• 제목/요약/키워드: Thin-film manufacturing process

검색결과 171건 처리시간 0.028초

UVO 처리에 따른 NiOx 박막 및 페로브스카이트 태양전지 셀 특성 변화 (Effect of UVO Treatment on Optical and Electrical Properties of NiOx Thin Film and Perovskite Solar Cells)

  • 조수진;황재근;편도원;정석현;이솔희;이원규;황지성;최영호;김동환
    • Current Photovoltaic Research
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    • 제12권1호
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    • pp.1-5
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    • 2024
  • Perovskite solar cells have exhibited a remarkable increase in efficiency from an initial 3.8% to 26.1%, marking a significant advancement. However, challenges persist in the commercialization of perovskite solar cells due to their low stability with respect to humidity, light exposure, and temperature. Moreover, the instability of the organic charge transport layer underscores the need for exploring inorganic alternatives. In the manufacturing process of the perovskite solar cells' oxide charge transport layer, ultraviolet-ozone (UVO) treatment is commonly applied to enhance the wettability of the perovskite solution. The UVO treatment on metal oxides has proven effective in suppressing surface oxygen vacancies and removing surface organic contaminants. This study focused on the characterization of nickel oxide as the hole transport material in perovskite solar cells, specifically investigating the impact of UVO treatment on film properties. Through this analysis, changes induced by the UVO treatment were observed, and consequent alterations in the device characteristics were identified.

Laser crystallization in active-matrix display backplane manufacturing

  • Turk, Brandon A.;Herbst, Ludolf;Simon, Frank;Fechner, Burkhard;Paetzel, Rainer
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.1261-1262
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    • 2008
  • Laser-based crystallization techniques are ideally-suited for forming high-quality crystalline Si films on active-matrix display backplanes, because the highly-localized energy deposition allows for transformation of the as-deposited a-Si without damaging high-temperature-intolerant glass and plastic substrates. However, certain significant and non-trivial attributes must be satisfied for a particular method and implementation to be considered manufacturing-worthy. The crystallization process step must yield a Si microstructure that permits fabrication of thin-film transistors with sufficient uniformity and performance for the intended application and, the realization and implementation of the method must meet specific requirements of viability, robustness and economy in order to be accepted in mass production environments. In recent years, Low Temperature Polycrystalline Silicon (LTPS) has demonstrated its advantages through successful implementation in the application spaces that include highly-integrated active-matrix liquid-crystal displays (AMLCDs), cost competitive AMLCDs, and most recently, active-matrix organic light-emitting diode displays (AMOLEDs). In the mobile display market segment, LTPS continues to gain market share, as consumers demand mobile devices with higher display performance, longer battery life and reduced form factor. LTPS-based mobile displays have clearly demonstrated significant advantages in this regard. While the benefits of LTPS for mobile phones are well recognized, other mobile electronic applications such as portable multimedia players, tablet computers, ultra-mobile personal computers and notebook computers also stand to benefit from the performance and potential cost advantages offered by LTPS. Recently, significant efforts have been made to enable robust and cost-effective LTPS backplane manufacturing for AMOLED displays. The majority of the technical focus has been placed on ensuring the formation of extremely uniform poly-Si films. Although current commercially available AMOLED displays are aimed primarily at mobile applications, it is expected that continued development of the technology will soon lead to larger display sizes. Since LTPS backplanes are essentially required for AMOLED displays, LTPS manufacturing technology must be ready to scale the high degree of uniformity beyond the small and medium displays sizes. It is imperative for the manufacturers of LTPS crystallization equipment to ensure that the widespread adoption of the technology is not hindered by limitations of performance, uniformity or display size. In our presentation, we plan to present the state of the art in light sources and beam delivery systems used in high-volume manufacturing laser crystallization equipment. We will show that excimer-laser-based crystallization technologies are currently meeting the stringent requirements of AMOLED display fabrication, and are well positioned to meet the future demands for manufacturing these displays as well.

