• Title/Summary/Keyword: Ti-oxide

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Dielectric Characteristics of $Al_2O_3$ Thin Films Deposited by Reactive Sputtering

  • Park, Jae-Hoon;Park, Joo-Dong;Oh, Tae-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.100-100
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    • 2000
  • Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

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Characteristics of IGZO Thin Film Transistor Deposited by DC Magnetron Sputtering (DC 마그네트론 스퍼터링 방법을 이용하여 증착한 IGZO 박막트랜지스터의 특성)

  • Kim, Sung-Yeon;Myoung, Jae-Min
    • Korean Journal of Materials Research
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    • v.19 no.1
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    • pp.24-27
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    • 2009
  • Indium Gallium Zinc Oxide (IGZO) thin films were deposited onto 300 nm-thick oxidized Si substrates and glass substrates by direct current (DC) magnetron sputtering of IGZO targets at room temperature. FESEM and XRD analyses indicate that non-annealed and annealed IGZO thin films exhibit an amorphous structure. To investigate the effect of an annealing treatment, the films were thermally treated at $300^{\circ}C$ for 1hr in air. The IGZO TFTs structure was a bottom-gate type in which electrodes were deposited by the DC magnetron sputtering of Ti and Au targets at room temperature. The non-annealed and annealed IGZO TFTs exhibit an $I_{on}/I_{off}$ ratio of more than $10^5$. The saturation mobility and threshold voltage of nonannealed IGZO TFTs was $4.92{\times}10^{-1}cm^2/V{\cdot}s$ and 1.46V, respectively, whereas these values for the annealed TFTs were $1.49{\times}10^{-1}cm^2/V{\cdot}$ and 15.43V, respectively. It is believed that an increase in the surface roughness after an annealing treatment degrades the quality of the device. The transmittances of the IGZO thin films were approximately 80%. These results demonstrate that IGZO thin films are suitable for use as transparent thin film transistors (TTFTs).

Precision Length Metrology using the Optical Comb of Femtosecond Pulse Lasers (펨토초 레이저의 주파수 모드를 이용한 정밀 길이 측정)

  • Jin Jong-Han;Kim Young-Jin;Kim Seung-Woo
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.216-219
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    • 2005
  • In precision length measurements using optical interferometry based on homodyne or heterodyne principles, it is crucial to have frequency-stabilized monochromatic light sources. To the end, we investigate the possibility of utilizing the optical comb constituted by ultrashort femtosecond pulse lasers generated from a gain medium of titanium-doped aluminium oxide $(Ti:Al_2O_3)$. The optical comb is stabilized by locking to the caesium atomic clock, which allows all the modes of the comb to maintain an extremely high level of frequency stabilization to precision of one part in $10^{16}$. Then, high precision length measurements are realized by extracting a single or group of particularly wanted optical frequency components or by adopting a third-party light source locked to the comb. Required measurement system setup will be presented in detail along with experimental results.

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Impact of Solution-Processed BCP Buffer Layer on Efficient Perovskite Solar Cells (페로브스카이트 태양전지에서의 저온 용액 공정의 BCP 버퍼층 효과)

  • Jung, Minsu;Choi, In Woo;Kim, Dong Suk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.73-77
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    • 2021
  • Inorganic-organic hybrid perovskite solar cells have demonstrated considerable improvements, reaching 25.5% of certified power conversion efficiency in 2020 from 3.8% in 2009. In normal structured perovskite solar cells, TiO2 electron-transporting materials require heat treatment process at a high temperature over 450℃ to induce crystallinity. Inverted perovskite solar cells have also been studied to exclude the additional thermal process by using [6,6]-phenyl-C61-butyric acid methyl ester (PCBM) as a non-oxide electron-transporting layer. However, the drawback of the PCBM layer is a charge accumulation at the interface between PCBM and a metal electrode. The impact of bathocuproin (BCP) buffer layer on photovoltaic performance has been investigated herein to solve the problem of PCBM. 2-mM BCP-modified perovskite solar cells were observed to exhibit a maximum efficiency of 12.03% compared with BCP-free counterparts (5.82%) due to the suppression of the charge accumulation at the PCBM-Au interface and the resulting reduction of the charge recombination between perovskite and the PCBM layer.

