• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.36-37
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• 2006

Titanium oxy-nitride ($TiN_O_y$) thin films were deposited on $SiO_2$/Si substrates using reactive dc magnetron sputtering, and were then annealed at various temperatures in air ambient to incorporate oxygen into the films. The effect of annealing temperature on the structural and electrical properties of the films was investigated. The grain size of the films decreases with increasing annealing temperature. On the other hand, crystallinity of the films is independent of annealing temperature in air ambient. Resistivity of the films increases remarkably as an annealing temperature increases and temperature coefficience of resistance (TCR) of the films varies from a positive value to a negative value. The films annealed at $350^{\circ}C$ for 30 min exhibited a near-zero TCR value of approximately -5 ppm/K. The decrease of the grain size with increasing annealing temperature was attributed to an increase of oxygen concentration incorporated into the films during anncaling treatment.

• Transactions on Electrical and Electronic Materials
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• 제17권4호
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• pp.189-195
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• 2016

Micro Hotplate (MHP) is the key component in micro-sensors, particularly gas sensors. Indeed, in metal oxide gas sensors MOX, micro-heater is used as a hotplate in order to control the temperature of the sensing layer which should be in the requisite temperature range over the heater area, so as to detect the resistive changes as a function of varying concentration of different gases. Hence, their design is a very important aspect. In this paper, we have presented the design and simulation results of a meander micro heater based on three different materials - platinum, titanium and tungsten. The dielectric membrane size is 1.4 mm × 1.6 mm with a thickness of 1.4 μm. Above the membrane, a meander heating film was deposed with a thickness of 100 nm. In order to optimize the geometry, a comparative study by simulating two different heater thicknesses, then two inter track widths has also been presented. Power consumption and temperature distribution were determined in the micro heater´s structure over a supply voltage of 5, 6, and 7 V.

• 방사선산업학회지
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• 제2권3호
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• pp.141-148
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• 2008

Beta rays emitted from tritium in titanium tritide film were simulated with cathode rays of a scanning electron microscope to investigate the effect of beta rays from tritium on semiconductor devices. The cathode ray currents, which vary with the change of applied energy and beam spot size, were measured with Faraday cup. The current from the semiconductor device irradiated with cathode rays at various conditions was measured. The cathode ray current increased with the increase of spot size to a maximum then decreased when the spot sized increased further. The magnitude of current produced in the semiconductor device is proportional to the magnitude of cathode ray current. The magnitude of cathode ray current at each energy level was matched to the intensity of beta ray to simulate the tritium beta ray spectrum. Then the semiconductor characteristics were analyzed with I-V curves.

• 한국산학기술학회논문지
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• 제17권10호
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• pp.9-12
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• 2016

특정 광 파장 영역대역에서 광 반사율을 갖는 다층 박막을 DC펄스 스퍼터링 공정으로 제작하기 위하여 공정변수가 다층 박막의 광학 특성에 미치는 영향이 연구되었다. 다층 박막 필름을 제작하기위한 시뮬레이션이 이루어졌으며, DC펄스 스퍼터링 공정을 이용한 저 굴절률의 $SiO_2$와 고 굴절률의 $TiO_2$ 박막의 광학 특성에 미치는 공정 변수 파라미터가 연구되었다. DC펄스 스퍼터링 파워 2kW, 아르곤 가스 200sccm(standard cubic centimeter per minute)기준조건에서 산소가스 비율 12% 범위에서 제작한 $SiO_2$박막은 굴절률 1.46이었고 산소가스 1% 비율에서 제작한 $TiO_2$박막은 굴절률 2.27이었다. 이들 박막으로 구성된 고 굴절률 박막/저 굴절률 박막/고 굴절률 박막의 3층 다층 박막 구조의 광학설계 시뮬레이션 결과와 측정된 광 반사율 특성결과는 파장 대역에 걸쳐 유사한 경향이 있는 것으로 측정되었다. 근적외선 780nm에서 1200nm파장 대역 영역에서 광 반사율 45%이상의 성능을 갖는 다층 박막 필름을 제작할 수 있었고 근적외선 차단 기능 박막으로 사용될 것으로 기대된다.

