• Title/Summary/Keyword: Thick film process

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CO sensing Properties of $SnO_{2}$ fine particles ($SnO_{2}$ 초미세 입자의 CO 감지 특성)

  • Park, Jin-Seoung;Park, Bo-Seok;Noh, Whyo-Sub
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05b
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    • pp.55-61
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    • 2002
  • Ultra-fine particles of $SnO_{2}$ was synthersized by the sol-gel powder processing using tin(II) chloride dihydrate$(SnCl_{2}{\cdot}2H_{2}O)$ and ethanol$(C_{2}H_{5}OH)$ as raw materials. Gel powders can be obtained by drying of sol at $120^{\circ}C$ after aging 72hrs and 168hrs. The amount of $SnO_{2}$ phase was increased with temperature because of the evaporation of volatile components, and the creation of $SnO_{2}$ phase was almost done by the heat treatment at $700^{\circ}C/30min$ The grain sizes after firing are about 20-30nm, and it showed the narrow distribution of grain size. The specimens to measure electrical properties were fabricated by the thick film screen printing technique on the alumina substrates. The conductance of $SnO_{2}$ was increased with temperature up to $380^{\circ}C$ by the typical conduction mechanism of semiconducting ceramics. There was a region of constant conductance between about $200^{\circ}C$ and $380^{\circ}C$ due to the increment of electron concentration with temperature and the annihilation of conduction carriers by the absorption and electron trapped-ionization of oxygen on the surface of $SnO_{2}$, It was finally showed the intrinsic behaviors above $450^{\circ}C$. The sensing properties of response time, recovery, and sensitivity of CO were improved with aging time.

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Growth and Characteristics of SrBi2Nb2O9 Thin Films for Memory Devices (메모리 소자에의 응용을 위한 SrBi2Nb2O9 박막의 성장 및 전기적 특성)

  • Gang, Dong-Hun;Choe, Hun-Sang;Lee, Jong-Han;Im, Geun-Sik;Jang, Yu-Min;Choe, In-Hun
    • Korean Journal of Materials Research
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    • v.12 no.6
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    • pp.464-469
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    • 2002
  • $SrBi_2Nb_2O_9(SBN)$ thin films were grown on Pt/Ti/Si and p-type Si(100) substrates by rf-magnetron co-sputtering method using two ceramic targets, $SrNb_2O_6\; and \;Bi_2O_3$. The structural and electrical characteristics have been investigated to confirm the possibility of the SBN thin films for the applications to destructive and nondestructive read out ferroelectric random access memory(FRAM). For the optimum growth condition X-ray diffraction patterns showed that SBN films had well crystallized Bi-layered perovskite structure after $700^{\circ}C$ heat-treatment in furnace. From this specimen we got remnant polarization $(2P_r)$ of about 6 uC/$\textrm{cm}^2$ and coercive voltage $(V_c)$ of about 1.5 V at an applied voltage of 5 V. The leakage current density was $7.6{\times}10^{-7}$/A/$\textrm{cm}^2$ at an applied voltage of 5V. And for the NDRO-FRAM application, properties of SBN films on Si substrate has been investigated. From transmission electron microscopy (TEM) analysis, we found the furnace treated sample had a native oxide about 2 times thicker than the RTA treated sample and this thick native oxide layer had a bad effect on C-V characteristics of SBN/Si thin film. After $650^{\circ}C$ RTA process, we got the improved memory window of 1.3 V at an applied voltage of 5 V.

