• Advances in nano research
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• 제5권4호
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• pp.337-357
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• 2017

Knowledge of thin films mechanical properties is strongly associated to the reliability and the performances of Nano Electro Mechanical Systems (NEMS). In the literature, there are several methods for micro materials characterization. Bulge test is an established nondestructive technique for studying the mechanical properties of thin films. This study improve the performances of NEMS by investigating the mechanical behavior of Nano rectangular thin film (NRTF) made of new material embedded in Nano Electro Mechanical Systems (NEMS) by developing the bulge test technique. The NRTF built from adhesively-bonded layers of basalt fiber reinforced polymer (BFRP) laminate composite materials in Nano size at room temperature and were used for plane-strain bulging. The NRTF is first pre-stressed to ensure that is no initial deflection before applied the loads on NRTF and then clamped between two plates. A differential pressure is applying to a deformation of the laminated composite NRTF. This makes the plane-strain bulge test idea for studying the mechanical behavior of laminated composite NRTF in both the elastic and plastic regimes. An exact solution of governing equations for symmetric cross-ply BFRP laminated composite NRTF was established with taking in-to account the effect of the residual strength from pre-stressed loading. The stress-strain relationship of the BFRP laminated composite NRTF was determined by hydraulic bulging test. The NRTF thickness gradation in different points of hemisphere formed in bulge test was analysed.

• 한국전기전자재료학회논문지
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• 제29권10호
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• pp.665-670
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• 2016

Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.377-380
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• 2001

The BST thin films to composite (Ba$\sub$x/Sr$\sub$l-x/)TiO$_3$ using sol-gel method were fabricated on Pt/Ti/SiO$_2$/Si substrate. The thin film capacitor to be ferroelectric materials was investigated by structural and electrical properties. BST solution was composited by moi ratio, and then spin-coated (from 3 times to 5 times coating on Pt/SiO$_2$/Si substrate. Thickness of BST ceramics thin films are about 2600∼2800[${\AA}$] in 3 times deposition. The property of leakage current was stable when the applied voltage was 3[V]. Leakage current of 3 times coated BST thin film was 10$\^$-9/∼10$\^$-11/[A] at 0∼3[V].

• 대한화학회지
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• 제61권2호
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• pp.57-64
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• 2017

Monoclinic $VO_2(M)$ nanoparticles codoped with 1.5 at. % W and 2.9 at. % Mg were synthesized by the hydrothermal treatment and post-thermal transformation method of $V_2O_5-H_2C_2O_4-H_2O$ with $Na_2WO_4$ and $Mg(NO_3)_2$. The composite thin film of the W/Mg-codoped $VO_2(M)$ with a commercial acrylic block copolymer was also prepared on PET substrate by wet-coating method. The reversible phase transition characteristics of the codoped $VO_2(M)$ nanoparticles and the composite film were investigated from DSC, resistivity and Vis-NIR transmittance measurements compared with the undoped and Wdoped $VO_2(M)$ samples. Mg-codoping into W-doped $VO_2(M)$ nanoparticles synergistically enhanced the transition characteristics by increasing the sharpness of transition while the transition temperature ($T_c$) lowered by W-doping was maintained. The codoped composite film showed the prominently enhanced NIR switching efficiency compared to only W-doped $VO_2(M)$ film with a lowered $T_c$.

• 센서학회지
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• 제12권1호
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• pp.10-15
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• 2003

초전형 적외선 센서의 감지물질로 사용하기 위해 $PbTiO_3$/P(VDF/TrFE) 복합재료 박막을 스핀코팅방법을 사용하여 제작하였다. 시료는 65 wt% VDF와 35 wt% TrFE의 함량 P(VDF/TrFE) 분말을 사용하였으며 세라믹-고분자 복합재료를 제조하기 위하여 사용된 세라믹은 $PbTiO_3$ 분말을 사용하였다. 제조된 복합재료의 P(VDF/TrFE)와 $PbTiO_3$의 결합성을 확인하기 위해 제조된 박막의 표면은 SEM을 통해 관찰하였고 복합재료의 커패시턴스와 비유전율, 유전손실은 임피던스 분석기 (HP4192A)로 측정하였으며, 복합재료의 초전계수는 반도체 파라미터 분석기(HP4145B)로 조사하였다.

• 한국세라믹학회지
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• 제42권7호
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• pp.461-468
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• 2005

Transparent TiO$_{2}$ sols were prepared by hydrothermal synthesis to heat Ti precursor solutions, from Ti hydroxides obtained with neutralizing aqueous TiOCl$_{2}$ solutions having various concentrations of NaCI by aqueous NaOH solution, in the autoclave at 120$^{\circ}C$ The photocatalytic abilities of glass beads coated with the sol for gaseous benzene were evaluated. As a result, it was found that due to the increase of brookite phase in TiO$_{2}$ by controlling the concentration of Na ion the optical absorption of TiO$_{2}$ increases toward long wavelength but that in the area of short wavelength becomes relatively low and consequently the photocatalytic performance of TiO$_{2}$ thin film for benzene gas rather decreases, compared to that of composite film of anatase and brookite phases. These results suggest that in order for coated TiO$_{2}$ thin film to have high dissociation performance for benzene gas it is effective to form anatase and brookite phases compositely in TiO$_{2}$.

