• Title/Summary/Keyword: TEM analysis

Search Result 963, Processing Time 0.023 seconds

Microstructural Analysis of Epitaxial Layer Defects in Si Wafer

  • Lim, Sung-Hwan
    • Korean Journal of Materials Research
    • /
    • v.20 no.12
    • /
    • pp.645-648
    • /
    • 2010
  • The structure and morphology of epitaxial layer defects in epitaxial Si wafers produced by the Czochralski method were studied using focused ion beam (FIB) milling, scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Epitaxial growth was carried out in a horizontal reactor at atmospheric pressure. The p-type Si wafers were loaded into the reactor at about $800^{\circ}C$ and heated to about $1150^{\circ}C$ in $H_2$. An epitaxial layer with a thickness of $4{\mu}m$ was grown at a temperature of 1080-$1100^{\circ}C$. Octahedral void defects, the inner walls of which were covered with a 2-4 nm-thick oxide, were surrounded mainly by $\{111\}$ planes. The formation of octahedral void defects was closely related to the agglomeration of vacancies during the growth process. Cross-sectional TEM observation suggests that the carbon impurities might possibly be related to the formation of oxide defects, considering that some kinds of carbon impurities remain on the Si surface during oxidation. In addition, carbon and oxygen impurities might play a crucial role in the formation of void defects during growth of the epitaxial layer.

Poly(lactic acid)/Wood Flour/Montmorillonite Nanocomposites (I) : Tensile and Morphological Properties

  • Kim, Jin-Sung;Lee, Sun-Young;Doh, Geum-Hyun;Kang, In-Aeh;Yoon, Ho-Gyu
    • Journal of the Korean Wood Science and Technology
    • /
    • v.37 no.5
    • /
    • pp.426-433
    • /
    • 2009
  • This study investigates the tensile and morphological properties of nanocomposites prepared from poly(lactic acid) (PLA), wood flour (WF) and montmorillonite (MMT) by melt compounding with a twin screw extruder. In order to enhance the mechanical properties of PLA/WF composites, maleic anhydride grafted PLA (MAPLA) is synthesized as a compatibilizer. MAPLA prepared in the laboratory is characterized using FT-IR (Fourier transformed infrared spectroscopy). From the results of X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis for nanocomposites, we confirmed that silicate layers of MMT are intercalated and partially exfoliated. When 2 wt% MAPLA is added, the tensile strength and modulus of PLA/WF/MAPLA composites were higher than those of the PLA/WF composite. The addition of MMT increases the tensile modulus of PLA/WF/MAPLA composites but decreases the tensile strength.

Ultraviolet Blocking Material Based on Silver-doped Hydroxyapatite (수산화인회석에 은이 도입된 자외선차단재료)

  • Pyo, Eunji;Kim, Youngyong;Kwon, Ki-Young
    • Applied Chemistry for Engineering
    • /
    • v.27 no.6
    • /
    • pp.669-671
    • /
    • 2016
  • Hydroxyapatite (HAP) was prepared by a hydrothermal synthesis method and also silver was introduced on the surface of HAP through an ion exchange reaction. The crystal phase and morphology of HAP were then evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM). In addition, the absorption property of HAP was characterized by diffuse reflectance UV-Vis spectroscopy. The presence of silver nanoparticles on the surface of HAP was also verified by XRD and TEM analysis. Particularly, the silver doped HAP showed an enhanced absorption property in UV-Vis region compared to that of the pristine HAP.

