• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.21-24
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• 2002

A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.8
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• pp.886-893
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• 2011

To increase the reliability and positional accuracy of a machine tool, a novel capacitive displacement sensor having a cylindrical shape is presented to measure the axial displacement of a machine tool spindle. Characteristics of the sensor were analyzed by numerical simulation. The sensor was built into a specific machine tool spindle and its performance was experimentally investigated. The accuracy of a thermal error compensation system of a machine tool can be enhanced greatly using proposed sensor.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.5
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• pp.510-517
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• 2004

A fine hot-wire is used both as a heating element and a temperature sensor in transient hot-wire method. The traditional sensor system is unnecessarily big so that it takes large fluid volume to measure the thermal conductivity. To dramatically reduce this fluid volume, a new sensor fabrication and a data processing method are proposed in this article. Contrast to the conventional and most popular two wire sensor, the new sensor system is made up of divided multiple long and short wires. Through validation experiments, it is found that the measured thermal conductivities of the glycerin are exactly same each other between the conventional and proposed new method. Also some technical considerations in arranging the multiple wires are briefly discussed.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.210-215
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• 2003

A fine hot-wire is used both as a heating element and a temperature sensor in transient hot-wire method. The traditional sensor system is unnecessarily big so that it takes large fluid volume to measure the thermal conductivity. To dramatically reduce this fluid volume, a new sensor fabrication and a data processing method are proposed in this article. Contrast to the conventional and most popular two wire sensor, the new sensor system is made up of divided multiple long and short wires. Through validation experiments, it is found that the measured thermal conductivities of the glycerin are exactly same each other between the conventional and proposed new method. Also some technical considerations in arranging the multiple wires are briefly discussed.

• Proceedings of the Korean Geotechical Society Conference
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• 2006.03a
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• pp.171-178
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• 2006

In advanced countries, state-of-the-art temperature monitoring technique is widely used for effective use of geothermal resources. But these kind of modern tools such as Thermal Line Sensor has not been applied to find geothermal characteristics of alluvium and riverbed in domestic area. In this research, state-of-the-art thermal line temperature sensor monitoring was introduced. And long term field test using this type of sensor was performed to find geothermal characteristics of alluvium and riverbed and evaluate the availability for heat energy source. As a result, temperature monitoring technique through thermal line sensor was very effective to obtain basic geothermal information of alluvium deposit and riverbed. Also, it was found that the groundwater temperature phase showed its potential of utilization as a energy source of heat pump. It is estimated that further study shows a specific corelation between temperature monitoring data and its availability as a energy source.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.591-592
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• 2009

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1427_1428
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• 2009

In this paper, we designed and fabricated the ubiquitous thermal sensor unit for high voltage facilities. This sensor unit generates electric power from a current transformer which was mounted in the high voltage wires and transmitted thermal data by using a Zigbee module. We simulated the high voltage facilities that temperature was going up to $80^{\circ}C$ gradually. From the experimental results, it was confirmed that sensibility of the ubiquitous thermal sensor unit is in ranges from $-0.7^{\circ}C$ to $0.3^{\circ}C$.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2000.05a
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• pp.105-109
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• 2000

Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor the size of the pressure sensor diaphragm have become smaller year by year and a microaccelerometer with a size less than 200-300${\mu}m$ has been realized. In this paper we study some of the micromachining processes of SOI(silicon on insulator)for the microaccelerometer and their subsequent processes which might affect thermal loads. The finite element method(FEM) has been a standard numerical modeling technique extensively utilized in structural engineering discipline for design of SOI wafers. Successful thermal behaviors analysis and design of the SOI wafers based on the tunneling current concept using SOI wafer depend on the knowledge abut normal mechanical properties of the SCS(single crystal silicon)layer and their control through manufacturing process

• Journal of the Korea Institute of Military Science and Technology
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• v.10 no.2
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• pp.76-83
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• 2007

This report presents the test technique using optic thermal sensor for the HERO evaluation of equipment installed EED. The calibration method of EED-thermal sensor assembly is explained by relation between the current in bridge wire and voltage in thermal sensor. And the HERO test and evaluation method is indicated based on MIL-STD-464A and MIL-STD-331C. The safety and reliability levels of EED-thermal sensor assembly are evaluated when exposed in the electromagnetic environment.

• Journal of the Korean Geotechnical Society
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• v.23 no.4
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• pp.15-24
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• 2007

Two kinds of temperature monitoring technology have been introduced in this study, which can measure coincidently temperatures at many points along a single length of cable. One is to use a thermal sensor cable comprizing of addressable thermal sensors. The other is to use an optic fiber sensor with Distributed Temperature Sensing (DTS) system. The differences between two technologies can be summarized as follows: A thermal sensor cable has a concept of "point sensing" that can measure temperature only at a predefined position. The accuracy and resolution of temperature measurement are up to the capability of the individual thermal sensor. On the other hand, an optic fiber sensor has a concept of "distributed sensing" because temperature is measured practically at all points along the fiber optic cable by analysing the intensity of Raman back-scattering when a laser pulse travels along the fiber. Thus, the temperature resolution depends on the measuring distance, measuring time and spatial resolution. The purpose of this study is to investigate the applicability of two different temperature monitoring techniques in technical and economical sense. To this end, diverse experiments with two techniques were performed and two techniques are applied under the same condition. Considering the results, the thermal sensor cable will be well applicable to the assessment of groundwater flow, geothermal distribution and grouting efficiency within about loom distance, and the optic fiber sensor will be suitable for long distance such as pipe line inspection, tunnel fire detection and power line monitoring etc.