• Title/Summary/Keyword: TEM(Transmission Electron Microscopy)

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Correlation between Physical Defects and Performance in AlGaN/GaN High Electron Mobility Transistor Devices

  • Park, Seong-Yong;Lee, Tae-Hun;Kim, Moon-J.
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.2
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    • pp.49-53
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    • 2010
  • Microstructural origins of leakage current and physical degradation during operation in product-quality AlGaN/GaN high electron mobility transistor (HEMT) devices were investigated using photon emission microscopy (PEM) and transmission electron microscopy (TEM). AlGaN/GaN HEMTs were fabricated with metal organic chemical vapor deposition on semi-insulating SiC substrates. Photon emission irregularity, which is indicative of gate leakage current, was measured by PEM. Site specific TEM analysis assisted by a focused ion beam revealed the presence of threading dislocations in the channel below the gate at the position showing strong photon emissions. Observation of electrically degraded devices after life tests revealed crack/pit shaped defects next to the drain in the top AlGaN layer. The morphology of the defects was three-dimensionally investigated via electron tomography.

Surface Microtopography of Pyrophyllite Crystals from Gussi Deposit, Korea (전남 구시광산에서 산출하는 엽납석 결정의 표면 미세형태)

  • Mayumi Jige;Ryuji Kitagawa;Hwang, Jin-Yeon
    • Journal of the Mineralogical Society of Korea
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    • v.17 no.2
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    • pp.115-121
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    • 2004
  • The surface microtopography of pyrophyllite collected from the Gussi deposit, Korea was observed by mean of transmission electron microscopy (TEM) with the gold decoration technique. As results, closed step patterns with malformed circular islands were characteristically observed on the (001) surface of pyrophyllite, contrasting with spiral step patterns common in illite and kaolinite. Gussi pyrophyllite was likely crystallized from hydrothermal solution of higher temperature and/or higher supersaturation than those of other clay minerals. Comparing with micro-topographies of pyrophyllite from the Shokozan and the Uku deposits, southwest Japan, growth mechanism of Gussi pyrophyllite is almost equivalent to those from the Shokozan and the Uku deposits.

Transmission Electron Microscopy Characterization of Early Pre-Transition Oxides Formed on ZIRLOTM

  • Bae, Hoyeon;Kim, Taeho;Kim, Ji Hyun;Bahn, Chi Bum
    • Corrosion Science and Technology
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    • v.14 no.6
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    • pp.301-312
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    • 2015
  • Corrosion of zirconium fuel cladding is known to limit the lifetime and reloading cycles of fuel in nuclear reactors. Oxide layers formed on ZIRLO4^{TM}$ cladding samples, after immersion for 300-hour and 50-day in a simulated primary water chemistry condition ($360^{\circ}C$ and 20 MPa), were analyzed by using the scanning transmission electron microscopy (STEM), in-situ transmission electron microscopy (in-situ TEM) with the focused ion beam (FIB) technique, and X-ray diffraction (XRD). Both samples (immersion for 300 hours and 50 days) revealed the presence of the ZrO sub-oxide phase at the metal/oxide interface and columnar grains developed perpendicularly to the metal/oxide interface. Voids and micro-cracks were also detected near the water/oxide interface, while relatively large lateral cracks were found just above the less advanced metal/oxide interface. Equiaxed grains were mainly observed near the water/oxide interface.

Reliability Test of the TEM Rotation Holder for 3-D Structure Analysis (3차원적 구조분석을 위한 TEM Rotation Holder의 신뢰도 점검)

  • Kim, Jin-Gyu;Jeong, Jong-Man;Kim, Young-Min;Kim, Youn-Joong
    • Applied Microscopy
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    • v.36 no.3
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    • pp.209-216
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    • 2006
  • Accuracy and precision of the goniometer and the specimen holder should be measured and corrected to improve reliability of 3-D structure analysis using transmission electron microscopy (TEM). In this study, we described the operation principle and performance of the Gatan rotation holder. Through analysis of the images taken inside the microscope, rotation angles were measured within the accuracy of ${\pm}0.42^{\circ}$. For comparison the rotation angles were measured outside the microscope using a home-made measurement tool, which resulted in the accuracy of ${\pm}0.6^{\circ}$. Additionally, we found abnormal specimen drifts during rotation probably due to the unstable engagement between the specimen cup and the rotation belt.

Analysis of Electronic Materials Using Transmission Electron Microscopy (TEM) (전자현미경을 이용한 전자재료분석)

  • Kim, Ki-Bum
    • Applied Microscopy
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    • v.24 no.4
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    • pp.132-144
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    • 1994
  • The application of TEM in investigating the evolution of microstructure during solid phase crystallization of the amorphous Si, $Si_{1-x}Ge_x,\;and\;Si_{1-x}Ge_x/Si$ films deposited on $SiO_2$ substrate, in identifying the failure mechanism of the TiN barrier layer in the Cu-metallization scheme, and in comparing the microstructure of the as-deposited Cu-Cr and Cu-Ti alloy films are discussed. First, it is identified that the evolution of microstructure in Si and $Si_{1-x}Ge_x$ alloy films strongly depends on the concentration of Ge in the film. Second, the failure mechanism of the TiN diffusion barrier in the Cu-metallization is the migration of the Cu into the Si substrate, which results in the formation of a dislocation along the Si {111} plane and precipitates (presumably $Cu_{3}Si$) around the dislocation. Finally, the microstructure of the as-deposited Cu-Cr and Cu-Ti alloy films is also quite different in these two cases. From these several cases, we demonstrate that the information which we obtained using TEM is critical in understanding the behavior of materials.

