• Title/Summary/Keyword: System Interface

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Self-formation of Diffusion Barrier at the Interface between Cu-V Alloy and $SiO_2$

  • Mun, Dae-Yong;Park, Jae-Hyeong;Han, Dong-Seok;Gang, Yu-Jin;Seo, Jin-Gyo;Yun, Don-Gyu;Sin, So-Ra;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.256-256
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    • 2012
  • Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance delay와 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 $SiO_2$와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 $SiO_2$ 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 $SiO_2$와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장했다. 이는 V의 oxide formation energy가 Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, $V^{+5}$이온 반경이 $Mn^{+2}$이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

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Sintering Mixtures in the Stage of Establishing Chemical Equilibrium

  • Savitskii, A.P.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 1999.04a
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    • pp.5-5
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    • 1999
  • The Principal deficiency of the existing notion about the sintering-mixtures consists in the fact that almost no attention is focused on the Phenomenon of alloy formation during sintering, its connection with dimensional changes of powder bodies, and no correct ideas on the driving force for the sintering process in the stage of establishing chemical equilibrium in a system are available as well. Another disadvantage of the classical sintering theory is an erroneous conception on the dissolution mechanism of solid in liquid. The two-particle model widely used in the literature to describe the sintering phenomenon in solid state disregards the nature of the neighbouring surrounding particles, the presence of pores between them, and the rise of so called arch effect. In this presentation, new basic scientific principles of the driving forces for the sintering process of a two-component powder body, of a diffusion mechanism of the interaction between solid and liquid phases, of stresses and deformation arising in the diffusion zone have been developed. The major driving force for sintering the mixture from components capable of forming solid solutions and intermetallic compounds is attributed to the alloy formation rather than the reduction of the free surface area until the chemical equilibrium is achieved in a system. The lecture considers a multiparticle model of the mixed powder-body and the nature of its volume changes during solid-state and liquid-phase sintering. It explains the discovered S-and V-type concentration dependencies of the change in the compact volume during solid-state sintering. It is supposed in the literature that the dissolution of solid in liquid is realised due to the removal of atoms from the surface of the solid phase into the melt and then their diffusicn transfer from the solid-liquid interface into the bulk of liquid. It has been shown in our experimental studies that the mechanism of the interaction between two components, one of them being liquid, consist in diffusion of the solvent atoms from the liquid into the solid phase until the concentration of solid solutions or an intermetallic compound in the surface layer enables them to pass into the liquid by means of melting. The lecture discusses peculimities of liquid phase formation in systems with intermediate compounds and the role of the liquid phase in bringing about the exothermic effect. At the frist stage of liquid phase sintering the diffusion of atoms from the melt into the solid causes the powder body to grow. At the second stage the diminution of particles in size as a result of their dissolution in the liquid draws their centres closer to each other and makes the compact to shrink Analytical equations were derived to describe quantitatively the porosity and volume changes of compacts as a result of alloy formation during liquid phase sinteIing. Selection criteria for an additive, its concentration and the temperature regime of sintering to control the density the structure of sintered alloys are given.

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Occurrence of the lowermost part of the Yucheon Group and its SHRIMP U-Pb ages in Hyeonpoong and Bugok areas (현풍-부곡일원 최하부 유천층군의 산상과 SHRIMP U-Pb 연대)

  • Ghim, Yong Sik;Ko, Kyoungtae;Lee, Byung Choon
    • Economic and Environmental Geology
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    • v.53 no.4
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    • pp.397-411
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    • 2020
  • The Cretaceous Yucheon Group is volcano-sedimentary successions that are formed by volcanic activities of the Gyeongsang Volcanic Arc. Lack of the detailed field researches on the Yucheon Group results in poor understanding of the formation time and the tempo-spatial development of the volcanic arc. Also, this causes difficulties to reconstruct the depositional history from the Sindong and Hayang groups to the Yucheon Group. In this study, we conducted field research targeting to the interface between topmost part of the Hayang Group and the lowermost part of the Yucheon Group from Hyeonpoong to Bugok areas. We also identified depositional timing of the lowermost part of the Yucheon Group using SHRIMP U-Pb zircon age dating. This Yucheon Group is composed of tuff and lapilli tuff, conformably overlying the Jindong Formation. The results of SHRIMP U-Pb zircon age are 97 to 96 Ma, indicating cessation of deposition of the Hayang Group at 97 to 96 Ma by input of pyroclastic materials into the Jinju Subbasin during the explosive volcanic eruptions from the Gyeongsang Volcanic Arc. In comparison with field researches and results of LA-ICP-MS zircon U-Pb age dating (88-85 Ma) of the lowermost part of the Yucheon Group in Gyeongju areas, the volcanic activities that formed Yucheon Group and their influence ranges varied tempo-spatially. This is probably due to distance difference from the volcanic arc or establishment of the paleo-drainage system from the Gyeongsang Volcanic Arc to nearby lowlands.

