• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.131-135
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• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• 한국수소및신에너지학회논문집
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• 제23권2호
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• pp.173-182
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• 2012

Effects of temperature, pressure, and gas residence time on methane combustion characteristics of mass produced oxygen carrier particle (OCN706-1100) were investigated in a pressurized fluidized bed reactor using methane and air as reactants for reduction and oxidation, respectively. The oxygen carrier showed high fuel conversion, high $CO_2$ selectivity, and low CO concentration at reduction condition and very low NO emission at oxidation condition. Moreover OCN706-1100 particle showed good regeneration ability during successive reduction-oxidation cyclic tests up to the 10th cycle. Fuel conversion and $CO_2$ selectivity decreased and CO emission increased as temperature increased. These results can be explained by trend of calculated equilibrium CO concentration. However, $CO_2$ selectivity increased as pressure increased and fuel conversion increased as gas residence time increased.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.521-522
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• 2006

In this paper, hybrid air-water discharges were used to develop an optimal condition for providing a high level of water decomposition for hydrogen yield. Electrical and optical phenomena accompanying the discharges were investigated along with feeding gases, flow rates, and point-to-plane electrode gap distance. The primary focus of this experiment was put on the optical emission of the near UV range, with the energy threshold sufficient for water dissociation and excitation. The $OH(A^{2+},'=0\;X^2,"=0$) band's optical emission intensity indicated the presence of plasma chemical reactions involving hydrogen formation. In the gaseous atmosphere saturated with water vapor the OH(A-X) band intensity was relatively high compared to the liquid and transient phases although the optical emission strongly depended on the flow rate and type of feeding gas. In the gaseous phase discharge phenomenon for Ar carrier gas transformed into a gliding arc via the flow rate growth. OH(A-X) band's intensity increased according to the flow rate or residence time of He feeding gas. Reciprocal tendency was acquired for $N_2$ and Ar carrier gases. The peak value of OH(A-X) intensity was observed in the proximity of the water surface, however in the cases of Ar and $N_2$ with 0.5 SLM flow rate peaks shifted to the region below the water surface. Rotational temperature ($T_{rot}$) was estimated to be in the range of 900-3600 K, according to the carrier gas and flow rate, which corresponds to the arc-like-streamer discharge.

• International Journal of Automotive Technology
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• 제8권6호
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• pp.697-704
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• 2007

Recently, a variable valve timing system has been widely adopted in internal combustion engine in order to improve the fuel economy and torque at low engine speed. In addition, it is known that varying valve timing according to the various engine operations could reduce exhaust gas, especially NOx, because of residual gas by valve overlap. In this study, to improve the low exhaust gas and fuel economy at part load condition, the residual gas and back flow of exhaust gas due to valve overlap were calculated computationally. Moreover, the characteristics of engine performances and NOx formations were investigated with the experiment of combination of intake and exhaust valve timing condition. Under these various valve operating conditions, the effects of both the positive valve overlap and negative valve overlap(valve underlap) were examined simultaneously. Finally, the characteristics of cyclic THC emission were analyzed by using Fast Response FID(FR-FID) in the cylinder, intake port and exhaust port positions. Besides, the effect of the different gradients of the valve timing change on engine performance was investigated and an optimum control strategy was suggested.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권10호
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• pp.476-480
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• 2003

In this paper, we have performed 3-dimensional time-resolving measurement of the Ne light emitted from the cell of plasma display panel(PDP) as a function of the pressure using the scanned point detecting system. From the temporal behavior results, we could analyze the discharge behavior of panel with Ne-Xe(4%) mixing gas and 300 torr, 400 torr and 500 torr pressure. At the top view of panel, the discharge of 300 torr panel starts at the 634 ns and ends at the 722 ns. The emission duration time is about 90 ns. The discharge of 400 torr panel starts at the 682 ns and ends at the 786 ns. the emission duration time is about 100 ns. Also, the discharge of 500 torr panel starts at the 770 ns and ends at the 826 ns. the emission duration time is about 56 ns. The discharge moves from inner edge of cathode electrode to outer cathode electrode forming arc type. In the side view of 300 torr, 400 torr and 500 torr an emission shows that the light is detected up to 180${\mu}{\textrm}{m}$, 150${\mu}{\textrm}{m}$ and 70${\mu}{\textrm}{m}$ height of barrier rib and the emission distribution of the 300 torr is wider than 400 torr, 500 torr.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 1998년도 The Third Asian Fuzzy Systems Symposium
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• pp.83-86
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• 1998

In this paper, a fuzzy model based on the Polynomial Neural Network(PNN) structure is proposed to estimate the emission pattern for air pollutant in power plants. the new algorithm uses PNN algorithm based on Group Mehtod of Data Handling (GMDH) algorithm and fuzzy reasoning in order to identify the premise structure and parameter of fuzzy implications rules, and the least square method in order to identify the optimal consequence parameters. Both time series data for the gas furnace and data for the NOx emission process of gas turbine power plants are used for the purpose of evaluating the performance of the fuzzy model. The simulation results show that the proposed technique can produce the optimal fuzzy model with higher accuracy and feasibility than other works achieved previously.

