• Title/Summary/Keyword: Thermal vacuum evaporation

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Production Characteristics of Thermoelectric Film Produced by Vacuun Evaporation (진공증착에 의해 제조된 열전 박막의 제조 특성)

  • Kim, Bong-Seo;Jeong, Hyun-Uk;Park, Su-Dong;Lee, Hee-Woong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.865-868
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    • 2004
  • 열 진공 증착법(thermal vacuum evaporation)에 의해 p-형 열전박막을 $3{\times}10^{-4}{\sim}3{\times}10^{-6}$ Torr의 범위에서 유리 기판 위에 제조하였다. 제조된 박막의 전기저항은 고진공일수록 저항이 증가하였으며, $Bi_2Te_3$$Sb_2Te_3$상을 가지고 있었다. 박막의 조성은 기판의 위치에 따라 변화하였고, 원자 번호가 작을수록 위치의 영향이 크고, 반대로 원자번호가 큰 원소는 그 영향이 작았다. 또한 고진공에서 제조된 박막일수록 상대적으로 저진공에 비해 조성의 변화가 적게 나타났다.

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Evaporation Characteristics of Aluminum by Using Surface-treated Graphite Boat (표면처리된 흑연 보트를 이용한 알루미늄의 증발 특성)

  • Jeong, J.I.;Yang, J.H.
    • Journal of the Korean institute of surface engineering
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    • v.42 no.1
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    • pp.1-7
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    • 2009
  • Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited applications have been possible as it reacts easily with evaporating materials at high temperature. In this study, evaporation characteristics of aluminum have been investigated by using graphite boat thermally treated with BN powder. The employed graphite boat has been prepared by spray-coating BN power onto the cavity surface of the boat and thermal treatment with aluminum in vacuum at the temperature of more than $1400^{\circ}C$. The voltage-current characteristics as well as resistivity changes of the graphite boat have been investigated during aluminum evaporation according to the applied voltage and time. The evaporation aspect has been picturized during flash evaporation for 40 seconds based on the characterization results. The evaporation rate of the graphite boat has been compared with that of BN boat. The graphite boat showed some different characteristics compared with BN boat, in that the evaporation occurred at the last stage of flash evaporation. The film appearance according to the applied voltage has been compared, and also the reflectance of the resulting film has been investigated according to the film thickness. It has been found that the graphite boat thermally treated with BN powder can be used for aluminum evaporation without problem.

A Study on the growth of Si(001)/X(500$\AA$)/Zn(1000$\AA$) double layers deposited by thermal evaporation process. (열증착방법에 의해 제조된 Si(100)/X(500$\AA$)/Zn(1000$\AA$) 이중박막 성장에 관한 연구)

  • 신동원;정순종;이동윤;민복기;정원섭;송재성
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.1026-1029
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    • 2001
  • Zinc films have been deposited onto various buffer layers, Al, Al-Cu, Ag and Ag-Al, by vacuum evaporation method in order to investigate the film microstructure and its consequence on the film growth. Zn films were grown onto Al buffer layers with faster rates than on Ag buffer layers, because of the presence of preferred growth orientation. Especially, in the Zn film formation on the Ag layers, intermetallic compounds AgZn was formed to cause the different growth orientation from Zn film obtained on the Al layers.

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Thermal Analysis of a Liquid Hydrogen Vessel (액체수소 저장용기의 열해석)

  • Kim, Seo Young;Kang, Byung Ha
    • Transactions of the Korean hydrogen and new energy society
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    • v.8 no.2
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    • pp.57-65
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    • 1997
  • Thermal analysis has been performed to design a high-performance $LH_2$ vessel with about 1% per day evaporation loss. Analysis includes the combined insulations of MLI(Multi-Layer Insulation) and VCS (Vapor-Cooled Shield) under high vacuum. Combined insulation of MLI and VCS shows the existence of optimal location of VCS to minimize evaporation loss. Comparison of parallel-type DVCS (Double Vapor-Cooled Shield) and serial-type DVCS is also made to show the effectiveness of the system. The results indicate that the serial-type DVCS vessel is better than the parallel-type DVCS vessel with respect to overall evaporation loss. The combined insulation of SVCS (Single Vapor-Cooled Shield) with a partial MLI can give a similar performance characteristics compared to that with MLI and DVCS.

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The Comparison of X-ray Response Characteristics of Vacuum Evaporated $Cd_{1-x}Zn_{x}Te$ Detector (진공증착된 $Cd_{1-x}Zn_{x}Te$ 검출기의 X선 반응 특성 비교)

  • Kang, S.S.;Choi, J.Y.;Lee, D.G.;Cha, B.Y.;Kim, J.H.;Nam, S.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05b
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    • pp.39-42
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    • 2002
  • There is a renewed interest in the application of photoconductors especially Cd(Zn)Te to x-ray imaging. In this paper, We investigate effects on x-ray detection characteristic of Zn dopped CdTe detector. Cd(Zn)Te film was fabricated by vacuum thermal evaporation method and then investigate physical analysis using EPMA and XRD. We investigated the leakage current and X-ray photosensitivity as applied voltage about fabricated Cd(Zn)Te film. Experimental results showed that the increase of Zn dopped concentration in $Cd_{1-x}Zn_{x}Te$ detector reduced a leakage current and improved a signal to noise ratio significantly.

