• 제목/요약/키워드: Ti3SiC2

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열처리 온도에 따른 $V_{1.9}W_{0.1}O_5$ 박막의 유전특성 (Electrical Properties of $V_{1.9}W_{0.1}O_5$ Thin Films with Annealing Temperature)

  • 남성필;김재식;이성갑;배선기;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.239-240
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    • 2008
  • The $V_{1.9}W_{0.1}O_5$ thin films deposited on Pt/Ti/$SiO_2$/Si substrates by RF sputtering method exhibited fairly good TCR and dielectric properties. It was found that film crystallinity, dielectric properties, and TCR properties were strongly dependent upon the annealing temperature. The dielectric constants of the $V_{1.9}W_{0.1}O_5$ thin films annealed at $400^{\circ}C$ were 39.6, with a dielectric loss of 0.255, respectively. Also, the TCR values of the $V_{1.9}W_{0.1}O_5$ thin films annealed at $400^{\circ}C$ were about -3.15%/K.

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Fabrication and Electrical Properties of PZT/BFO Multilayer Thin Films

  • Jo, Seo-Hyeon;Nam, Sung-Pil;Lee, Sung-Gap;Lee, Seung-Hwan;Lee, Young-Hie;Kim, Young-Gon
    • Transactions on Electrical and Electronic Materials
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    • 제12권5호
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    • pp.193-196
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    • 2011
  • Lead zirconate titanate (PZT)/ bismuth ferrite (BFO) multilayer thin films have been fabricated by the spin-coating method on Pt(200 nm)/Ti(10 nm)/$SiO_2$(100 nm)/p-Si(100) substrates using $BiFeO_3$ and $Pb(Zr_{0.52}Ti_{0.48})O_3$ metal alkoxide solutions. The PZT/BFO multilayer thin films show a uniform and void-free grain structure, and the grain size is smaller than that of PZT single films. The reason for this is assumed to be that the lower BFO layers play an important role as a nucleation site or seed layer for the formation of homogeneous and uniform upper PZT layers. The dielectric constant and dielectric losses decreased with increasing number of coatings, and the six-layer PZT/BFO thin film has good properties of 162 (dielectric constant) and 0.017 (dielectric losses) at 1 kHz. The remnant polarization and coercive field of three-layer PZT/BFO thin films were 13.86 ${\mu}C/cm^2$ and 37 kV/cm respectively.

회전코팅법을 이용한 BST 박막의 제조 및 전기적 특성에 관한 연구 (The Preparation and Electrical Characteristics of BST Thin Film by Spin-Coating Method)

  • 기현철;김덕근;이승우;홍경진;이진;김태성
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.918-920
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    • 1999
  • Recently, the ceramics of high permittivity are applied to DRAM and FRAM. In this study, (Ba, Sr)$TiO_3$ (BST) ceramics thin films were prepared by Sol-Gel method. BST solution was made and spin-coated on Pt/$SiO_2$/Si substrate at 4000[rpm] for 10 seconds. Coating process was repeated 3 times and then sintered at $750[^{\circ}C]$ for 30 minutes. Each specimen was analyzed structure and electrical characteristics. Thickness of BST ceramics thin films are about $2000[\AA]$. Dielectric constant and loss of thin films was little decreased at $1[kHz]{\sim}1[MHz]$. Dielectric constant and loss to frequency were 250 and 0.02 in BST3. In accordance with applied voltage, property of leakage current was stability when the was $0{\sim}3$[V]. According to voltage, leakage current was increased exponentially at $4{\sim}7$[V].