• 도시과학
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• 제9권1호
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• pp.69-73
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• 2020

Sudokwon landfill("Sudokwon" means regions of Seoul, Kyunggi and Incheon metropolitan cities in Korea), the world's largest sanitary landfill, has been systematically managing statistics on the incoming and dumping wastes and satisfactorily controlling pollutants including leachate and LFG. According to our long time experience of LFG field monitoring, the emission of GHG from landfill estimated by the IPCC Guideline showed much difference with our results. C&D waste has high concentration of sulfate compared to other wastes. Increased C&D waste of dumping waste had changed the COD/sulfate ratio in the landfill, which caused the increase of H₂S gas and the decrease of CH₄ gas. But the IPCC estimation method does not consider the effects of sulfate. In addition to that, the oxidation factor of the cover soil is set to the default values of 0.1 but the measured values by the field monitoring, are showing much higher than that, especially in the closed landfill.

• 정보처리학회논문지:컴퓨터 및 통신 시스템
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• 제2권1호
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• pp.35-42
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• 2013

본 논문은 정보통신기술을 기반으로 한 특정 서비스가 온실가스 감축에 미치는 영향력에 대하여 실험을 통하여 실증적으로 보여준다. 본 연구에서는 정보통신기술 기반 서비스로 실시간내비게이션을 선정하여 최적경로의 이산화탄소 감소율을 기존 내비게이션에서 제공하는 최단경로에서의 이산화탄소 감소율과 비교 실험하였다. 실험 결과는 실시간내비게이션의 최적경로로 이동할 경우 최단거리에 비해 이산화탄소 배출량 감소의 효과가 있다는 것을 보여준다. 또한, 본 연구는 청정개발체제에서 제시하는 온실가스 감축 방법을 기반으로 정량화 및 모니터링 접근을 통한 새로운 온실가스 감축 평가 방법을 이론적으로 제시하였다. 본 연구의 결과는 다양한 정보통신기술 기반 서비스들의 온실가스 감축 영향력에 대한 연구의 기반연구로써 활용될 수 있을 것이다. 또한, 본 논문에서 제시한 온실가스 감축 평가 방법론은 청정개발체제에 제안되어 새로운 표준으로 활용될 수 있을 것이다.

• 한국가스학회지
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• 제26권6호
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• pp.37-44
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• 2022

본 연구에서는 SN(Swirl Number)는 같지만 코어부와 스월러부의 질량유량비(m)가 다른 저선회 노즐 2종을 설계하여 상압 연소성능 시험을 수행하였다. 각 노즐에 대해 단열화염온도에 따른 연소성능 실험을 수행하였고 화염구조 특성, NOx 배출 특성, 연소진동 모드를 파악하였다. 화염구조가 크게 차이가 있었지만 CO 배츨 특성은 유사하였고 NOx 배출 특성도 화염구조보다는 연소진동과 더 큰 관련성이 있음을 보였다. 연료노즐의 위치를 변경하여 대류지연시간을 조절하면서 연소진동 및 NOx 배출 특성을 파악하였는데 대류지연시간이 연소진동 주기의 (3+4n)/4±1/4 (n=0,1,2,...) 영역에 들어올 때 진소진동이 강하게 나타나고 반대의 경우는 연소진동이 아주 약하게 발생함을 확인하였다.

• 한국환경과학회지
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• 제11권6호
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• pp.543-551
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• 2002

A Numerical simulation on the thermal flow performance was carried out to propose the incinerator type for the domestic refuses and to investigate the design factor and operating conditions. The SSTI(Standard Stoker Type Incinerator) proposed in this study was modified from the type with central f)ow. It has the characteristics of good mixing between refuse and hot combustion gas in primary combustion chamber and between unburned gas inflowing and secondary air jet in secondary chamber. By predictive results, the SSTI was no recirculation zone in secondary chamber so that mixing time was increased with high residence time. It has good characteristics of combustion and low emission. Parametric screening studies have been understood with phenomenon of combustion in incinerator.