The Study on the Internet-based Virtual Apartment Remodeling and Auto Estimation Simulator (인터넷 기반의 아파트 리모델링 및 자동 내역산출을 위한 시뮬레이터 디자인 연구)

  • 서재은;김성곤
    • Archives of design research
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    • v.15 no.1
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    • pp.191-202
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    • 2002
  • As family types have been diverse, patterns of living and living space became diverse as much as users are. Therefore, it is needed to provide various remodeled design of living space corresponding to changes of users'living patterns, and to provide these remodeling process to users directly on the web. In this paper, use scenario for the Internet-based Virtual Apartment Remodeling Simulator is researched as an export system to remodel space in accordance with users diverse lifestyle paradigm and the website is developed. The study consists of four parts. First, the general concept of remodeling, including the range and types of remodeling, are defined, and the misleading terms in this field are reviewed and organized by secondary research Second, fixed factors and variable factors are differentiated in the complex building for residence and business that was decided as a basic building type in this study. Third, there needed a database for consulting, final material, pre-estimation real estimation for simulation of remodeling. This database was introduced along with floor plan and elevation. Finally, the remodeling simulator is presented by the case study developed on the web. The system structure and use scenario are also presented. In order to present and inspect design alternatives, prototype was produced. The Final simulator was enhanced by defeating problems regarding interface efficiency and missing information of existing online site.

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Design and development of VSI Optical Adapter for high speed transmission of VLBI observation data (VLBI 관측데이터 초고속 전송을 위한 VSI 광변환 송수신 장치의 설계 및 개발)

  • Oh, Se-Jin;Roh, Duk-Gyoo;Yeom, Jae-Hwan;Jung, Jin-Seung;Jung, Dong-Kyu;Oh, Chung-Sik;Ozeki, Kensuke;Onuki, Hirofumi;Harada, Keniichi
    • Journal of the Institute of Convergence Signal Processing
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    • v.14 no.4
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    • pp.261-269
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    • 2013
  • This paper describes the design and development of VSI (VLBI standard interface) optical adapter for transmitting VLBI(Very long baseline interferometry) observation data with optical signal. VSI cable comprised of 80-line is being used for observed data transmission with maximum length of 5-meter between playbacks (Mark5B, VERA2000) and raw VLBI data buffer (RVDB), RVDB and VLBI correlation subsystem (VCS) in Daejeon correlator. It has a plan to conduct the data processing for 16-stations and introduce the 14 RVDB systems in near future. And data loss frequently occurred because of trouble of VSI cable MDR80 connector. By considering the data loss by connector error of VSI cable, RVDB system extension plan, effective space usage and long distance data transmission(e-VLBI), the VSI optical adapter was proposed and developed for effectively transmitting and receiving VLBI data through optical signal. In order to confirming the performance of developed VSI optical adapter, the experiments for data transmission was conducted between playback and RVDB system, and confirmed that data transmission was clearly done without any data loss.

Performance Analysis of Noncoherent OOK UWB Transceiver for LR-WPAN (저속 WPAN용 비동기 OOK 방식 UWB 송수신기 성능 분석)

  • Ki Myoungoh;Choi Sungsoo;Oh Hui-Myoung;Kim Kwan-Ho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.30 no.11A
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    • pp.1027-1034
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    • 2005
  • IEEE802.15.4a, which is started to realize the PHY layer including high precision ranging/positioning and low data rate communication functions, requires a simple and low power consumable transceiver architecture. To satisfy this requirements, the simple noncoherent on-off keying (OOK) UWB transceiver with the parallel energy window banks (PEWB) giving high precision signal processing interface is proposed. The flexibility of the proposed system in multipath fading channel environments is acquired with the pulse and bit repetition method. To analyze the bit error rate (BER) performance of this proposed system, a noise model in receiver is derived with commonly used random variable distribution, chi-square. BER of $10^{-5}$ under the line-of-sight (LOS) residential channel is achieved with the integration time of 32 ns and signal to noise ratio (SNR) of 15.3 dB. For the non-line-of-sight (NLOS) outdoor channel, the integration time of 72 ns and SNR of 16.2 dB are needed. The integrated energy to total received energy (IRR) for the best BER performance is about $86\%$.

