• 제목/요약/키워드: TiAgN

검색결과 78건 처리시간 0.026초

$(Ba_{0.5}Sr_{0.5})TiO_3$ 박막의 상부전극 RTA에 따른 계면 특성 변화 (Effect of RTA on the interfacial Properties of Top Electrodes on $(Ba_{0.5}Sr_{0.5})TiO_3$)

  • 전장배;김덕규;소순진;박춘배
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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    • pp.740-742
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    • 1998
  • In this paper, we described the effect of rapid thermal annealing on the electrical properties of interfacial layer between various top electrodes and $(Ba_{0.5}Sr_{0.5})TiO_3$ thin films. BST thin films were fabricated on Pt/TiN/$SiO_2$/Si substrate by RF magnetron sputtering technique. AI, Ag, and Cu films for the formation of top electrode were deposited on BST thin films by thermal evaporator. Top electrodes/BST/Pt capacitor annealed with rapid thermal annealing at various temperature. In $(Ba_{0.5}Sr_{0.5})TiO_3$ thin films with Cu top electrode annealed at $500^{\circ}C$, the dielectric constant was measured to the value of 366 at 1.2 [kHz] and the leakage current was obtained to the value of $5.85{\times}10^{-7}\;[A/cm^2}$ at the forward bias of 2 [V].

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$SrTiO_3$ 치환에 따른 (Na,K)$NbO_3$ 세라믹스의 압전 및 유전 특성 (Piezoelectric and Dielectric Properties of (Na,K)$NbO_3$ Ceramics as a Function of $SrTiO_3$ substitution)

  • 이상호;김도형;이일하;류주현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.175-176
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    • 2008
  • In this study, in order to develop the composition ceramics for lead-free ultrasonic motor, $[(K_{0.5}Na_{0.5})_{0.95}Li_{0.05}(Nb_{0.96}Sb_{0.04})]O_3$ ceramics were fabricated using $Ag_2O$ as sintering aid and a conventional mixed oxide process and their piezoelectric and dielectric characteristics were investigated according to the $SrTiO_3$ substitution. $SrTiO_3$ substitution enhanced density, dielectric constant$(\varepsilon_r)$ and electromechanical coupling factor$(k_p)$. However, mechanical quality factor was deteriorated. At the 0.5mol% $SrTiO_3$ substitution, density, electromechanical coupling factor$(k_p)$, dielectric constant$(\varepsilon_r)$ and piezoelectric constant$(d_{33})$ of specimen showed the optimum value of 4.437g/$cm^3$, 0.457, 1294, 265pC/N, respectively.

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SrTiO3 치환에 따른 (Na,K)NbO3계 세라믹스의 유전 및 압전특성 (Dielectric and Piezoelectric Properties of (Na,K)$NbO3 Ceramics as a Function of SrTiO3 Substitution)

  • 이상호;류주현;이의용;송현선;마석범;김성구
    • 한국전기전자재료학회논문지
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    • 제22권6호
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    • pp.484-488
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    • 2009
  • In this study, in order to develop the lead-free piezoelectric ceramics with high piezoelectric and dielectric properties, $[(K_{0.5}Na_{0.5})_{0.95}Li_{0.05}(Nb_{0.96}Sb_{0.04})]O_3$ ceramics were fabricated using $Ag_2O$ as sintering aid and a conventional mixed oxide process and their piezoelectric and dielectric characteristics were investigated according to the $SrTiO_3$ substitution. $SrTiO_3$ substitution enhanced density, dielectric constant(${\varepsilon}_r$) and electromechanical coupling factor($k_p$). However, mechanical quality factor was deteriorated. And also, Curie temperature ($T_c$), and phase transition temperature($T_p$) were rapidly decreased. At the 0.5 mol% $SrTiO_3$ substitution, density, electromechanical coupling factor($k_p$), dielectric constant(${\varepsilon}_r$) and piezoelectric constant($d_{33}$) of specimen showed the optimum value of $4.437\;g/cm^3$, 0.457, 1294, 265 pC/N, respectively.