Effect of Re-oxidation on the Electrical Properties of Mutilayered PTC Thermistors (적층 PTC 써미스터의 전기적 특성에 대한 재산화의 영향)

  • Chun, Myoung-Pyo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.2
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    • pp.98-103
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    • 2013
  • The alumina substrates that Ni electrode was printed on and the multi-layered PTCR thermistors of which composition is $(Ba_{0.998}Ce_{0.002})TiO_3+0.001MnCO_3+0.05BN$ were fabricated by a thick film process, and the effect of re-oxidation temperature on their resistivities and resistance jumps were investigated, respectively. Ni electroded alumina substrate and the multi-layered PTC thermistor were sintered at $1150^{\circ}C$ for 2 h under $PO_2=10^{-6}$ Pa and then re-oxidized at $600{\sim}850^{\circ}C$ for 20 min. With increasing the re-oxidation temperature, the room temperature resistivity increased and the resistance jump ($LogR_{290}/R_{25}$) decreased, which seems to be related to the oxidation of Ni electrode. The small sized chip PTC thermistor such as 2012 and 3216 exhibits a nonlinear and rectifying behavior in I-V curve but the large sized chip PTC thermistor such as 4532 and 6532 shows a linear and ohmic behavior. Also, the small sized chip PTC thermistor such as 2012 and 3216 is more dependent on the re-oxidation temperature and easy to be oxidized in comparison with the large sized chip PTC thermistor such as 4532 and 6532. So, the re-oxidation conditions of chip PTC thermistor may be determined by considering the chip size.

Development of a Semiconductor Odor Gas Sensor for the Measurement of CH3SH with Taguchi Experimental Design (Taguchi 실험 계획법에 의한 CH3SH 반도체 악취 가스 센서의 개발)

  • Kim Sun-Tae;Choi Il-Hwan
    • Journal of Korean Society for Atmospheric Environment
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    • v.20 no.6
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    • pp.783-792
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    • 2004
  • In this study, a thick-film semiconductor odor gas sensor for the detection of $CH_3$SH was developed using SnO$_2$ as the main substrate and was investigated in terms of its sensitivity and reaction time. In the process of manufacturing the sensor, Taguchi's design of experiment (DOE) was applied to analyze the effects of a variety of parameters, including the substrate, the additives and the fabrication conditions, systematically and effectively. Eight trials of experiments could be possible using the 27 orthogonal array for the seven factors and two levels of condition, which originally demands 128 trials of experiments without DOE. The additives of Sb$_2$O$_{5}$ and PdCl$_2$ with the H$_2$PtCl$_{6}$ ㆍ6$H_2O$ catalyst were appeared to be important factors to improve the sensitivity, and CuO, TiO$_2$, V$_2$O$_{5}$ and PdO were less important. In addition, TiO$_2$, V$_2$O$_{5}$ and PdO would improve the reaction time of a sensor, and CuO, Sb$_2$O$_{5}$, PdCl$_2$ and H$_2$PtCl$_{6}$ㆍ6$H_2O$ were negligible. Being evaluated simultaneously in terms of both sensitivity and reaction time, the sensor showed the higher performance with the addition of TiO$_2$ and PdO, but the opposite results with the addition of CuO, V$_2$O$_{5}$, Sb$_2$O$_{5}$ and PdCl$_2$. The amount of additives were superior in the case of 1% than 4%. H$_2$PtCl$_{6}$ㆍ6$H_2O$ would play an important role for the increase of sensor performance as a catalyst.nce as a catalyst.

