• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.77-77
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• 2000

Titanium oxide (TiO2) thin films have valuable properties such as a high refractive index, excellent transmittance in the visible and near-IR frequency, and high chemical stability. Therefore it is extensively used in anti-reflection coating, sensor, and photocatalysis as electrical and optical applications. Specially, TiO2 have a high dielectric constant of 180 along the c axis and 90 along the a axis, so it is highlighted in fabricating dielectric capacitors in micro electronic devices. A variety of methods have been used to produce patterned self-assembled monolayers (SAMs), including microcontact printing ($\mu$CP), UV-photolithotgraphy, e-beam lithography, scanned-probe based micro-machining, and atom-lithography. Above all, thin film fabrication on $\mu$CP modified surface is a potentially low-cost, high-throughput method, because it does not require expensive photolithographic equipment, and it produce micrometer scale patterns in thin film materials. The patterned SAMs were used as thin resists, to transfer patterns onto thin films either by chemical etching or by selective deposition. In this study, we deposited TiO2 thin films on Si (1000 substrateds using titanium (IV) isopropoxide ([Ti(O(C3H7)4)] ; TIP as a single molecular precursor at deposition temperature in the range of 300-$700^{\circ}C$ without any carrier and bubbler gas. Crack-free, highly oriented TiO2 polycrystalline thin films with anatase phase and stoichimetric ratio of Ti and O were successfully deposited on Si(100) at temperature as low as 50$0^{\circ}C$. XRD and TED data showed that below 50$0^{\circ}C$, the TiO2 thin films were dominantly grown on Si(100) surfaces in the [211] direction, whereas with increasing the deposition temperature to $700^{\circ}C$, the main films growth direction was changed to be [200]. Two distinct growth behaviors were observed from the Arhenius plots. In addition to deposition of THe TiO2 thin films on Si(100) substrates, patterning of TiO2 thin films was also performed at grown temperature in the range of 300-50$0^{\circ}C$ by MOCVD onto the Si(100) substrates of which surface was modified by organic thin film template. The organic thin film of SAm is obtained by the $\mu$CP method. Alpha-step profile and optical microscope images showed that the boundaries between SAMs areas and selectively deposited TiO2 thin film areas are very definite and sharp. Capacitance - Voltage measurements made on TiO2 films gave a dielectric constant of 29, suggesting a possibility of electronic material applications.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.197-197
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• 2016

Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

• 한국결정성장학회지
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• 제19권6호
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• pp.305-310
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• 2009

PMMA 입자의 표면에 양전하를 갖는 전해질 폴리머 PDDA와 음전하를 갖는TALH를 사용하여 $TiO_2$ 박막을 LBL 법에 의해 성공적으로 제조하였다. 수정진동자의 측정을 통해 TALH의 용액의 pH가 감소됨에 따라 TALH의 적층량이 늘어나고 PMMA의 입자 표면에 코팅된 (PDDA/TALH) 박막의 두께가 증가됨을 확인하였다. (PDDA/TALH)n의 순서에 의해 코팅된 PMMA 입자들은 bilayer 수의 변화에 따라 다양한 색 변화를 보여주었다. (PDDA/TALH) 박막의 bilayer 수(n)가 10과 20 일 경우에 $a^*$와 $b^*$의 값은 막이 코팅되지 않은 PMMA의 값보다 감소하였고 색 변화는 $a^*$, $b^*$ 색도도에서 각각 green과 blue 방향으로 이동하였다. 이후 n의 수가 30, 40으로 증가됨에 따라 $a^*$와 $b^*$의 값은 증가하였고 색의 변화는 red와 yellow 방향으로 각각 이동하였다. 최종적으로 $(PDDA/TALH)_{50}$ 박막이 코팅된 PMMA 입자들은 박막이 코팅되지 않은 PMMA 입자들과 거의 비슷한 $a^*$와 $b^*$의 값을 보여주었다.

• 한국재료학회지
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• 제22권7호
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• pp.379-383
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• 2012

$TiO_2$ thin films consisting of positively charged poly(diallyldimethylammonium chloride)(PDDA) and negatively charged titanium(IV) bis(ammonium lactato) dihydroxide(TALH) were successfully fabricated on glass beads by a layer-by-layer(LBL) self-assembly method. The glass beads used here showed a positive charge in an acid range and negative charge in an alkaline range. The glass beads coated with the coating sequence of(PDDA/TALH)n showed a change in the surface morphology as a function of the number of bilayers. When the number of bilayers(n) of the(PDDA/TALH) thin film was 20, Ti element was observed on the surface of the coated glass beads. The thin films coated onto the glass beads had a main peak of the (101) crystal face and were highly crystallized with XRD diffraction peaks of anatase-type $TiO_2$ according to an XRD analysis. In addition, the $TiO_2$ thin films showed photocatalytic properties such that they could decompose a methyl orange solution under illumination with UV light. As the number of bilayers of the(PDDA/TALH) thin film increased, the photocatalytic property of the $TiO_2$-coated glass beads increased with the increase in the thin film thickness. The surface morphologies and optical properties of glass beads coated with $TiO_2$ thin films with different coating numbers were measured by field emission scanning electron microscopy(FE-SEM), X-ray diffraction(XRD) and by UV-Vis spectrophotometry(UV-vis).

