• 제목/요약/키워드: Synchrotron X-ray

검색결과 264건 처리시간 0.027초

α-Fe2O3/AI2O3(0001) 박막 결정화의 방사광 X-선 산란 연구 (Crystallization of α-Fe2O3/AI2O3(0001) Thin films Studied by Synchrotron X-ray Scattering)

  • 조태식
    • 한국전기전자재료학회논문지
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    • 제15권8호
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    • pp.708-712
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    • 2002
  • The crystallization of amorphous $\alpha$-Fe$_2$O$_3$/$\alpha$-AI$_2$O$_3$(0001) thin films during thermal annealing in air has been studied using real-time synchrotron x-ray scattering. The well aligned (0.02$^{\circ}$/ FWHM) $\alpha$-Fe$_2$O$_3$and Fe$_3$O$_4$interfacial crystallites (50- -thick) coexist on the $\alpha$-AI$_2$O$_3$(0001) in the sputter-grown amorphous films at room temperature. The amorphous precursor is crystallized to the epitaxial $\alpha$-Fe$_2$O$_3$grains in three steps with annealing temperature; i ) the growth of the well aligned $\alpha$-Fe$_2$O$_3$interfacial crystallites, together with the transformation of the Fe$_3$O$_4$crystallites to the $\alpha$-Fe$_2$O$_3$ crystallites, ii ) the growth of the less aligned (3.08$^{\circ}$ FWHM)$\alpha$-Fe$_2$O$_3$grains on the well aligned grains (>40$0^{\circ}C$), and iii) the nucleation of the other less aligned (1.39$^{\circ}$ FWHM) $\alpha$-Fe$_2$O$_3$grains directly on the $\alpha$-AI$_2$O$_3$substrate (>$600^{\circ}C$). The effective thickness thinner than 230 may be very useful for enhancing the epitaxial quality of $\alpha$-Fe$_2$O$_3$/AI$_2$O$_3$(0001) thin films.

생물의료용 연 X-선 현미경 시스템 개발 (Development of a soft X-ray microscopy system for Biological Application)

  • 김경우;권영만;김규겸;민종환;박정권;임종혁;남기용;윤권하;민진영
    • 한국광학회:학술대회논문집
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    • 한국광학회 2005년도 제16회 정기총회 및 동계학술발표회
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    • pp.264-265
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    • 2005
  • In this paper the conceptual design and development of a compact vertical type soft x-ray microscope is described. This x-ray microscope operates in the water window wavelength region(2.3 ${\sim}$ 4.4nm), where natural contrast between carbon(protein) and oxygen(water) allows imaging of unstained biological material their natural, hydrated environment. Until now, operational x-ray microscopes are based on synchrotron radiation sources, which limit their accessibility. Many biologists would benefit from having the x-ray microscope as a tool among other tools in their own laboratory, For this purpose we introduced the compact vertical type soft X-ray microscope with 50 nm resolution for biomedical application. The compact vertical type soft x-ray microscope is based on a laser plasma x-ray source, doubled ellipsoidal condenser reflective optics, diffractive zone plate optics and MCP coupled with CCD to record an x-ray image.

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수정된 DXRL 공정에 의한 미세구조 제작 (Fabrication of a Micro-Structure by Modified DXRL Process)

  • 한상필;정명영;정석원;김진태
    • 대한기계학회논문집A
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    • 제27권9호
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    • pp.1517-1523
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    • 2003
  • Deep X-ray lithography (DXRL), a fabrication method for the production of microstructures with a high aspect ratio, plays an important role in the subsequent electroplanting process. However, secondary radiation is generated during X-ray exposure and damages the resist adhesion to the metal layer. To solve adhesion problems, we modified the conventional DXRL process, changing the sequence of polymer adhesion in DXRL process. With optimized X-ray exposure and development conditions based on a calculated and modified X-ray power spectrum, we fabricated various polymer microstructures and achieved a maximum aspect ratio of 40.

Circularly polarized soft X-ray generation by Co/Pt thin film polarizer with perpendicular magnetic anisotropy

  • Lee, Sang-Hyuk;Huang, Lin;Lee, Jae-Woong;Kim, Namdong;Shin, Hyun-Joon;Jeong, Jong-Ryul;Hwang, Chanyong;Kim, Dong-Hyun
    • Current Applied Physics
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    • 제18권11호
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    • pp.1196-1200
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    • 2018
  • We have experimentally demonstrated circular polarization generation from linear polarized soft X-ray at synchrotron by adopting a thin magnetic film polarizer. Polarizer is composed of Co/Pt multilayer with a perpendicular magnetic anisotropy, which allows us to easily accommodate without needing any tilting angle into the measurement setup since the circular polarization is generated for the X-ray with normal incidence and transmission. Generated circular polarization is examined by observing magnetic domain features based on the X-ray magnetic circular dichroism, where~11% of circular component is estimated compared to the case of full circular polarization.

Investigation of Water Transport in Newly Developed Micro Porous Layers for Polymer Electrolyte Membrane Fuel Cells

  • Alrwashdeh, Saad S.;Markotter, Henning;Haussmann, Jan;Hilger, Andre;Klages, Merle;Muller, Bernd R.;Kupsch, Andreas;Riesemeier, Heinrich;Scholta, Joachim;Manke, Ingo
    • Applied Microscopy
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    • 제47권3호
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    • pp.101-104
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    • 2017
  • In this investigation, synchrotron X-ray imaging was used to investigate the water distribution inside newly developed gas diffusion media in polymer electrolyte membrane fuel cells. In-situ radiography was used to reveal the relationship between the structure of the microporous layer (MPL) and the water flow in a newly developed MPL equipped with randomly arranged holes. A strong influence of these holes on the overall water transport was found. This contribution provides a brief overview to some of our recent activities on this research field.