• 해양환경안전학회지
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• 제19권3호
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• pp.285-289
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• 2013

The coastal area of Republic of Korea is very clean compared to other countries. In this reason, west coastal area of our country is a good place for breeding up a fish such as shrimp. In winter season, the heating system is required for preventing shrimp death caused by freezing in the farm. The heater in the heating system for fishery's farm is operated very severe combating corrosion due to high accumulation by feeding material and high temperature in heated sea water. Almost all manufactured heaters of STS 316L and Ti material are scrapped every year due to heavy corrosion such a general and crevice corrosion. For comparing the general and galvanic corrosion in new heater material, the test material of Zirconium (Zr), Titanium (Ti) and STS 316L are tested by potentiodynamic polarization, electrochemical impedance spectroscopy (EIS), current density-time methods and microscopic examination in a 3.5% NaCl solution. The corrosion potential (Ecor) measured by potentiodynamic polarization for Zr, Ti and STS 316L reveals -198, -250 and -450mV, corrosion current density 0.5, 2.5 and $6.5{\mu}A/cm^2$ respectively. The film resistance measured by EIS are Zr 63,000, Ti 39,700 and 316L $3,150{\Omega}$, and the current of Zr-Ti couple is $0.03{\mu}A$, whereas Zr-316L SS is $0.1{\mu}A$. According to the result of this experiment in 3.5% NaCl solution, Zr is excellent corrosion resistance material than Ti and STS 316L.

• 한국수소및신에너지학회논문집
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• 제7권1호
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• pp.29-37
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• 1996

Alkaline water electrolysis has been commercialized as the only large-scale method for a long time to produce hydrogen and the technology is superior to other methods such as photochemical, thermochemical water splitting, and thermal decomposition method in view of efficiency and related technical problem. However, such conventional electrolyzer do not have high electric efficiency and productivity to apply to large scale hydrogen production for energy or chemical feedstocks. Solid polymer electrolyte water electrolysis using a perfluorocation exchange membrane as an $H^+$ ion conductor is considered to be a promising method, because of capability for operating at high current densities and low cell voltages. So, this is a good technology for the storage of electricity generated by photovoltaic power plants, wind generators and other energy conversion systems. One of the most important R&D topics in electrolyser is how to minimize cell voltage and maximize current density in order to increase the productivity of the electrolyzer. A commercialized technology is the hot press method which the film type electrocatalyst is hot-pressed to soild polymer membrane in order to eliminate the contact resistance. Various technologies, electrocatalyst formed over Nafion membrane surface by means of nonelectrolytic plating process, porous sintered metal(titanium powder) or titanium mesh coated with electrocatalyst, have been studied for preparation of membrane-electrocatalyst composites. In this study some experiments have been conducted at a solid polymer electrolyte water electrolyzer, which consisted of single cell stack with an electrode area of $25cm^2$ in a unipolar arrangement using titanium mesh coated with electrocatalyst.

• Bulletin of the Korean Chemical Society
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• 제31권10호
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• pp.2849-2853
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• 2010

A method to improve the photocatalytic activity of titanium dioxide by modification with a sensitizer and a metal oxide is proposed. To achieve this goal, we used metal oxides as dopants. In particular, $CaWO_4$ and $Gd_2O_2S$:Tb were used because their 2.6 eV and 2.2 eV band gap energy and optical properties have a large positive effect on photocatalysis. The improvement in the photocatalytic activity of $TiO_2$ modified with $Gd_2O_2S$:Tb under ultraviolet light irradiation is described in a previous study. The present work focuses on the sensitization of metal oxide-modified $TiO_2$. Having observed the ultraviolet-visible absorption spectra of 3,4,9,10-Perylenetetracarboxylic diimide in the wide visible-light region from 400 nm to 650 nm and the broad peaks in its photoluminescence spectra at 695 nm and 717 nm, we decided to use this perylene dye to sensitize modified $TiO_2$ to enhance its activity as a visible-light harvesting photocatalyst. We also explored the positive effects thin-film surface changes stemming from ultraviolet pre-treatment have on photocatalytic activity. Finally, we subjected several metal oxide-modified $TiO_2$ products sensitized by the perylene dye to ultraviolet pre-treatment, obtaining the most active photocatalysts.