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Al-Si 용융도금된 11%Cr 페라이트 스테인리스강, STS409L GTA 용접부의 미세조직과 경도 (Microstructures and Hardness of Al-Si Coated 11%Cr Ferritic Stainless Steel, 409L GTA Welds)

  • 박태준;공종판;나혜성;강정윤;엄상호;김정길;우인수;이종섭
    • Journal of Welding and Joining
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    • 제28권3호
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    • pp.92-98
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    • 2010
  • Ferritic stainless steels, which have relatively small thermal expansion coefficient and excellent corrosion resistance, are increasingly being used in vehicle manufacturing, in order to increase the lifetime of exhaust manifold parts. But, there are limits on use because of the problem related to cosmetic resistance, corrosions of condensation and high temperature salt etc. So, Aluminum-coated stainless steel instead of ferritic stainless steel are utilized in these parts due to the improved properties. In this investigation, Al-8wt% Si alloy coated 409L ferritic stainless steel was used as the base metal during Gas Tungsten Arc(GTA) welding. The effects of coated layer on the microstructure and hardness were investigated. Full penetration was obtained, when the welding current was higher than 90A and the welding speed was lower than 0.52m/min. Grain size was the largest in fusion zone and decreased from near HAZ to base metal. As welding speed increased, grain size of fusion zone decreased, and there was no big change in HAZ. Hardness had a peak value in the fusion zone and decreased from the bond line to the base metal. The highest hardness in the fusion zone resulted from the fine re-precipitation of the coarse TiN and Ti(C, N) existed in the base metal during melting and solidification process and the presence of fine $Al_2O_3$ and $SiO_2$ formed by the migration of the elements, Al and Si, from the melted coating layer into the fusion zone.

더덕 ( 사삼 )의 재배방법별 일반성분 및 무기성분에 관한 연구 ( Proximate and Mineral of Dried Wild and Cultivated Codonopsis lanceolata Benth , et Hook , Fil , of Different Cultivated Groups )

  • 신수철
    • 한국자원식물학회지
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    • 제4권2호
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    • pp.39-45
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    • 1991
  • Proximate compositions of the roots of cultured and wild Codonopsis lanceolata were examined as tile basic reasearch for the study of their source of processed foods.No significant difference in the contents was found between the wild root and thecultivated at 3$0^{\circ}C$ in biotronroom. In view of the results to have measured mineralswhich is included in 14 sorts of Codonopsis lanceolata and surveyed their distribution.12 kinds of minerals including T1, Co, Ge, Sm, Mo, Sc, Be, Cd, As, Ga, Bi, ph are ne-vel or little included in almost source. Other twenty-one sorts of minerals (Ni, Se,Ba, Sb, Si, Ti, B, Li, Ifs, Ca, Sr, Mn, Fe, Cu, Zn, p, Al, Na, V, Cr, K) are more or less in-cluded in all source and Ca, Mg, p, K, and Fe are metals that are included in large qu-entities in comparison with others. No minerals difference in the contents was foundbetween the cultivated temperature. The content of elements of inorganic metal differsaccording to the part of C. lanceolata.

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무연솔더 접합부 특성향상을 위한 나노복합솔더 기술 (Nano-Composite Solder Technology for the Improvement of Solder Joint Properties)

  • 기원명;이영규;이창우;유세훈
    • 마이크로전자및패키징학회지
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    • 제18권3호
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    • pp.9-17
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    • 2011
  • Nano-composite solders have been studied to improve the properties of Pb-free solder joints. The nanoparticles in the composite solders were carbon nanotubes(CNTs), metals (Ag, Ni, Cr, etc.), ceramics (SiC, $ZrO_2$, $TiB_2$, etc.). To fabricate the nano-composite solders, mechanical mixing methods and in-situ fabrication method has been used for well-dispersed nano phase. The characteristic properties of the nano-composite solders were high creep resistance, low undercooling, low IMC growth rate and fine microstructures. More researches on the nano-composite solders are required to improve the processibility and the reliability of the nano-composite solder joints.