Exploration of growth mechanism for layer controllable graphene on copper

  • Song, Woo-Seok;Kim, Yoo-Seok;Kim, Soo-Youn;Kim, Sung-Hwan;Jung, Dae-Sung;Jun, Woo-Sung;Jeon, Cheol-Ho;Park, Chong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.490-490
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    • 2011
  • Graphene, hexagonal network of carbon atoms forming a one-atom thick planar sheet, has been emerged as a fascinating material for future nanoelectronics. Huge attention has been captured by its extraordinary electronic properties, such as bipolar conductance, half integer quantum Hall effect at room temperature, ballistic transport over ${\sim}0.4{\mu}m$ length and extremely high carrier mobility at room temperature. Several approaches have been developed to produce graphene, such as micromechanical cleavage of highly ordered pyrolytic graphite using adhesive tape, chemical reduction of exfoliated graphite oxide, epitaxial growth of graphene on SiC and single crystalline metal substrate, and chemical vapor deposition (CVD) synthesis. In particular, direct synthesis of graphene using metal catalytic substrate in CVD process provides a new way to large-scale production of graphene film for realization of graphene-based electronics. In this method, metal catalytic substrates including Ni and Cu have been used for CVD synthesis of graphene. There are two proposed mechanism of graphene synthesis: carbon diffusion and precipitation for graphene synthesized on Ni, and surface adsorption for graphene synthesized on Cu, namely, self-limiting growth mechanism, which can be divided by difference of carbon solubility of the metals. Here we present that large area, uniform, and layer controllable graphene synthesized on Cu catalytic substrate is achieved by acetylene-assisted CVD. The number of graphene layer can be simply controlled by adjusting acetylene injection time, verified by Raman spectroscopy. Structural features and full details of mechanism for the growth of layer controllable graphene on Cu were systematically explored by transmission electron microscopy, atomic force microscopy, and secondary ion mass spectroscopy.

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Fabrication and Characterization of Thermal Battery using Porous MgO Separator Infiltrated with Li based Molten Salts

  • Kim, Kyungho;Lee, Sungmin;Im, Chae-Nam;Kang, Seung-Ho;Cheong, Hae-Won;Han, Yoonsoo
    • Journal of Powder Materials
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    • v.24 no.5
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    • pp.364-369
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    • 2017
  • Ceramic powder, such as MgO, is added as a binder to prepare the green compacts of molten salts of an electrolyte for a thermal battery. Despite the addition of a binder, when the thickness of the electrolyte decreases to improve the battery performance, the problem with the unintentional short circuit between the anode and cathode still remains. To improve the current powder molding method, a new type of electrolyte separator with porous MgO preforms is prepared and characteristics of the thermal battery are evaluated. A Spherical PMMA polymer powder is added as a pore-forming agent in the MgO powder, and an organic binder is used to prepare slurry appropriate for tape casting. A porous MgO preform with $300{\mu}m$ thickness is prepared through a binder burnout and sintering process. The particle size of the starting MgO powder has an effect, not on the porosity of the porous MgO preform, but on the battery characteristics. The porosity of the porous MgO preforms is controlled from 60 to 75% using a pore-forming agent. The batteries prepared using various porosities of preforms show a performance equal to or higher than that of the pellet-shaped battery prepared by the conventional powder molding method.

Investigation of Transparent Conductive Oxide Films Deposited by Co-sputtering of ITO and AZO (ITO와 AZO 동시 증착법으로 제조된 투명전도막의 특성 연구)

  • Kim, Dong-Ho;Kim, Hye-Ri;Lee, Sung-Hun;Byon, Eung-Sun;Lee, Gun-Hwan
    • Journal of the Korean institute of surface engineering
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    • v.42 no.3
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    • pp.128-132
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    • 2009
  • Transparent conducting thin films of indium tin oxide(ITO) co-sputtered with aluminum-doped zinc oxide(AZO) were deposited on glass substrate by dual magnetron sputtering. It was found that the electrical properties and structural characteristics of the films are significantly changed according to the sputtering power of the AZO target. The IAZTO film prepared with D.C power of ITO at 100 W and R.F power of AZO at 50 W shows an electrical resistivity of $4.6{\times}10^{-4}{\Omega}{\cdot}cm$ and a sheet resistance of $30{\Omega}/{\square}$ (for 150 nm thick). Besides of the improvement of the electrical properties, compared to the ITO films deposited at the same process conditions, the IAZTO films have very smooth surface, which is due to the amorphous nature of the films. However, the electrical conductivity of the IAZTO films was found to be deteriorated along with the crystallization in case of the high temperature deposition (above $310^{\circ}C$). In this work, high quality amorphous transparent conductive oxide layers could be obtained by mixing AZO with ITO, indicating possible use of IAZTO films as the transparent electrodes in OLED and flexible display devices.

