• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• Journal of Korean Society on Water Environment
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• v.34 no.6
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• pp.621-631
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• 2018

In this study, catalyst was made through incipient wetness method using palladium (Pd) as noble metal, indium (In) as secondary metal, and montmorillonite (MK10) and Al pillared montmorillonite (Al-MK10) as supporters. The nitrate reduction rate of the catalysts was measured by batch experiments where H2 gas was used as reducing agent and formic acid as pH controller. Transmission electron microscopy (TEM) equipped with energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) were all used to determine the elemental distribution of Pd, In, Al, and Si on catalysts. It was observed that Al pillaring increased the Al/Si elemental composition ratio and point of zero charge of MK10, but decreased its BET specific surface area and pore volume. The nitrate reduction rate of Al-MK10 Pd/In was 2.0 ~ 2.5 times higher than that of MK10 Pd/In using artificial groundwater (GW) in ambient temperature and pressure. Nitrate reduction rates in GW were 1.2 ~ 1.7 times lower than those in distilled deionized water (DDW). Nitrate reduction rates in acidic conditions were higher than those in neutral condition in both GW and DDW. The amount of produced NH3-N over degraded NO3- at acid conditions was lower than that of neutral condition. Even though the leaching of Pd after reaction was measured in DDW it was not detected when both Al-MK10 Pd/In and MK10 Pd/In were used in GW. The modification of montmorillonite as a supporter significantly increased the reductive catalytic activities of nitrates. However, the ratio of producing ammonia by-products to degraded nitrates in ambient temperature and pressure was similar.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.4
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• pp.377-385
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• 2022

Thermal batteries are specialized as primary reserve batteries that operate when the internal heat source is ignited and the produced heat (450~550℃) melts the initially insulating salt into highly conductive eutectic electrolyte. The heat source is composed of Fe powder and KClO₄ with different mass ratios and is inserted in-between the cells (stacks) to allow homogeneous heat transfer and ensure complete melting of the electrolyte. An ideal heat source has following criteria to satisfy: sufficient mechanical durability for stacking, appropriate heat calories, ease of combustion by an igniter, stable combustion rate, and modest peak temperature. To satisfy the aforementioned requirements, Fe powder must have high surface area and porosity to increase the reaction rate. Herein, the hydrothermal and spray drying synthesis techniques for Fe powder samples are employed to investigate the physicochemical properties of Fe powder samples and their applicability as a heat source constituent. The direct comparison with the state-of-the-art Fe powder is made to confirm the validity of synthesized products. Finally, the actual batteries were made with the synthesized iron powder samples to examine their performances during the battery operation.

• Journal of the Korean Chemical Society
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• v.33 no.5
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• pp.558-567
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• 1989

The synthesis of methanol from carbon dioxide and hydrogen was studied for various compositions of Cu/ZnO catalyst system. Effect of the composition ratio of CuO and ZnO on the catalytic activity in the above reaction and the relationship between the activity and the characteristics of the catalysts were explained from the result of surface area measurements, SEM, XRD, and XPS. The major products of the reaction were methanol and carbon monoxide. The selectivity to methanol increased with increase of the copper oxide content in the catalyst up to CuO: ZnO = 30:70 weight ratio, and decreased rapidly when the content is above 70%. SEM and BET measurements, indicate that this point corresponds to the increasing point of the catalyst crystallite size and the decreasing point of the surface area. As to the Cu/Cu + Zn atomic ratio, the surface concentration of copper measured by XPS decreased remarkably when the copper oxide content in catalyst was higher than 50%. All the unreduced catalysts had almost same binding energy of Cu(2P3) level, but the binding energy for $Cu(2P^3)$ level of reduced catalysts was lowered than that of calcined catalysts. The surface copper species which was in the maximum amount when the CuO:ZnO composition in the catalyst was 30:70, existed as zero valent copper. This result agreed with the experimental result that the highest rate of methanol formation was observed when the CuO content in the catalyst was 30%. It was postulated that these reduced catalysts performed with a relatively strong basicity because the formation rate of acetone was higher than that of propylene in isopropanol decomposition as measured in a pulse type reactor.