사파이어 기판의 방향에 따른 ZnO 박막의 결정화 거동 (Sapphire orientation dependence of the crystallization of ZnO thin films)

  • 조태식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.1036-1038
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    • 2001
  • The sapphire orientation dependence of the crystallization of ZnO thin films has been studied using real-time synchrotron x-ray scattering. The amorphous ZnO thin films with a 2400-${\AA}$-thick were grown on sapphire(110) and sapphire(001) substrates by radio frequency magnetron sputtering at room temperature. The amorphous ZnO films were crystallization into epitaxial ZnO(002) grains both on the sapphire(110) and on the sapphire(001) substrates. The epitaxial quality, such as mosaic distribution and crystal domain size, of the ZnO grains on the sapphire(110) is high, similar to that of the ZnO grains on the sapphire(001). With increasing the annealing temperature to 600$^{\circ}C$, the mosaic distribution and the crystal domain size of ZnO(002) grains in the film normal direction was improved and decreased, respectively.

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In-situ Synchrotron X-ray Diffraction Measurement of Epitaxial FeRh thin Films

  • Jang, Sung-Uk;Hyun, Seung-Min;Lee, Hwan-Soo;Kwon, Soon-Ju;Kim, Ji-Hong;Park, Ki-Hoon;Lee, Hak-Joo
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2009년도 정기총회 및 동계학술연구발표회
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    • pp.204-205
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    • 2009
  • The magnetic properties and structure of FeRh thin film pitaxially grown onto MgO(001) substrate were studied by MPMS(Magnetic Properties Measure System) and in-situ temperature synchrotron XRD(X-ray Diffraction). The transition temperature of FeRh thin films was around 380K. Both M-T curve and d-spacing changes correspond to each other very closely.

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플라이 애시 지오폴리머와 활성 슬래그 시멘트 생성물의 방사광 X선 회절 실험 연구 (Synchrotron X-ray diffraction study on alkali-activated slag cement and fly ash-based geopolymers)

  • 오재은;전쌍순;최세진
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2009년도 춘계 학술대회 제21권1호
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    • pp.319-320
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    • 2009
  • 알칼리 활성 반응에 의한 고로 슬래그와 플라이 애시의 반응생성물에 대하여 강도실험 및 방사광 X선 회절 연구가 실시되었다. 본 연구는 지금까지 제올라이트 계열로 추정되어 왔던 지오폴리머의 실제 결정 구조가 무경절질형태의 ABC-6 family 제올라이트에 속해 있음을 제안한다.

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The Interfacial Electronic Structure of Organic-organic Heterojunction: Effect of Molecular Orientation

  • 조상완
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.114.2-114.2
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    • 2014
  • The orientation of the constituent molecules in organic thin film devices can affect significantly their performance due to the highly anisotropic nature of ${\pi}$-conjugated molecules. We report here an angle dependent x-ray absorption study of the control of such molecular orientation using well-ordered interlayers for the case of a bilayer heterojunction of chloroaluminum phthalocyanine (ClAlPc) and C60. Furthermore, the orientation-dependent energy level alignment of the same bilayer heterojunction has been measured in detail using synchrotron radiation-excited photoelectron spectroscopy. Regardless of the orientation of the organic interlayer, we find that the subsequent ClAlPc tilt angle improves the ${\pi}-{\pi}$ interaction at the interface, thus leading to an improved short-circuit current in photovoltaic devices based on ClAlPc/C60. The use of the interlayers does not change the effective band gap at the ClAlPc/C60 heterointerface, resulting in no change in open-circuit voltage.

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X-ray Microdiffraction 을 이용한 구리 Interconnect의 Texture 분석 (Texture Analysis of Cu Interconnects Using X-ray Microdiffraction)

  • 정진석
    • 한국결정학회지
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    • 제12권4호
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    • pp.233-238
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    • 2001
  • 1㎛ 이하로 집속된 방사광원으로부터의 x-선을 이용하여 새로운 분석법인 x-선 미세회절(x-ray microdiffraction)을 사용하면 다결정시료 내 grain들의 방위나 strain의 국지적 분포를 정밀하게 측정할 수 있다. 포항가속기연구소 방사광원의 x-ray microbeam 실험 장치를 사용하여 찍은 Laue 사진을 측별히 쓰여진 분석 software를 이용하여 분석함으로써 고집적회로에 쓰이는것과 같은 방법으로 제작된 Si wafer 상의 다른 선폭의 구리 도선들이 가지는 texture 를 밝혀내었다. 실험시 x-ray빔의 크기는 2×3㎛²정도이었으며, 분석 결과에의하면 선폭 1㎛도선에서는 grain들이 방위가 특정한 방향성이 없는 반면, 선폭 20㎛도선의 중앙부분에서는 〈111〉fiber texture 가 관측되었다. Grain들의 크기는 선폭 1㎛의도선에서 2∼5㎛, 선폭 20㎛의도선에서는 6∼8㎛로 측정되었다.

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