• 한국재료학회지
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• 제12권4호
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• pp.296-303
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• 2002

For potential application to quantum mechanical devices, nano-composite thin films, consisting of GaAs quantum dots dispersed in SiO$_2$ glass matrix, were fabricated and studied in terms of structural, chemical, and optical properties. In order to form crystalline GaAs quantum dots at room temperature, uniformly dispersed in $SiO_2$matrix, the composite films were made to consist of alternating layers of GaAs and $SiO_2$in the manner of a superlattice using RF magnetron sputter deposition. Among different film samples, nominal thickness of an individual GaAs layer was varied with a total GaAs volume fraction fixed. From images of High Resolution Transmission Electron Microscopy (HRTEM), the formation of GaAs quantum dots on SiO$_2$was shown to depend on GaAs nominal thickness. GaAs deposits were crystalline and GaAs compound-like chemically according to HRTEM and XPS analysis, respectively. From measurement of optical absorbance using a spectrophotometer, absorption edges were determined and compared among composite films of varying GaAs nominal thicknesses. A progressively larger shift of absorption edge was noticed toward a blue wavelength with decreasing GaAs nominal thickness, i.e. quantum dots size. Band gaps of the composite films were also determined from Tauc plots as well as from PL measurements, displaying a linear decrease with increasing GaAs nominal thickness.

• 멤브레인
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• 제30권1호
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• pp.38-45
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• 2020

리튬금속전지(LMB)는 매우 큰 이론 용량을 갖지만 단락(short circuit), 수명 감소 등을 야기하는 덴드라이트(dendrite)가 형성되는 큰 문제점을 갖고 있다. 본 연구에서는 poly(dimethylsiloxane) (PDMS)에 graphene oxide (GO) nanosheet를 고르게 분산시킨 PDMS/GO 복합체를 합성하였고 이를 박막 형태로 코팅하여 덴드라이트의 형성을 물리적으로 억제할 수 있는 막의 효과를 이끌어내었다. PDMS의 경우, 그 자체로는 이온 전도체가 아니기 때문에 리튬 이온의 통로를 형성시켜 리튬 이온의 이동을 원활하게 하기 위하여 5wt% 불산(HF)으로 에칭하여 PDMS/GO 박막이 이온전도성을 가질 수 있도록 하였다. 주사전자현미경(scanning electron microscopy, SEM)을 통해 전면 및 단면을 관찰하여 PDMS/GO 박막의 형상을 확인하였다. 그리고 PDMS/GO 박막을 리튬금속전지에 적용하여 실시한 배터리 테스트 결과, 100번째 사이클까지 쿨롱 효율(columbic efficiency)이 평균 87.4%로 유지되었고, 박막이 코팅되지 않은 구리 전극보다 과전압이 감소되었음을 전압 구배(voltage profile)를 통해 확인하였다.

• 한국재료학회지
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• 제19권12호
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• pp.637-643
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• 2009

In this study, we analyzed the effect of silicon oxynitride matrix on the optical properties of Au nanoparticles dispersed on composite film and explored the effectiveness of the silicon in fine tuning the refractive index of the composite film for applications in optical waveguide devices. The atomic fraction of nitrogen in $SiO_xN_y$ films was controlled by varying the relative flow ratio of nitrogen gas in reactive sputtering and was evaluated optically using an effective medium theory with Bruggeman geometry consisting of a random mixture between $SiO_2$ and $Si_3N_4$. The Au nanoparticles were embedded in the $SiO_xN_y$ matrix by employing the alternating deposition technique and clearly showed an absorption peak due to the excitation of surface plasmon. With increasing nitrogen atomic fraction in the matrix, the surface plasmon resonance wavelength shifted to a longer wavelength (a red-shift) with an enhanced resonance absorption. These characteristics were interpreted using the Maxwell-Garnett effective medium theory. The formation of a guided mode in a slab waveguide consisting of 3 $\mu$m thick Au:$SiO_xN_y$ nanocomposite film was confirmed at the telecommunication wavelength of 1550 nm by prism coupler method and compared with the case of using $SiO_2$ matrix. The use of $SiO_xN_y$ matrix provides an effective way of controlling the mode confinement while maintaining or even enhancing the surface plasmon resonance properties.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.533-537
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• 2003

Compared to sintered polycrystalline diamond (PCD), the deposited thin film diamond has a great advantage on the fabrication of cutting tools with complex geometries such as drills. Because of high performance in high speed machining non-ferrous difficult-to-cut materials in the field of automobiles industry, aeronautics and astronautics industry, diamond-coated drills find large potentialities in commercial applications. However, the poor adhesion of the diamond film on the substrate and high surface roughness of the drill flute adversely affect the tool lift and machining quality and they become the main technical barriers for the successful development and commercialization of diamond-coated drills. In this paper, diamond thin films were deposited on the commercial WC-Co based drills by the electron aided hot filament chemical vapor deposition (EACVD). A new multiple coating technology based on changing gas pressure in different process stages was developed. The large triangular faceted diamond grains may have great contribution to the adhesive strength between the film and the substrate, and the overlapping ball like blocks consisted of nanometer sized diamond crystals may contribute much to the very low roughness of diamond film. Adhesive strength and quality of diamond film were evaluated by scanning electron microscope (SEM), atomic force microscope (AFM), Raman spectrum and drilling experiments. The ring-block tribological experiments were also conducted and the results revealed that the friction coefficient increased with the surface roughness of the diamond film. From a practical viewpoint, the cutting performances of diamond-coated drills were studied by drilling the SiC particles reinforced aluminum-matrix composite. The good adhesive strength and low surface roughness of flute were proved to be beneficial to the good chip evacuation and the decrease of thrust and consequently led to a prolonged tool lift and an improved machining quality. The wear mechanism of diamond-coated drills is the abrasive mechanical attrition.