• Title/Summary/Keyword: TA분석

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Electrical Properties of Ta/$Ta_2O_5$/Ta Thin Film Capacitor deposited on $Al_2O_3$ Substrate ($Al_2O_3$ 기판 위에 제작된 Ta/$Ta_2O_5$/Ta 박막 커패시터의 전기적 특성)

  • Kim, Hyun-Ju;Song, Jae-Sung;Kim, In-Sung;Kim, Sang-Su
    • Proceedings of the KIEE Conference
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    • 2003.07c
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    • pp.1502-1504
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    • 2003
  • 최근 전자기기의 경박단소화 추세는 전자기기의 크기와 가격의 감소를 이끌었으며 이러한 추세는 앞으로 지속될 것이다. 이와 같은 현상으로 전자기기를 구성하는 요소의 절반이상을 차지하는 단위수동소자의 경우 소형화를 넘어 박막화 및 집적화가 절실히 요구되는 실정이다. 따라서 본 연구에서는 현재 GHz 대역의 휴대용 무선통신 송 수신부 등에 사용되고 있는 기판이 $Al_2O_3$ 기판인 점을 고려하여 기판의 공통화를 위해 $Al_2O_3$ 기판 위에 Ta/$Ta_2O_5$/Ta 구조를 갖는 MIM 박막커패시터를 제작하여 그 특성을 고찰하였다. 모든 박막의 증착은 RF-magnetron reactive sputtering법에 의해 이루어졌으며, 유전체 열처리는 $700^{\circ}C$ 진공상태에서 60 sec 동안 수행하였다. XRD 분석결과, as-deposited $Ta_2O_5$ 박막은 열처리 후에 비정질상에서 결정질상으로 변환되었다. Ta/$Ta_2O_5$/Ta/Ti/$Al_2O_3$ 커패시터의 전기적 특성으로는 C-F, C-V, I-V 를 측정하였다.

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Untersuchungen zur Kohlenstoffloslichkeit in Molybdan und Molybdan-Va-Metall-Legierungen

  • Klaus Schulze;Kim, Hyung-Jin;Hermann Jehn
    • Journal of Surface Science and Engineering
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    • v.16 no.3
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    • pp.108-123
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    • 1983
  • 순수 Mo와 Mo-Nb, Mo-Ta($\leq$10 at% Nb. Ta)합금을 1,500-2,06$0^{\circ}C$ 범위에서 탄소의 고용도를 연구하였다. 특수한 침탄방법으로 C2H2를 시편에 침탄한후 열처리하여 부분적으로 석출하거나 완전석출에 관계없는 화학적 분석방법으로 행하였다. 순수 Mo에서 최대탄소 고용도는 logCCmax = 7.02-9,490/T이다. Nb, Ta를 미량첨가하여 탄소의 최대 고용도는 Arrhenius 식을 적용할 수 없다. Nb-, Ta- 농도와 온도에 따라 Mo2C와 Nb-,Ta-를 함유한 여러 가지 탄화물상을 만들거나 $\alpha$고용체와 Mo가 포함된 NbC, TaC와 평형상태를 나타나기 때문이다. 실험온도 범위에서 Nb, Ta를 첨가량을 증가하면 탄화물 내부에 NbC, TaC로 석출된다. 고온에 용해된 a-고용체는 150-200 oK/Min으로 냉각하면 석출물은 결정입계나 결정내부에 나타난다. 순수 Mo에 Nb, Ta를 첨가하여도 경도, 파괴실험에서와 같이 인장강도는 크게 증가하지 않는다.