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The Comparison of X-ray Response Characteristics of Vacuum Evaporated (진공증착된 CdTe와 $Cd_{0.85}Zn_{0.15}Te$ 필름의 X선 반응특성 비교)

  • Kang, S.S.;Choi, J.Y.;Cha, B.Y.;Moon, C.W.;Kim, J.H.;Nam, S.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.845-848
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    • 2002
  • The study of photoconductor materials is demanded for development for flat-panel digital x-ray Imager. In this paper, We investigated the feasibility of application as x-ray image sensor using Cd(Zn)Te compound with high stopping power on high radiation. These Cd(Zn)Te samples were fabricated by vacuum thermal evaporation method to large area deposition and investigated I-V measurement as applied voltage. The experimental results show that the additional injection Zn in CdTe film reduced the leakage current, for the $Cd_{0.85}Zn_{0.15}Te$ detector, the net charge had the highest value as $144.58pC/cm^2$ at 30 V.

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Thermal analysis of LNG storage tank for LNG bunkering system (LNG 벙커링용 고효율 LNG 저장탱크 열해석)

  • Yun, Sang-kook
    • Journal of Advanced Marine Engineering and Technology
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    • v.39 no.9
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    • pp.876-880
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    • 2015
  • In 2016, the IMO's new rules for an 80% reduction in NOx emissions in newly built ships will necessitate the use of LNG as a clean fuel. So far, the developed European countries have led the development of LNG bunkering ships and related facilities. An LNG bunkering system stores LNG in a horizontal or vertical IMO "C"-Type tank insulated with perlite powder, and a vacuum in the annular space between the double walls, like the cryogenic liquid nitrogen tank. Current storage tanks have high heat leakage, evaporating over 2.0% daily, and are difficult to build with the required vacuum. A more efficiently insulated storage tank could reduce the evaporation rate. This research carried out thermal analysis on a new effective insulation method that separates high vacuum in the annular space between two tanks with a solid insulation material, such as urethane foam, lining the outer vessel. This highly efficient insulation system obtained an evaporation rate of 0.03% per day under a $10^{-3}torr$ vacuum, and an evaporation rate of 0.11% at $10^{-45}torr$. Even if the space loses its vacuum, the new insulation system showed a lower evaporation rate of 4.12% than the present perlite system of 4.9%. This newly developed tank can increase the efficiency of LNG storage tank and may help keep LNG bunkering systems safe.

An Experimental Study on the Water Evaporation Conditions of the Enclosed Tank (밀폐용기내의 물의 저압 증발 최적조건에 관한 실험적 연구)

  • Kim, S.H.;Shin, Y.S.;Lee, Y.W.;Chung, H.S.;Jeong, H.M.
    • Journal of Power System Engineering
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    • v.8 no.1
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    • pp.41-47
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    • 2004
  • Cooling towers are widely used not only for cooling products and equipment in manufacturing process but HVAC(Heating, Ventilation and Air Conditioning) system. As a cooling tower is the terminal apparatus which discharges heat from industrial process, the efficiency of heat exchange in the cooling tower greatly affects to the overall performance of a thermal system. In this paper, we constituted a new water cooling system by using a Latent heat of evaporation in an enclosed tank, and this system is consisted of an enclosed vacuum tank and water driven ejector system. Several experimental cases were carried out for improvement methods of high vacuum pressure and water cooling characteristics. The ejector performance was tested in case of water temperature variations that flows into the ejector. Based on the vacuum pressure by water driven ejector, the water cooling characteristics were investigated for the vaporized air condensing effects.

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Electrical Properties of CNT/Al/Cu Composite Fiber Deposited by Thermal Vacuum Evaporation (열 증착법으로 제조된 CNT/Al/Cu 복합 파이버의 전기적 특성)

  • Kim, Jong-Seok;Shin, Paik-Kyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.2
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    • pp.105-109
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    • 2021
  • CNT fiber has been in the spotlight as a conductor, but the conductivity of CNT fibers do not match that of CNT. This study reveals that the conductivity of CNT fiber can be improved by depositing Al/Cu through vacuum evaporation. Cu is commonly used for deposition on CNT fibers. But low bonding strength of the interface between CNT and Cu could be a disadvantage. To overcome this, Al was deposited on the CNT fiber for forming aluminum carbide islands to increase the interfacial bonding strength. The conductivity characteristics were improved as the deposition time increased. The resistance was measured as a function of temperature, demonstrating that the temperature coefficient of resistance (TCR) is improved to be 241 ppm/℃ in comparison with that of as-received CNT fibers at -1,251 ppm/℃, when the CNT fibers are deposited with Al and Cu, respectively, for 90s and for 540s.