• Korean Journal of Food Science and Technology
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• v.42 no.1
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• pp.8-13
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• 2010

Bisphenol A diglycidyl ether (BADGE) and bisphenol F diglycidyl ether (BFDGE) were obtained by a polymerization reaction of epichlorohydrin (ECH) with bisphenol A (BPA) or bisphenol F (BPF). These compounds are commonly used as monomers or additives such as a polymerization stabilizer and a hydrochloric acid scavenger of epoxy resin, polyvinyl chloride (PVC)-containing organosols and polyester lacquers, that are applied to the internal surface of most canned foods to impart chemical resistance. The unreacted BADGE, BFDGE and their reaction products migrating from epoxy resin, PVC-containing organosol and/or polyester lacquer-based food packaging materials into the foods have recently become an issue of great concern because of increased customer demand for safety. This study was conducted to develop a rapid and sensitive simultaneous analysis method based on HPLC/FLD and HPLC/APCI-mass and to evaluate the concentration of BADGE, BFDGE and their metabolites, BADGE $H_2O$, BADGE $2H_2O$, BADGE HCl, BADGE 2HCl, BADGE HCl $H_2O$, BFDGE $H_2O$, BFDGE $2H_2O$, BFDGE HCl, BFDGE 2HCl and BFDGE HCl $H_2O$ for 133 canned food samples. The method provided a linearity of 0.9997-0.9999, a limit of detection of $0.01-0.13\;{\mu}g/mL$, a limit of quantitation of $0.03-0.44\;{\mu}g/mL$ and a recovery (%) of 85.64-118.18. The number of samples containing BADGE, BFDGE or their metabolites were: 28/133 (21.1%), with levels of 0.400-0.888 mg/kg being observed for aqueous foods (19/133) and 0.093-0.506 mg/kg being observed for oily foods (9/133).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.05a
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• pp.58-61
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• 1995

Instead of using CCl$_4$CCl$_2$F$_2$ gases, we used a alternative reaction gas of CFCs which we have developed, for the experiment of laser induced dry etching of laser induced dry etching of GaAs, and compared with the etch profile of a usual reation gas. Laser powers(power density) on the sample surface were varied from 100 mW(12.7 MW/$\textrm{cm}^2$) to 210mW(27 MW/$\textrm{cm}^2$) The laser beam was scanned over the sample by moving the cell with a speed raging from 8.3$\mu\textrm{m}$/sec and the gas pressure also was varied form 260 Torr to 760 Torr, High etching rates up to 136 $\mu\textrm{m}$/sec and an aspect ratio of 2.6 have been achieved by single scan of laser beam. The chemical compositions of the reaction products deposited on the etched groove were measured by Auger electron spectroscopy(AES) Etch profiles, including depth and width were observed by scanning electron microscopy(SEM)

• Journal of the Korean Chemical Society
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• v.43 no.1
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• pp.28-42
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• 1999

Polysilanes with sterically bulky substituents, -[2-( $R^1R^2$-phenyl)propyl]Si[$R^3$]-, such as poly(2-phenylpropyl)(n-hexyl)silane [$R^1=R^2$=H, $R^3$=n-hexyl] were prepared by Wurtz-type coupling reactions with Na using a sonochemical method. The high-intensity ultrasound provided the formation of high quality Na dispersion in toluene and its active surface which was important for the synthesis of polysilanes in Wurtz-type coupling reaction was freshly and continuously regenerated during the process. The polysilanes products were mixtures of high molecular weight polymers with $\={M}_W$ of ∼$10^6$ and low molecular weight polymers with $\={M}_W$ of ∼$10^3$. It was found that the formation of high molecular weight polymerr was greatly influenced by the substituents $R^3$, directly attached to Si. On the contrary, changes on substituents ($R^1, R^2$) gave no influences at all. Overall yields for polysilanes were 75-99% in general but high molecular weight polysilanes were obtained as a major product when substituent $R^3$ is n-hexyl group and low molecular weight polysilanes were obtained as a major product when substituent $R^3$ is cyclohexyl and 2-phenylethyl groups. Effects of reaction conditions to polysilane yields were investigated.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.10
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• pp.861-867
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• 2001