Ag2O 첨가에 따른 0.98(Na0.5K0.5)NbO3-0.02Li(Sb0.17Ta0.83)O3 세라믹스의 압전특성 (Piezoelectric Properties of Ag2O-doped 0.98(Na0.5K0.5)NbO3-0.02Li(Sb0.17Ta0.83)O3 Ceramics)

  • 김현주;이승환;이성갑;이영희
    • 한국전기전자재료학회논문지
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    • 제25권1호
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    • pp.29-32
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    • 2012
  • Lead-free $0.98(Na_{0.5},K_{0.5})NbO_3-0.02Li(Sb_{0.17}Ti_{0.83})O_3$ (hereafter 0.98NKN-0.02LST) ceramics doped with $Ag_2O$ were prepared using a conventional mixed oxide method. The specimen showed superior structural and electrical properties when 1 mol% $Ag_2O$ was doped. For the 0.98NKN-0.02LST+1.0mol%$Ag_2O$ ceramics sintered at $1,100^{\circ}C$, piezoelectric constant ($d_{33}$) of sample showed the optimum values of 207 pC/N. The 0.98NKN-0.02LST+1.0 mol%$Ag_2O$ ceramics are a promising candidate for lead-free piezoelectric materials.

The Syntheses, Characterizations, and Photocatalytic Activities of Silver, Platinum, and Gold Doped TiO2 Nanoparticles

  • Loganathan, Kumaresan;Bommusamy, Palanisamy;Muthaiahpillai, Palanichamy;Velayutham, Murugesan
    • Environmental Engineering Research
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    • 제16권2호
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    • pp.81-90
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    • 2011
  • Different weight percentages of Ag, Pt, and Au doped nano $TiO_2$ were synthesized using the acetic acid hydrolyzed sol-gel method. The crystallite phase, surface morphology combined with elemental composition and light absorption properties of the doped nano $TiO_2$ were comprehensively examined using X-ray diffraction (XRD), $N_2$ sorption analysis, transmission electron microscopic (TEM), energy dispersive X-ray, and DRS UV-vis analysis. The doping of noble metals stabilized the anatase phase, without conversion to rutile phase. The formation of gold nano particles in Au doped nano $TiO_2$ was confirmed from the XRD patterns for gold. The specific surface area was found to be in the range 50 to 85 $m^2$/g. TEM images confirmed the formation a hexagonal plate like morphology of nano $TiO_2$. The photocatalytic activity of doped nano $TiO_2$ was evaluated using 4-chlorophenol as the model pollutant. Au doped (0.5 wt %) nano $TiO_2$ was found to exhibit higher photocatalytic activity than the other noble metal doped nano $TiO_2$, pure nano $TiO_2$ and commercial $TiO_2$ (Degussa P-25). This enhanced photocatalytic activity was due to the cathodic influence of gold in suppressing the electron-hole recombination during the reaction.

금속 코팅을 통한 다양한 반도체/금속 나노선 제작 (Fabrication of Various Semiconductor/Metal Structured Nanowires Using Metal Coating)

  • 박병준;김경환;김현석;조경아;김진형;이준우;김상식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.252-255
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    • 2004
  • Various Semiconductor/Metal structured nanowires were synthesized from the simple thermal annealing of ball-milled compound powders and the thermal evaporation of metals. Their structural properties were investigated by Scanning Electron Microscopy(SEM) and Transmission Electron Microscopy(TEM), Energy Dispersive X-ray spectroscopy(EDX). Depending on the type of metals and the material of nanowires, uniform somiconductor/metal nanowires(GaN/Al, GaN/Ag) or isolated metal particles on semiconductor nanowires$(SnO_2/Ti,\;Si/Ti)$ were formed on the surface of nanowires.