Advanced Optical and Electrical Properties of TIO Thin Films by Thermal Surface Treatment of Electron Beam Irradiation (전자빔 열 표면처리에 따른 TIO 박막의 투명전극 특성 개선 효과)

  • Yeon-Hak Lee;Min-Sung Park;Daeil Kim
    • Journal of the Korean Society for Heat Treatment
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    • v.36 no.4
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    • pp.193-197
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    • 2023
  • Transparent and conducting titanium (Ti) doped indium oxide (TIO) thin films were deposited on the poly-imide (PI) substrate with radio frequency magnetron sputtering and then electron irradiation was conducted on the TIO film's surface to investigate the effect electron irradiation on the crystallization and opto-electrical properties of the films. All x-ray diffraction (XRD) pattern showed two diffraction peaks of the In2O2 (431) and (444) planes with regardless of the electron beam irradiation energy. In the AFM analysis, the surface roughness of as deposited films was 3.29 nm, while the films electron irradiated at 700 eV, show a lower RMS roughness of 2.62 nm. In this study, the FOM of as deposited TIO films is 6.82 × 10-3 Ω-1, while the films electron irradiated at 500 eV show the higher FOM value of 1.0 × 10-2 Ω-1. Thus, it is concluded that the post-deposition electron beam irradiation at 500 eV is the one of effective methods of crystallization and enhancement of opto-electrical performance of TIO thin film deposited on the PI substrate.

Physical Propertise of Non-Cement Matrix with Red Mud (레드머드를 혼입한 무시멘트 경화체의 물리적 특성)

  • Kwon, Hyeong-Soon;Lee, Sang-Soo
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2023.05a
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    • pp.93-94
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    • 2023
  • Through the industrial revolution that began in the 18th century, the amount of carbon dioxide in the atmosphere increased rapidly as humans used fossil energy such as coal and oil as fuel for steam engines and factory machines. The amount of carbon dioxide emitted while producing cement, the main material of concrete used in construction, is large enough to account for 5-8% of the world's carbon dioxide emissions. In this study, Non cement-based matrix were used to reduce carbon dioxide emissions from cement production. Red mud is an industrial by-product generated in the manufacturing process of aluminum hydroxide using bauxite, and more than 120 million tons are produced worldwide. In addition, red mud is a porous material that can be physically adsorbed, and causes a photocatalytic reaction of TiO2 to remove harmful substances such as nitrogen oxide formaldehyde in the air and chemically adsorbs ammonia and hydrogen sulfide. Therefore, this study aims to examine the physical properties of the matrix by mixing red mud, an industrial by-product with good adsorption performance, into the Non cement-based matrix.

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Study on Iron-making and Manufacturing Technology of Iron Swords with Ring Pommel Excavated in Ipbuk-dong, Suwon (수원 입북동 출토 철제환두도의 제철과 제작기술 연구)

  • Kim, Soo-Ki
    • Journal of Conservation Science
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    • v.32 no.4
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    • pp.579-588
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    • 2016
  • This study analyzed nonmetallic inclusions in iron swords with a ring pommel excavated in the Ipbuk-dong, Suwon. Scanning electron microscopy with energy dispersive spectroscopy(SEM-EDS) was used to estimate the iron-making temperature, and we compared the oxide with $SiO_2$ to investigate the heat-treatment technology in the production of iron swords with a ring pommel by investigating the artificial insertion of a slag former and the metallurgical structure. From the wustite observed in most of the specimens, it is judged that these swords were produced by heating and forging iron smelted at a low temperature using the solid reduction method. In addition, judging from the partial presence of $P_2O_5$, it is assumed that they were smelted directly with natural ore, not calcined. From the ratios of $CaO/SiO_2$ and $TiO_2/SiO_2$, it is judged that the raw material for iron-making was iron ore and that a calcareous slag former was not artificially inserted. The structure of the blade part on the front end was pure iron. From the high carbon content of the blade part on the ring pommel and the formation of a martensitic structure and pearlite colony, it is judged that they were tempered after carburizing and that the back, handle part, and ring pommel were unintentionally carburized. Judging from the structure of these specimens, it was noted that they were produced by applying artificial partial heat-treatment technology. This study attempted to present a more scientific analysis by using the method of interpretation through component analysis of nonmetallic inclusions appearing in one relic by the ratio of the oxide divided by $SiO_2$. It is judged that reinterpreting the arguments by the results of the existing analysis and research in this way can obtain different interpretations.

