capacitance.

• 공업화학
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• 제24권3호
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• pp.314-319
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• 2013

본 연구에서는 휘발성 유기화합물 제거특성을 향상시키고자 졸겔법 및 urea의 고상 열처리법을 이용하여 질소가 도핑된 $TiO_2$ ($N-TiO_2$) 코팅 활성탄소 펠렛을 제조하였다. 또한 이 활성탄소 펠렛의 가시광 활성능 평가를 위하여 light emitting diods (LED)를 조사하였고, gas chromatography를 이용하여 벤젠가스 제거능을 측정하였다. Titanium tetra isopropoxide 함량이 증가함에 따라 활성탄소 펠렛 표면에 $TiO_2$ 코팅량이 증가되고, 비표면적이 감소됨을 SEM 및 BET 결과를 통해 각각 확인하였다. 벤젠가스 제거 결과, ACP10의 벤젠가스에 대한 파과점 도달시간이 ACP에 비하여 약 2배정도 증가되었다. 이는 활성탄소 펠렛의 표면에 코팅된 $N-TiO_2$가 LED 광원 조사 하에서 더 효과적으로 벤젠가스를 분해하였기 때문으로 판단된다.