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Low-Firing Pb(Zr,Ti)O3-Based Multilayer Ceramic Actuators Using Ag Inner Electrode

  • Han, Hyoung-Su;Park, Eon-Cheol;Lee, Jae-Shin;Yoon, Jong-Il;Ahn, Kyoung-Kwan
    • Transactions on Electrical and Electronic Materials
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    • 제12권6호
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    • pp.249-252
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    • 2011
  • We investigated the low firing of $Li_2CO_3$ added $0.2Pb(Mg_{1/3}Nb_{2/3})O_3$ - 0.3Pb($Fe_{1/2}Nb_{1/2}$) - $0.5Pb(Zr_{0.475}Ti_{0.525})O_3$ (PMN-PFN-PZT) ceramics and multilayer actuators (MLAs) using Ag inner electrodes. It was found that 0.1 wt% $Li_2CO_3$ was quite effective in lowering the sintering temperature of PMN-PFN-PZT ceramics from $1,100^{\circ}C$ down to $900^{\circ}C$ without deteriorating their piezoelectric ceramics ($d_{33}$ = 425 pC/N and $k_p$ = 61.9%). However, excess $Li_2CO_3$ up to 0.3 wt% brings about unwanted problems such as the formation of a $LiPbO_2$ secondary phase and subsequent degradation in the piezoelectric properties. Using 0.1 wt% $Li_2CO_3$ added PMN-PFN-PZT ceramics, MLAs with Ag inner electrodes were successfully fabricated, resulting in a normalized strain of 580 pm/V at an electric field of 1.5 kV/mm.

상부전극에 따른 SCT 세라믹 박막의 전기적 특성 (Electrical Properties of SCT Ceramic Thin Film with Top Electrode)

  • 조춘남;김진사;신철기;최운식;김충혁;박용필;유영각;이준응
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1501-1503
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    • 1999
  • The $(Sr_{0.85}Ca_{0.15})TiO_3$(SCT) thin films are deposited on Pt-coated electrode$(Pt/TiO_2/SiO_2/Si)$ using RF sputtering method. Ag, Cu, Al, Pt films for the formation of top eletrode were doposited on SCT thin films by thermal evaporator and sputtering. The effects of top electodes have be studied on SCT samples with a variety of top electrode materials.

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산화 스트롬튬 박막 전도도의 온도특성에 관한 연구 (The study on the temperature characteristics of conductivity for SrTiO$_3$ thin films.)

  • 이우선;손경춘;박정기;김상용;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.437-440
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    • 1999
  • The objective of this study is to deposited the preparation of SrTiO$_3$dielectric thin films on Ag/barrier-mater/Si(N-type 100) bottom electrode using a conventional rf-magnetron sputtering technique with a ceramic target under various conditions. It is demonstrated that the leakage current of films are strongly dependent on the substrate temperature. The current-voltage characteristics are influenced by the Schottky effict. The resistivity properties of films deposited on silicon substrates were very high resistivity. Conduction mechanisms in the films was dependent on the substrate temperature range.

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강유전체$Ba_{1-x}Sr_xTiO_3$ 박막의 제조 및 상부전극재료에 따른 전기적 특성 (Deposition $Ba_{1-x}Sr_xTiO_3$Thin Films and Electrical Properties with Various Materials Top Electrodes)

  • 박춘배;김덕규;전장배
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권6호
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    • pp.410-415
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    • 1999
  • $Ba_{1-x}Sr_xTiO_3$ thin films with various ratio of Sr (X = 0.4, 0.5, 0.6) were grown $Pt/TiN/SiO_2/Si$ subastrate by RF magnetron sputtering deposition. As, Ag, and Cu films were deposited on $Ba_{1-x}Sr_xTiO_3$ thin films as top electrodes by using a thermal evaporator. The electrical properties of $Ba_{1-x}Sr_xTiO_3$ thin films for various compositions were characterized and the physical properties at interface between $Ba_{1-x}Sr_xTiO_3$ thin films and top electrodes were evaluated in terms of the work function difference. At x =0.5, the degradation of capacitance is lower to the other compositions. As negative biasapplied, the specimen with Cu top electrode has board saturation region and low leakage current since work function of Cu is bigger than other electrodes.$ Ba_{0.5}Sr_{0.5}TiO_3$ thin films with Cu top electrode, the dielectric constant was measured to the value of 354 at 1 kHz and the leakage current was obtained to the value of $5.26\times10^{-6}A/cm2$ at the forward bias of 2 V.

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