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Chemical Characteristics for Hydrothermal Alteration of Surface Sediments from Submarine Volcanoes of the Tonga Arc (통가열도 해저화산 표층 퇴적물 내 열수변질의 화학적 특성)

  • Um, In Kwon;Chun, Jong-Hwa;Choi, Hunsoo;Choi, Man Sik
    • Journal of the Mineralogical Society of Korea
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    • v.26 no.4
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    • pp.245-262
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    • 2013
  • We analyzed 29 surface sediment samples in five submarine volcanoes (TA12, TA19, TA22, TA25, and TA26) located in the southern part of the Tonga arc for trace elements and rare earth elements to investigate characteristics of the hydrothermal alteration of surface sediments. Based on analytical results of trace element and rare earth element (REE), surface sediments of TA12, TA19, and TA22 submarine volcanoes, which are located in the northern part of the study area, were very little or not influenced by hydrothermal fluids. In contrast, some stations of TA25 and TA26 submarine volcanoes were strongly affected by hydrothermal fluids. However, these two submarine volcanoes showed different features in element concentration in the sediments. Some stations of TA25 submarine volcano showed enrichment of Ni, Cu, Sn, Zn, Pb, Cr, Cd, Sb, W, Ba, Ta, Rb, Sr, and As, however, those of TA26 submarine volcano showed enrichment of Sn, Zn, Pb, Cd, Sb, Ba, Rb, and Sr. Stations which enriched trace elements were observed, enriched REEs were also observed. Average upper continental crust (UCC)-normalized REE patterns of the surface sediments generally showed low light REE (LREE) abundances and increased heavy REE (HREE) abundances. Eu enrichment was identified at several stations of TA25 and TA26 submarine volcanoes. In addition, enrichment of Ce was found at some stations of TA26 submarine volcano and these enrichment patterns were similar with hydrothermal fluid of near stations. Furthermore, TA25 and TA26 submarine volcanoes showed different enrichment characteristics of trace elements and REE. Trace elements were concentrated at TA25 submarine volcano. TA26 submarine volcano, on the other hand, observed highly enrichment of REE especially, Eu and Ce. As a result of the investigation, the characteristics and concentrations of REEs and trace elements in the surface sediments of each submarine volcano can be applied to identify hydrothermal alteration of sediments during exploration for hydrothermal deposits.

Sensitivity and Rejection Capability of Thermal Asperity Induced by Sub-Micron Contamination Particles (미세 입자에 의한 thermal asperity의 민감도 해석 및 감소 방안)

  • 좌성훈
    • Journal of the Korean Magnetics Society
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    • v.10 no.6
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    • pp.310-317
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    • 2000
  • With use of (G)MR head, thermal asperity (TA) has been a big concern in drive industry. In this study, we investigated several factors of heads and disks which affects the TA sensitivity of the drive. TA experiments were conducted by introducing the particles on the drives using a particle injection chamber. It was found that the slider ABS shape can help to reduce TA or contamination in the head/media interface. However, TA sensitivity of the drive mainly depend on the intrinsic property of (G)MR sensor. GMR head is much less sensitive to TA compared with MR head. However, in case that the same bias current was applied for both of MR and GMR head, TA sensitivity of GMR head became almost identical to that of MR head. Therefore it was found that the bias current is a dominant factor in determining TA sensitivity of the head. TA sensitivity of different types of disks was also studied. The scratch resistance of the carbon overcoat layer is the one of the main factors which influence TA rejection capability of the disks.

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A study on the frequency sharing TA Radio with the RFID in the 900MHz band (900MHz대역에서 TA Radio와 RFID의 주파수 공유에 관한 연구)

  • Moon, Hun-Il;Yu, Seung-Duk;Hong, Wan-Pyo
    • Journal of Advanced Navigation Technology
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    • v.14 no.3
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    • pp.367-374
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    • 2010
  • In this paper, the frequencies sharing possibility between TA(TalkAround) Radios and RFID system in 900MHz frequency band have been studied. The modulation technic for FHSS(Frequency Hopping Spread Spectrum) of TA is digital FSK and RFID system adapts digital ASK modulation technic. The communication mode of the tested RFID system for frequencies sharing possibility was FHSS. The field test was performed by five scenarios. The RFID field testing system for the frequencies sharing possibility was composed of four tags and two main devices made in USA. Four TA and Egilant spectrum analyzer was used for testing. The frequencies sharing possibility by differentiated modulation was theoretically analyzed. As result of simulation, it was proved that the frequencies sharing between each other modulation system is possible. And also as result of field testing it was confirmed that the signal of TA Radios have no effect on the signal of RFID system.