An Analysis of the Characteristics of Glass Beads from the Joseon Dynasty Using Non-destructive Analysis (비파괴 분석을 활용한 조선시대 유리구슬의 특성 분석)

  • Lee Sujin;Kim Gyuho
    • Conservation Science in Museum
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    • v.30
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    • pp.71-88
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    • 2023
  • This paper examined the visible characteristics and chemical composition of glass beads from the Joseon Dynasty as well as the associations thereof. It also explored the characteristics and uses of glass beads by region. This study covered a total of 1,819 pieces excavated from 25 locations in the Gyeonggi, Chungcheong, and Gyeongsang regions, of which 537 pieces were analyzed for their chemical composition. Glass beads of the Joseon Dynasty take a variety of shapes such as a Round, Coil, Floral, Segmented, Flat, Oval, and Calabash. Colors vary from shades of brown (brown, lemon yellow) and shades of blue (Bluish-Green, greenish-Blue, Purple-Blue) to shades of white (colorless, white) and shades of green (Green, Greenish-Blue, Greenish-Brown). Brown accounts for the largest percentage, followed by Bluish-Green, greenish-Blue. It was identified that Drawing technique was the most common glass bead production technique of the Joseon Dynasty. Potassium oxide (K2O) was the most common flux agent for glass beads, while the potash glass and mixed alkali glass groups account for the largest quantity. The choice of stabilizers depended on the type of flux agents used, but the most common were calcium oxide (CaO) and aluminum oxide (Al2O3). The potash glass and potash lead glass groups are high in CaO and low in Al2O3, the mixed alkali glass group is high in CaO, and the lead glass group is low in CaO. In terms of the association between color and shape, most of the beads with shade of brown and blue have round shapes of brown and blue have spherical shapes, while the coil shape is prominent in blue beads. A high percentage of green and colorless beads also take the shape of a coil, while white beads in general have a floral shape. In terms of the association between shape and chemical composition, round, floral and segmented shapes account for a high percentage of the potash glass group, while coil and flat shapes are common in the mixed alkali glass group. This paper also analyzed the colorants for each color based on the association between color and chemical composition. Iron (Fe) was used as the colorant for brown and white, and titanium (Ti) and iron were used for light yellow. Purple-Blue was produced by by cobalt (Co), and greenish-Blue, Bluish-Green, green, Greenish-Blue were produced by iron and copper (Cu). Colorless beads had a generally low colorant content.

Mineralogy and Mineral-chemistry of REE Minerals Occurring at Mountain Eorae, Chungju (충주 어래산 일대에서 산출하는 희토류 광물의 광물학적 및 광물화학적 특성)