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Tribological study on the thermal stability of thick ta-C coating at elevated temperatures

  • Lee, Woo Young;Ryu, Ho Jun;Jang, Young Jun;Kim, Gi Taek;Deng, Xingrui;Umehara, Noritsugu;Kim, Jong Kuk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.144.2-144.2
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    • 2016
  • Diamond-like carbon (DLC) coatings have been widely applied to the mechanical components, cutting tools due to properties of high hardness and wear resistance. Among them, hydrogenated amorphous carbon (a-C:H) coatings are well-known for their low friction properties, stable production of thin and thick film, they were reported to be easily worn away under high temperature. Non-hydrogenated tetrahedral amorphous carbon (ta-C) is an ideal for industrial applicability due to good thermal stability from high $sp^3$-bonding fraction ranging from 70 to 80 %. However, the large compressive stress of ta-C coating limits to apply thick ta-C coating. In this study, the thick ta-C coating was deposited onto Inconel alloy disk by the FCVA technique. The thickness of the ta-C coating was about $3.5{\mu}m$. The tribological behaviors of ta-C coated disks sliding against $Si_3N_4$ balls were examined under elevated temperature divided into 23, 100, 200 and $300^{\circ}C$. The range of temperature was setting up until peel off observed. The experimental results showed that the friction coefficient was decreased from 0.14 to 0.05 with increasing temperature up to $200^{\circ}C$. At $300^{\circ}C$, the friction coefficient was dramatically increased over 5,000 cycles and then delaminated. These phenomenon was summarized two kinds of reasons: (1) Thermal degradation and (2) graphitization of ta-C coating. At first, the reason of thermal degradation was demonstrated by wear rate calculation. The wear rate of ta-C coatings showed an increasing trend with elevated temperature. For investigation of relationship between hardness and graphitization, thick ta-C coatings(2, 3 and $5{\mu}m$) were additionally deposited. As the thickness of ta-C coating was increased, hardness decreased from 58 to 49 GPa, which means that graphitization was accelerated. Therefore, now we are trying to increase $sp^3$ fraction of ta-C coating and control the coating parameters for thermal stability of thick ta-C at high temperatures.

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유기발광(有機發光) 다이오드의 가속(加速) 수명(壽命) 시험(試驗)에 관한 연구(硏究) (Life Estimation of Organic Light Emission Diode by Accelerated Test)

  • 최영태;조재립
    • 한국품질경영학회:학술대회논문집
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    • 한국품질경영학회 2010년도 춘계학술대회
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    • pp.262-268
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    • 2010
  • Organic light emitting diode is developed fast from 1963 after discovering electric light emitting phenomenon. First PMOLED(passive matrix OLED) product is manufactured and AMOLED(active matrix OLED) using TFT(thin film ransistor) is now in the center. PMOLED is mainly mounted at sub display. but AMOLED is mounted at main display. Also AMOLED expand the market to PMP(portable multimedia players), navigation and TV. Even thought OLED's market is opening to many applications, OLED is worried about lifetime until now. That's appeared in market in a very short time and is not known well about result of OLED's lifetime and reliability test. And there is no standard ssessment method and not enough study to standardization the method. A study's purpose is reduce the time for life test by accelerated current and it can do production possible design by accelerated life model in design phase. It's must be add to process variables and design variables(like ratio of light emitting, organic material structure, condition of aging, etc) to make the best use of supplied accelerated lifetime model in this paper. In terms of lifetime it needs each criterion of applications because of image sticking. In conclusion, it's possible to discover new defect because there is not much time to be opened in market and develop a method of manufacturing process & materials, so we need to study on the subject of this paper continuously.

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디지털 프린팅을 위한 전도성 배선에 관한 연구 (Investigation of Conductive Pattern Line for Direct Digital Printing)

  • 김용식;서상훈;이로운;김태훈;박재찬;김태구;정경진;윤관수;박성준;정재우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.502-502
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    • 2007
  • Current thin film process using memory device fabrication process use expensive processes such as manufacturing of photo mask, coating of photo resist, exposure, development, and etching. However, direct printing technology has the merits about simple and cost effective processes because inks are directly injective without mask. And also, this technology has the advantage about fabrication of fine pattern line on various substrates such as PCB, FCPB, glass, polymer and so on. In this work, we have fabricated the fine and thick metal pattern line for the electronic circuit board using metal ink contains Ag nano-particles. Metal lines are fabricated by two types of printing methods. One is a conventional printing method which is able to quick fabrication of fine pattern line, but has various difficulties about thick and high resolution DPI(Dot per Inch) pattern lines because of bulge and piling up phenomenon. Another(Second) methods is sequential printing method which has a various merits of fabrication for fine, thick and high resolution pattern lines without bulge. In this work, conductivities of metal pattern line are investigated with respect to printing methods and pattern thickness. As a result, conductivity of thick pattern is about several un.