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Electrospinning Fabrication and Characterization of Poly(vinyl alcohol)/Waterborne Polyurethane/Montmorillonite Nanocomposite Nanofibers (전기방사법을 이용한 폴리(비닐 알코올)/수분산 폴리우레탄/몬모릴로나이트 나노복합섬유의 제조 및 특성분석)

  • Kim, In-Kyo;Yeum, Jeong-Hyun
    • Polymer(Korea)
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    • v.35 no.6
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    • pp.553-557
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    • 2011
  • Poly(vinyl alcohol) (PVA)/waterborne polyurethane (WBPU)/montmorillonite clay (MMT) nanocomposite nanofibers were prepared using electrospinning technique of aqueous solutions. Scanning electron microscopy, transmission electron microscopy, X-ray diffraction and thermal gravimetric analyzer were used to characterize the morphology and properties of the nanocomposite nanofibers. Since PVA, WBPU and MMT are hydrophilic, non-toxic and biocompatible materials, these nanocomposite nanofibers can be used for filter and medical industries as wound dressing materials, antimicrobial filters, etc.

Mechanical removal of surface residues on graphene for TEM characterizations

  • Dong-Gyu Kim;Sol Lee;Kwanpyo Kim
    • Applied Microscopy
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    • v.50
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    • pp.28.1-28.6
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    • 2020
  • Contamination on two-dimensional (2D) crystal surfaces poses serious limitations on fundamental studies and applications of 2D crystals. Surface residues induce uncontrolled doping and charge carrier scattering in 2D crystals, and trapped residues in mechanically assembled 2D vertical heterostructures often hinder coupling between stacked layers. Developing a process that can reduce the surface residues on 2D crystals is important. In this study, we explored the use of atomic force microscopy (AFM) to remove surface residues from 2D crystals. Using various transmission electron microscopy (TEM) investigations, we confirmed that surface residues on graphene samples can be effectively removed via contact-mode AFM scanning. The mechanical cleaning process dramatically increases the residue-free areas, where high-resolution imaging of graphene layers can be obtained. We believe that our mechanical cleaning process can be utilized to prepare high-quality 2D crystal samples with minimum surface residues.

Theory of High Resolution TEM Image Formation: Coherence (2) (TEM 관련 이론해설(7): 투과전자현미경의 고분해능 영상이론: 결맞음 (2))

  • Lee, Hwack-Joo
    • Applied Microscopy
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    • v.36 no.1
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    • pp.1-6
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    • 2006
  • In this review, the important ideas of coherence theory are introduced. The transfer function and damping envelopes of the microscope due to temporal and spatial coherence are described. The passbands and the condition of Scherzer focus are discussed in associated with the resolution of transmission electron microscope. The characterization of coherence is also described.

Fabrication of ZnO incorporated TMA-A zeolite nanocrystals (ZnO를 담지한 TMA-A 제올라이트 나노결정의 제조)

  • Lee, Seok-Ju;Lim, Chang-Sung;Kim, Ik-Jin
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.17 no.6
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    • pp.238-244
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    • 2007
  • Nano-sized ZnO crystals were successfully incorporated using ion exchange method in TMA-A zeolite synthesized by the hydrothermal method. The optimal composition for the synthesis of TMA-A zeolite was resulted in a solution of $Al(i-pro)_3$:2.2 TEOS:2.4 TMAOH:0.3 NaOH:200 $H_2O$. 0.3g of TMA-A zeolite and 5mol of $ZnCl_2$ solution were employed for the preparation of ZnO incorporated TMA-A zeolite. The ZnO incorporated TMA-A zeolite precursors, prepared from the process of mixing, stirring, centrifugal separation and drying, were calcined at temperatures from 400 to $600^{\circ}C$ for 3 h. The crystallization process of ZnO incorporated TMA-A zeolite was analyzed by X-ray diffraction (XRD). The Brunaur-Emett-Teller (BET) surface area of the ZnO incorporated TMA-A zeolite was measured. Subsequently, the morphology and the particle size depending on the temperature and time were observed using scanning electron microscopy(SEM), transmission electron microscopy(TEM) and particle size analyzer.

Synthesis and Characterization of DNA-mediated Gold Nanoparticles by Chemical Reduction Method (화학적환원에 의한 DNA-mediated 금 나노입자의 합성 및 특성)

  • Sohn, Jun Youn;Sohn, Jeong Sun
    • Applied Chemistry for Engineering
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    • v.26 no.4
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    • pp.515-519
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    • 2015
  • Complexes composed of hydrogen tetrachloroaurate (III) trihydrate ($HAuCl_4{\cdot}3H_2O$) and DNA were first formed for the synthesis of gold nanoparticle using a DNA template, which were validated using UV-Vis spectroscopy. The morphology of complexes were also characterized by scanning electron microscopy (SEM). DNA-mediated gold nanoparticles were synthesized by the chemical reduction of DNA-Au(III) complexes using hydrazine ($N_2H_4$) and sodium borohydride ($NaBH_4$) as reducing agents. The effects of reducing agent types and their concentration on the formation of gold nanoparticles were investigated. The results showed that hydarazine was the most effective for the reduction of DNA-Au(III) complex. The DNA-mediated gold nanoparticles were characterized SEM, particle size analyzer (PSA), and transmission electron microscopy (TEM). Gold nanoparticles with 55~80 nm in diameter were formed by the aggregation of smaller gold nanoparticles (~nm), which was confirmed in the DNA matrix.