Analysis on Adhesion Properties of Composite Electrodes for Lithium Secondary Batteries using SAICAS (SAICAS를 이용한 리튬이차전지용 복합전극 결착특성 분석)

  • Byun, Seoungwoo;Roh, Youngjoon;Jin, Dahee;Ryou, Myung-Hyun;Lee, Yong Min
    • Journal of the Korean Electrochemical Society
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    • v.21 no.2
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    • pp.28-38
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    • 2018
  • Although the adhesion properties of composite electrodes are important for securing long-term reliability and realizing high energy density of lithium secondary batteries, related research has not been carried out extensively due to the limitation of measurement technology. However, surface and interfacial cutting analysis system(SAICAS), which can measure the adhesion properties while cutting and peeling a coating layer of $1{\sim}1000{\mu}m$ thickness, has been developed and applied for analyzing the adhesion properties of composite electrodes for lithium secondary batteries. Thus, this review presents not only the principle and measurement method of SAICAS but also comparison results between SAICAS and conventional peel test. In addition, application examples of SAICAS are introduced in the study of electrode design optimization, new binder derivation study, and binder distribution in composite electrode. This suggests that SAICAS is an analytical method that can be easily applied to investigate the adhesion properties of composite electrodes for lithium secondary batteries.

A GaAs MMIC Multi-Function Chip with a Digital Serial-to-Parallel Converter for an X-band Active Phased Array Radar System (X-대역 능동 위상 배열 레이더 시스템용 디지털 직병렬 변환기를 포함한 GaAs MMIC 다기능 칩)

  • Jeong, Jin-Cheol;Shin, Dong-Hwan;Ju, In-Kwon;Yom, In-Bok
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.22 no.6
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    • pp.613-624
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    • 2011
  • An MMIC multi-function chip for an X-band active phased array radar system has been designed and fabricated using a 0.5 ${\mu}m$ GaAs p-HEMT commercial process. A digital serial-to-parallel converter is included in this chip in order to reduce the number of the control interface. The multi-function chip provides several functions: 6-bit phase shifting, 6-bit attenuation, transmit/receive switching, and signal amplification. The fabricated multi-function chip with a relative compact size of 24 $mm^2$(6 mm${\times}$4 mm) exhibits a transmit/receive gain of 24/15 dB and a P1dB of 21 dBm from 8.5 GHz to 10.5 GHz. The RMS errors for the 64 states of the 6-bit phase shift and attenuation were measured to $7^{\circ}$ and 0.3 dB, respectively over the frequency.

A Study on the Current Status and Policy Direction of Open Banking (오픈뱅킹(Open Banking)의 현황과 정책방향에 관한 연구)

  • Park, Jeongkuk;Kim, Injai
    • Journal of Service Research and Studies
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    • v.10 no.1
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    • pp.17-31
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    • 2020
  • Open banking, the global trend of the financial industry, is the driving force behind various innovations in the financial market in the future. The right policy direction and detailed tasks are important for triggering the differentiation and reunion of the financial industry. The purpose of this study is to investigate and analyze the background of open banking, domestic and international trends, and Korea's open banking policy. The policy directions and tasks for successful settlement and activation of open banking system are carefully suggested. Open banking is a policy to allow third party provider(TPP) access to bank accounts and open payment functions under the explicit consent of the customer. The opening of the open banking era is expected to begin competition and cooperation between banks and fintech companies in earnest, thus enhancing the competitiveness of the financial industry and contributing to the utility of financial consumers. To this end, policymakers should make every effort to advance open-ended financial settlement infrastructure, open banking legal grounds, and minimize side effects such as customer data leakage and poor financial system stability. Banks and fintech companies will need to focus on scattered customer financial information on a single platform and develop it into a convergence and discrimination of true financial services.

Computational Analysis for a Molten-salt Electrowinner with Liquid Cadmium Cathode (액체 카드뮴 음극을 사용한 용융염 전해제련로 전산해석)

  • Kim, Kwang-Rag;Jung, Young-Joo;Paek, Seung-Woo;Kim, Ji-Yong;Kwon, Sang-Woon;Yoon, Dal-Seong;Kim, Si-Hyung;Shim, Jun-Bo;Kim, Jung-Gug;Ahn, Do-Hee;Lee, Han-Soo
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.8 no.1
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    • pp.1-7
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    • 2010
  • In the present work, an electrowinning process in the LiCl-KCl/Cd system is considered to model and analyze the electrotransport of the actinide and rare-earth elements. A simple dynamic modeling of this process was performed by taking into account the material balances and diffusion-controlled electrochemical reactions in a diffusion boundary layer at an electrode interface between the molten salt electrolyte and liquid cadmium cathode. The proposed modeling approach was based on the half-cell reduction reactions of metal chloride occurring on the cathode. This model demonstrated a capability for the prediction of the concentration behaviors, a faradic current of each element and an electrochemical potential as function of the time up to the corresponding electrotransport satisfying a given applied current based on a galvanostatic electrolysis. The results of selected case studies including five elements (U, Pu, Am, La, Nd) system are shown, and a preliminary simulation is carried out to show how the model can be used to understand the electrochemical characteristics and provide better information for developing an advanced electrowinner.