Validation of Predictive Liquid Model Systems for the Growth of Listeria monocytogenes and Yersinia enterocolitica on Pork at Various Temperatures

  • Rho, Min-Jeong;Chung, Myung-Sub;Kim, Jeong-Weon;Park, Ji-Yong
    • Food Science and Biotechnology
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    • v.14 no.1
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    • pp.42-45
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    • 2005
  • The present study was carried out to envisage the aerobic growth of Listeria monocytogenes and Yersinia enterocolitica on pork, which is one of the major meat sources in Korea. The results were compared with the previously developed predictive model systems for the verification of microbial growth in a real situation during pork processing. Pork loin samples (8.0 g, 5 mm thick) were aseptically prepared and inoculated with each pathogen by immersing into the respective inoculums for one min. Each of the samples were then wrapped with PE film and stored at 5, 10, and $15^{\circ}C$ up to 36 days to measure the growth profile of the respective pathogens. The growth parameters were calculated by using Gompertz equation and were compared with the previously reported data. The predicted generation time (GT) of L. monocytogenes at 5, 10 and $15^{\circ}C$ was 28.74, 7.85 and 4.02 hr, respectively, and for Y. enterocolitica was 10.29, 4.74 and 2.50 hr, at the same temperatures respectively. In this study, the GT values predicted on pork were slightly higher than the values predicted in other studies using liquid model systems. Unlike previous reports, both the pathogens were found to grow at $5^{\circ}C$ on pork. This finding recommends the necessity of controlling the growth of both the pathogens during the slaughtering process and distribution.

The Powder Synthesis of (Bi,Pb)-2223 System Superconductor by Oxalate Method and Thick Film Preparation (옥살산염법에 의한 (Bi, Pb)-2223계 초전도 분말 합성과 후막 제조)

  • 하성원;김형태;이응상
    • Journal of the Korean Ceramic Society
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    • v.34 no.10
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    • pp.1083-1091
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    • 1997
  • As one of the chemical powder fabrication methods, the powder preparation method by using oxalate has the following advantages; (1) easy to control the chemical stoichiometry, (2) easy to fabricate homogeneous and fine particles, and (3) easy to be thermaly decomposed at low temperature. In the present study, the initial morphology and size distribution of the powder were controlled and the homogeniaty was improved. By carefully controlling the pH with NH4OH, the Bi(Pb)-Sr-Ca-Cu-O superconducting powders were prepared and investigated for their properties. The microstructures and the superconducting properties of the pelletized samples were investigated. Also, the microstructures and electrical properties of the samples prepared by tape casting method were investigated. The fabricated powders were spherical with less than 400 nm, but most of them were agglomerated to be 1~3 ${\mu}{\textrm}{m}$ in size. The critical temperature of the pelletized sample annealed at 84$0^{\circ}C$ for 72 hours in air was 110K. And the critical currents of annealed samples in air prepared by tape casting process for 24 hours and 72 hours were 0.6 A (Jc=600A/$\textrm{cm}^2$) and 1.9A (Jc=1, 900A/$\textrm{cm}^2$) respectively.

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Characteristics and Thermal Stabilities of W-B-C-N Diffusion Barrier by Using the Incorporation of Boron Impurities (Boron 불순물에 의한 W-B-C-N 확산방지막의 특성 및 열적 안정성 연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Magnetics Society
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    • v.18 no.1
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    • pp.32-35
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    • 2008
  • Thermally stable diffusion barrier of tungsten carbon nitride(W-C-N) and of tungsten boron carbon nitride(W-B-C-N) thin films have studied to investigate the impurity behaviors of boron and nitrogen. In this paper we newly deposited tungsten boron carbon nitride(W-B-C-N) thin film for various $W_2B$ target power on silicon substrate. The impurities of the 100nm-thick W-C-N and W-B-C-N thin films provide stuffing effect for preventing the inter-diffusion between W-C-N or W-B-C-N thin films and silicon during the high temperature($700^{\circ}C{\sim}1000^{\circ}C$) annealing process.