• 공업화학
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• 제19권3호
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• pp.270-276
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• 2008

$TiO_2$의 가장 큰 특징은 광촉매적 특성을 들 수 있으나 순수한 $TiO_2$는 자외선 영역에서만 활성을 보이는 단점이 있다. 단점을 보완하고자 본 연구에서는 초고온, 고활성을 이용한 열플라즈마 공정으로 질소가 도핑된 $TiO_2$를 합성하여 $TiO_2$의 광촉매적 특성을 높이고자 하였다. 직류 플라즈마 제트를 이용하여 비금속이온인 질소와 반응 가스인 산소를 $TiCl_4$와 함께 플라즈마 반응기 안에서 반응시켜 질소가 도핑된 $TiO_2$ 나노 분말을 합성하였다. 합성 조건으로 질소의 유량을 변화하였다. 합성 변수에 따른 입자의 상조성, 크기를 분석하였고 아세트알데히드와 곰팡이를 광분해하는 실험을 통해 광촉매 활성을 살펴보았다. 한편 $TiO_2$의 분말 상태와 코팅된 상태의 광촉매 특성을 비교하고자 합성한 분말의 스핀 코팅과 PLD (Pulsed Laser Deposition)을 통해 $TiO_2$를 코팅하였다. 아세트알데히드 분해 실험의 결과 질소가 도핑된 $TiO_2$ 분말의 경우가 순수한 $TiO_2$ 분말에 비해 가시영역에서의 광촉매 활성이 두 배 이상 뛰어난 것을 확인하였으며, 곰팡이 분해 실험 결과 역시 질소가 도핑된 $TiO_2$ 분말에 곰팡이가 분해되는 것을 확인하였다. 분말과 필름을 제조하여 메틸렌블루 광분해 실험한 결과 분말의 경우 100% $TiO_2$입자가 메틸렌블루 분해에 이용되며, 반면 스핀 코팅의 경우 바인더의 함량 때문에 20~30%의 $TiO_2$만이 분해에 이용되기 때문에, 분말의 경우 초기 30 mL 메틸렌블루를 한번에 분해할 수 있었다.

• 열처리공학회지
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• 제22권5호
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• pp.267-274
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• 2009

Titanium Chromium Nitrided (TiCrN) coatings were deposited on stainless steel 316 L and Si (100) wafer by inductively coupled plasma assisted D.C. magnetron sputtering at the various sputtering power on Cr target and $N_2/Ar$ gas ratio. Increasing the sputtering power of Cr target, XRD patterns were changed from TiCrN to nitride $Cr_2Ti$. The maximum hardness was $Hk_{3g}$ 3900 at $0.3\;N_2/Ar$ gas ratio. The thickness of the TiCrN films increased as the Cr target power increased, and it showed over $Hk_{5g}3100$ hardness at 100 W, 150 W. TiCrN films were deposited by the ICP assisted DC magnetron sputtering shown good wear resistance as the $N_2/Ar$ gas ratio was 0.1, 0.3.

• Journal of Microbiology and Biotechnology
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• 제14권6호
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• pp.1105-1113
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• 2004

Disinfection of a waterborne pathogenic protozoa, Giardia lamblia, by the conventional chlorine method has been known to be difficult. An alternative disinfection has been carried out by using a UV -light illuminating optical­fiber photoreactor. Light intensity diffused from one piece of a clad-removed optical-fiber was $1- 1.5{\mu}Em^{-2}s^{-1}$. Disinfection capability in a UV -light irradiated optical-fiber reactor suspended with 0.01 g $TiO_{2}\;dm^{-3}$ was 1.4 times that in the same reactor without $TiO_{2}$ photocatalysts. To resolve the absorption and scattering of UV light by the particles themselves as well as the difficulty of recycling particles in the slurry­type reactor, $TiO_{2}$ which was obtained by a hydrothermal method, was immobilized on clad-removed optical fibers. Such pretreatment of fiber surface resulted in an excellent transparency, which enhanced the UV light to diffuse laterally from a fiber surface. Coating time of the prepared solution by the hydrothermal method was not effective after more than two times. Disinfection capability in the $TiO_{2}$-immobilized optical-fiber reactor was $83\%$ in 1 h at $40^{\circ}C$, which was slightly higher than $76\%$ at $22^{\circ}C$ and $68\%$ at $10^{\circ}C$. Disinfection capability at $22^{\circ}C$ increased from $74\%$ at an initial pH of 3.4, through $76\%$ at pH 6.5, to $87\%$ at an initial pH of 10. Oxygen supply with air-flow rate of 5 $cm^3\;min^{-1}$ did not seem to increase the disinfection capability with UV /immobilized $TiO_2$.