X-Ray Spectrometric Analysis of $Ta_2O_5$,$Nb_2O_5$ and $SnO_2$in Tin Slags using Standard Addition and Dilution Method (표준물첨가 및 희석법을 이용한 주석 슬랙중$Ta_2O_5$,$Nb_2O_5$$SnO_2$의 X-선 분광분석)

  • Young-Sang Kim;Dong-Hui Lee
    • Journal of the Korean Chemical Society
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    • v.27 no.6
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    • pp.424-482
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    • 1983
  • Determination for $Ta_2O_5$,$Nb_2O_5$ and $SnO_2$ in tin slags was investigated by X-ray spectrometric method. Standard addition-dilution method was attempted and showed a comparable accuracy with standard calibration curve method. Pure chemicals($Ta_2O_5$,$Nb_2O_5$ and $SnO_2$) were added to the samples and diluted with silica or ferric oxide. For the determination of $Ta_2O_5$and$SnO_2$ , silica was more suitable than ferric oxide while the latter was more preferable than the former for $Nb_2O_5$.

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General Geochemical Characteristics of Dashinchilen Nb-Ta and Sant Cu Occurrences in Southeastern Part of Khangai Area, Mongolia (몽골 항가이 남동부 지역 다신칠렌 탄탈륨-니오븀 및 산트 동 산출지의 지구화학적 특성 개요)

  • Kim, In Joon;Lee, Bum Han;Heo, Chul-Ho
    • Economic and Environmental Geology
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    • v.46 no.5
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    • pp.455-468
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    • 2013
  • We performed reconnaissance survey on Dashinchilen Nb-Ta REE area and Sant Cu area which are located in southeastern part of Khangai rare metals mineralized belt. In Dashinchilen area, Nb and Ta have been found in pegmatitic granite that is largely distributed in the survey area and muscovite in pegmatite which is an intrusion in paleozoic sedimentary rocks which are mostly composed of sandstone. While grades of Nb and Ta are not high, an outcrop that has high Th and U contents (542 ppm of Th and 56.9 ppm of U) has been found. Average and maximum REE contents in the survey area is three times and seven times, respectively, larger than average REE contents in the crust of the Earth. In Sant area, copper oxides such as malachite has been found in quartzite in paleozoic sedimentary rocks. A sedimentary rock formation that has high grade of Mn (12.4-34.6 %) has been found in the survey area. This sedimentary rock formation is the same formation with that of Ugii Nuur Fe-Mn mineralization which is located about 200 km northwest of the survey area. Average and maximum REE contents in the survey area is two and half times and seven times, respectively, larger than average REE contents in the crust of the Earth. According to the factor analysis for the data of the geochemical analysis, Nb and Ta in Dashinchilen area are highly correlated with muscovite and Cu in Sant area is highly correlated with Mo, Sn, and Bi. Furthermore, the factor analysis results show that Fe in Sant area was deposited with rare earth elements.

Effects of Nitrogen Addition on Thermal Stability of Ta-Al Alloy Films (Ta-Al 합금박막의 열적안정성에 미치는 질소첨가 효과)

