• 제목/요약/키워드: Thin Film Transistor (TFT)

검색결과 502건 처리시간 0.027초

플레티늄-실리사이드를 이용한 쇼트키 장벽 다결정 박막 트랜지스터 (Schottky Barrier Thin Film Transistor by using Platinum-silicided Source and Drain)

  • 신진욱;정홍배;이영희;조원주
    • 한국전기전자재료학회논문지
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    • 제22권6호
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    • pp.462-465
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    • 2009
  • Schottky barrier thin film transistors (SB-TFT) on polycrystalline silicon(poly-Si) are fabricated by platinum silicided source/drain for p-type SB-TFT. High quality poly-Si film were obtained by crystallizing the amorphous Si film with excimer laser annealing (ELA) or solid phase crystallization (SPC) method, The fabricated poly-Si SB-TFTs showed low leakage current level and a large on/off current ratio larger than 10), Significant improvement of electrical characteristics were obtained by the additional forming gas annealing in 2% $H_2/N_2$ ambient, which is attributed to the termination of dangling bond at the poly-Si grain boundaries as well as the reduction of interface trap states at gate oxide/poly-Si channel.

Transparent ZnO based thin film transistors fabricated at room temperature with high-k dielectric $Gd_2O_3$ gate insulators

  • Tsai, Jung-Ruey;Li, Chi-Shiau;Tsai, Shang-Yu;Chen, Jyun-Ning;Chien, Po-Hsiu;Feng, Wen-Sheng;Liu, Kou-Chen
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.374-377
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    • 2009
  • The characteristics of the deposited thin films of the zinc oxide (ZnO) at different oxygen pressures will be elucidated in this work. The resistivity of ZnO thin films were dominated by the carrier concentration under high oxygen pressure conditions while controlled by the carrier mobility at low oxygen ambiences. In addition, we will show the characteristics of the transparent ZnO based thin film transistor (TFT) fabricated at a full room temperature process with gate dielectric of gadolinium oxide ($Gd_2O_3$) thin films.

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최적화 기법에 의한 다결정 TFT(Thin Film Transistor)의 매개 변수 추출 (The Parameters Extraction in Poly TFT Using Optimization Technique)

  • 김홍배;손상희;박용헌
    • 대한전기학회논문지
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    • 제40권6호
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    • pp.582-589
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    • 1991
  • We used Cd Se as the semiconductor to analyze the Poly-TFT. Cd Se TFT is fabricated by the vacuum evaporation method and the characteristics curves of the current-voltage are obtained using the results of measurement of Cd Se TFT devices. Employing least square method and Rosenbrock algorithm, we can extract the device parameters(grain boundary mobility, trap density). The current-voltage relations calculated by extracted parameters are in good agreement with experimental results.

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액정디스플레이 기술의 발전전망 (An outlook of liquid crystal display technology)

  • 장진
    • E2M - 전기 전자와 첨단 소재
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    • 제9권7호
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    • pp.745-754
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    • 1996
  • 이글에서는 다음의 내용을 다루었다. 1. LCD의 기능 성능 향상, (1) CRT와 TFT-LCD의 기능, 성능 비교, (2) TFT-LCD의 기능, 성능향상을 위한 과제 2. TFT-LCD의 가격 및 수급현황 3. Poly-Si TFT-LCD전망 4. 투사형 TFT-LCD 5. 반사형 LCD 6. 필림형 LCD 7. 고분자 분산형 액정(PDLC)

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SPICE를 사용한 다결정 실리콘 TFT-LCD 화소의 전기적 특성 시뮬레이션 방법의 체계화 (A Systematic Method for SPICE Simulation of Electrical Characteristics of Poly-Si TFT-LCD Pixel)

  • 손명식;유재일;심성륭;장진;유건호
    • 대한전자공학회논문지SD
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    • 제38권12호
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    • pp.25-35
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    • 2001
  • 복잡한 thin film transistor-liquid crystal display (TFT-LCD) array 회로의 전기적 특성을 분석하기 위해서는 PSPICE나 AIM-SPICE와 같은 회로 시뮬레이터를 사용하는 것이 필수적이다. 본 논문에서는 SPICE 시뮬레이션을 위한 다결정 실리콘 (poly-Si) TFT 소자의 입력 변수 추출을 체계화하는 방법을 도입한다. 이 방법을 excimer laser annealing 및 silicide mediated crystallization 방법으로 각각 제작된 다결정 실리콘 TFT 소자에 적용하여 실험 결과와 잘 일치하는 결과를 얻었다. SPICE 시뮬레이터 중에서 PSPICE는 graphic user interface(GUI) 방식의 편의성을 제공하므로 손쉽게 복잡한 회로를 구성할 수가 있다는 장점이 있으나, poly-Si TFT 소자 모델을 가지고 있지 않다. 이 연구에서는 PSPICE에 다결정 실리콘 TFT 소자 모델을 이식하고, TFT가 이식된 PSPICE를 사용하여 poly-Si TFT-LCD 단위 화소 및 라인 RC 지연을 고려한 화소에 대한 전기적 특성을 분석하였다. 이러한 결과는 TFT-LCD 어레이 특성 분석을 위한 시뮬레이션을 효율적으로 수행하는데 기여할 수 있을 것으로 기대된다.