  • You, Byoung-Woon;Lee, Gill Jae;Koh, Sang Mo
    • Economic and Environmental Geology
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    • v.45 no.6
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    • pp.643-659
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    • 2012
  • The Chungju Fe-REE deposit is located in the Kyemyeongsan Formation of the Ogcheon Group. The Kyemyeongsan Formation includes meta-volcanic rocks and pegmatite hosted REE deposit which show different kind of REE-containing minerals. The meta-volcanic rocks hosted REE deposits' main REE minerals are allanite, zircon, apatite, and sphene, whereas the pegmatite hosted REE deposits is mainly composed of fergusonite, and karnasurtite, zircon, thorite. The meta-volcanic rock hosted major REE mineral is allanite as the form of aggregation and contains 23.89-29.19 wt% TREO (Total Rare Earth Oxide), 4.71-9.92 wt% $La_2O_3$, 11.30-14.33 wt% $Ce_2O_3$, 0.11-0.29 wt% $Y_2O_3$, 0.15-0.94 wt% $ThO_2$, as a formula of (Ca, Y, REE, Th)$_{2.095}$(Mg, Al, Ti, Mn, $Fe^{3+})_{2.770}(SiO_4)_{2.975}(OH)$. Accompanying REE in a coupled substitution for $Ca^{2+}$ (M1 site) and $Al^{3+}-Fe^{2+}$ (M2 site) leads to a large chemical variety. Due to the allanite's high contents of Fe, it belongs to Ferrialanite. The pegmatite hosted deposit's domi-nant REE mineral is fergusonite as prismatic or subhedral grains associated with zircon, fluorite and karnasurtite. Geochemical composition of the fergusonite($YNbO_4$) suggests substitution of Y-REE and Y-Th in A-site, and Nb-Ta-Ti in B-site, furthermore the proportion of $Y_2O_3$ and $Nb_2O_5$ is oddly 1:1.5 comparing to the ideal ratio 1:1 and Nb is higher than Y, also A-site Y actively substitutes with REE. Karnasurtite in pegmatite variously ranges 9.16-22.88 wt% $Ce_2O_3$, 2.15-9.16 wt% and $La_2O_3$, 0.44-10.8 wt% $ThO_2$, as a calculated formula (Y, REE, Th, K, Na, Ca)$_{1.478}(Ti, Nb)_{1.304}$(Mg, Al, Mn, $Fe^{3+})_{0.988}$(Si, P)$_{1.431}O_7(OH)_4{\cdot}3H_2O$. Firstly the 870-860 Ma is the initial age of the supercontinent Rhodinia dispersal and subsequent A-1 type volcanism, which contains Fe, REE, and HFS(High Field Strength elements; Nb, Zr, Y etc.) elements in Fe-rich meta-volcanic rocks dominant Kyemyeongsan Formation, might mineralized allanite. Another synthesis is that regional metamorphism at late Paleozoic 300-280 Ma(Cho et al., 2002) might cause allanite mineralization. Also pegmatite REE mineralization highly related to the granite intrusion over the Chungju area in Jurassic(190 Ma; Koh et al., 2012). Otherwise above all, A-1 type volcanism at the same time of the Kyemyeongsan Formation development, regional metamorphism and pegmatite, might have caused REE mineralization. Although REE ore bodies display a close spatial association, each ore bodies display temporal distinction, different mineral assemblage and environment of ore formation.

The Study on Preparation and Characterization of Yellow Ceramic Pigment (황색세라믹안료의 제조 및 특성연구)

  • Kwon, Myon-Joo;Ha, Jin-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.7
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    • pp.504-509
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    • 2018
  • The purpose of this study was to manufacture a high-performance titanium yellow pigment. Anatase type $TiO_2$ was the skeleton of the pigment and $Sb_2O_3$ is used as the color assistant for the coloring agent, $Cr_2O_3$. Mixed raw materials for the pigment were $TiO_2$(98%), $Sb_2O_3$(99.5%), and $Cr_2O_3$(99.5%). The raw materials were mixed by a dry process and crystallized by calcination at $1,000{\sim}1,200^{\circ}C$. The crystalline material was pulverized in a Jar Mill under $1{\mu}m$ by a wet process and dried for 12 hours at $100^{\circ}C$. The pigment was finally made by a fine grinding process. To determine the best temperature for calcination, 4 temperature sections ($1000^{\circ}C$, $1100^{\circ}C$, $1150^{\circ}C$, and $1200^{\circ}C$) were set up. The X-ray diffraction peak of the rutile crystalline structure was highest at $1,150^{\circ}C$. The yellow ceramic pigment, which has the rutile structure, was applied for coating materials. The synthesized pigments underwent a discoloration tests on the acid resistance, alkaline resistance, weather resistance and heat resistance. In addition, a detection test on harmful heavy metals ($Cr^{+6}$) was done. The resulting values (${\Delta}E$) of the weather resistance test (2000hr), acid resistance test, alkaline resistance test, and heat resistance test were 0.74, 0.16, 0.07 and 0.29. The resulting value for heavy metals testing was 34ppm.