Mechanical Properties of ODS Fe Alloys Produced by Mechano-Chemical Cryogenic Milling (극저온 기계화학적 밀링(Mechano-Chemical Milling)에 의해 제조된 ODS Fe 합금의 기계적 특성)

  • Hahn, Sung-In;Hong, Young-Hwan;Hwang, Seung-Joon
    • Journal of the Korean Society for Heat Treatment
    • /
    • v.25 no.3
    • /
    • pp.138-145
    • /
    • 2012
  • An ${\alpha}$-Ferrite (Fe) powder dispersed with 4 vol.% of $Al_2O_3$ was successfully produced by a simple miling at 210 K with a mixture of $Fe_2O_3$, Fe and Al ingredient powders, followed by 2 step high temperature consolidation: Hot Pressing (HP) at 1323 K and then Hot Isostatic Pressing at 1423 K. The microstructure of the consolidated material was characterized by standard metallographic techniques such as XRD (X-ray Diffraction), TEM and STEM-EDS. The results of STEM-EDS analysis showed that the HIPed materials comprised a mixture of pure Fe matrix with a grain size of ~20 nm and $Al_2O_3$ with a bimodal size distribution of extremely fine (~5 nm) and medium size dispersoids (~20 nm). The mechanical properties of the consolidated materials were characterized by compressive test and micro Vickers hardness test at room temperature. The results showed that the yield strength of the ODS (Oxide Dispersion Strengthened) Fe alloy are as much as $674{\pm}39$ MPa and the improvement of the yield strength is attributed to the presence of the fine $Al_2O_3$ dispersoid.

Correlation between Physical Defects and Performance in AlGaN/GaN High Electron Mobility Transistor Devices

  • Park, Seong-Yong;Lee, Tae-Hun;Kim, Moon-J.
    • Transactions on Electrical and Electronic Materials
    • /
    • v.11 no.2
    • /
    • pp.49-53
    • /
    • 2010
  • Microstructural origins of leakage current and physical degradation during operation in product-quality AlGaN/GaN high electron mobility transistor (HEMT) devices were investigated using photon emission microscopy (PEM) and transmission electron microscopy (TEM). AlGaN/GaN HEMTs were fabricated with metal organic chemical vapor deposition on semi-insulating SiC substrates. Photon emission irregularity, which is indicative of gate leakage current, was measured by PEM. Site specific TEM analysis assisted by a focused ion beam revealed the presence of threading dislocations in the channel below the gate at the position showing strong photon emissions. Observation of electrically degraded devices after life tests revealed crack/pit shaped defects next to the drain in the top AlGaN layer. The morphology of the defects was three-dimensionally investigated via electron tomography.

Utilization of Iodine for the Enhanced Permeance of Facilitated Olefin Transport Nanocomposite Membrane (올레핀 촉진수송 나노복합체 분리막의 투과도 향상을 위한 iodine의 활용)

  • Choi, Yeji;Lee, Eun Yong;Kang, Sang Wook
    • Membrane Journal
    • /
    • v.24 no.6
    • /
    • pp.448-452
    • /
    • 2014
  • Nanocomposite membrane to show facilitated olefin transport was prepared for enhanced separation performance. Addtion of halogen molecules into PVP/AgNPs/ TCNQ nanocomposite membrane was expected to further polarize the surface of AgNPs for enhancing the separation performance. The formation of AgNPs and presence of iodine was confirmed by TEM and EDS analysis, respectively. The separation performance for propylene/propane mixture was compared with that of PVP/AgNPs/TCNQ nanocomposite membrane. The long-term stability of membrane was investigated with time.

Effect of Al Precursor Type on Mesoporous Alumina Particles Prepared by Spray Pyrolysis (분무열분해공정에 의한 메조기공 알루미나 제조에 있어 Al 전구체 영향)

  • Kim, Joo-Hyun;Jung, Kyeong-Youl;Park, Kyun-Young
    • Journal of Powder Materials
    • /
    • v.17 no.3
    • /
    • pp.209-215
    • /
    • 2010
  • Mesoporous alumina particles were prepared by spray pyrolysis using cetyltrimethyl-ammonium bromide (CTAB) as a structure directing agent and the effect of Al precursor types on the texture properties was studied using $N_2$ adsorption isotherms, small-angle X-ray scattering (SAXS), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). The surface area and the microstructure of alumina particles were significantly influenced by the Al precursor type. The largest BET surface area was obtained when Al chloride was used, whereas alumina particles prepared from Al acetate had the largest pore volume. According to small-angle X-ray scattering (SAXS) analysis, the alumina powders prepared using nitrate and acetate precursors had a clear single SAXS peak around $2{\theta}=1.0{\sim}1.5^{\circ}$, indicating that regular mesopores with sponge-like structure were produced. On the basis of TEM, SAXS, and $N_2$ isotherm results, the chloride precursor was most profitable to obtain the largest surface area ($265\;m^2/g$), whereas, the nitrate precursor is useful for the preparation of non-hollow mesoporous alumina with regular pore size, maintaining high surface area (${\sim}233\;m^2/g$).

