• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• 센서학회지
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• 제25권3호
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• pp.184-188
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• 2016

Highly ordered $SnO_2$ and NiO nanocolumns have been successfully achieved by glancing-angle deposition (GLAD) using an electron beam evaporator. Nanocolumnar $SnO_2$ and NiO sensors exhibited high performance owing to the porous nanostructural effect with the formation of a double Schottky junction and high surface-to-volume ratios. When all gas sensors were exposed to various gases such as $C_2H_5OH$, $C_6H_6$, and $CH_3COCH_3$, the response of the highly ordered $SnO_2$ nanocolumn were over 50 times higher than that of the $SnO_2$ thin film. This work will bring broad interest and create a strong impact in many different fields owing to its particularly simple and reliable fabrication process.

• 한국정밀공학회지
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• 제20권4호
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• pp.92-102
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• 2003

To detect electrical faults of a TFT (Thin Film Transistor) panel for the LCD (Liquid Crystal Display), techniques of converting electric field to an image are used One of them is the PDLC (polymer-dispersed liquid crystal) modulator which changes light transmittance under electric field. The advantage of PDLC modulator in the electric field detection is that it can be used without physically contacting the TFT panel surface. Specific pattern signals are applied to the data and gate electrodes of the panel to charge the pixel electrodes and the image sensor detects the change of transmittance of PDLC positioned in proximity distance above the pixel electrodes. The image represents the status of electric field reflected on the PDLC so that the characteristic of the PDLC itself plays an important role to accurately quantify the defects of TFT panel. In this paper, the image of the PDLC modulator caused by the change of electric field of the pixel electrodes on the TFT panel is acquired and how the characteristics of PDLC reflect the change of electric field to the image is analyzed. When the holding time of PDLC is short, better contrast of electric field image can be obtained by changing the instance of applying the driving voltage to the PDLC.

• Bulletin of the Korean Chemical Society
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• 제33권1호
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• pp.100-104
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• 2012

Thrombin is a serine protease that catalyzes the conversion of soluble fibrinogen to insoluble fibrin, and thus induces physiological and pathological blood coagulation. Therefore, it is important to detect thrombin in blood serum for purposes of diagnosis. To achieve this goal, it has been suggested that a 15-mer aptamer strongly binds with thrombin to form a G-quartet structure of the aptamer. Generally, 5'-end thiol-functionalized aptamer has been used as an anti-thrombin binder. Herein, we evaluate the possibility of utilizing a 3'-SH aptasensor for thrombin detection using SPR spectroscopy, and compare the enhancement of the electrochemical signal of the thrombin-aptamer bound on a porous gold substrate. Although the two aptamers have similar configurations, in SPR analysis, the 3'-SH aptamer was a effective aptasensor as well as 5'-SH aptamer. Results from electrochemical analysis showed that the porous gold substrate acted as a good substrate for an aptasensor and demonstrated 5-fold enhancement of current change, as compared to gold thin film.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.197-201
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• 2002

This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

• 센서학회지
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• 제5권6호
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• pp.68-73
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• 1996

고주파 마그네트론 스펏터링법을 이용하여 유리 및 (012)면인 사파이어 기판위에 ZnO박막을 제조하였다. 유리기판위에는 (002)면을 갖는 ZnO 다결정박막이 제조되었으며, (012)면인 사파이어 기판위에는 (110)면인 ZnO에 피택셜 박막이 제조되었다. 유리 및 사파이어 기판위에 제조된 ZnO박막의 표면탄성파 특성을 조사하였다. 유리 및 사파이어 기판에 대한 중심주파수에서의 전파속도는 각각 2680 m/sec 및 5980 m/sec였으며, 기본모드에서 구한 결합계수는 각각 0.98 % 및 1.44 %였다.

• Journal of Biosystems Engineering
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• 제29권4호
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• pp.323-328
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• 2004

A surface plasmon resonance (SPR) sensing system, which belonged to a family of thin film refractometry-based sensors, was fabricated to measure the alcohol contents in alcoholic beverages. In this study, a SPR owe was obtained by a photodiode array with 128 pixels and transformed into a refractive index which was calculated by means of the first moment of values below a baseline of 0.85. When the sensing system was applied to Soju, Cheonju, Igwaduju and Tacju highly linear relationships between the refractive index by SPR and the contents of alcohol were obtained. That is, the coefficients of determination in their linear models were 0.992, 0.933, 0.918 and 0.954, respectively. Meanwhile, the effect of sample preparations on the accuracy of measurement was analyzed. As for Soju and Tacju, the best calibration equations were obtained when no sample preparation was applied. The best calibration models for measurement of Cheonju and Igwaduju were obtained through the samples filtered by $C_{18}$ disks.

• 대한금속재료학회지
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• 제46권7호
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• pp.464-470
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• 2008

Metallic nanostructures have great potential for bio-chemical sensor applications due to the excitation of localized surface plasmon and its sensitive response to environmental change. Unlike the commonly explored absorption-based sensing, the optical scattering provides single particle detection scheme. For the localized surface plasmon resonance spectroscopy, the metallic nanostructures with controlled shape and size have been usually fabricated on adhesion-layer pre-coated transparent glass substrates. In this study, we calculated the optical scattering properties of plasmonic Au nanodisc using a discrete dipole approximation method and analyzed the effect of adhesion layer on them. Our result also indicates that there is a trade-off between the surface plasmon damping and the capability of supporting nanostructures in determining the optimal thickness of adhesion layer. Marginal thickness of Ti adhesion layer for supporting Au nanostructures fabricated on a silica glass substrate was experimentally analyzed by an adhesion strength test using a nano-indentation technique.

• 대한의용생체공학회:의공학회지
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• 제43권3호
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• pp.147-152
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• 2022

This research is to measure real-time temperature distribution inside a tissue-mimicking phantom for the safety and effectiveness evaluations of focused ultrasound (FUS) device capable of linear scanning stimulation. Since the focusing area of the FUS stimulation device is smaller than diameter of conventional thermal probe and keeps moving, it is impossible to monitor temperature distribution inside the phantom. By using the phantom with a thin film temperature sensor array inserted, real-time temperature change caused by the FUS device was measured. The translation of the measured temperature peak was also tracked successfully. The present phantom had been experimentally proven to be applicable to validate the performance and safety of the therapeutic ultrasound devices.

• 센서학회지
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• 제32권6호
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• pp.455-461
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• 2023

We investigated the electrical characteristics of ZnO nanoparticles (NPs) with air exposure that is a widely used electron transport layer for quantum dot light-emitting diodes (QLEDs). Upon air exposure, we observed changes in the density of states (DOS) of the trap levels of ZnO NPs. In particular, with air exposure, the concentration of deep trap energy levels in ZnO NPs decreased and electron mobility significantly improved. Consequently, the air-exposed ZnO reduced leakage current by approximately one order of magnitude and enhanced the external quantum efficiency at the low driving voltage region of the QLED. In addition, based on the excellent conductivity properties, high-brightness QLEDs could be achieved.