• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2006년도 추계학술발표회 초록집
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• pp.65-65
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• 2006

• 한국생산제조학회지
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• 제24권6호
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• pp.639-646
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• 2015

A treatment for improving the characteristics of a surface is very important in increasing the life of machine parts. Many studies have been carried out on the surface characteristics after such treatments. For enhanced eco-technology, an alternative to a conventional chemical surface treatment process is essential. Ultrasonic nano-crystal surface modification (UNSM) technology is a physical environmentally friendly surface treatment method. This technology was developed in domestic and currently being used. As the mechanism of UNSM technology, a ball tip attached to an ultrasonic vibration device strikes the metal surface at nearly 20,000 times per second. The resulting modified surface layer improves the surface characteristics. This paper describes a self-developed fast tool servo system applied to the UNSM process as a vibration module within a high-frequency bandwidth. After describing the surface modification process based on the material and process changes, the surface characteristics are compared.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.285-285
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• 2008

• 대한기계학회논문집A
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• 제33권3호
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• pp.190-195
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• 2009

All the failure in fatigue of torsion, bending and rolling contact, and in sliding wear begins mostly from surface. So much efforts have been invested to the surface technology which deal these problems during past decades, but the industrial demand keeps growing and more significant requirements are added to researchers and engineers. Nano crystal surface modification technology which makes the surface layers into nano crystalline, induces big and deep compressive residual stress, increases surface hardness, improves surface hardness, and make micro dimples structure on surface is an emerging technology which can break limits of current surface technology and relieve the burden of researchers and engineers. In this study, a nano crystal surface modification technology which is calling UNSM(Ultrasonic nano crystal surface modification) technology, is introduced and how it has been applied to industry to solve these failure problems is explained.

• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.1-5
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• 2019

This study has been focused on properties of surface technology for large diameter upper electrode using in high density plasma process as like semi-conductor manufacturing process. The experimental studies have been carried out to get mirror surface for upper electrode. For a formation of high surface quality upper electrode, single crystal silicon upper electrode has been mechanical and chemical machining worked. Mechanical machining work of the upper electrode is carried out with varying mesh type using diamond wheel. In case of chemical machining work, upper electrode surface roughness was observed to be strongly dependent upon the etchant. The different surface roughness characteristics were observed according to etchant. The machining result of the surface roughness and surface morphology have been analyzed by use of surface roughness tester, laser microscope and ICP-MS.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2001년도 창립10주년 제20회 학술발표회
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• pp.65-66
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• 2001

• 한국진공학회:학술대회논문집
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• 한국진공학회 2003년도 제24회 학술발표회 초록집
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• pp.205-205
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• 2003

• 한국표면공학회지
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• 제39권4호
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• pp.160-165
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• 2006

Ni-SiC composite coating layers were prepared by electroplating method and their deposition rate, codeposition of SiC, morphology, surface roughness, hardness, wear and friction properties were investigated. It was found that the deposition rate and the codeposition of SiC in the composite coating layer increased with increasing concentration of SiC in the solution only at the early stage. Both of them reached certain maxima and then decreased with increasing concentration of SiC. Rough surface was obtained with increasing codeposition of SiC, which is probably due to the agglomeration of the SiC particle in the vicinity of surface. Vickers hardness increased with increasing codeposition of SiC and heat treatment at $300^{\circ}C$ in air for 1 hour. Wear volume decreased with increasing codeposition of SiC and friction coefficient increased with increasing codeposition of SiC at the early stage, and it became almost constant. Such wear and friction behaviors are desirable for the practical application.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.258-258
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• 2009

• 반도체디스플레이기술학회지
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• 제17권4호
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• pp.1-5
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• 2018

Atomic force microscopy (AFM) simulation for Si (001) surface defects was conducted by using density functional theory (DFT). Three major defects on the Si (001) surface are difficult to analyze due to external noises that are always present in the images obtained by AFM. Noise-free surface defects obtained by simulation can help identify the real surface defects on AFM images. The surface defects were first optimized by using a DFT code. The AFM tip was designed by using five carbon atoms and positioned on the surface to calculate the system's energy. Forces between tip and surface were calculated from the energy data and converted into an AFM image. The simulated AFM images are noise-free and, therefore, can help evaluate the real surface defects present on the measured AFM images.