In this paper, in order to investigate the catalytic effect of the sludge exhausted from waterworks on NO$_{x}$ removal, we measure NO removal characteristics with and without sludge pellets in BaTiO$_3$-sludge packed-bed reactor of plate-plate geometry. NO initial concentration is 50 ppm balanced with air and a gas flow rate is 5ι/min. Gas temperature is changed from 25 to 10$0^{\circ}C$ to investigate the role of sludge pellet on removing active oxygen species and NO$_2$. BaTiO$_3$pellets is filled for coronal discharge at upstream of reactor and sludge pellets is filled for catalytic effect at downstream of reactor. The volume percent of sludge pellets to BaTiO$_3$pellets is changed from 0% to 100% and AC voltage is supplied to the reactor for discharging simulated gases. In the results, when sludge pellets is put at the downstream of plasma reactor, NO removal rate is slightly increased. However, NO$_2$and $O_3$ as by-products during NO removal is significantly decreased from 51ppm without sludge pellets to 5 ppm with sludge pellets and from 50 ppm without sludge pellets to 0.004ppm with sludge pellets, respectively. Therefore, NO$_{x}$(NO+NO$_2$) removal rate is increased up to 93%. It is thought that sludge pellet maybe react with active oxygen species and NO$_2$ generated by corona discharge in surface of BaTiO$_3$pellets, the then NO$_2$O$_3$as by-products are considerably decreased. When we increase gas temperature from room temperature to 10$0^{\circ}C$, NO removal rate is decreased, while NO$_2$ concentration is independent on gas temperature. These result suggest that the removal mechanism of active oxygen species and NO$_2$in sludge pellet is not absorption, but chemical reaction. Therefore we expect that sludge pellets exhausted for waterworks could be used as catalyst for NO$_{x}$ removal with high removal rate and low by-product.oduct.

• Journal of Digital Convergence
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• v.14 no.1
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• pp.253-262
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• 2016

Yeonsan Ogae has been known as supporting health and high efficacy of treatment. In recent days, as the efficacy of functional peptides has known, the optimization of oligo peptides production and its characteristics from Ogae viscera has been performed. Response surface method was used to perform the optimizaion of enzyme hydrolysis. The range of processes was temperature (40, 50 and $60^{\circ}C$), pH(6.0, 7.0 and 8.0), and enzyme(1, 2 and 3%). The degree of hydrolysis, amono acids, molecular weight of products were analyzed. The optimum process of enzyme hydrolysis were determined as temperature $58^{\circ}C$, pH 7.5, and enzyme concetration 3%. At optimum conditions, the degree of hydrolysis after 2 h reaction was 75-80%. The total amino acids of amino acid and were 386.15 mg/100 g and 155.26 mg/100 g, respectively. The molecular weight of products by using Maldi-TOF was ranged from 300 to 1,000 Da.

• Journal of the Korean Applied Science and Technology
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• v.33 no.2
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• pp.293-303
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• 2016

Protein hydrolysate that shows physiological function such as antioxidant, suppression of hypertension, immunodulatory, alleviation of pain, and antimicrobial activity has been known as playing important role like hormone. This study was performed to optimize the hydrolysis of the wing's meat of Yosan-Ogae by a commercial protease. The ranges of processes were the reaction temperature of 40 to $60^{\circ}C$, pH 6 to 8, and enzyme concentration 1 to 3%(w/v). As a result, the optimization of process was determined at temperature of $48-50^{\circ}C$, pH of 7.0-7.2, and enzyme concentration of 3%(w/v), and degree of hydrolysis was 68 to 69% at above conditions. The molecular weight of hydrolysate was distributed to 500-1,200 Da and showed typical peptides. The amino acids of peptides showing presumably antioxidant activity such as histidine, proline, methionine, cystein, tyrosine, tryptophan, phenylalanine comprised about 43.07%. The glutamic acid was 13.6%. Therefore, we expect that those products are useful as functional food ingredients.