Fractal Analysis of the Surface in Thin Film Capacitors

  • Hong, Kyung-Jin;Min, Yong-Ki;Cho, Jae-Cheol
    • KIEE International Transactions on Electrophysics and Applications
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    • 제11C권2호
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    • pp.18-22
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    • 2001
  • The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Sio$_2$/Si substrate at 4,000 [rpm] for 10 seconds. The structural characteristics of the surface were analyzed by fractal dimension. The thickness of BST ceramics thin films was about 260∼280 [nm]. The property of the leakage current was stable with 10-9∼10-11[A] when the applied voltage was 0∼3[V]. BST thin films ha low leakage current properties when fractal dimension was low and a coating area was high.

Enhanced Electrical Performance of SiZnSnO Thin Film Transistor with Thin Metal Layer

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • 제18권3호
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    • pp.141-143
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    • 2017
  • Novel structured thin film transistors (TFTs) of amorphous silicon zinc tin oxide (a-SZTO) were designed and fabricated with a thin metal layer between the source and drain electrodes. A SZTO channel was annealed at $500^{\circ}C$. A Ti/Au electrode was used on the SZTO channel. Metals are deposited between the source and drain in this novel structured TFTs. The mobility of the was improved from $14.77cm^2/Vs$ to $35.59cm^2/Vs$ simply by adopting the novel structure without changing any other processing parameters, such as annealing condition, sputtering power or processing pressure. In addition, stability was improved under the positive bias thermal stress and negative bias thermal stress applied to the novel structured TFTs. Finally, this novel structured TFT was observed to be less affected by back-channel effect.

증착 조건이 KLN 박막의 형상에 미치는 영향 (The Effect of Deposition Parameters on the Morphology of KLN Thin Films)

  • 박성근;전병억;김진수;김지현;최병진;남기홍;류기홍;김기완
    • 한국재료학회지
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    • 제11권1호
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    • pp.27-33
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    • 2001
  • 본 실험에서는 $Pt/Ti/SiO_2/Si(100)$ 기판 위에 KLN 박막을 형성할 때 나타나는 4-fold 그레인의 성장 특성을 조사하기 위하여 공정 변수를 변화시키면서 박막을 제작하였다. 공정 변수는 기판 온도, 스퍼터링 압력, 고주파 전력을 선택하여 최적의 증착 조건 근방에서 공정 변수를 변화시키면서 실험하였다. K와 Li가 과량된 타겟을 사용하여 KLN 박막을 제조할 때 최적의 성장 조건은 고주파 전력 100 W, 공정압력 150 mTorr, 기판온도 $600^{\circ}C$이며 공정변수의 작은 변화에도 박막의 표면 형상은 매우 민감하게 변화하였다. KLN은 화합물을 구성하는 원소 사이의 증기화 온도의 차이가 많이나는 물질로서 고온 고진공의 환경에서 박막을 제조할 때 어려움이 있으며, 녹는점과 기판 온도와의 관계를 설명한 Thornton의 모델로 설명하기 어려운 현상이 나타났다. 이러한 것은 박막 물질을 이루는 구성 원소의 증기화 온도를 이용하여 이 현상을 간단하게 설명할 수 있었다.

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BST 박막의 비대칭전극재료에 따른 누설전류특성 (The Leakage Current Properties of BST thin films with Unsymmetrical Electrode Materials)

  • 전장배;김덕규;박영순;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.329-332
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    • 1999
  • In this paper, BST((Bao.&o,dTi0:3) thin films were deposited by the rf magnetron sputtering method on Pt/$SiO_2$/Si substrate. Pt, $RuO_2$, Ag, Cu films for the formation of top electrode were deposited on BST thm films. And then Top Electrodes/BST/Pt capacitors were annealed with rapid thermal annealing(RTA) at various temperature. We have investigated effect of post-annealing on the electrical properties such as dielectric constant and leakage current of the capacitors. It was found that electrical properties of the capacitors were greatly depended on the annealing temperatures as well as the materials of top electrodes. In BST thin films with Pt top electrode was annealed at $700^{\circ}C$. the dielectric constant was measured to the value of 346 at l[kHzl and the leakage current was obtained to the value of $8.76\times10^8$[A/$\textrm{cm}^2$] at the forward bias of 2[V].

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