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Barrier층을 갖는 Soda lime glass 기판위에 증착된 ITO박막의 Annealing 조건에 따른 영향 (Effects of Annealing Condition on Properties of ITO Thin Films Deposited on Soda Lime Glass having Barrier Layers)

  • 이정민;최병현;지미정;박정호;주병권
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.66-66
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    • 2008
  • Most of the properties of ITO films depend on their substrate nature, deposition techniques and ITO film composition. For the display panel application, it is normally deposited on the glass substrate which has high strain point (>575 degree) and must be deposited at a temperature higher than $250^{\circ}C$ and then annealed at a temperature higher than $300^{\circ}C$ in order to high optical transmittance in the visible region, low reactivity and chemical duration. But the high strain point glass (HSPG) used as FPDs is blocking popularization of large sizes FPDs because it is more expensive than a soda lime glass (SLG). If the SLG could be used as substrate for FPDs, then diffusion of Na ion from the substrate occurs into the ITO films during annealing or heat treatment on manufacturing process and it affects the properties. Therefore proper care should be followed to minimize Na ion diffusion. In this study, we investigate the electrical, optical and structural properties of ITO films deposited on the SLG and the Asahi glass(PD200) substrate by rf magnetron sputtering using a ceramic target ($In_2O_3:SnO_2$, 90:10wt.%). These films were annealed in $N_2$ and air atmosphere at $400^{\circ}C$ for 20min, 1hr, and 2hrs. ITO films deposited on the SLG show a high electrical resistivity and structural defect as compared with those deposited on the PD200 due to the Na ion from the SLG on diffuse to the ITO film by annealing. However these properties can be improved by introducing a barrier layer of $SiO_2$ or $Al_2O_3$ between ITO film and the SLG substrate. The characteristics of films were examined by the 4-point probe, FE-SEM, UV-VIS spectrometer, and X-ray diffraction. SIMS analysis confirmed that barrier layer inhibited Na ion diffusion from the SLG.

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폴리아마이드계 박막복합막 제조 공정에서 계면중합의 유기용액 퍼짐 속도에 따른 표면 모폴로지의 변화 (Change of Surface Morphology with the Spreading Rate of Organic Solution During Interfacial Polymerization for Polyamide-based Thin Film Composite Membrane Manufacturing Process)

  • 박철호
    • 멤브레인
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    • 제27권6호
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    • pp.506-510
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    • 2017
  • 계면중합법은 혼합되지 않은 두 용액에 용해되어 있는 반응성 단량체들이 계면에서 중합되는 기술로 다양한 분야에 응용되고 있다. 이 중, 수처리 분리막의 경우 m-phenylene diamine과 Trimesoyl chloride를 반응물로 사용하고 있다. 분리막의 성능은 다양한 중합 성능에 의해 영향을 받고 있으며, 본 연구에서는 유기 용액의 퍼짐 속도가 어떻게 분리막 표면 및 구조에 영향을 주는지를 주사전자현미경을 통해 고찰하였다. 퍼짐 속도는 7.6과 25 mm/sec로 조절하였으며, 유기상 용액은 1~3방울까지 조절하였다. 관찰된 결과는 퍼짐 속도가 7.6 mm/sec에서는 한 방울 떨어트릴 경우, 25 mm/sec에서는 두 방울 떨어트릴 경우 폴리아마이드 막에 균열을 발견할 수 없었다. 반면 나머지 경우에 모두 균열이 발생하였다. 따라서, 초기 유기용액의 퍼짐 속도는 폴리아마이드 분리막의 성능에 영향을 줄 것으로 관찰되었다.

열처리에 따른 Peroxo Titanium Complex 졸 용액 기반 TiN/TiO2/FTO Resistive Random-Access Memory의 전기적 특성 (Electrical Properties of TiN/TiO2/FTO Resistive Random-Access Memory Based on Peroxo Titanium Complex Sol Solution by Heat Treatment)

  • 임현민;이진호;김원진;오승환;서동혁;이동희;김륜나;김우병
    • 한국재료학회지
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    • 제32권9호
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    • pp.384-390
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    • 2022
  • A spin coating process for RRAM, which is a TiN/TiO2/FTO structure based on a PTC sol solution, was developed in this laboratory, a method which enables low-temperature and eco-friendly manufacturing. The RRAM corresponds to an OxRAM that operates through the formation and extinction of conductive filaments. Heat treatment was selected as a method of controlling oxygen vacancy (VO), a major factor of the conductive filament. It was carried out at 100 ℃ under moisture removal conditions and at 300 ℃ and 500 ℃ for excellent phase stability. XRD analysis confirmed the anatase phase in the thin film increased as the heat treatment increased, and the Ti3+ and OH- groups were observed to decrease in the XPS analysis. In the I-V analysis, the device at 100 ℃ showed a low primary SET voltage of 5.1 V and a high ON/OFF ratio of 104. The double-logarithmic plot of the I-V curve confirmed the device at 100 ℃ required a low operating voltage. As a result, the 100 ℃ heat treatment conditions were suitable for the low voltage driving and high ON/OFF ratio of TiN/TiO2/FTO RRAM devices and these results suggest that the operating voltage and ON/OFF ratio required for OxRAM devices used in various fields under specific heat treatment conditions can be compromised.