The Photodegradation Effect of Organic Dye for Metal Oxide (Cr2O3, MgO and V2O3) Treated CNT/TiO2 Composites

  • Chen, Ming-Liang;Bae, Jang-Soon;Yoon, Hee-Seung;Lim, Chang-Sung;Oh, Won-Chun
    • Bulletin of the Korean Chemical Society
    • /
    • v.32 no.3
    • /
    • pp.815-820
    • /
    • 2011
  • Three kinds of organometallic compounds (chromium acetylacetonate, magnesium acetate and vanadyl acetylacetonate) were used as transition metal precursor, titanium n-butoxide and multi-walled carbon nanotube as titanium and carbon precursor to prepare metal oxide-CNT/$TiO^2$ composites. The surface properties and morphology of metal oxide-CNT/$TiO^2$ composites were by Brauer-Emett-Teller (BET) surface area measurement, scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and energy dispersive X-ray (EDX) analysis. The photocatalytic activity of prepared metal oxide-CNT/$TiO^2$ composites was determined by the degradation effect of methylene blue in an aqueous solution under irradiation of visible light.

Property Evaluation of Reaction Sintered SiC/SiC Composites Fabricated by Melt Infiltration Process (용융함침법에 의한 반응소결 SiC/SiC 복합재료의 특성 평가)

  • Lee, Sang-Pill;Shin, Yun-Seok;Kohyama, Akira
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.31 no.2 s.257
    • /
    • pp.205-210
    • /
    • 2007
  • SiC/SiC composites and monolithic SiC materials have been fabricated by the melt infiltration process, through the creation of crystallized SiC phase by the chemical reaction of C and Si. The reinforcing material used in this system was a braided Hi-Nicalon SiC fiber with double interphases of BN and SiC. The microstructures and the mechanical properties of RS-SiC based materials were investigated through means of SEM, TEM, EDS and three point bending test. The matrix morphology of RS-SiS/SiC composites was greatly composed of the SiC phases that the chemical composition of Si and C is different. The TEM analysis showed that the crystallized SiC phases were finely distributed in the matrix region of RS-SiC/SiC composites. RS-SiC/SiC composites also represented a good flexural strength and a high density, accompanying a pseudo failure behavior.

Preparation of MWCNT/TiO2 Composites by Using MWCNTs and Titanium(IV) Alkoxide Precursors in Benzene and their Photocatalytic Effect and Bactericidal Activity

  • Oh, Won-Chun;Zhang, Feng-Jun;Chen, Ming-Liang
    • Bulletin of the Korean Chemical Society
    • /
    • v.30 no.11
    • /
    • pp.2637-2642
    • /
    • 2009
  • In this present paper, we prepared $MWCNT/TiO_2$ composites by using pre-oxidized multi-walled carbon nanotubes (MWCNTs) with different titanium alkoxide precursors in benzene solvent. The composites were comprehensively characterized by BET surface area, scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), energy dispersive X-ray analysis (EDX) and UV-Vis absorption spectroscopy. The photoactivity of the prepared materials, under UV irradiation, was tested using methylene blue (MB) in aqueous solution. Finally, according to the results of MB removal experiment, it can be considered that the MB degradation infect mainly caused by photocatalytic effect of $TiO_2$. Furthermore, the bactericidal test of the composites was also determined. It was indicated that $MWCNT/TiO_2$ composites with sunlight had greater effectiveness for B. cereus, S. aureus and E. coli than any other experimental conditions.