• 열처리공학회지
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• 제18권5호
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• pp.281-287
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• 2005

Titanium aluminium nitride((TiAl)N) film is anticipated as an advanced coating film with wear resistance used for drills, bites etc. and with corrosion resistance at a high temperature. In this study, (TiAl)N thin films were deposited both at room temperature and at elevated substrate temperatures of 573 to 773 K by using a two-facing-targets type DC sputtering system in a mixture Ar and $N_2$ gases. Atomic compositions of the binary Ti-Al alloy target is Al-rich (25Ti-75Al (atm%)). Process parameters such as precursor volume %, substrate temperature and Ar/$N_2$ gas ratio were optimized. The crystallization processes and phase transformations of (TiAl)N thin films were investigated by X-ray diffraction, field-emission scanning electron microscopy. The microhardness of (TiAl)N thin films were measured by a dynamic hardness tester. The films obtained with Ar/$N_2$ gas ratio of 1:3 and at 673 K substrate temperature showed the highest microhardness of $H_v$ 810. The crystallized and phase transformations of (TiAl)N thin films were $Ti_2AlN+AlN{\rightarrow}TiN+AlN$ for Ar/$N_2$ gas ratio of 1:3, $Ti_2AlN+AlN{\rightarrow}TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 1:1 and $TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN{\rightarrow}Ti_2AlN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 3:1. The above results are discussed in terms of crystallized phases and microhardness.

• Journal of Periodontal and Implant Science
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• 제43권6호
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• pp.291-300
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• 2013

Purpose: Calcium phosphate (CaP)-coated implants promote osseointegration and survival rate. The aim of this study was to (1) analyze the dissolution behavior of the residual CaP particles of removed implants and (2) evaluate bone apposition of CaP-coated machined surface implants at the early healing phase. Methods: Mandibular premolars were extracted from five dogs. After eight weeks, the implants were placed according to drilling protocols: a nonmobile implant (NI) group and rotational implant (RI) group. For CaP dissolution behavior analysis, 8 implants were removed after 0, 1, 2, and 4 weeks. The surface morphology and deposition of the coatings were observed. For bone apposition analysis, block sections were obtained after 1-, 2-, and 4-week healing periods and the specimens were analyzed. Results: Calcium and phosphorus were detected in the implants that were removed immediately after insertion, and the other implants were composed mainly of titanium. There were no notable differences between the NI and RI groups in terms of the healing process. The bone-to-implant contact and bone density in the RI group showed a remarkable increase after 2 weeks of healing. Conclusions: It can be speculated that the CaP coating dissolves early in the healing phase and chemically induces early bone formation regardless of the primary stability.

• 한국환경과학회지
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• 제18권1호
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• pp.61-72
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• 2009

Fabrication and oxidants production of 3 or 4 components metal oxide electrode, which is known to be so effective to destruct non-biodegradable organics in wastewater, were studied. Five electrode materials (Ru as main component and Pt, Sn, Sb and Gd as minor components) were used for the 3 or 4 components electrode. The metal oxide electrode was prepared by coating the electrode material on the surface of the titanium mesh and then thermal oxidation at $500^{\circ}C$ for 1h. The removed RhB per 2 min and unit W of 3 components electrode was in the order: Ru:Sn:Sb=9:1:1 > Ru:Pt:Gd=5:5:1 > Ru:Sn=9:1 > Ru:Sn:Gd=9:1:1 > Ru:Sb:Gd=9:1:1. Although RhB decolorization of Ru:Sn:Sb:Gd electrode was the highest among the 4 components electrode, the RhB decolorization and oxidants formation of the Ru:Sn:Sb=9:1:1 electrode was higher than that of the 3 and 4 components electrode. Electrogenerated oxidants (free Cl and $ClO_2$) of chlorine type in 3 and 4 components electrode were higher than other oxidants such as $H_2O_2\;and\;O_3$. It was assumed that electrode with high RhB decolorization showed high oxidant generation and COD removal efficiency. OH radical which is electrogenerated by the direct electrolysis was not generated the entire 3 and 4 components electrode, therefore main mechanism of RhB degradation by metal oxide electrode based Ru was considered indirect electrolysis using electrogenerated oxidants.