a-IGZO TFT 기반 OLED 디스플레이 화소에 내장되는 OLED 열화 보상용 온도 센서의 개발 (Development of a Temperature Sensor for OLED Degradation Compensation Embedded in a-IGZO TFT-based OLED Display Pixel)

  • 문승재;김승균;최세용;이장후;이종모;배병성
    • 센서학회지
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    • 제33권1호
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    • pp.56-61
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    • 2024
  • The quality of the display can be managed by effectively managing the temperature generated by the panel during use. Conventional display panels rely on an external reference resistor for temperature monitoring. However, this approach is easily affected by external factors such as temperature variations from the driving circuit and chips. These variations reduce reliability, causing complicated mounting owing to the external chip, and cannot monitor the individual pixel temperatures. However, this issue can be simply and efficiently addressed by integrating temperature sensors during the display panel manufacturing process. In this study, we fabricated and analyzed a temperature sensor integrated into an a-IGZO (amorphous indium-gallium-zinc-oxide) TFT array that was to precisely monitor temperature and prevent the deterioration of OLED display pixels. The temperature sensor was positioned on top of the oxide TFT. Simultaneously, it worked as a light shield layer, contributing to the reliability of the oxide. The characteristics of the array with integrated temperature sensors were measured and analyzed while adjusting the temperature in real-time. By integrating a temperature sensor into the TFT array, monitoring the temperature of the display became easier and more accurate. This study could contribute to managing the lifetime of the display.

다양한 전착조건에서 제작된 리튬 전극의 특성 연구 (Comparison of Characteristics of Electrodeposited Lithium Electrodes Under Various Electroplating Conditions)

  • 임라나;이민희;김점수
    • 전기화학회지
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    • 제22권3호
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    • pp.128-137
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    • 2019
  • 리튬은 가장 가벼운 금속일 뿐만 아니라 낮은 환원전위(-3.04 V vs. SHE)와 큰 이론용량($3860mAh\;g^{-1}$)을 가지고 있어 차세대 음극 소재로 연구되고 있다. 리튬 금속을 전극으로 사용하는 리튬이차전지의 경우 전지의 효율과 에너지 밀도 극대화를 위해 얇은 두께의 리튬 전극이 필요하지만 기존의 리튬 박을 제조하는 물리적인 압연 방법으로는 일정수준 이하의 두께를 가지는 리튬 박을 제조하는데 한계가 있다. 본 연구에서는 물리적인 방법 대신 전해도금법으로 박막의 리튬을 전착하여 전해도금 시 사용되는 전해액의 종류와 전착 조건이 전착 특성 및 전착된 리튬의 전기화학 특성에 주는 영향을 확인하였다. 전착 전해액의 농도가 높을 수록 리튬 덴드라이트(dendrite) 형성 억제에 유리한 크고 둥근 형태의 리튬 입자를 형성하였으며 우수한 stripping 효율 (92.68%, 3M LiFSI in DME) 을 나타냈다. 전착 속도(전류 밀도)의 경우 속도 증가에 따라 리튬이 길이 방향으로 성장하여 길고 끝이 뾰족한 형태를 가지는 경향을 보였으며, 이로 인한 비표면적 증가로 전착된 리튬 전극의 stripping 효율이 감소(90.41%, 3M LiFSI in DME, $0.8mA\;cm^{-2}$)하는 경향을 확인하였다. 두 종류의 염과 용매를 조합하여 얻은 1.5M LiFSI + 1.5M LiTFSI in DME : DOL (1 : 1 vol%) (Du-Co) 전해액에서 전착된 리튬 전극이 가장 우수한 stripping 효율 (97.26%) 및 안정적인 가역성을 보였으며, 이는 염의 분해물로 구성된 전극 표면 피막의 Li-F 성분이 주는 안정성 향상과 피막의 유연성을 부여하는 DOL 효과에 기인한 것으로 추정된다.