  • Jo, Won-Gi;Kim, Tae-Yeong;Gang, Nam-Seok;Kim, Ju-Han;An, Dong-Hun
    • Korean Journal of Materials Research
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    • v.7 no.10
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    • pp.877-883
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    • 1997
  • Ar 및 Ar과 $N_{2}$ 분위기하에서 rf 마그네트론 스퍼터링방법으로 Ta-AI과 Ta-AI-N합금막을 제조하였다. Ta-7.9at.% AI계열, Ta-26.7 at% AI게열과 Ta-45.4at.%AI계열에 Ar에 대한 질서유량비로 26%까지 질소를 첨가하여 Ta-AI-N박막을 증착한후, 300-$600^{\circ}C$온도 구산에서 열처리 전후의 구조 및 전기적 특성과 열적안정성을 통하여 레지스터의 적용가능성을 조사하였다. 구조 및 조성 분석은 X-선 회절과 Rutherford Backscattering Spectrometry(RBS)로 관찰하였고 열적안정성은 4단자법(four point probe method)을 이용한 저항변화를 통하여 측정하였다. 순수 Ta에 AI을 첨가하면 확장된 $\beta$($\beta$-Ta)N 합금박막에서 가장 열적안정성이 우수하게 나타났던 질소첨가 범위는 Ta $N_{hcp}$또는 TaN/ sub fcc/또는 Ta $N_{fcc}$와 비정질과의 혼합상순으로 상천이를 나타내었다. Ta-AI-N 합금박막에서 가장 열적안정성이 우수하게 나타났던 질서첨가 범위는 Ta-26.7at. % AI계열의 경우 19-36at.% $N_{2}$구간이었고, Ta-45.5at.% AI계열의 경우는 30-45at.%구간이었다. Ta-AI합금박막은 질소가 첨가되지 않아도 열처리 온도 및 시간에 따라 약 10% 이내의 비교적 작은 저항변화를 보여 열적안정성이 우수하지만 질소를 첨가하여 Ta-AI-N합금박막을 형성시킬경우, 증착된 상태에서 이미 큰 비저항을 나타내었고 열처리 동안 3%이내의 매우 작은 저항변화를 나타내었기 때문에 레지스터용 재료로써 열적안정성에 대한 잠재력이 크다.

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Analysis of the microstructure of reactively sputtered Ta-N thin films (반응성 스퍼터링방법으로 증착된 Ta-N 박막의 미세구조 분석)

  • 민경훈;김기범
    • Journal of Surface Science and Engineering
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    • v.27 no.5
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    • pp.253-260
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    • 1994
  • Ta-N films were reactively sputter deposited by dc magnetron sputtering from a Ta target with a various Ar-N, gas ratio. Electrical resistivity of pure Ta film was 150$\mu$$\Omega$cm and decreased initially with nitrogen addition, and then increased to a value of 220$\mu$$\Omega$-cm~260$\mu$$\Omega$-cm at 9%~23% nitrogen partial flow. Rutherford backscattering spectrometry(RBS) and Auger electron spectroscopy (AES) analysis show that nitrogen content in the film is increased with the nitrogen partial flow. The film contains 58at.% nitrogen at 36% nitrogen partial flow. Both the phase and the microstructure of the as-deposisted films were investigated by x-ray diffractometry(XRD) adn transmission electron microscopy (TEM) at various nitrogen content. The phase of pure Ta film is identified as $\beta$-Ta with a 200$\AA$~300$\AA$ grain size. The phase of Ta film is changed to bcc-Ta as small amount of nitrogen is added. Crystalline Ta2N film was deposited at 24at.% nitrogen content. Amorphous phase is formed over a range of nitrogen content from about 33at.% to 35at.% while crystalline fcc-TaN is observed to form at 39at.%~48at.% nitrogen content.

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Design and Implementation of Simulator for Topology Aggregation in Private Networks to Networks Interface and Performance Analysis of TA Algorithms (사설망 인터페이스에서 토폴로지 요약 테스트를 위한 시뮬레이터 설계 구현 및 TA 알고리즘 성능분석)

  • Kim, Nam-Hee;Kim, Byun-Gon;Seo, Hae-Young;Park, Ki-Hong
    • The Journal of the Korea Contents Association
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    • v.7 no.5
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    • pp.1-9
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    • 2007
  • Topology information can be constructed hierarchically in the networks and the process of aggregating topology information is known as TA(Topology Aggregation). It is very important for scalability in networks. In paticular, routing and TA algorithm are very much elements on networks performance in private networks to networks interface. Therefore, in this paper, we designed and implemented routing simulator for TA in private networks to networks interface. And we evaluated and analyzed the existent TA algorithm using the implemented simulator. The implemented simulator can be used valuably to developing TA algorithm.