• 융합정보논문지
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• 제7권5호
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• pp.53-58
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• 2017

석유 고갈의 시대에 저가이면서 반투명한 특징을 갖고 있는 염료감응형 태양전지(DSC)는 1991년 $Gr{\ddot{a}}tzel$의 연구결과 보고 이후 많은 주목을 받아왔다. 염료감응형 태양전지의 광전극의 빛 수확 성능을 증진시키고, 궁극적으로 광전변환효율을 향상시키기 위하여 다양한 구조를 갖는 산란층이 광전극 소재로 제안되었다. DSC 광전극의 산란층에서 산란의 중심으로는 지름이 250 - 300 nm 정도의 크기를 갖는 비교적 큰 이산화티탄 나노입자가 필요하다. 본 연구에서는 변형된 졸겔 공정을 이용하여 약 300 nm 크기의 이산화티탄 나노결정을 합성하였다. XRD와 TEM 분석결과에 의하면, 합성된 이산화티탄 나노입자는 아나타제 상의 단결정 특성을 나타내었다. 합성된 이산화티탄 나노입자를 이용하여 스핀 코팅 공정으로 제조된 이산화티탄 박막의 광학적 투과율은 550 nm 파장에서 약 50%로 측정되었다. 이처럼 적당한 투과율은 DSC 산란층의 산란 중심으로 사용하기에 적합하며, DSC의 광전변환효율 향상에 적절하게 기여할 것으로 기대된다.

• 대한치과교정학회지
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• 제51권4호
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• pp.270-281
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• 2021

Objective: The aim of this in vitro study was to evaluate the changes in friction between orthodontic brackets and archwires coated with aluminum oxide (Al₂O₃), titanium nitride (TiN), or chromium nitride (CrN). In addition, the resistance of the coatings to intraoral conditions was evaluated. Methods: Stainless steel canine brackets, 0.016-inch round nickel-titanium archwires, and 0.019 × 0.025-inch stainless steel archwires were coated with Al₂O₃, TiN, and CrN using radio frequency magnetron sputtering. The coated materials were examined using scanning electron microscopy, an X-ray diffractometer, atomic force microscopy, and surface profilometry. In addition, the samples were subjected to thermal cycling and in vitro brushing tests, and the effects of the simulated intraoral conditions on the coating structure were evaluated. Results: Coating of the metal bracket as well as nickel-titanium archwire with Al₂O₃ reduced the coefficients of friction (CoFs) for the bracket-archwire combination (p < 0.01). When the bracket and stainless steel archwire were coated with Al₂O₃ and TiN, the CoFs were significantly lower (0.207 and 0.372, respectively) than that recorded when this bracket-archwire combination was left uncoated (0.552; p < 0.01). The friction, thermal, and brushing tests did not deteriorate the overall quality of the Al₂O₃ coatings; however, some small areas of peeling were evident for the TiN coatings, whereas comparatively larger areas of peeling were observed for the CrN coatings. Conclusions: Our findings suggest that the CoFs for metal bracket-archwire combinations used in orthodontic treatment can be decreased by coating with Al₂O₃ and TiN thin films.

• 한국재료학회지
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• 제32권9호
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• pp.384-390
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• 2022

A spin coating process for RRAM, which is a TiN/TiO₂/FTO structure based on a PTC sol solution, was developed in this laboratory, a method which enables low-temperature and eco-friendly manufacturing. The RRAM corresponds to an OxRAM that operates through the formation and extinction of conductive filaments. Heat treatment was selected as a method of controlling oxygen vacancy (V_O), a major factor of the conductive filament. It was carried out at 100 ℃ under moisture removal conditions and at 300 ℃ and 500 ℃ for excellent phase stability. XRD analysis confirmed the anatase phase in the thin film increased as the heat treatment increased, and the Ti³⁺ and OH- groups were observed to decrease in the XPS analysis. In the I-V analysis, the device at 100 ℃ showed a low primary SET voltage of 5.1 V and a high ON/OFF ratio of 10⁴. The double-logarithmic plot of the I-V curve confirmed the device at 100 ℃ required a low operating voltage. As a result, the 100 ℃ heat treatment conditions were suitable for the low voltage driving and high ON/OFF ratio of TiN/TiO₂/FTO RRAM devices and these results suggest that the operating voltage and ON/OFF ratio required for OxRAM devices used in various fields under specific heat treatment conditions can be compromised.