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Laser crystallization of Si film for poly-Si thin film transistor on plastic substrates

  • Kwon, Jang-Yeon;Cho, Hans-S;Kim, Do-Young;Park, Kyung-Bae;Jung, Ji-Sim;Park, Young-Soo;Lee, Min-Chul;Han, Min-Koo;Noguchi, Takashi
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.957-961
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    • 2004
  • In order to realize high performance thin film transistor (TFT) on plastic substrate, Si film was deposited on plastic substrate at 170$^{\circ}C$ by using inductivity coupled plasma chemical vapor deposition (ICPCVD). Hydrogen concentration in as-deposited Si film was 3.8% which is much lower than that in film prepared by using conventional plasma enhanced chemical vapor deposition (PECVD). Si film was deposited as micro crystalline phase rather than amorphous phase even at 170$^{\circ}C$ because of high density plasma. By step-by-step Excimer laser annealing, dehydrogenation and recrystallization of Si film were carried out simultaneously. With step-by-step annealing and optimization of underlayer structure, it has succeeded to achieve large grain size of 300nm by using ICPCVD. Base on these results, poly-Si TFT was fabricated on plastic substrate successfully, and it is sufficient to drive pixels of OLEDs, as well as LCDs.

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Electrical Properties of Local Bottom-Gated MoS2 Thin-Film Transistor

  • Kwon, Junyeon;Lee, Youngbok;Song, Wongeun;Kim, Sunkook
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.375-375
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    • 2014
  • Layered semiconductor materials can be a promising candidate for large-area thin film transistors (TFTs) due to their relatively high mobility, low-power switching, mechanically flexibility, optically transparency, and amenability to a low-cost, large-area growth technique like thermal chemical vapor deposition (CVD). Unlike 2D graphene, series of transition metal dichalcogenides (TMDCs), $MX_2$ (M=Ta, Mo, W, X=S, Se, Te), have a finite bandgap (1~2 eV), which makes them highly attractive for electronics switching devices. Recently, 2D $MoS_2$ materials can be expected as next generation high-mobility thin-film transistors for OLED and LCD backplane. In this paper, we investigate in detail the electrical characteristics of 2D layered $MoS_2$ local bottom-gated transistor with the same device structure of the conventional thin film transistor, and expect the feasibility of display application.

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비정질 실리콘 박막 트랜지스터의 광누설 전류와 다양한 광원의 광자 에너지스펙트럼과의 관계에 관한 연구 (A Study on the Relationship between Photo Leakage Current of a-Si:H Thin Film Transistor and the Photon Energy Spectrum of various Backlight Sources)

  • 정경서;권상직;조의식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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    • pp.70-71
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    • 2009
  • Photoelectric characteristics of a hydrogenated amorphous silicon thin film transistor(a-Si:H TFT) were obtained for the illumination from various backlight sources and the results were compared and analyzed in terms of the photon energy spectral characteristics of the backlights obtained from the integration of the multiplication of the photon energy and the spectral intensity at etch wavelength. It was possible to conclude that the absorption of illuminated backlight to a-Si:H layer and the generation of electrons and holes are mainly carried out at the wavelength less than 500nm.

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비정질 실리콘 TFT의 광누설 전류에 Backlight 광원의 광학적 특성이 미치는 영향에 대한 연구 (A Study on the Effects of the Optical Characteristics of backlight Sources on the Photo Leakage Currents of a-Si:H Thin Film Transistor)

  • 임승혁;권상직;조의식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 및 기술 세미나 논문집 디스플레이 광소자
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    • pp.55-56
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    • 2008
  • The photo leakage currents of a conventional hydrogenated amorphous silicon(a-Si:H) thin film transistor(TFT) were investigated and analyzed in the case of illumination from various lightsources such as halogen lamp, cold cathode fluorescent lamp(CCFL) backlight, and white light emitting diode(LED) backlight The photo leakage characteristics showed the apparent differences in the leakage level and in the $I_{on}/I_{off}$ ratio in spite of the similar luminances of light sources. This leakage level is expected to be related to the wavelength of the lowest intensity peak from spectral analysis of light sources.

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Photo-Leakage Currents in Organic Thin-Film Transistor

  • Cho, Sang-Mi;Han, Seung-Hoon;Kim, Jun-Hee;Lee, Sun-Hee;Choo, Dong-June;Uchiike, H.;Oh, Myung-Hwan;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1386-1389
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    • 2005
  • We report the light illumination effect on the performance of pentacene organic thin-film transistor (OTFT). The TFT performance with and without illumination were measured at various temperatures. The off-state currents increase linearly with light intensity in the region of gate voltage where the holes are majority carriers in the TFT channel. The minimum photocurrents of OTFT increase with increasing light intensity.

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